Patent US4546372A successfully refreshed from Google Patents.
US4546372A
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Phosphorous-nitrogen based glasses for the passivation of III-V semiconductor materials
Assignee: RTX Corp
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Filing: 1983-04-11
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Granted: 1985-10-08
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Expires: 2003-04-11
Abstract
Abstract A semiconductor article having a phosphorous nitrogen passivating film thereon. Particularly, an insulated gate field effect transistor device operating in the inversion mode, wherein the device comprises an essentially oxygen-free, amorphous, phosphorous-nitrogen glass passivating film deposited on a III-V semiconductor material.
Inventors
- 👤 Alexander J. Shuskus
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 20:20
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/68; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6334; H10P14/6336
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
15 words
A III-V semiconductor material having a passivating layer of substantially oxygen-free, amorphous phospham glass thereon.
Claim 2
Dependent Claim
15 words
A III-V semiconductor material having a passivating layer of substantially oxygen-free, amorphous phospham glass thereon.
Claim 3
Dependent Claim
27 words
An insulated gate field effect transistor capable of operating in the inversion mode comprising a III-V semiconductor material having a gate of substantially oxygen-free, amorphous phospham glass.
Claim 4
Dependent Claim
27 words
An insulated gate field effect transistor capable of operating in the inversion mode comprising a III-V semiconductor material having a gate of substantially oxygen-free, amorphous phospham glass.
Claim 5
Dependent Claim
16 words
The insulated gate field effect transistor of claim 2 wherein the semiconductor material is gallium arsenide.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-10-07 | 1989-04-08 | 1989-10-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-10-07 | 1993-04-08 | 1993-10-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-10-07 | 1997-04-08 | 1997-10-08 | $7700.00 | Window Closed / Lapsed |