US6885084B2
Expired / Lapsed
US
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Semiconductor transistor having a stressed channel
Assignee: Intel Corp
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Filing: 2003-07-23
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Granted: 2005-04-26
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Expires: 2023-07-23
Abstract
Abstract A process is described for manufacturing an improved PMOS semiconductor transistor. Recesses are etched into a layer of epitaxial silicon. Source and drain films are deposited in the recesses. The source and drain films are made of an alloy of silicon and germanium. The alloy is epitaxially deposited on the layer of silicon. The alloy thus has a lattice having the same structure as the structure of the lattice of the layer of silicon. However, due to the inclusion of the germanium, the lattice of the alloy has a larger spacing than the spacing of the lattice of the layer of silicon. The larger spacing creates a stress in a channel of the transistor between the source and drain films. The stress increases I DSAT and I DLIN of the transistor. An NMOS transistor can be manufactured in a similar manner by including carbon instead of germanium, thereby creating a tensile stress.
Inventors
- 👤 Anand Murthy
- 👤 Robert S. Chau
- 👤 Tahir Ghani
- 👤 Kaizad R. Mistry
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 16:47
CPC Classifications
H; H10; H10D; H10D30/00; H10D30/60; H10D30/791; H10D30/797; H10D30/01; H10D30/021; H10D30/027; H10D30/0275; H10D30/601; H10D30/608; H10D30/751; H10D62/00; H10D62/01; H10D62/021; H10D62/80; H10D62/82; H10D62/822; H10D62/83; H10D62/832; H10D64/00; H10D64/01; H10D64/021; H10D84/00; H10D84/01; H10D84/0123; H10D84/0126; H10D84/0165; H10D84/017; H10D84/02; H10D84/03; H10D84/038; H10D84/80; H10D84/82; H10D84/83; H10D84/85; H10D30/0223; H10D30/0227
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
149 words
A semiconductor transistor, comprising: a layer having source and drain recesses formed therein with a channel between the source and drain recesses, and being made of a semiconductor material having a first lattice with a first structure and a first spacing; a source and a drain formed in the source and drain recesses respectively, at least one of the source and the drain being made of a film material which: (a) includes a p-dopant; and (b) is formed epitaxially on the semiconductor material so as to have a second lattice having a second structure which is the same as the first structure, the second lattice having a second spacing which is larger than the first spacing, so that a compressive stress is created between the source and the drain in the channel; a gate dielectric layer on the channel; and a conductive gate electrode on the gate dielectric layer.
Claim 2
Dependent Claim
149 words
A semiconductor transistor, comprising: a layer having source and drain recesses formed therein with a channel between the source and drain recesses, and being made of a semiconductor material having a first lattice with a first structure and a first spacing; a source and a drain formed in the source and drain recesses respectively, at least one of the source and the drain being made of a film material which: (a) includes a p-dopant; and (b) is formed epitaxially on the semiconductor material so as to have a second lattice having a second structure which is the same as the first structure, the second lattice having a second spacing which is larger than the first spacing, so that a compressive stress is created between the source and the drain in the channel; a gate dielectric layer on the channel; and a conductive gate electrode on the gate dielectric layer.
Claim 3
Dependent Claim
33 words
The semiconductor transistor of claim 1 , wherein the second material includes the semiconductor material and an additive, the difference between the first spacing and the second spacing being due to the additive.
Claim 4
Dependent Claim
12 words
The semiconductor transistor of claim 2 , wherein the additive is germanium.
Claim 5
Dependent Claim
38 words
The semiconductor transistor of claim 2 , further comprising: tip regions formed between the source and the drain with the channel between the tip regions, the tip regions being formed by implanting of dopants and excluding the additive.
Claim 6
Dependent Claim
16 words
The semiconductor transistor of claim 4 , wherein the dopants of the tip regions are p-dopants.
Claim 7
Dependent Claim
149 words
A semiconductor transistor comprising: a layer having source and drain recesses formed therein with a channel between the source and drain recesses, and being made of a semiconductor material having a first lattice with a first structure and a first spacing; a source and a drain formed in the source and drain recesses respectively, at least one of the source and the drain being made of a film material which: (a) includes an n-dopant; and (b) is formed epitaxially on the semiconductor material so as to have a second lattice having a second structure which is the same as the first structure, the second lattice having a second spacing which is smaller than the first spacing, so that a tensile stress is created between the source and the drain in the channel; a gate dielectric layer on the channel; and a conductive gate electrode on the gate dielectric layer.
Claim 8
Dependent Claim
149 words
A semiconductor transistor comprising: a layer having source and drain recesses formed therein with a channel between the source and drain recesses, and being made of a semiconductor material having a first lattice with a first structure and a first spacing; a source and a drain formed in the source and drain recesses respectively, at least one of the source and the drain being made of a film material which: (a) includes an n-dopant; and (b) is formed epitaxially on the semiconductor material so as to have a second lattice having a second structure which is the same as the first structure, the second lattice having a second spacing which is smaller than the first spacing, so that a tensile stress is created between the source and the drain in the channel; a gate dielectric layer on the channel; and a conductive gate electrode on the gate dielectric layer.
Claim 9
Dependent Claim
33 words
The semiconductor transistor of claim 6 , wherein the second material includes the semiconductor material and an additive, the difference between the first spacing and the second spacing being due to the additive.
Claim 10
Dependent Claim
12 words
The semiconductor transistor of claim 7 , wherein the additive is carbon.
Claim 11
Dependent Claim
38 words
The semiconductor transistor of claim 7 , further comprising: tip regions formed between the source and the drain with the channel between the tip regions, the tip regions being formed by implanting of dopants and excluding the additive.
Claim 12
Dependent Claim
16 words
The semiconductor transistor of claim 9 , wherein the dopants of the tip regions are n-dopants.
Claim 13
Dependent Claim
154 words
A semiconductor transistor comprising: a layer having source and drain recesses formed therein with a channel between the source and drain recesses, and being made of a semiconductor material having a first lattice with a first structure and a first spacing and at least the channel, the semiconductor material including an n-dopant; a source and a drain formed in the source and drain recesses respectively, at least one of the source and the drain being made of a film material which is formed epitaxially on the semiconductor material so as to have a second lattice having a second structure which is the same as the first structure, the second lattice having a second spacing which is larger than the first spacing, so that a compressive stress is created between the source and the drain in the channel; a gate dielectric layer on the channel; and a conductive gate electrode on the gate dielectric layer.
Claim 14
Dependent Claim
154 words
A semiconductor transistor comprising: a layer having source and drain recesses formed therein with a channel between the source and drain recesses, and being made of a semiconductor material having a first lattice with a first structure and a first spacing and at least the channel, the semiconductor material including an n-dopant; a source and a drain formed in the source and drain recesses respectively, at least one of the source and the drain being made of a film material which is formed epitaxially on the semiconductor material so as to have a second lattice having a second structure which is the same as the first structure, the second lattice having a second spacing which is larger than the first spacing, so that a compressive stress is created between the source and the drain in the channel; a gate dielectric layer on the channel; and a conductive gate electrode on the gate dielectric layer.
Claim 15
Dependent Claim
154 words
A semiconductor transistor comprising: a layer having source and drain recesses formed therein with a channel between the source and drain recesses, and being made of a semiconductor material having a first lattice with a first structure and a first spacing and at least the channel, the semiconductor material including a p-dopant; a source and a drain formed in the source and drain recesses respectively, at least one of the source and the drain being made of a film material which is formed epitaxially on the semiconductor material so as to have a second lattice having a second structure which is the same as the first structure, the second lattice having a second spacing which is smaller than the first spacing, so that a tensile stress is created between the source and the drain in the channel; a gate dielectric layer on the channel; and a conductive gate electrode on the gate dielectric layer.
Claim 16
Dependent Claim
154 words
A semiconductor transistor comprising: a layer having source and drain recesses formed therein with a channel between the source and drain recesses, and being made of a semiconductor material having a first lattice with a first structure and a first spacing and at least the channel, the semiconductor material including a p-dopant; a source and a drain formed in the source and drain recesses respectively, at least one of the source and the drain being made of a film material which is formed epitaxially on the semiconductor material so as to have a second lattice having a second structure which is the same as the first structure, the second lattice having a second spacing which is smaller than the first spacing, so that a tensile stress is created between the source and the drain in the channel; a gate dielectric layer on the channel; and a conductive gate electrode on the gate dielectric layer.
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