US6756284B2
Expired / Lapsed
US
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Method for forming a sublithographic opening in a semiconductor process
Assignee: Silicon Storage Technology Inc
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Filing: 2002-09-18
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Granted: 2004-06-29
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Expires: 2022-09-18
Abstract
Abstract A first method of forming a sublithographic opening in a first layer of a first material begins by creating a lithographic opening on the first layer with the lithographic opening being over the location of the desired sublithographic opening. The first material in the first layer is partially removed from the lithographic opening. A sacrificial layer of the same material as the first layer is conformally deposited to fit the contour of the first layer, including over the lithographic opening. The resultant structure is anisotropically etched to etch the sacrificial layer as well as the first layer to form the sublithographic opening within the lithographic opening. A second method to form a sublithographic opening is to deposit a sacrificial layer such as polysilicon. A lithographic opening is created in the sacrificial layer with the lithographic opening being positioned over the location of the desired sublithographic opening. The sacrificial material is removed from the lithographic opening. The sacrificial material is then laterally expanded by converting the sacrificial material to a second sacrificial material, thereby decreasing the size of the lithographic opening to a sublithographic opening. This can be done by converting the sacrificial polysilicon into silicon dioxide. The converted silicon dioxide may then be used as a mask layer to etch the underlying layers.
Inventors
- 👤 Gian Sharma
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 06:09
CPC Classifications
H; H10; H10W; H10W10/00; H10W10/01; H10W10/011; H10B; H10B41/00; H10B41/30; H10B69/00; H10P; H10P50/00; H10P50/71; H10P50/73; H10P76/00; H10P76/40; H10P76/408; H10P76/4085; H10P76/4088; H10W10/10
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
103 words
A method of forming a sublithographic opening in a first layer of a first material in a semiconductor process, said method comprising: creating a lithographic opening on said first layer, said lithographic opening being over the location of the desired sublithographic opening; partially removing said first material in said lithographic opening; depositing a sacrificial layer conformally to the contour of said first layer over said first layer including over said lithographic opening; said sacrificial layer being of said first material; and anistropically etching said sacrificial layer and said first layer in a single step to form said sublithographic opening within said lithographic opening.
Claim 2
Independent Claim
103 words
A method of forming a sublithographic opening in a first layer of a first material in a semiconductor process, said method comprising: creating a lithographic opening on said first layer, said lithographic opening being over the location of the desired sublithographic opening; partially removing said first material in said lithographic opening; depositing a sacrificial layer conformally to the contour of said first layer over said first layer including over said lithographic opening; said sacrificial layer being of said first material; and anistropically etching said sacrificial layer and said first layer in a single step to form said sublithographic opening within said lithographic opening.
Claim 3
Dependent Claim
57 words
The method of claim 1 wherein said creating step further comprises: depositing a layer of photoresist on said first layer; exposing said layer of photoresist to form a latent image comprising a latent lithographic opening over the location of the desired sublithographic opening; and removing completely said photoresist in said lithographic opening, thereby exposing said first layer.
Claim 4
Dependent Claim
25 words
The method of claim 2 further comprising: removing all of said photoresist, after said partially removing and prior to said depositing of said sacrificial layer.
Claim 5
Dependent Claim
14 words
The method of claim 3 wherein said first material is polysilicon or amorphous silicon.
Claim 6
Independent Claim
119 words
A method of forming a sublithographic opening in a first layer of a first material in a semiconductor process, said method comprising: depositing a sacrificial layer of a first sacrificial material on said first layer; creating a lithographic opening on said sacrificial layer, said lithographic opening positioned over the location of the desired sublithographic opening; removing said first sacrificial material in said lithographic opening; laterally expanding said first sacrificial material by converting said first sacrificial material to a second sacrificial material after the removing, thereby decreasing the size of said lithographic opening to a sublithographic opening; and etching said first layer using said second sacrificial material as a masking layer to form said sublithographic opening in said first layer.
Claim 7
Independent Claim
119 words
A method of forming a sublithographic opening in a first layer of a first material in a semiconductor process, said method comprising: depositing a sacrificial layer of a first sacrificial material on said first layer; creating a lithographic opening on said sacrificial layer, said lithographic opening positioned over the location of the desired sublithographic opening; removing said first sacrificial material in said lithographic opening; laterally expanding said first sacrificial material by converting said first sacrificial material to a second sacrificial material after the removing, thereby decreasing the size of said lithographic opening to a sublithographic opening; and etching said first layer using said second sacrificial material as a masking layer to form said sublithographic opening in said first layer.
Claim 8
Dependent Claim
56 words
The method of claim 5 wherein said creating step further comprises: depositing a layer of photoresist on said sacrificial layer; exposing said layer of photoresist to form a latent image comprising a latent lithographic opening over the location of the desired sublithographic opening; and removing said photoresist in said lithographic opening thereby exposing said sacrificial layer.
Claim 9
Dependent Claim
20 words
The method of claim 6 further comprising: removing all of said photoresist after said removing and prior to said expanding.
Claim 10
Dependent Claim
16 words
The method of claim 7 wherein said first sacrificial material is silicon, polysilicon or amorphous silicon.
Claim 11
Dependent Claim
19 words
The method of claim 8 wherein said expanding step comprises oxidizing said first sacrificial material to produce silicon (di)oxide.
Claim 12
Dependent Claim
35 words
The method of claim 9 wherein said first layer is a composite layer comprising of a layer of polysilicon and a layer of silicon nitride with said silicon nitride immediately adjacent to said sacrificial layer.
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