Patent US6780770B2 successfully refreshed from Google Patents.
US6780770B2
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US
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Method for stacking semiconductor die within an implanted medical device
Assignee: Medtronic Inc
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Filing: 2000-12-13
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Granted: 2004-08-24
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Expires: 2020-12-13
Abstract
Abstract A method for forming a stackable wafer for use in an implantable device is provided. The method comprises forming an opening extending substantially through the wafer. Thereafter, conductive material is deposited within the opening to substantially fill the opening. A bump is then formed on an upper surface of the wafer adjacent the conductive material, and a contact pad is formed on a lower surface of the wafer adjacent the conductive material. A second wafer formed using substantially the same process may then be stacked on top of the first wafer with the bump of the first wafer being in contact with the contact pad of the second wafer. A soldering process may then be used to couple the adjacent pad and wafer for physically mounting the wafers and providing electrical connectivity therebetween.
Inventors
- 👤 Lary R. Larson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 11:24
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/021; H10W20/023; H10W20/20; H10W72/00; H10W72/01; H10W72/012; H10W90/00; H10W72/20; H10W72/241; H10W72/244; H10W72/251; H10W90/20; H10W90/297; H10W90/701; H10W90/721; H10W90/722
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
69 words
A method for forming a stackable wafer in an implantable device, comprising: forming an opening extending substantially through the wafer; depositing conductive material within the opening to substantially fill the opening; forming a bump on and extending outward from an upper surface of the wafer adjacent the conductive material; and forming a contact pad on and extending outward from a lower surface of the wafer adjacent the conductive material.
Claim 2
Independent Claim
69 words
A method for forming a stackable wafer in an implantable device, comprising: forming an opening extending substantially through the wafer; depositing conductive material within the opening to substantially fill the opening; forming a bump on and extending outward from an upper surface of the wafer adjacent the conductive material; and forming a contact pad on and extending outward from a lower surface of the wafer adjacent the conductive material.
Claim 3
Dependent Claim
37 words
The method set forth in claim 1 , wherein forming an opening further comprises exposing a selected portion of the upper surface of the wafer to a reactive ion etching process for a preselected duration of time.
Claim 4
Dependent Claim
30 words
The method set forth in claim 1 , wherein depositing conductive material within the opening further comprises depositing at least one of copper, tungsten, nickel, and aluminum within the opening.
Claim 5
Dependent Claim
51 words
The method set forth in claim 1 , wherein depositing conductive material within the opening further comprises depositing a layer of conductive material over the upper surface of the wafer and within the opening, and removing a portion of the layer of conductive material overlying the upper surface of the wafer.
Claim 6
Dependent Claim
48 words
The method set forth in claim 4 , wherein removing a portion of the layer of conductive material further comprises performing a chemical mechanical polishing of the layer of conductive material to remove a portion of the layer of conductive material overlying the upper surface of the wafer.
Claim 7
Dependent Claim
35 words
The method of claim 1 , wherein forming a bump on an upper surface of the wafer further comprises forming a bump wherein at least a portion of a surface of the bump is wettable.
Claim 8
Dependent Claim
38 words
The method of claim 1 , wherein forming a contact pad on a lower surface of the wafer further comprises forming a contact pad wherein at least a portion of a surface of the contact pad is wettable.
Claim 9
Dependent Claim
28 words
The method of claim 1 , wherein forming an opening extending substantially through the wafer further comprises forming the opening extending substantially through a substrate of the wafer.
Claim 10
Dependent Claim
37 words
The method of claim 8 , wherein forming an opening extending substantially through the wafer further comprises forming the opening extending substantially through a substrate of the wafer and any additional process layers formed on the substrate.
Claim 11
Dependent Claim
32 words
The method set forth in claim 1 , wherein depositing conductive material within the opening further comprises depositing conductive material in contact with at least one conductive layer disposed within the wafer.
Claim 12
Independent Claim
169 words
A method for forming a stacked arrangement of a first and second wafer in an implantable device, comprising: forming an opening extending substantially through the first wafer; depositing conductive material within the opening to substantially fill the opening in the first wafer; forming a bump on an upper surface of the first wafer adjacent the conductive material; forming a contact pad on a lower surface of the first wafer adjacent the conductive material; forming an opening extending substantially through the second wafer, depositing conductive material within the opening to substantially fill the opening in the second wafer; forming a bump on an upper surf ace of the second wafer adjacent the conductive material; forming a contact pad on a lower surface of the second wafer adjacent the conductive material; positioning the first water adjacent the second wafer with the bump of the first wafer being adjacent the contact pad of the second wafer; and coupling the bump of the first wafer with the contact pad of the second wafer.
Claim 13
Independent Claim
169 words
A method for forming a stacked arrangement of a first and second wafer in an implantable device, comprising: forming an opening extending substantially through the first wafer; depositing conductive material within the opening to substantially fill the opening in the first wafer; forming a bump on an upper surface of the first wafer adjacent the conductive material; forming a contact pad on a lower surface of the first wafer adjacent the conductive material; forming an opening extending substantially through the second wafer, depositing conductive material within the opening to substantially fill the opening in the second wafer; forming a bump on an upper surf ace of the second wafer adjacent the conductive material; forming a contact pad on a lower surface of the second wafer adjacent the conductive material; positioning the first water adjacent the second wafer with the bump of the first wafer being adjacent the contact pad of the second wafer; and coupling the bump of the first wafer with the contact pad of the second wafer.
Claim 14
Dependent Claim
41 words
The method set forth in claim 11 , wherein coupling the bump of the first wafer with the contact pad of the second wafer further comprises soldering the bump of the first wafer with the contact pad of the second wafer.
Claim 15
Dependent Claim
42 words
The method set forth in claim 11 , wherein forming an opening in the first wafer further comprises exposing a selected portion of the upper surface of the first wafer to a reactive ion etching process for a preselected duration of time.
Claim 16
Dependent Claim
38 words
The method set forth in claim 11 , wherein depositing conductive material within the opening of the first wafer further comprises depositing at least one of copper, tungsten, nickel, and aluminum within the opening of the first wafer.
Claim 17
Dependent Claim
57 words
The method set forth in claim 11 , wherein depositing conductive material within the opening of the first wafer further comprises depositing a layer or conductive material over the upper surface of the first wafer and within the opening, and removing a portion of the layer of conductive material overlying the upper surface of the first wafer.
Claim 18
Dependent Claim
49 words
The method set forth in claim 15 , wherein removing a portion of the layer of conductive material further comprises performing a chemical mechanical polishing of the layer of conductive material to remove a portion of the layer of conductive material overlying the upper surface of the first wafer.
Claim 19
Dependent Claim
36 words
The method of claim 11 , wherein forming a bump on an upper surface of the first wafer further comprises forming a bump wherein at least a portion of a surface of the bump is wettable.
Claim 20
Dependent Claim
39 words
The method of claim 11 , wherein forming a contact pad on a lower surface of the second wafer further comprises forming a contact pad wherein at least a portion of a surface of the contact pad is wettable.
Claim 21
Dependent Claim
30 words
The method of claim 11 , wherein forming an opening extending substantially through the firs wafer further comprises forming the opening extending substantially through a substrate of the first wafer.
Claim 22
Dependent Claim
39 words
The method of claim 19 , wherein forming an opening extending substantially through the first wafer further comprises forming the opening extending substantially through the substrate of the first wafer and any additional process layers formed on the substrate.
Claim 23
Dependent Claim
37 words
The method set forth in claim 11 , wherein depositing conductive material within the opening of the first wafer further comprises depositing conductive material in contact with at least one conductive layer disposed within the first wafer.
Claim 24
Independent Claim
106 words
A method for forming a stackable wafer for use in an implantable medical device, comprising: providing a housing; mounting a semiconductor module inside the housing, wherein said semiconductor module includes first and second semiconductor die in a stacked arrangement, the stacked semiconductor die having circuitry implementing an operational implantable medical device function; and providing a plurality of electrical connections extending between the die, each electrical connection comprising an interconnection between a bump on an upper surface that extends outward from the upper surface of the first die and a contact pad on a lower surface that extends outward from the lower surface of the second die.
Claim 25
Independent Claim
106 words
A method for forming a stackable wafer for use in an implantable medical device, comprising: providing a housing; mounting a semiconductor module inside the housing, wherein said semiconductor module includes first and second semiconductor die in a stacked arrangement, the stacked semiconductor die having circuitry implementing an operational implantable medical device function; and providing a plurality of electrical connections extending between the die, each electrical connection comprising an interconnection between a bump on an upper surface that extends outward from the upper surface of the first die and a contact pad on a lower surface that extends outward from the lower surface of the second die.
Claim 26
Dependent Claim
39 words
The method of claim 22 further comprises a solder connection that is provided for the interconnection between a bump on an upper surface of the first die and a contact pad on a lower surface of the second die.
Claim 27
Dependent Claim
14 words
The method of claim 22 further comprises delivering electrical stimulation therapy via said circuitry.
Claim 28
Dependent Claim
24 words
The method of claim 22 wherein an operational implantable medical device function further comprises pacing and sensing functions that are implemented by the circuitry.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2007-08-24 | 2008-02-23 | 2008-08-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2011-08-24 | 2012-02-23 | 2012-08-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2015-08-24 | 2016-02-23 | 2016-08-24 | $7700.00 | Window Closed / Lapsed |