US7251017B2
Expired / Lapsed
US
⏱️ 0.0 years remaining
Environmental system including a transport region for an immersion lithography apparatus
Assignee: Nikon Corp
•
Filing: 2005-09-28
•
Granted: 2007-07-31
•
Expires: 2025-09-28
Abstract
Abstract An environmental system controls an environment in a gap between an optical assembly and a device and includes a fluid barrier, an immersion fluid system, and a transport region. The fluid barrier is positioned near the device and maintains the transport region near the gap. The immersion fluid system delivers an immersion fluid that fills the gap. The transport region transports at least a portion of the immersion fluid that is near the fluid barrier and the device away from the device. The immersion fluid system can include a fluid removal system that is in fluid communication with the transport region. The transport region can be made of a porous material.
Inventors
- 👤 W. Thomas Novak
- 👤 Andrew J. Hazelton
- 👤 Douglas C. Watson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 13:13
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/20; G03F7/2041; G03F7/70; G03F7/708; G03F7/70858; G03F7/70866; G03B; G03B27/00; G03B27/32; G03B27/42; G03B27/426; G03F7/70216; G03F7/70341; G03F7/7095; H; H10; H10P; H10P76/00; H10P76/20; H10P76/204; H10P76/2041
Claims Analysis
Total Claims: 44
Claim 1
Independent Claim
89 words
An apparatus comprising: a stage that holds a work piece; a reticle stage that holds a reticle that defines an image; a projection system including an illumination source and an optical element, the projection system projects the image defined by the reticle onto the work piece; a gap between the optical element and the work piece, the gap to be filled with an immersion fluid; and a porous material, positioned adjacent to the gap, the porous material including a plurality of passages for collecting immersion fluid exiting the gap.
Claim 2
Independent Claim
89 words
An apparatus comprising: a stage that holds a work piece; a reticle stage that holds a reticle that defines an image; a projection system including an illumination source and an optical element, the projection system projects the image defined by the reticle onto the work piece; a gap between the optical element and the work piece, the gap to be filled with an immersion fluid; and a porous material, positioned adjacent to the gap, the porous material including a plurality of passages for collecting immersion fluid exiting the gap.
Claim 3
Dependent Claim
14 words
The apparatus of claim 1 , wherein the porous material substantially surrounds the gap.
Claim 4
Dependent Claim
33 words
The apparatus of claim 1 , further comprising a pressure system that creates a pressure differential across the porous material, the pressure differential acting to pull the immersion fluid through the porous material.
Claim 5
Dependent Claim
19 words
The apparatus of claim 1 , wherein the porous material comprises one of a wick and a mesh material.
Claim 6
Dependent Claim
28 words
The apparatus of claim 1 , wherein the plurality of passages of the porous material is aided by capillary action to collect the immersion fluid exiting the gap.
Claim 7
Dependent Claim
21 words
The apparatus of claim 1 , further comprising a fluid removal system that removes immersion fluid from near the porous material.
Claim 8
Dependent Claim
54 words
The apparatus of claim 6 , wherein the porous material has a first surface, and a second surface that is positioned near the work piece, and wherein the fluid removal system controls a pressure at the first surface so that the pressure at the first surface is below a pressure at the second surface.
Claim 9
Dependent Claim
18 words
The apparatus of claim 1 , further comprising a pressure controller for controlling the pressure in the gap.
Claim 10
Dependent Claim
29 words
The apparatus of claim 1 , further comprising a control pressure source that delivers a control fluid to the gap that is not easily absorbed by the immersion fluid.
Claim 11
Independent Claim
121 words
An apparatus comprising: a stage that holds a work piece; a reticle stage that holds a reticle that defines an image; a projection system including an illumination source and an optical element, the projection system projects the image defined by the reticle onto the work piece; a gap between the optical element and the work piece, the gap to be filled with an immersion fluid; and a transport region positioned adjacent to the gap, the transport region having a first surface, a second surface that is positioned near the work piece, and a plurality of passages that extend between the first and second surfaces for collecting immersion fluid exiting the gap, the plurality of passages being configured to generate capillary force.
Claim 12
Independent Claim
121 words
An apparatus comprising: a stage that holds a work piece; a reticle stage that holds a reticle that defines an image; a projection system including an illumination source and an optical element, the projection system projects the image defined by the reticle onto the work piece; a gap between the optical element and the work piece, the gap to be filled with an immersion fluid; and a transport region positioned adjacent to the gap, the transport region having a first surface, a second surface that is positioned near the work piece, and a plurality of passages that extend between the first and second surfaces for collecting immersion fluid exiting the gap, the plurality of passages being configured to generate capillary force.
Claim 13
Dependent Claim
14 words
The apparatus of claim 10 , wherein the transport region substantially surrounds the gap.
Claim 14
Dependent Claim
34 words
The apparatus of claim 10 , further comprising a fluid removal system that creates a pressure differential across the transport region, the pressure differential acting to pull the immersion fluid through the transport region.
Claim 15
Dependent Claim
34 words
The apparatus of claim 12 , wherein the fluid removal system controls a pressure at the first surface so that the pressure at the first surface is below a pressure at the second surface.
Claim 16
Dependent Claim
18 words
The apparatus of claim 10 , further comprising a pressure controller for controlling the pressure in the gap.
Claim 17
Dependent Claim
29 words
The apparatus of claim 10 , further comprising a control pressure source that delivers a control fluid to the gap that is not easily absorbed by the immersion fluid.
Claim 18
Independent Claim
139 words
An apparatus comprising: a stage that holds a work piece; a reticle stage that holds a reticle that defines an image; a projection system including an illumination source and an optical element, the projection system projects the image defined by the reticle onto the work piece; a gap between the optical element and the work piece, the gap to be filled with an immersion fluid; a transport region positioned adjacent to the gap, the transport region including a first surface positioned away from the work piece, a second surface positioned adjacent to the work piece, and a plurality of passages for collecting immersion fluid exiting the gap; and a fluid removal system that is in fluid communication with the transport region, the fluid removal system maintaining a pressure differential across the transport region between the first and second surfaces.
Claim 19
Independent Claim
139 words
An apparatus comprising: a stage that holds a work piece; a reticle stage that holds a reticle that defines an image; a projection system including an illumination source and an optical element, the projection system projects the image defined by the reticle onto the work piece; a gap between the optical element and the work piece, the gap to be filled with an immersion fluid; a transport region positioned adjacent to the gap, the transport region including a first surface positioned away from the work piece, a second surface positioned adjacent to the work piece, and a plurality of passages for collecting immersion fluid exiting the gap; and a fluid removal system that is in fluid communication with the transport region, the fluid removal system maintaining a pressure differential across the transport region between the first and second surfaces.
Claim 20
Dependent Claim
14 words
The apparatus of claim 16 , wherein the transport region substantially surrounds the gap.
Claim 21
Dependent Claim
21 words
The apparatus of claim 16 , wherein the transport region includes a porous material that collects immersion fluid by capillary action.
Claim 22
Dependent Claim
19 words
The apparatus of claim 18 , wherein the porous material comprises one of a wick and a mesh material.
Claim 23
Dependent Claim
25 words
The apparatus of claim 16 , wherein the fluid removal system maintains the pressure near the first surface below the pressure at the second surface.
Claim 24
Dependent Claim
30 words
The apparatus of claim 16 , wherein the transport region includes a plurality of spaced apart transport apertures that extend through the transport region between the first and second surfaces.
Claim 25
Independent Claim
86 words
A method for transferring an image to a work piece, the method comprising the steps of: holding a reticle with a reticle stage; providing an optical assembly that projects the image onto the work piece; holding the work piece with a stage, the work piece being spaced apart from the optical assembly by a gap; directing an immersion fluid into the gap; and positioning a porous material adjacent to the gap, the porous material including a plurality of passages for collecting immersion fluid exiting the gap.
Claim 26
Independent Claim
86 words
A method for transferring an image to a work piece, the method comprising the steps of: holding a reticle with a reticle stage; providing an optical assembly that projects the image onto the work piece; holding the work piece with a stage, the work piece being spaced apart from the optical assembly by a gap; directing an immersion fluid into the gap; and positioning a porous material adjacent to the gap, the porous material including a plurality of passages for collecting immersion fluid exiting the gap.
Claim 27
Dependent Claim
36 words
The method of claim 22 , further comprising the step of creating a pressure differential across the porous material with a pressure system, the pressure differential acting to pull the immersion fluid through the porous material.
Claim 28
Dependent Claim
28 words
The method of claim 22 , wherein the plurality of passages of the porous material is aided by capillary action for collecting the immersion fluid exiting the gap.
Claim 29
Independent Claim
121 words
A method for transferring an image to a work piece, the method comprising the steps of: holding a reticle with a reticle stage; providing an optical assembly that projects the image onto the work piece; holding the work piece with a stage, the work piece being spaced apart from the optical assembly by a gap; directing an immersion fluid into the gap; and collecting immersion fluid exiting from the gap through a transport region adjacent to the gap, the transport region including a first surface positioned away from the work piece, a second surface positioned adjacent to the work piece, and a plurality of passages that extend between the first and second surfaces and that are configured to generate capillary force.
Claim 30
Independent Claim
121 words
A method for transferring an image to a work piece, the method comprising the steps of: holding a reticle with a reticle stage; providing an optical assembly that projects the image onto the work piece; holding the work piece with a stage, the work piece being spaced apart from the optical assembly by a gap; directing an immersion fluid into the gap; and collecting immersion fluid exiting from the gap through a transport region adjacent to the gap, the transport region including a first surface positioned away from the work piece, a second surface positioned adjacent to the work piece, and a plurality of passages that extend between the first and second surfaces and that are configured to generate capillary force.
Claim 31
Dependent Claim
36 words
The method of claim 25 , further comprising the step of creating a pressure differential across the transport region with a pressure system, the pressure differential acting to pull the immersion fluid through the transport region.
Claim 32
Independent Claim
119 words
A method for transferring an image to a work piece, the method comprising the steps of: holding a reticle with a reticle stage; providing an optical assembly that projects the image onto the work piece; holding the work piece with a stage, the work piece being spaced apart from the optical assembly by a gap; directing an immersion fluid into the gap; positioning a transport region adjacent to the gap, the transport region including a first surface positioned away from the work piece, a second surface positioned adjacent to the work piece, and a plurality of passages for collecting immersion fluid exiting the gap; and creating a pressure differential across the transport region between the first and second surfaces.
Claim 33
Independent Claim
119 words
A method for transferring an image to a work piece, the method comprising the steps of: holding a reticle with a reticle stage; providing an optical assembly that projects the image onto the work piece; holding the work piece with a stage, the work piece being spaced apart from the optical assembly by a gap; directing an immersion fluid into the gap; positioning a transport region adjacent to the gap, the transport region including a first surface positioned away from the work piece, a second surface positioned adjacent to the work piece, and a plurality of passages for collecting immersion fluid exiting the gap; and creating a pressure differential across the transport region between the first and second surfaces.
Claim 34
Dependent Claim
85 words
An immersion lithography apparatus comprising: a stage that holds a work piece; a projection system including an illumination source and an optical element, the projection system projects an image onto the work piece in a lithography process; a gap be filled with an immersion fluid, the gap being defined between the optical element and the work piece in the lithography process; and a transport region positioned adjacent to the gap, the transport region having a wick structure to collect the immersion fluid in the gap.
Claim 35
Dependent Claim
85 words
An immersion lithography apparatus comprising: a stage that holds a work piece; a projection system including an illumination source and an optical element, the projection system projects an image onto the work piece in a lithography process; a gap be filled with an immersion fluid, the gap being defined between the optical element and the work piece in the lithography process; and a transport region positioned adjacent to the gap, the transport region having a wick structure to collect the immersion fluid in the gap.
Claim 36
Dependent Claim
17 words
The immersion lithography apparatus according to claim 28 , wherein the transport region includes a porous material.
Claim 37
Dependent Claim
22 words
The immersion lithography apparatus according to claim 28 , wherein the immersion fluid is drawn into the transport region with capillary forces.
Claim 38
Dependent Claim
32 words
The immersion lithography apparatus according to claim 30 , wherein the transport region has passages that are small enough so that the capillary forces draw the immersion fluid into the transport region.
Claim 39
Dependent Claim
31 words
The immersion lithography apparatus according to claim 28 , wherein the transport region has passages that are small enough so that capillary forces draw the immersion fluid into the transport region.
Claim 40
Dependent Claim
17 words
The immersion lithography apparatus according to claim 28 , wherein the transport region substantially surrounds the gap.
Claim 41
Dependent Claim
19 words
The immersion lithography apparatus according to claim 33 , wherein the transport region inhibits the immersion fluid from leaking.
Claim 42
Dependent Claim
29 words
The immersion lithography apparatus according to claim 33 , further comprising a supply nozzle to supply the immersion fluid, the supply nozzle being arranged inside of the transport region.
Claim 43
Dependent Claim
24 words
The immersion lithography apparatus according to claim 28 , further comprising a fluid removal system to pull the immersion fluid through the transport region.
Claim 44
Dependent Claim
25 words
A device manufacturing method for manufacturing a micro-device using a lithography process, wherein the lithography process utilizes the immersion lithography apparatus of claim 28 .
References Cited (Backward Citations)
DE221563C
Cited
DE224448C
Cited
US4346164A
Cited
JPS57153433A
Cited
US4480910A
Cited
JPS58202448A
Cited
JPS5919912A
Cited
JPS6265326A
Cited
JPS63157419A
Cited
JPH04305915A
Cited
JPH04305917A
Cited
JPH0562877A
Cited
JPH06124873A
Cited
US5610683A
Cited
JPH07220990A
Cited
JPH08316125A
Cited
US5715039A
Cited
US6191429B1
Cited
US5825043A
Cited
JPH10303114A
Cited
JPH10340846A
Cited
WO1999049504A1
Cited
US20050117224A1
Cited
US20050190455A1
Cited
US20020020821A1
Cited
US20030030916A1
Cited
US20020163629A1
Cited
WO2002091078A1
Cited
WO2003077037A1
Cited
US20030174408A1
Cited
US20050141098A1
Cited
US20050030506A1
Cited
US20040000627A1
Cited
WO2004019128A2
Cited
US20050217703A1
Cited
US20050217137A1
Cited
US20050217135A1
Cited
US6988327B2
Cited
US20040075895A1
Cited
US6788477B2
Cited
US20040160582A1
Cited
US20050036121A1
Cited
US20040165159A1
Cited
US20040136494A1
Cited
US20040207824A1
Cited
US20040211920A1
Cited
US20040169834A1
Cited
US20040114117A1
Cited
US20040109237A1
Cited
US20040119954A1
Cited
WO2004055803A1
Cited
WO2004057590A1
Cited
WO2004057589A1
Cited
US20040118184A1
Cited
US20040125351A1
Cited
US6781670B2
Cited
WO2004077154A2
Cited
US20040180294A1
Cited
US20050280791A1
Cited
US20040227923A1
Cited
US20040169924A1
Cited
WO2004081666A1
Cited
US20040180299A1
Cited
WO2005001432A2
Cited
WO2004093159A2
Cited
WO2004092833A2
Cited
WO2004093160A2
Cited
WO2004090634A2
Cited
WO2004090633A2
Cited
WO2004092830A2
Cited
WO2004093130A2
Cited
WO2004090577A2
Cited
WO2004095135A2
Cited
US20040224265A1
Cited
US20040224525A1
Cited
US20040253548A1
Cited
US20040253547A1
Cited
US20040257544A1
Cited
US20040259008A1
Cited
US20040259040A1
Cited
WO2005003864A2
Cited
US20040263808A1
Cited
WO2005006026A2
Cited
WO2005008339A2
Cited
WO2005013008A2
Cited
US20050042554A1
Cited
US20050036183A1
Cited
WO2005017625A2
Cited
US20050036184A1
Cited
US20050037269A1
Cited
WO2005015283A1
Cited
US20050036213A1
Cited
WO2005019935A2
Cited
WO2005024325A2
Cited
US20050094116A1
Cited
US20050046934A1
Cited
WO2005022266A2
Cited
US20050048223A1
Cited
WO2005024517A2
Cited
US7053983B2
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2010-07-30 | 2011-01-29 | 2011-07-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2014-07-30 | 2015-01-29 | 2015-07-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2018-07-30 | 2019-01-29 | 2019-07-31 | $7700.00 | Window Closed / Lapsed |