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Self-light emitting device and method of manufacturing the same

Assignee: Semiconductor Energy Laboratory Co Ltd
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Filing: 2006-01-26
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Granted: 2008-12-09
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Expires: 2026-01-26
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Abstract

Abstract To provide a process of successively forming from an EL layer, a cathode, a barrier layer and a cover layer in the same multi-chamber. By using a same film deposition method to form the EL layer and the cover layer, as shown in FIG. 1 A, the EL layer, the cathode, the barrier layer, and the cover layer can be formed in the same multi-chamber in succession. Thus, as shown in FIG. 1 B, a sealed structure of an EL element can be formed.

Inventors

  • 👤 Shunpei Yamazaki
  • 👤 Noriko Shibata

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-02 05:32
CPC Classifications
H; H10; H10K; H10K50/00; H10K50/80; H10K50/84; H10K59/00; H10K59/80; H10K59/87; H10K59/873; H10K50/844; H10K50/846; H10K59/10; H10K59/12; H10K59/122; H10K59/874; H10K71/00; H10K71/10; H10K71/12; H10K71/13; H10K71/135; H10K85/00; H10K85/10; H10K85/111; H10K85/114; H10K85/141; H10K85/146; H10K85/30; H10K85/341; H10K85/346; H10K85/60; Y; Y10; Y10S; Y10S428/00; Y10S428/917; Y10T; Y10T428/00; Y10T428/23

Claims Analysis

Total Claims: 20
Claim 1
Independent Claim 129 words
A method of manufacturing a light emitting device comprising: forming a plurality of first electrodes arranged in a stripe shape, over a substrate; forming a light emitting layer over the plurality of first electrodes; forming a plurality of second electrodes arranged in a stripe shape, over the light emitting layer; forming a film comprising an inorganic material over the plurality of second electrodes; and forming a film comprising an organic material covering the film comprising said inorganic material, wherein the film comprising an inorganic material is formed by a CVD method or an evaporation method, wherein the plurality of second electrodes are orthogonal to the plurality of first electrodes, and wherein the light emitting layer and said film comprising an organic material are formed by an ink jet method.
Claim 2
Independent Claim 129 words
A method of manufacturing a light emitting device comprising: forming a plurality of first electrodes arranged in a stripe shape, over a substrate; forming a light emitting layer over the plurality of first electrodes; forming a plurality of second electrodes arranged in a stripe shape, over the light emitting layer; forming a film comprising an inorganic material over the plurality of second electrodes; and forming a film comprising an organic material covering the film comprising said inorganic material, wherein the film comprising an inorganic material is formed by a CVD method or an evaporation method, wherein the plurality of second electrodes are orthogonal to the plurality of first electrodes, and wherein the light emitting layer and said film comprising an organic material are formed by an ink jet method.
Claim 3
Dependent Claim 23 words
A method of manufacturing a light emitting device according to claim 1 , wherein the light emitting layer comprises a low molecular material.
Claim 4
Dependent Claim 31 words
A method of manufacturing a light emitting device according to claim 1 , wherein the film comprising an inorganic material comprises one of silicon nitride, tantalum oxide, aluminum nitride, or carbon.
Claim 5
Dependent Claim 29 words
A method of manufacturing a light emitting device according to claim 1 , wherein the film comprising an organic material comprises one of polyamide, polyimide, acrylic resin, or benzocyclobutene.
Claim 6
Dependent Claim 56 words
A method of manufacturing a light emitting device according to claim 1 , wherein the light emitting device is incorporated into an electronic appliance selected from the group consisting of a video camera, a head mount type display, an image reproduction apparatus, a portable computer, a personal computer, a portable telephone, and a sound reproduction device.
Claim 7
Dependent Claim 32 words
A method of manufacturing a light emitting device according to claim 1 , wherein the plurality of first electrodes are transparent electrodes and the plurality of second electrodes are light shielding electrodes.
Claim 8
Dependent Claim 32 words
A method of manufacturing a light emitting device according to claim 1 , wherein the plurality of second electrodes are transparent electrodes and the plurality of first electrodes are light shielding electrodes.
Claim 9
Dependent Claim 27 words
A method of manufacturing a light emitting device according to claim 1 , wherein the method thither comprises forming a bank between the plurality of first electrodes.
Claim 10
Dependent Claim 27 words
A method of manufacturing a light emitting device according to claim 1 , wherein the method further comprises forming a protective electrode including an aluminum alloy film.
Claim 11
Independent Claim 129 words
A method of manufacturing a light emitting device comprising: forming a plurality of first electrodes arranged in a stripe shape, over a substrate; forming a light emitting layer over the plurality of first electrodes; forming a plurality of second electrodes arranged in a stripe shape, over the light emitting layer; forming a film comprising an organic material over the plurality of second electrodes; and forming a film comprising an inorganic material covering the film comprising the organic material, wherein the film comprising an inorganic material is formed by a CVD method or an evaporation method, wherein the plurality of second electrodes are orthogonal to the plurality of first electrodes, and wherein the light emitting layer and the film comprising an organic material are formed by an ink jet method.
Claim 12
Independent Claim 129 words
A method of manufacturing a light emitting device comprising: forming a plurality of first electrodes arranged in a stripe shape, over a substrate; forming a light emitting layer over the plurality of first electrodes; forming a plurality of second electrodes arranged in a stripe shape, over the light emitting layer; forming a film comprising an organic material over the plurality of second electrodes; and forming a film comprising an inorganic material covering the film comprising the organic material, wherein the film comprising an inorganic material is formed by a CVD method or an evaporation method, wherein the plurality of second electrodes are orthogonal to the plurality of first electrodes, and wherein the light emitting layer and the film comprising an organic material are formed by an ink jet method.
Claim 13
Dependent Claim 23 words
A method of manufacturing a light emitting device according to claim 10 , wherein the light emitting layer comprises a low molecular material.
Claim 14
Dependent Claim 31 words
A method of manufacturing a light emitting device according to claim 10 , wherein the film comprising an inorganic material comprises one of silicon nitride, tantalum oxide, aluminum nitride, or carbon.
Claim 15
Dependent Claim 29 words
A method of manufacturing a light emitting device according to claim 10 , wherein the film comprising an organic material comprises one of polyamide, polyimide, acrylic resin, or benzocyclobutene.
Claim 16
Dependent Claim 56 words
A method of manufacturing a light emitting device according to claim 10 , wherein the light emitting device is incorporated into an electronic appliance selected from the group consisting of a video camera, a head mount type display, an image reproduction apparatus, a portable computer, a personal computer, a portable telephone, and a sound reproduction device.
Claim 17
Dependent Claim 32 words
A method of manufacturing a light emitting device according to claim 10 , wherein the plurality of first electrodes are transparent electrodes and the plurality of second electrodes are light shielding electrodes.
Claim 18
Dependent Claim 32 words
A method of manufacturing a light emitting device according to claim 10 , wherein the plurality of second electrodes are transparent electrodes and the plurality of first electrodes are light shielding electrodes.
Claim 19
Dependent Claim 27 words
A method of manufacturing a light emitting device according to claim 10 , wherein the method further comprises forming a bank between the plurality of first electrodes.
Claim 20
Dependent Claim 27 words
A method of manufacturing a light emitting device according to claim 10 , wherein the method further comprises forming a protective electrode including an aluminum alloy film.

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