US4430184A
Expired / Lapsed
US
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Evaporation arc stabilization
Assignee: Hauzer Industries BV
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Filing: 1983-05-09
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Granted: 1984-02-07
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Expires: 2003-05-09
Abstract
Abstract Apparatus and method for evaporation arc stabilization including a target having a surface of material to be evaporated; circuitry for establishing an arc on the target surface for evaporating the target material, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over the target surface; and a confinement ring contacting and surrounding the target surface, the ring being composed of a material such as boron nitride having (a) a secondary emission ratio less than one at the mean energies of the charged particles of the arc and (b) a surface energy less than that of the evaporated target material to thereby confine the cathode spot to the target surface. Further, the secondary emission ratio of the confinement ring is preferably less than that of the target.
Inventors
- 👤 William M. Mularie
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 23:51
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32055; C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/32; C23C14/325
Claims Analysis
Total Claims: 33
Claim 1
Independent Claim
113 words
Apparatus for evaporation arc stabilization comprising a target having a surface of material to be evaporated; means for establishing an arc on the target surface for evaporating the target material, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over said target surface; and a confinement ring contacting the target and surrounding the target surface, the ring being composed of a material having (a) a secondary emission ratio less than one at the mean energies of the charged particles of the arc and (b) a surface energy less than that of the evaporated target material to thereby confine the cathode spot to the target surface.
Claim 2
Dependent Claim
113 words
Apparatus for evaporation arc stabilization comprising a target having a surface of material to be evaporated; means for establishing an arc on the target surface for evaporating the target material, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over said target surface; and a confinement ring contacting the target and surrounding the target surface, the ring being composed of a material having (a) a secondary emission ratio less than one at the mean energies of the charged particles of the arc and (b) a surface energy less than that of the evaporated target material to thereby confine the cathode spot to the target surface.
Claim 3
Dependent Claim
21 words
Apparatus as in claim 1 where the secondary emission ratio of the confinement ring is less than that of the target.
Claim 4
Dependent Claim
17 words
Apparatus as in claim 1 where the mean charged particle energies of said arc are 20-100 eV.
Claim 5
Dependent Claim
15 words
Apparatus as in claims 1 or 2 where the confinement ring comprises a nitride compound.
Claim 6
Dependent Claim
21 words
Apparatus as in claim 4 where the nitride compound is selected from the group consisting of boron nitride and titanium nitride.
Claim 7
Dependent Claim
19 words
Apparatus as in claim 1 including a substrate upon which the evaporated target material is deposited as a coating.
Claim 8
Dependent Claim
14 words
Apparatus as in claim 6 where the anode and substrate are the same member.
Claim 9
Dependent Claim
15 words
Apparatus as in claim 1 where said target is composed of an electrically conductive material.
Claim 10
Dependent Claim
12 words
Apparatus as in claim 8 where said electrically conductive material is metallic.
Claim 11
Dependent Claim
15 words
Apparatus as in claim 1 where said target is composed of an electrically insulative material.
Claim 12
Dependent Claim
22 words
Apparatus as in claim 1 where the means for establishing the arc on the target surface includes a cathode and an anode.
Claim 13
Dependent Claim
13 words
Apparatus as in claim 11 where said target is mounted on said cathode.
Claim 14
Dependent Claim
14 words
Apparatus as in claim 11 where said target and cathode are the same member.
Claim 15
Dependent Claim
75 words
Apparatus for evaporation arc stabilization comprising a target having a surface of material to be evaporated; means for establishing an arc on the target surface for evaporating the target material, the arc being characterized by a cathode spot which is randomly displaced over the target surface; and a confinement ring contacting the target and surrounding the target surface, the ring being composed of boron nitride to thereby confine the cathode spot to the target surface.
Claim 16
Dependent Claim
75 words
Apparatus for evaporation arc stabilization comprising a target having a surface of material to be evaporated; means for establishing an arc on the target surface for evaporating the target material, the arc being characterized by a cathode spot which is randomly displaced over the target surface; and a confinement ring contacting the target and surrounding the target surface, the ring being composed of boron nitride to thereby confine the cathode spot to the target surface.
Claim 17
Dependent Claim
17 words
Apparatus as in claim 14 where the mean charged particle energies of said arc are 40-60 eV.
Claim 18
Dependent Claim
19 words
Apparatus as in claim 14 including a substrate upon which the evaporated target material is deposited as a coating.
Claim 19
Dependent Claim
14 words
Apparatus as in claim 16 where the anode and substrate are the same member.
Claim 20
Dependent Claim
15 words
Apparatus as in claim 14 where said target is composed of an electrically conductive material.
Claim 21
Dependent Claim
12 words
Apparatus as in claim 17 where said electrically conductive material is metallic.
Claim 22
Dependent Claim
15 words
Apparatus as in claim 14 where said target is composed of an electrically insulative material.
Claim 23
Independent Claim
103 words
A method of evaporation arc stabilization comprising the steps of establishing an arc on a surface of a target to evaporate the target, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over said target surface; and confining the arc to the target surface with a confinement ring which contacts and surrounds the target surface, the ring being composed of a material having (a) a secondary emission ratio less than one at the mean energies of the charged particles of the arc and (b) a surface energy less than that of the evaporated target material.
Claim 24
Independent Claim
103 words
A method of evaporation arc stabilization comprising the steps of establishing an arc on a surface of a target to evaporate the target, the arc being characterized by the presence of charged particles and a cathode spot which randomly migrates over said target surface; and confining the arc to the target surface with a confinement ring which contacts and surrounds the target surface, the ring being composed of a material having (a) a secondary emission ratio less than one at the mean energies of the charged particles of the arc and (b) a surface energy less than that of the evaporated target material.
Claim 25
Dependent Claim
22 words
A method as in claim 21 where the secondary emission ratio of the confinement ring is less than that of the target.
Claim 26
Dependent Claim
18 words
A method as in claim 21 where the mean charged particle energies of said arc are 40-60 eV.
Claim 27
Dependent Claim
14 words
A method as in claim 21 where the confinement ring comprises a nitride compound.
Claim 28
Dependent Claim
22 words
A method as in claim 24 where the nitride compound is selected from the group consisting of boron nitride and titanium nitride.
Claim 29
Dependent Claim
13 words
A method as in claim 25 where the nitride compound is boron nitride.
Claim 30
Dependent Claim
16 words
A method as in claim 21 where said target is composed of an electrically conductive material.
Claim 31
Dependent Claim
13 words
A method as in claim 27 where said electrically conductive material is metallic.
Claim 32
Dependent Claim
16 words
A method as in claim 21 where said target is composed of an electrically insulative material.
Claim 33
Dependent Claim
18 words
A method as in claim 21 including depositing the evaporated target material on a substrate as a coating.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-02-06 | 1987-08-08 | 1988-02-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-02-06 | 1991-08-08 | 1992-02-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-02-06 | 1995-08-08 | 1996-02-07 | $7700.00 | Window Closed / Lapsed |