US6776880B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of fabricating an EL display device, and apparatus for forming a thin film
Assignee: Semiconductor Energy Laboratory Co Ltd
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Filing: 2000-07-19
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Granted: 2004-08-17
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Expires: 2020-07-19
Abstract
Abstract A plurality of processing chambers are connected to a common chamber ( 103 in FIG. 1 ), and they comprehend a processing chamber for oxidation ( 107 ), a processing chamber for solution application ( 108 ), a processing chamber for baking ( 109 ), and processing chambers for vapor-phase film formation ( 110, 111 ). Owing to a thin-film forming apparatus of such construction, it is permitted to fabricate an EL (electroluminescence) element employing a high-molecular EL material, without touching the open air. Thus, an EL display device of high reliability can be fabricated.
Inventors
- 👤 Shunpei Yamazaki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 10:38
CPC Classifications
H; H10; H10F; H10F55/00; H10P; H10P72/00; H10P72/04; H10P72/0451; H10P72/0452; H10P72/0454; C; C23; C23C; C23C14/00; C23C14/22; C23C14/56; C23C14/568; H10K; H10K71/00; H10K71/40; H10P72/0456; H10P72/0461; H10P72/0468; H10K71/10; H10K71/16; H10K71/164
Claims Analysis
Total Claims: 39
Claim 1
Independent Claim
85 words
An apparatus comprising: a transport chamber into or out of which a substrate is taken; a common chamber including a mechanism for transporting said substrate; and a plurality of processing chambers respectively connected to said common chamber through gates; wherein said plurality of processing chambers include a processing chamber for solution application, a processing chamber for baking, and a processing chamber for vapor-phase film formation, wherein a processing chamber for evacuation is interposed between said processing chamber for solution application and a gate corresponding thereto.
Claim 2
Independent Claim
85 words
An apparatus comprising: a transport chamber into or out of which a substrate is taken; a common chamber including a mechanism for transporting said substrate; and a plurality of processing chambers respectively connected to said common chamber through gates; wherein said plurality of processing chambers include a processing chamber for solution application, a processing chamber for baking, and a processing chamber for vapor-phase film formation, wherein a processing chamber for evacuation is interposed between said processing chamber for solution application and a gate corresponding thereto.
Claim 3
Independent Claim
90 words
An apparatus comprising: a transport chamber into or out of which a substrate is taken; a common chamber including a mechanism for transporting said substrate; and a plurality of processing chambers respectively connected to said common chamber through gates; wherein said plurality of processing chambers include a processing chamber for oxidation, a processing chamber for solution application, a processing chamber for baking, and a processing chamber for vapor-phase film formation, wherein a processing chamber for evacuation is interposed between said processing chamber for solution application and a gate corresponding thereto.
Claim 4
Independent Claim
90 words
An apparatus comprising: a transport chamber into or out of which a substrate is taken; a common chamber including a mechanism for transporting said substrate; and a plurality of processing chambers respectively connected to said common chamber through gates; wherein said plurality of processing chambers include a processing chamber for oxidation, a processing chamber for solution application, a processing chamber for baking, and a processing chamber for vapor-phase film formation, wherein a processing chamber for evacuation is interposed between said processing chamber for solution application and a gate corresponding thereto.
Claim 5
Independent Claim
106 words
An apparatus, comprising: a transport chamber into or out of which a substrate is taken; a common chamber including a mechanism for transporting said substrate; and a plurality of processing chambers respectively connected to said common chamber through gates; wherein said plurality of processing chambers include a processing chamber for solution application, a processing chamber for baking, a processing chamber for vapor-phase film formation in which a metal film is formed, and a processing chamber for vapor-phase film formation in which an insulating film is formed, wherein a processing chamber for evacuation is interposed between said processing chamber for solution application and a gate corresponding thereto.
Claim 6
Independent Claim
106 words
An apparatus, comprising: a transport chamber into or out of which a substrate is taken; a common chamber including a mechanism for transporting said substrate; and a plurality of processing chambers respectively connected to said common chamber through gates; wherein said plurality of processing chambers include a processing chamber for solution application, a processing chamber for baking, a processing chamber for vapor-phase film formation in which a metal film is formed, and a processing chamber for vapor-phase film formation in which an insulating film is formed, wherein a processing chamber for evacuation is interposed between said processing chamber for solution application and a gate corresponding thereto.
Claim 7
Independent Claim
111 words
An apparatus comprising: a transport chamber into or out of which a substrate is taken; a common chamber including a mechanism for transporting said substrate; and a plurality of processing chambers respectively connected to said common chamber through gates; wherein said plurality of processing chambers include a processing chamber for oxidation, a processing chamber for solution application, a processing chamber for baking, a processing chamber for vapor-phase film formation in which a metal film is formed, and a processing chamber for vapor-phase film formation in which an insulating film is formed, wherein a processing chamber for evacuation is interposed between said processing chamber for solution application and a gate corresponding thereto.
Claim 8
Independent Claim
111 words
An apparatus comprising: a transport chamber into or out of which a substrate is taken; a common chamber including a mechanism for transporting said substrate; and a plurality of processing chambers respectively connected to said common chamber through gates; wherein said plurality of processing chambers include a processing chamber for oxidation, a processing chamber for solution application, a processing chamber for baking, a processing chamber for vapor-phase film formation in which a metal film is formed, and a processing chamber for vapor-phase film formation in which an insulating film is formed, wherein a processing chamber for evacuation is interposed between said processing chamber for solution application and a gate corresponding thereto.
Claim 9
Independent Claim
19 words
An apparatus according to any of claims 1 through 4 , wherein said solution application is a spin-coating application.
Claim 10
Independent Claim
54 words
An apparatus according to any of claims 1 through 4 , further comprising means for applying a member selected from the group consisting of a thermosetting resin and an ultraviolet-setting resin, so as to cover, at least, side surfaces of said substrate subjected to all processing steps, and means for setting the selected resin.
Claim 11
Independent Claim
60 words
An apparatus according to any of claims 1 through 4 , further comprising means for applying a member selected from the group consisting of a thermosetting resin and an ultraviolet-setting resin, onto said substrate subjected to all processing steps, means for sticking said substrate and a sealing material together, with the selected resin, and means for setting said selected resin.
Claim 12
Independent Claim
100 words
A method of fabricating an EL display device, comprising: applying a solution containing an EL material onto a transparent conductive film by spin coating; baking said solution by a heat treatment after the solution applying step, thereby to form a thin film made of said EL material; and forming a metal containing element belonging to at least one of the group-1 and group-2 of a periodic table, on said thin film made of said EL material and by either of vacuum evaporation and sputtering; wherein the solution applying step through the metal forming step are performed in an identical apparatus.
Claim 13
Independent Claim
100 words
A method of fabricating an EL display device, comprising: applying a solution containing an EL material onto a transparent conductive film by spin coating; baking said solution by a heat treatment after the solution applying step, thereby to form a thin film made of said EL material; and forming a metal containing element belonging to at least one of the group-1 and group-2 of a periodic table, on said thin film made of said EL material and by either of vacuum evaporation and sputtering; wherein the solution applying step through the metal forming step are performed in an identical apparatus.
Claim 14
Independent Claim
117 words
A method of fabricating an EL display device, comprising: oxidizing a surface of a transparent conductive film; applying a solution containing an EL material by spin coating, onto the transparent conductive film subjected to the oxidizing step; baking said solution by a heat treatment after the solution applying step, thereby to form a thin film which is made of said EL material; and forming a metal film containing an element belonging to at least one of the group-1 and group-2 of a periodic table, on said thin film made of said EL material and by either of vacuum evaporation and sputtering; wherein the surface oxidizing step through the metal forming step are performed in an identical apparatus.
Claim 15
Independent Claim
117 words
A method of fabricating an EL display device, comprising: oxidizing a surface of a transparent conductive film; applying a solution containing an EL material by spin coating, onto the transparent conductive film subjected to the oxidizing step; baking said solution by a heat treatment after the solution applying step, thereby to form a thin film which is made of said EL material; and forming a metal film containing an element belonging to at least one of the group-1 and group-2 of a periodic table, on said thin film made of said EL material and by either of vacuum evaporation and sputtering; wherein the surface oxidizing step through the metal forming step are performed in an identical apparatus.
Claim 16
Independent Claim
49 words
A method of fabricating an EL display device according to either of claims 8 and 9 , comprising: forming an insulating film on said metal film by either of vacuum evaporation and sputtering, after forming said metal film; wherein the insulating film forming step is performed in the apparatus.
Claim 17
Independent Claim
120 words
A method of fabricating an EL display device, comprising: forming a metal film containing an element belonging to at least one of the group-1 and group-2 of a periodic table, on a conductive film by either of vacuum evaporation and sputtering; applying a solution containing an EL material, onto said metal film by spin coating; baking said solution by a heat treatment after the solution applying step, thereby to form a thin film which is made of said EL material; and forming a transparent conductive film on said thin film made of said EL material and by either of vacuum evaporation and sputtering; wherein the metal forming step through the transparent conductive forming step are performed in an identical apparatus.
Claim 18
Independent Claim
120 words
A method of fabricating an EL display device, comprising: forming a metal film containing an element belonging to at least one of the group-1 and group-2 of a periodic table, on a conductive film by either of vacuum evaporation and sputtering; applying a solution containing an EL material, onto said metal film by spin coating; baking said solution by a heat treatment after the solution applying step, thereby to form a thin film which is made of said EL material; and forming a transparent conductive film on said thin film made of said EL material and by either of vacuum evaporation and sputtering; wherein the metal forming step through the transparent conductive forming step are performed in an identical apparatus.
Claim 19
Dependent Claim
48 words
A method of fabricating an EL display device according to claim 11 , comprising: forming an insulating film on the transparent conductive film by either of vacuum evaporation and sputtering, after the transparent conductive film forming step; wherein the insulating film forming step is performed in the apparatus.
Claim 20
Independent Claim
118 words
An apparatus, comprising: a first chamber for applying a solution containing an EL material; a second chamber for baking said solution; a third chamber for forming a metal film containing an element belonging to at least one of the group-1 and group-2 of a periodic table; means for transferring a substrate between said first to third chambers without exposing said substrate to air; means for isolating said first to third chambers from each other; and means for enveloping an EL element comprising said EL material and said metal film in a sealed space, wherein at least one chamber is provided between said first chamber and said means for transferring a substrate and said chamber is an evacuation chamber.
Claim 21
Independent Claim
118 words
An apparatus, comprising: a first chamber for applying a solution containing an EL material; a second chamber for baking said solution; a third chamber for forming a metal film containing an element belonging to at least one of the group-1 and group-2 of a periodic table; means for transferring a substrate between said first to third chambers without exposing said substrate to air; means for isolating said first to third chambers from each other; and means for enveloping an EL element comprising said EL material and said metal film in a sealed space, wherein at least one chamber is provided between said first chamber and said means for transferring a substrate and said chamber is an evacuation chamber.
Claim 22
Independent Claim
116 words
An apparatus, comprising: a first chamber for applying a solution containing an EL material; a second chamber for oxidation; a third chamber for forming a metal film containing an element belonging to at least one of the group-1 and group-2 of a periodic table; means for transferring a substrate between said first to third chambers without exposing said substrate to air; means for isolating said first to third chambers from each other; and means for enveloping an EL element comprising said EL material and said metal film in a sealed space, wherein at least one chamber is provided between said first chamber and said means for transferring a substrate and said chamber is an evacuation chamber.
Claim 23
Independent Claim
116 words
An apparatus, comprising: a first chamber for applying a solution containing an EL material; a second chamber for oxidation; a third chamber for forming a metal film containing an element belonging to at least one of the group-1 and group-2 of a periodic table; means for transferring a substrate between said first to third chambers without exposing said substrate to air; means for isolating said first to third chambers from each other; and means for enveloping an EL element comprising said EL material and said metal film in a sealed space, wherein at least one chamber is provided between said first chamber and said means for transferring a substrate and said chamber is an evacuation chamber.
Claim 24
Independent Claim
126 words
An apparatus, comprising: a first chamber for applying a solution containing an EL material; a second chamber for baking said solution; a third chamber for forming a metal film containing an element belonging to at least one of the group-1 and group-2 of a periodic table; a fourth chamber for forming an insulating film; means for transferring a substrate between said first to fourth chambers without exposing said substrate to air; means for isolating said first to fourth chambers from each other; and means for enveloping an EL element comprising said EL material and said metal film in a sealed space, wherein at least one chamber is provided between said first chamber and said means for transferring a substrate and said chamber is an evacuation chamber.
Claim 25
Independent Claim
126 words
An apparatus, comprising: a first chamber for applying a solution containing an EL material; a second chamber for baking said solution; a third chamber for forming a metal film containing an element belonging to at least one of the group-1 and group-2 of a periodic table; a fourth chamber for forming an insulating film; means for transferring a substrate between said first to fourth chambers without exposing said substrate to air; means for isolating said first to fourth chambers from each other; and means for enveloping an EL element comprising said EL material and said metal film in a sealed space, wherein at least one chamber is provided between said first chamber and said means for transferring a substrate and said chamber is an evacuation chamber.
Claim 26
Independent Claim
22 words
An apparatus according to any one of claims 13 through 15 , wherein a spin-coating apparatus is installed into said first chamber.
Claim 27
Independent Claim
31 words
An apparatus according to any of claims 13 through 15 , wherein a processing chamber for evacuation is interposed between said processing chamber for solution application and a gate corresponding thereto.
Claim 28
Independent Claim
54 words
An apparatus according to any of claims 13 through 15 , further comprising means for applying a member selected from the group consisting of a thermosetting resin and an ultraviolet-setting resin, so as to cover, at least, side surfaces of said substrate subjected to all processing steps, and means for setting the selected resin.
Claim 29
Independent Claim
124 words
A method of manufacturing an EL display device, comprising: applying a solution containing an EL material onto a conductive film over a substrate; forming a thin film comprising said EL material by baking said solution after the solution applying step; forming a metal film containing an element belonging to at least one of the group-1 and group-2 of a periodic table, on said thin film made of said EL material by vacuum evaporation or sputtering; and enveloping an EL element comprising said conductive film, said thin film made of EL material, and said method film into a sealed space, wherein the solution applying step through the enveloping step are performed in an apparatus without taking out the substrate to an outside of the apparatus.
Claim 30
Independent Claim
124 words
A method of manufacturing an EL display device, comprising: applying a solution containing an EL material onto a conductive film over a substrate; forming a thin film comprising said EL material by baking said solution after the solution applying step; forming a metal film containing an element belonging to at least one of the group-1 and group-2 of a periodic table, on said thin film made of said EL material by vacuum evaporation or sputtering; and enveloping an EL element comprising said conductive film, said thin film made of EL material, and said method film into a sealed space, wherein the solution applying step through the enveloping step are performed in an apparatus without taking out the substrate to an outside of the apparatus.
Claim 31
Dependent Claim
44 words
A method of manufacturing an EL display device according to claim 19 , further comprising: forming an insulating film on said metal film by vacuum evaporation or sputtering, after forming said metal film; wherein the insulating film forming step is performed in said apparatus.
Claim 32
Independent Claim
119 words
A method of manufacturing an EL display device, comprising: applying a solution containing an EL material over a substrate; forming a first EL layer by baking said solution after the solution applying step; forming a second EL layer by evaporation over said first EL layer; forming a metal film containing element belonging to at least one of the group-1 and group-2 of a periodic table, on said second EL layer by vacuum evaporation or sputtering; enveloping an EL element comprising, said first and second EL layers, and said metal film into a sealed space, wherein the solution applying step through the enveloping step are performed in an apparatus without taking out the substrate to an outside of the apparatus.
Claim 33
Independent Claim
119 words
A method of manufacturing an EL display device, comprising: applying a solution containing an EL material over a substrate; forming a first EL layer by baking said solution after the solution applying step; forming a second EL layer by evaporation over said first EL layer; forming a metal film containing element belonging to at least one of the group-1 and group-2 of a periodic table, on said second EL layer by vacuum evaporation or sputtering; enveloping an EL element comprising, said first and second EL layers, and said metal film into a sealed space, wherein the solution applying step through the enveloping step are performed in an apparatus without taking out the substrate to an outside of the apparatus.
Claim 34
Dependent Claim
43 words
A method of manufacturing an EL display device according to claim 21 , comprising: forming an insulating film on said metal film by vacuum evaporation or sputtering, after forming said metal film; wherein the insulating film forming step is performed in said apparatus.
Claim 35
Independent Claim
89 words
An apparatus comprising: a transport chamber into or out of which a substrate is taken; a common chamber including a mechanism for transporting said substrate; and a plurality of processing chambers respectively connected to said common chamber through gates; wherein said plurality of processing chambers include a processing chamber for solution application, a processing chamber for baking, and a processing chamber for vapor-phase film formation, and wherein a chamber is provided between said common chamber and said processing chamber for solution application and said chamber is an evacuation chamber.
Claim 36
Independent Claim
89 words
An apparatus comprising: a transport chamber into or out of which a substrate is taken; a common chamber including a mechanism for transporting said substrate; and a plurality of processing chambers respectively connected to said common chamber through gates; wherein said plurality of processing chambers include a processing chamber for solution application, a processing chamber for baking, and a processing chamber for vapor-phase film formation, and wherein a chamber is provided between said common chamber and said processing chamber for solution application and said chamber is an evacuation chamber.
Claim 37
Dependent Claim
15 words
An apparatus according to claim 23 , wherein said solution application is a spin-coating application.
Claim 38
Dependent Claim
52 words
An apparatus according to claim 23 , said apparatus further comprising means for applying a member selected from the group consisting of a thermosetting resin and an ultraviolet-setting resin, so as to cover, at least, side surfaces of said substrate subjected to all processing steps, and means for setting the selected resin.
Claim 39
Dependent Claim
58 words
An apparatus according to claim 23 , said apparatus further comprising means for applying a member selected from the group consisting of a thermosetting resin and an ultraviolet-setting resin, onto said substrate subjected to all processing steps, means for sticking said substrate and a sealing material together, with the selected resin, and means for setting said selected resin.
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