US3549411A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of preparing silicon nitride films
Assignee: Texas Instruments Inc
•
Filing: 1967-06-27
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Granted: 1970-12-22
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Expires: 1987-06-27
Abstract
No abstract record available.
Inventors
- 👤 Kenneth E Bean
- 👤 Paul S Gleim
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 02:40
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/69; H10P14/694; H10P14/6943; H10P14/69433; C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/34; C23C16/345; H10F; H10F77/00; H10F77/30; H10F77/306; H10F77/311; H10F77/315; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6334; H10P14/66; H10P14/668; H10P14/6681; H10P14/6682; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y10; Y10S; Y10S148/00; Y10S148/043; Y10S148/097; Y10S148/113; Y10S148/114; Y10S148/118; Y10S148/12
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1973-12-21 | 1974-06-22 | 1974-12-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1977-12-21 | 1978-06-22 | 1978-12-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1981-12-21 | 1982-06-22 | 1982-12-22 | $7700.00 | Window Closed / Lapsed |