US4289539A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Phosphorus-nitrogen-oxygen composition and method for making such composition and applications of the same
Assignee: International Business Machines Corp
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Filing: 1979-05-25
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Granted: 1981-09-15
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Expires: 1999-05-25
Abstract
Abstract A composition is described which comprises amorphous phosphorus-nitrogen-oxygen material having excellent thermal stability and low reactivity to a wide variety of chemicals. The material is manufactured using a chemical vapor deposition process. The reaction chamber is maintained at a temperature between about 400 DEG -900 DEG C. with a suitable substrate placed therein. Reaction gases containing phosphorus-nitrogen-bearing compounds and a source of oxygen are passed through the chamber to deposit the phosphorus-nitrogen-oxygen film onto the substrate.
Inventors
- 👤 Pei-Ching Li
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 06:04
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/68; C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/308; H10D; H10D64/00; H10D64/01; H10D64/013; H10D64/01302; H10D64/01332; H10D64/01336; H10D64/01344; H10D64/60; H10D64/66; H10D64/68; H10D64/681; H10D64/685; H10D64/693; H10P14/66; H10P14/668; H10P50/00; H10P50/20; H10P50/28; H10P50/282; H10P50/283; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6334; Y; Y10; Y10S; Y10S252/00; Y10S252/95; Y10S252/951
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
49 words
A coating composition comprising gaseous phosphorus-nitrogen-oxygen material having about 16 to 27 percent by weight of oxygen; the dielectric breakdown strength on bare silicon of the amorphous film resulting from the application of said coating composition being between about 10 to 20×10 6 volts/cm based on equivalent oxide thickness.
Claim 2
Dependent Claim
49 words
A coating composition comprising gaseous phosphorus-nitrogen-oxygen material having about 16 to 27 percent by weight of oxygen; the dielectric breakdown strength on bare silicon of the amorphous film resulting from the application of said coating composition being between about 10 to 20×10 6 volts/cm based on equivalent oxide thickness.
Claim 3
Dependent Claim
32 words
The coating composition of claim 1 wherein the refractive index of the amorphous film resulting from the application of said composition is between about 1.6 and 2.0 measured at wavelength 5461 A.
Claim 4
Dependent Claim
27 words
The coating composition of claim 1 wherein the dielectric constant of the amorphous film resulting from the application of said composition is between about 6 and 9.
Claim 5
Dependent Claim
34 words
The coating composition of claim 1 wherein the amorphous film resulting from the application of said composition has three major broad IR absorption bands located at wavelength 1230, 910 and 480 cm -1 .
Claim 6
Dependent Claim
52 words
The coating composition for diffusing phosphorus comprising a gaseous phosphorus-oxygen-nitrogen material containing about 47 to 51 percent phosphorus by wt.; the dielectric breakdown strength on bare silicon of the amorphous film resulting from the application of said coating composition being between about 10 to 20×10 6 volts/cm based on equivalent oxide thickness.
Claim 7
Dependent Claim
52 words
The coating composition for diffusing phosphorus comprising a gaseous phosphorus-oxygen-nitrogen material containing about 47 to 51 percent phosphorus by wt.; the dielectric breakdown strength on bare silicon of the amorphous film resulting from the application of said coating composition being between about 10 to 20×10 6 volts/cm based on equivalent oxide thickness.
Claim 8
Dependent Claim
29 words
The coating composition of claim 5 wherein the oxygen content is between about 10 to 27 wt. percent and the nitrogen content between about 25 to 36 wt. percent.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1984-09-14 | 1985-03-16 | 1985-09-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1988-09-14 | 1989-03-16 | 1989-09-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1992-09-14 | 1993-03-16 | 1993-09-15 | $7700.00 | Window Closed / Lapsed |