US3625848A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Arc deposition process and apparatus
Assignee: INSTITUTE FOR SOCIAL AND SCIENTIFIC DEVELOPMENT 376 EAST 400 SOUTH NO 315 SALT LAKE CITY UTAH 84111 A CORP OF UTAH
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Filing: 1968-12-26
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Granted: 1971-12-07
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Expires: 1988-12-26
Abstract
Abstract According to the present disclosure, a deposition process comprises emitting a beam of particles consisting of atoms and ions of source material, each particle having a kinetic energy between about 10 and 100 electron volts. The particles are deposited onto an object to coat the object with a thin film of source material. A beam gun is provided having an anode and a cathode and is supplied with current of such magnitude as to cause an arc discharge to occur between the anode and cathode to emit the beam.
Inventors
- 👤 Alvin A Snaper
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 19:35
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/32; C23C14/325
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
49 words
The method according to claim 1 wherein a beam gun is provided in said chamber having a cathode constructed of said source material, and said electrode is an anode of said beam gun, said arc discharge being generated between said cathode and anode to emit particles from said cathode.
Claim 2
Dependent Claim
41 words
The method according to claim 2 further including providing an atmosphere of gas in said chamber, the cathode of said beam gun and said object being spaced apart no greater than the length of the mean free path of said particles.
Claim 3
Dependent Claim
12 words
The method according to claim 2 wherein said beam also includes electrons.
Claim 4
Dependent Claim
74 words
The method according to claim 2 wherein said anode of said beam gun comprises a plurality of anode segments each connected to an individual phase of a polyphase source of alternating current and said cathode is connected to a common lead for all phases so that individual ones of said anode segments are sequentially positive with respect to the cathode so that the arc discharge moves from one anode segment to another in succession.
Claim 5
Dependent Claim
12 words
The method according to claim 5 wherein said beam also includes electrons.
Claim 6
Dependent Claim
77 words
The method according to claim 1 wherein said source material is an insulative material and a beam gun is provided in said chamber having a cathode and an anode, and said source material comprises a plate spaced between the cathode and anode, said arc discharge being generated between said cathode and anode to emit particles from said plate, said method further including the step of providing a radiofrequency field in said chamber for sustaining said arc discharge.
Claim 7
Dependent Claim
50 words
The method according to claim 7 further including providing an atmosphere of gas in said chamber for sustaining the arc discharge between the cathode and anode, the plate of source material and said object being spaced apart no greater than the length of the mean free path of said particles.
Claim 8
Dependent Claim
18 words
The method according to claim 7 further including providing a magnetic field to focus the beam of particles.
Claim 9
Dependent Claim
12 words
The method according to claim 7 wherein said beam also includes electrons.
Claim 10
Dependent Claim
20 words
The method according to claim 1 further including providing a radiofrequency field in said chamber for sustaining said arc discharge.
Claim 11
Dependent Claim
18 words
The method according to claim 1 further including providing a magnetic field to focus the beam of particles.
Claim 12
Dependent Claim
18 words
The method according to claim 1 further including providing a magnetic field to focus the beam of particles.
Claim 13
Dependent Claim
12 words
The method according to claim 1 wherein said beam also includes electrons.
Claim 14
Independent Claim
90 words
The method of produciNg a coating of insulative source material on an object comprising the steps of: emitting a beam of particles consisting of atoms and ions of said insulative source material by sustaining an arc discharge in a chamber between a cathode and anode of a beam gun having a plate of insulative source material spaced between the cathode and anode, said particles having a most probable kinetic energy in the range of about 10 to 100 electron volts; and depositing said particles onto a surface of the object.
Claim 15
Dependent Claim
50 words
The method according to claim 15 further including providing an atmosphere of gas in said chamber for sustaining the arc discharge between the cathode and anode, the plate of source material and said object being spaced apart no greater than the length of the mean free path of said particles.
Claim 16
Dependent Claim
20 words
The method according to claim 16 further including providing a radiofrequency field in said chamber for sustaining said arc discharge.
Claim 17
Dependent Claim
20 words
The method according to claim 15 further including providing a radiofrequency field in said chamber for sustaining said arc discharge.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1974-12-06 | 1975-06-07 | 1975-12-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1978-12-06 | 1979-06-07 | 1979-12-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1982-12-06 | 1983-06-07 | 1983-12-07 | $7700.00 | Window Closed / Lapsed |