US4448659A
Expired / Lapsed
US
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Method and apparatus for evaporation arc stabilization including initial target cleaning
Assignee: Hauzer Industries BV
•
Filing: 1983-09-12
•
Granted: 1984-05-15
•
Expires: 2003-09-12
Abstract
Abstract Apparatus and method for evaporation arc stabilization including a target having a surface of material of non-permeable material to be evaporated; circuitry for establishing an arc on the target surface for evaporating the target material, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over the target surface; and a confinement ring surrounding the target surface, the ring being composed of a magnetically permeable material to confine the cathode spot to the target. The anode is closely spaced to the ring to prevent the arc from moving off the target and the ring, during initial arc cleaning of the target. In lieu of the magnetically permeable confinement ring, the anode itself may be permeable. Various configurations of the confinement ring are also disclosed together with various features for improving the operation thereof.
Inventors
- 👤 Charles F. Morrison, Jr.
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 21:20
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32055; C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/32; C23C14/325
Claims Analysis
Total Claims: 111
Claim 1
Independent Claim
111 words
Apparatus for evaporation arc stabilization comprising a target having a surface of non-permeable material to be evaporated; means for establishing an arc on the target surface for evaporating the target material, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over said target surface; a confinement ring surrounding the target surface, the ring being composed of a magnetically permeable material to thereby confine the cathode spot to the target surface; and means for preventing said arc from moving off said target and confinement ring in response to said arc being initially applied to said target and ring to effect cleaning of contaminants therefrom.
Claim 2
Dependent Claim
111 words
Apparatus for evaporation arc stabilization comprising a target having a surface of non-permeable material to be evaporated; means for establishing an arc on the target surface for evaporating the target material, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over said target surface; a confinement ring surrounding the target surface, the ring being composed of a magnetically permeable material to thereby confine the cathode spot to the target surface; and means for preventing said arc from moving off said target and confinement ring in response to said arc being initially applied to said target and ring to effect cleaning of contaminants therefrom.
Claim 3
Dependent Claim
18 words
Apparatus as in claim 1 where said preventing means includes an electrode closely spaced to said confinement ring.
Claim 4
Dependent Claim
12 words
Apparatus as in claim 2 where said electrode is at anode potential.
Claim 5
Dependent Claim
14 words
Apparatus as in claim 3 where said electrode is biased to said anode potential.
Claim 6
Dependent Claim
17 words
Apparatus as in claim 3 where said electrode is electrically floating and induced to said anode potential.
Claim 7
Dependent Claim
14 words
Apparatus as in claim 2 where said electrode is composed of a permeable material.
Claim 8
Dependent Claim
18 words
Apparatus as in claim 2 where said electrode is spaced no more than 1/8 inch from said ring.
Claim 9
Dependent Claim
18 words
Apparatus as in claim 7 where said electrode is spaced, about 1/32 to 1/16 inch from said ring.
Claim 10
Dependent Claim
33 words
Apparatus as in claim 2 including means for moving said electrode away from its closely spaced relationship with respect to the ring after said contaminants have been cleaned from the target and ring.
Claim 11
Dependent Claim
17 words
Apparatus as in claim 1 where the mean charged particle energies of said arc are 20-100 eV.
Claim 12
Dependent Claim
17 words
Apparatus as in claim 10 where the mean charged particle energies of said arc are 40-60 eV.
Claim 13
Dependent Claim
19 words
Apparatus as in claim 1 including a substrate upon which the evaporated target material is deposited as a coating.
Claim 14
Dependent Claim
19 words
Apparatus as in claim 1 where the permeable material is selected from the group consisting of iron and Permalloy.
Claim 15
Dependent Claim
19 words
Apparatus as in claim 1 where said ring extends above the target surface by at least about 1/8 inch.
Claim 16
Dependent Claim
19 words
Apparatus as in claim 14 where said ring extends above said target surface no more than about 1/4 inch.
Claim 17
Dependent Claim
19 words
Apparatus as in claim 1 including permeable means for shielding said target from the influence of extraneous, external fields.
Claim 18
Dependent Claim
19 words
Apparatus as in claim 16 where said permeable means includes a cup-shaped member upon which said target is disposed.
Claim 19
Dependent Claim
26 words
Apparatus as in claim 16 where said permeable means includes a plate disposed on the side of the target opposite from the surface to be evaporated.
Claim 20
Dependent Claim
36 words
Apparatus as in claim 1 including a non-permeable clamp for holding said target in place within said apparatus; and said ring including an insert at least partially disposed within and held in place by said clamp.
Claim 21
Dependent Claim
14 words
Apparatus as in claim 19 where said insert is completely disposed within said clamp.
Claim 22
Dependent Claim
30 words
Apparatus as in claim 1 where said target is cylindrical in configuration and said confinement ring includes first and second members disposed at the respective ends of the said target.
Claim 23
Dependent Claim
23 words
Apparatus as in claim 21 where the diameters of said first and second confinement members are greater than that of the cylindrical target.
Claim 24
Dependent Claim
23 words
Apparatus as in claim 21 where the diameters of said first and second confinement members are less than that of the cylindrical target.
Claim 25
Dependent Claim
27 words
Apparatus as in claim 21 where the diameters of said first and second confinement members are respectively greater than and less than that of the cylindrical target.
Claim 26
Dependent Claim
67 words
Apparatus as in claim 1 where said target is planar and said confinement ring surrounds at least a portion of the target surface and where said apparatus includes means for relatively moving the target with respect to the confinement ring so that the confinement ring surrounds a further portion of the target surface to thereby confine the cathode spot to said further portion of the target surface.
Claim 27
Dependent Claim
15 words
Apparatus as in claim 1 where said target is relatively moved through said confinement ring.
Claim 28
Dependent Claim
20 words
Apparatus as in claim 1 where said confinement ring is relatively moved parallel to the plane of said target surface.
Claim 29
Dependent Claim
34 words
Apparatus as in claim 1 where said confinement ring comprises a substrate composed of said permeable material and a coating thereon selected from the group consisting of boron nitride, titanium nitride and mixtures thereof.
Claim 30
Dependent Claim
110 words
Apparatus for evaporation arc stabilization comprising a target having a surface of non-permeable material to be evaporated; means for establishing an arc on the target surface for evaporating the target material, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over said target surface; and an electrode closely spaced from and surrounding the target surface, the electrode being composed of an magnetically permeable material to thereby confine the cathode spot to the target surface and prevent the arc from moving off the target in response to said arc being initially applied to said target and ring to effect cleaning of contaminants therefrom.
Claim 31
Dependent Claim
110 words
Apparatus for evaporation arc stabilization comprising a target having a surface of non-permeable material to be evaporated; means for establishing an arc on the target surface for evaporating the target material, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over said target surface; and an electrode closely spaced from and surrounding the target surface, the electrode being composed of an magnetically permeable material to thereby confine the cathode spot to the target surface and prevent the arc from moving off the target in response to said arc being initially applied to said target and ring to effect cleaning of contaminants therefrom.
Claim 32
Dependent Claim
12 words
Apparatus as in claim 29 where said electrode is at anode potential.
Claim 33
Dependent Claim
14 words
Apparatus as in claim 30 where said electrode is biased to said anode potential.
Claim 34
Dependent Claim
17 words
Apparatus as in claim 30 where said electrode is electrically floating and induced to said anode potential.
Claim 35
Dependent Claim
18 words
Apparatus as in claim 29 where said electrode is spaced no more than 1/8 inch from said ring.
Claim 36
Dependent Claim
18 words
Apparatus as in claim 33 where said electrode is spaced about 1/32 to 1/16 inch from said ring.
Claim 37
Dependent Claim
33 words
Apparatus as in claim 29 including means for moving said electrode away from its closely spaced relationship with respect to the ring after said contaminants have been cleaned from the target and ring.
Claim 38
Dependent Claim
17 words
Apparatus as in claim 29 where the mean charged particle energies of said arc are 20-100 eV.
Claim 39
Dependent Claim
17 words
Apparatus as in claim 36 where the mean charged particle energies of said arc are 40-60 eV.
Claim 40
Dependent Claim
19 words
Apparatus as in claim 29 including a substrate upon which the evaporated target material is deposited as a coating.
Claim 41
Dependent Claim
19 words
Apparatus as in claim 29 where the permeable material is selected from the group consisting of iron and Permalloy.
Claim 42
Dependent Claim
91 words
Apparatus for evaporation arc stabilization comprising a target having a surface of non-permeable material to be evaporated; means for establishing an arc on the target surface for evaporating the target material, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over said target surface; and a confinement ring surrounding the target surface, the ring being composed of a magnetically permeable material and extending above the target surface by at least about 1/8 inch to thereby confine the cathode spot to the target surface.
Claim 43
Dependent Claim
91 words
Apparatus for evaporation arc stabilization comprising a target having a surface of non-permeable material to be evaporated; means for establishing an arc on the target surface for evaporating the target material, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over said target surface; and a confinement ring surrounding the target surface, the ring being composed of a magnetically permeable material and extending above the target surface by at least about 1/8 inch to thereby confine the cathode spot to the target surface.
Claim 44
Dependent Claim
19 words
Apparatus as in claim 40 where said ring extends above said target surface no more than about 1/4 inch.
Claim 45
Dependent Claim
17 words
Apparatus as in claim 40 where the mean charged particle energies of said arc are 20-100 eV.
Claim 46
Dependent Claim
17 words
Apparatus as in claim 42 where the mean charged particle energies of said arc are 40-60 eV.
Claim 47
Dependent Claim
19 words
Apparatus as in claim 40 including a substrate upon which the evaporated target material is deposited as a coating.
Claim 48
Dependent Claim
19 words
Apparatus as in claim 40 where the permeable material is selected from the group consisting of iron and Permalloy.
Claim 49
Dependent Claim
90 words
Apparatus for evaporation arc stabilization comprising a target having a surface of non-permeable material to be evaporated; means for establishing an arc on the target surface for evaporating the target material, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over said target surface; a confinement ring surrounding the target surface, the ring being composed of a material which confines the cathode spot to the target surface; and permeable means for shielding said target from the influence of extraneous, external magnetic fields.
Claim 50
Dependent Claim
90 words
Apparatus for evaporation arc stabilization comprising a target having a surface of non-permeable material to be evaporated; means for establishing an arc on the target surface for evaporating the target material, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over said target surface; a confinement ring surrounding the target surface, the ring being composed of a material which confines the cathode spot to the target surface; and permeable means for shielding said target from the influence of extraneous, external magnetic fields.
Claim 51
Dependent Claim
11 words
Apparatus as in claim 46 where said material is magnetically permeable.
Claim 52
Dependent Claim
22 words
Apparatus as in claim 46 where said material is selected from the group consisting of boron nitride, titanium nitride, and mixtures thereof.
Claim 53
Dependent Claim
19 words
Apparatus as in claim 46 where said permeable means includes a cup-shaped member upon which said target is disposed.
Claim 54
Dependent Claim
26 words
Apparatus as in claim 46 where said permeable means includes a plate disposed on the side of the target opposite from the surface to be evaporated.
Claim 55
Dependent Claim
17 words
Apparatus as in claim 46 where the mean charged particle energies of said arc are 20-100 eV.
Claim 56
Dependent Claim
17 words
Apparatus as in claim 51 where the mean charged particle energies of said arc are 40-60 eV.
Claim 57
Dependent Claim
19 words
Apparatus as in claim 46 including a substrate upon which the evaporated target material is deposited as a coating.
Claim 58
Dependent Claim
19 words
Apparatus as in claim 46 where the permeable material is selected from the group consisting of iron and Permalloy.
Claim 59
Dependent Claim
108 words
Apparatus for evaporation arc stabilization comprising a target having a surface of non-permeable material to be evaporated; means for establishing an arc on the target surface for evaporating the target material, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over said target surface; a confinement ring surrounding the target surface, the ring being composed of a magnetically permeable material to thereby confine the cathode spot to the target surface; a non-permeable clamp for holding said target in place within said apparatus; and said ring including an insert at least partially disposed within and held in place by said clamp.
Claim 60
Dependent Claim
108 words
Apparatus for evaporation arc stabilization comprising a target having a surface of non-permeable material to be evaporated; means for establishing an arc on the target surface for evaporating the target material, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over said target surface; a confinement ring surrounding the target surface, the ring being composed of a magnetically permeable material to thereby confine the cathode spot to the target surface; a non-permeable clamp for holding said target in place within said apparatus; and said ring including an insert at least partially disposed within and held in place by said clamp.
Claim 61
Dependent Claim
14 words
Apparatus as in claim 55 where said insert is completely disposed within said clamp.
Claim 62
Dependent Claim
17 words
Apparatus as in claim 55 where the mean charged particle energies of said arc are 20-100 eV.
Claim 63
Dependent Claim
17 words
Apparatus as in claim 57 where the mean charged particle energies of said arc are 40-60 eV.
Claim 64
Dependent Claim
19 words
Apparatus as in claim 55 including a substrate upon which the evaporated target material is deposited as a coating.
Claim 65
Dependent Claim
19 words
Apparatus as in claim 55 where the permeable material is selected from the group consisting of iron and Permalloy.
Claim 66
Dependent Claim
87 words
Apparatus for evaporation arc stabilization comprising a cylindrical target having a surface of nonpermeable material to be evaporated; means for establishing an arc on the target surface for evaporating the target material, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over said target surface; and first and second confinement members disposed at the respective ends of said target, the confinement members being composed of a magnetically permeable material to thereby confine the cathode spot to the target surface.
Claim 67
Dependent Claim
87 words
Apparatus for evaporation arc stabilization comprising a cylindrical target having a surface of nonpermeable material to be evaporated; means for establishing an arc on the target surface for evaporating the target material, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over said target surface; and first and second confinement members disposed at the respective ends of said target, the confinement members being composed of a magnetically permeable material to thereby confine the cathode spot to the target surface.
Claim 68
Dependent Claim
23 words
Apparatus as in claim 61 where the diameters of said first and second confinement members are greater than that of the cylindrical target.
Claim 69
Dependent Claim
23 words
Apparatus as in claim 61 where the diameters of said first and second confinement members are less than that of the cylindrical target.
Claim 70
Dependent Claim
27 words
Apparatus as in claim 61 where the diameters of said first and second confinement members are respectively greater than and less than that of the cylindrical target.
Claim 71
Dependent Claim
17 words
Apparatus as in claim 61 where the mean charged particle energies of said arc are 20-100 eV.
Claim 72
Dependent Claim
17 words
Apparatus as in claim 65 where the mean charged particle energies of said arc are 40-60 eV.
Claim 73
Dependent Claim
19 words
Apparatus as in claim 61 including a substrate upon which the evaporated target material is deposited as a coating.
Claim 74
Dependent Claim
19 words
Apparatus as in claim 61 where the permeable material is selected from the group consisting of iron and Permalloy.
Claim 75
Dependent Claim
127 words
Apparatus for evaporation arc stabilization comprising a planar target having a surface of non-permeable material to be evaporated; means for establishing an arc on the target surface for evaporating the target material, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over said target surface; a confinement ring surrounding at least a portion of the target surface, the ring being composed of a magnetically permeable material to thereby confine the cathode spot to said portion of the target surface; and means for relatively moving the target with respect to the confinement ring so that the confinement ring surrounds a further portion of the target surface to thereby confine the cathode spot to said further portion of the target surface.
Claim 76
Dependent Claim
127 words
Apparatus for evaporation arc stabilization comprising a planar target having a surface of non-permeable material to be evaporated; means for establishing an arc on the target surface for evaporating the target material, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over said target surface; a confinement ring surrounding at least a portion of the target surface, the ring being composed of a magnetically permeable material to thereby confine the cathode spot to said portion of the target surface; and means for relatively moving the target with respect to the confinement ring so that the confinement ring surrounds a further portion of the target surface to thereby confine the cathode spot to said further portion of the target surface.
Claim 77
Dependent Claim
15 words
Apparatus as in claim 69 where said target is relatively moved through said confinement ring.
Claim 78
Dependent Claim
20 words
Apparatus as in claim 69 where said confinement ring is relatively moved parallel to the plane of said target surface.
Claim 79
Dependent Claim
17 words
Apparatus as in claim 69 where the mean charged particle energies of said arc are 20-100 eV.
Claim 80
Dependent Claim
17 words
Apparatus as in claim 72 where the mean charged particle energies of said arc are 40-60 eV.
Claim 81
Dependent Claim
19 words
Apparatus as in claim 69 including a substrate upon which the evaporated target material is deposited as a coating.
Claim 82
Dependent Claim
19 words
Apparatus as in claim 69 where the permeable material is selected from the group consisting of iron and Permalloy.
Claim 83
Dependent Claim
98 words
Apparatus for evaporation arc stabilization comprising a target having a surface of non-permeable material to be evaporated; means for establishing an arc on the target surface for evaporating the target material, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over said target surface; and a confinement ring surrounding the target surface, the ring comprising a substrate composed of a magnetically permeable material and a coating thereon selected from the group consisting of boron nitride, titanium nitride and mixtures thereof to thereby confine the cathode spot to the target surface.
Claim 84
Dependent Claim
98 words
Apparatus for evaporation arc stabilization comprising a target having a surface of non-permeable material to be evaporated; means for establishing an arc on the target surface for evaporating the target material, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over said target surface; and a confinement ring surrounding the target surface, the ring comprising a substrate composed of a magnetically permeable material and a coating thereon selected from the group consisting of boron nitride, titanium nitride and mixtures thereof to thereby confine the cathode spot to the target surface.
Claim 85
Dependent Claim
17 words
Apparatus as in claim 76 where the mean charged particle energies of said arc are 20-100 eV.
Claim 86
Dependent Claim
17 words
Apparatus as in claim 77 where the mean charged particle energies of said arc are 40-60 eV.
Claim 87
Dependent Claim
19 words
Apparatus as in claim 76 including a substrate upon which the evaporated target material is deposited as a coating.
Claim 88
Dependent Claim
19 words
Apparatus as in claim 76 where the permeable material is selected from the group consisting of iron and Permalloy.
Claim 89
Independent Claim
103 words
A method of evaporation arc stabilization comprising the steps of establishing an arc on a surface of a target of non-permeable material to evaporate the target, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over said target surface; confining the arc to the target surface with a confinement ring which surrounds the target surface, the ring being composed of a magnetically permeable material; and preventing said arc from moving off said target and confinement ring in response to said arc being initially applied to said target and ring to effect cleaning of contaminants therefrom.
Claim 90
Independent Claim
103 words
A method of evaporation arc stabilization comprising the steps of establishing an arc on a surface of a target of non-permeable material to evaporate the target, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over said target surface; confining the arc to the target surface with a confinement ring which surrounds the target surface, the ring being composed of a magnetically permeable material; and preventing said arc from moving off said target and confinement ring in response to said arc being initially applied to said target and ring to effect cleaning of contaminants therefrom.
Claim 91
Dependent Claim
21 words
A method as in claim 81 where said preventing step is effected by an electrode closely spaced to said confinement ring.
Claim 92
Dependent Claim
13 words
A method as in claim 82 where said electrode is at anode potential.
Claim 93
Dependent Claim
15 words
A method as in claim 83 where said electrode is biased to said anode potential.
Claim 94
Dependent Claim
19 words
A method as in claim 82 where said electrode is electrically floating and electrically induced to said anode potential.
Claim 95
Dependent Claim
15 words
A method as in claim 82 where said electrode is composed of a permeable material.
Claim 96
Dependent Claim
18 words
A method as in claim 81 where the mean charged particle energies of said arc are 20-100 eV.
Claim 97
Dependent Claim
18 words
A method as in claim 87 where the mean charged particle energies of said arc are 40-60 eV.
Claim 98
Dependent Claim
18 words
A method as in claim 81 including depositing the evaporated target material on a substrate as a coating.
Claim 99
Dependent Claim
19 words
A method as in claim 82 where said electrode is spaced no more than 1/8 inch from said ring.
Claim 100
Dependent Claim
19 words
A method as in claim 90 where said electrode is spaced about 1/32 to 1/16 inch from said ring.
Claim 101
Dependent Claim
32 words
A method as in claim 81 including moving said electrode away from its closely spaced relationship with respect to the ring after said contaminants have been cleaned from the target and ring.
Claim 102
Independent Claim
115 words
A method of evaporation arc stabilization comprising the steps of establishing an arc on a surface of a target of non-permeable material to evaporate the target, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over said target surface; and confining the arc to the target surface with an electrode which is closely spaced from and surrounds the target surface, the electrode being composed of a magnetically permeable material to thereby confine the cathode spot to the target surface and prevent the arc from moving off the target in response to said arc being initially applied to said target and ring to effect cleaning of contaminants therefrom.
Claim 103
Independent Claim
115 words
A method of evaporation arc stabilization comprising the steps of establishing an arc on a surface of a target of non-permeable material to evaporate the target, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over said target surface; and confining the arc to the target surface with an electrode which is closely spaced from and surrounds the target surface, the electrode being composed of a magnetically permeable material to thereby confine the cathode spot to the target surface and prevent the arc from moving off the target in response to said arc being initially applied to said target and ring to effect cleaning of contaminants therefrom.
Claim 104
Dependent Claim
13 words
A method as in claim 93 where said electrode is at anode potential.
Claim 105
Dependent Claim
15 words
A method as in claim 94 where said electrode is biased to said anode potential.
Claim 106
Dependent Claim
18 words
A method as in claim 93 where said electrode is electrically floating and induced to said anode potential.
Claim 107
Dependent Claim
18 words
A method as in claim 93 where the mean charged particle energies of said arc are 20-100 eV.
Claim 108
Dependent Claim
18 words
A method as in claim 97 where the mean charged particle energies of said arc are 40-60 eV.
Claim 109
Dependent Claim
18 words
A method as in claim 93 including depositing the evaporated target material on a substrate as a coating.
Claim 110
Dependent Claim
19 words
A method as in claim 93 where said electrode is spaced no more than 1/8 inch from said ring.
Claim 111
Dependent Claim
19 words
A method as in claim 100 where said electrode is spaced about 1/32 to 1/16 inch from said ring.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-05-15 | 1987-11-14 | 1988-05-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-05-15 | 1991-11-14 | 1992-05-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-05-15 | 1995-11-14 | 1996-05-15 | $7700.00 | Window Closed / Lapsed |