US6461900B1
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Method to form a self-aligned CMOS inverter using vertical device integration
Assignee: GlobalFoundries Singapore Pte Ltd
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Filing: 2001-10-18
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Granted: 2002-10-08
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Expires: 2021-10-18
Abstract
Abstract A method to form a closely-spaced, vertical NMOS and PMOS transistor pair in an integrated circuit device is achieved. A substrate comprises silicon implanted oxide (SIMOX) wherein an oxide layer is sandwiched between underlying and overlying silicon layers. Ions are selectively implanted into a first part of the overlying silicon layer to form a drain, channel region, and source for an NMOS transistor. The drain is formed directly overlying the oxide layer, the channel region is formed overlying the drain, and the source is formed overlying the channel region. Ions are selectively implanted into a second part of the overlying silicon layer to form a drain, channel region, and source for a PMOS transistor. The drain is formed directly overlying the oxide layer, the PMOS channel region is formed overlying the drain, and the source is formed overlying the channel region. The PMOS transistor drain is in contact with said NMOS transistor drain. A gate trench is etched through the NMOS and PMOS sources and channel regions. The gate trench terminates at the NMOS and PMOS drains and exposes the sidewalls of the NMOS and PMOS channel regions. A gate oxide layer is formed overlying the NMOS and PMOS channel regions and lining the gate trench. A polysilicon layer is deposited and etched back to form polysilicon sidewalls and to thereby form gates for the closely-spaced, vertical NMOS and PMOS transistor pair.
Inventors
- 👤 Ravi Sundaresan
- 👤 Yang Pan
- 👤 James Lee Young Meng
- 👤 Ying Keung Leung
- 👤 Yelehanka Ramachandramurthy Pradeep
- 👤 Jia Zhen Zheng
- 👤 Lap Chan
- 👤 Elgin Quek
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 23:51
CPC Classifications
H; H10; H10D; H10D84/00; H10D84/80; H10D84/82; H10D84/83; H10D84/85; H10D86/00; H10D86/01; H10D30/00; H10D30/01; H10D30/021; H10D30/025; H10D84/01; H10D84/0123; H10D84/0126; H10D84/0165; H10D84/0195; H10D84/02; H10D84/03; H10D84/038; H10D86/201
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
251 words
A method to form a closely-spaced, vertical NMOS and PMOS transistor pair in an integrated circuit device comprising: providing a substrate comprising silicon implanted oxide wherein an oxide layer is sandwiched between underlying and overlying silicon layers; selectively implanting ions into a first part of said overlying silicon layer to form a drain, channel region, and source for an NMOS transistor wherein said drain is formed directly overlying said oxide layer, wherein said channel region is formed overlying said drain, and wherein said source is formed overlying said channel region; selectively implanting ions into a second part of said overlying silicon layer to form a drain, channel region, and source for a PMOS transistor wherein said drain is formed directly overlying said oxide layer, wherein said PMOS channel region is formed overlying said drain, wherein said source is formed overlying said channel region, and wherein said drain is in contact with said NMOS transistor drain; etching a gate trench through said NMOS and PMOS sources and channel regions wherein said gate trench terminates at said NMOS and PMOS drains and wherein said gate trench exposes sidewalls of said NMOS and PMOS channel regions; forming a gate oxide layer overlying said NMOS and PMOS channel regions and lining said gate trench; depositing a polysilicon layer overlying said gate oxide layer; and etching back said polysilicon layer to form polysilicon sidewalls and to thereby form gates for said closely-spaced, vertical NMOS and PMOS transistor pair in the manufacture of the integrated circuit device.
Claim 2
Independent Claim
251 words
A method to form a closely-spaced, vertical NMOS and PMOS transistor pair in an integrated circuit device comprising: providing a substrate comprising silicon implanted oxide wherein an oxide layer is sandwiched between underlying and overlying silicon layers; selectively implanting ions into a first part of said overlying silicon layer to form a drain, channel region, and source for an NMOS transistor wherein said drain is formed directly overlying said oxide layer, wherein said channel region is formed overlying said drain, and wherein said source is formed overlying said channel region; selectively implanting ions into a second part of said overlying silicon layer to form a drain, channel region, and source for a PMOS transistor wherein said drain is formed directly overlying said oxide layer, wherein said PMOS channel region is formed overlying said drain, wherein said source is formed overlying said channel region, and wherein said drain is in contact with said NMOS transistor drain; etching a gate trench through said NMOS and PMOS sources and channel regions wherein said gate trench terminates at said NMOS and PMOS drains and wherein said gate trench exposes sidewalls of said NMOS and PMOS channel regions; forming a gate oxide layer overlying said NMOS and PMOS channel regions and lining said gate trench; depositing a polysilicon layer overlying said gate oxide layer; and etching back said polysilicon layer to form polysilicon sidewalls and to thereby form gates for said closely-spaced, vertical NMOS and PMOS transistor pair in the manufacture of the integrated circuit device.
Claim 3
Dependent Claim
19 words
The method according to claim 1 wherein said closely-spaced, vertical NMOS and PMOS transistor pair form a CMOS inverter.
Claim 4
Dependent Claim
92 words
The method according to claim 1 further comprising: depositing an interlevel dielectric layer overlying said closely-spaced, vertical NMOS and PMOS transistor pair after said step of etching back said polysilicon layer; etching openings through said interlevel dielectric layer to expose said PMOS source and drain and said NMOS source and drain; thereafter forming a metal silicide layer in said PMOS source and drain and said NMOS source and drain; depositing a metal layer overlying said interlevel dielectric layer and said overlying silicon layer; and patterning said metal layer to form connective lines.
Claim 5
Dependent Claim
23 words
The method according to claim 3 wherein said metal silicide layer consists of one of the group of: titanium silicide and cobalt silicide.
Claim 6
Dependent Claim
22 words
The method according to claim 1 wherein said overlying silicon layer comprises a thickness of between about 2,000 Angstroms and 3,000 Angstroms.
Claim 7
Dependent Claim
70 words
The method according to claim 1 wherein said step of selectively implanting ions into said first part of said overlying silicon layer to form said drain, channel region, and source of said NMOS transistor comprises a drain implant recipe comprising implanting arsenic ions at an energy of between about 220 KeV and 500 KeV and a dose of between about 3×10 15 ions/cm 2 and 4×10 15 ions/cm 2 .
Claim 8
Dependent Claim
70 words
The method according to claim 1 wherein said step of selectively implanting ions into said first part of said overlying silicon layer to form said drain, channel region, and source of said NMOS transistor comprises a source implant recipe comprising implanting arsenic ions at an energy of between about 45 KeV and 70 KeV and a dose of between about 3×10 15 ions/cm 2 and 4×10 15 ions/cm 2 .
Claim 9
Dependent Claim
70 words
The method according to claim 1 wherein said step of selectively implanting ions into said second part of said overlying silicon layer to form said drain, channel region, and source of said PMOS transistor comprises a drain implant recipe comprising implanting boron ions at an energy of between about 40 KeV and 90 KeV and a dose of between about 3×10 15 ions/cm 2 and 4×10 15 ions/cm 2 .
Claim 10
Dependent Claim
70 words
The method according to claim 1 wherein said step of selectively implanting ions into said second part of said overlying silicon layer to form said drain, channel region, and source of said PMOS transistor comprises a source implant recipe comprising implanting boron ions at an energy of between about 2 KeV and 4 KeV and a dose of between about 2×10 15 ions/cm 2 and 4×10 15 ions/cm 2 .
Claim 11
Dependent Claim
24 words
The method according to claim 1 wherein said gate oxide layer is formed to a thickness of between about 15 Angstroms and 20 Angstroms.
Claim 12
Dependent Claim
23 words
The method according to claim 1 wherein said polysilicon layer is deposited to a thickness of between about 800 Angstroms and 1,200 Angstroms.
Claim 13
Dependent Claim
28 words
The method according to claim 1 further comprising forming shallow trench isolations in said overlying silicon layer to isolate planned said closely-spaced, vertical NMOS and PMOS transistor pair.
Claim 14
Independent Claim
322 words
A method to form an inverter with a closely-spaced, vertical NMOS and PMOS transistor pair in an integrated circuit device comprising: selectively implanting ions into a first part of said overlying silicon layer to form a drain, channel region, and source for an NMOS transistor wherein said drain is formed directly overlying said oxide layer, wherein said channel region is formed overlying said drain, and wherein said source is formed overlying said channel region; selectively implanting ions into a second part of said overlying silicon layer to form a drain, channel region, and source for a PMOS transistor wherein said drain is formed directly overlying said oxide layer, wherein said PMOS channel region is formed overlying said drain, wherein said source is formed overlying said channel region, and wherein said drain is in contact with said NMOS transistor drain; etching a gate trench through said NMOS and PMOS sources and channel regions wherein said gate trench terminates at said NMOS and PMOS drains and wherein said gate trench exposes sidewalls of said NMOS and PMOS channel regions; forming a gate oxide layer overlying said NMOS and PMOS channel regions and lining said gate trench; depositing a polysilicon layer overlying said gate oxide layer; etching back said polysilicon layer to form polysilicon sidewalls and to thereby form gates for said closely-spaced, vertical NMOS and PMOS transistor pair; depositing an interlevel dielectric layer overlying said closely-spaced, vertical NMOS and PMOS transistor pair after said step of etching back said polysilicon layer; etching openings through said interlevel dielectric layer to expose said PMOS source and drain and said NMOS source and drain; thereafter forming a metal silicide layer in said PMOS source and drain and said NMOS source and drain; depositing a metal layer overlying said interlevel dielectric layer and said overlying silicon layer; and patterning said metal layer to form connective lines to complete said inverter in the manufacture of the integrated circuit device.
Claim 15
Independent Claim
322 words
A method to form an inverter with a closely-spaced, vertical NMOS and PMOS transistor pair in an integrated circuit device comprising: selectively implanting ions into a first part of said overlying silicon layer to form a drain, channel region, and source for an NMOS transistor wherein said drain is formed directly overlying said oxide layer, wherein said channel region is formed overlying said drain, and wherein said source is formed overlying said channel region; selectively implanting ions into a second part of said overlying silicon layer to form a drain, channel region, and source for a PMOS transistor wherein said drain is formed directly overlying said oxide layer, wherein said PMOS channel region is formed overlying said drain, wherein said source is formed overlying said channel region, and wherein said drain is in contact with said NMOS transistor drain; etching a gate trench through said NMOS and PMOS sources and channel regions wherein said gate trench terminates at said NMOS and PMOS drains and wherein said gate trench exposes sidewalls of said NMOS and PMOS channel regions; forming a gate oxide layer overlying said NMOS and PMOS channel regions and lining said gate trench; depositing a polysilicon layer overlying said gate oxide layer; etching back said polysilicon layer to form polysilicon sidewalls and to thereby form gates for said closely-spaced, vertical NMOS and PMOS transistor pair; depositing an interlevel dielectric layer overlying said closely-spaced, vertical NMOS and PMOS transistor pair after said step of etching back said polysilicon layer; etching openings through said interlevel dielectric layer to expose said PMOS source and drain and said NMOS source and drain; thereafter forming a metal silicide layer in said PMOS source and drain and said NMOS source and drain; depositing a metal layer overlying said interlevel dielectric layer and said overlying silicon layer; and patterning said metal layer to form connective lines to complete said inverter in the manufacture of the integrated circuit device.
Claim 16
Dependent Claim
23 words
The method according to claim 13 wherein said metal silicide layer consists of one of the group of: titanium silicide and cobalt silicide.
Claim 17
Dependent Claim
22 words
The method according to claim 13 wherein said overlying silicon layer comprises a thickness of between about 2,000 Angstroms and 3,000 Angstroms.
Claim 18
Dependent Claim
70 words
The method according to claim 13 wherein said step of selectively implanting ions into said first part of said overlying silicon layer to form said drain, channel region, and source of said NMOS transistor comprises a drain implant recipe comprising implanting arsenic ions at an energy of between about 220 KeV and 500 KeV and a dose of between about 3×10 15 ions/cm 2 and 4×10 15 ions/cm 2 .
Claim 19
Dependent Claim
70 words
The method according to claim 13 wherein said step of selectively implanting ions into said first part of said overlying silicon layer to form said drain, channel region, and source of said NMOS transistor comprises a source implant recipe comprising implanting arsenic ions at an energy of between about 45 KeV and 70 KeV and a dose of between about 3×10 15 ions/cm 2 and 4×10 15 ions/cm 2 .
Claim 20
Dependent Claim
70 words
The method according to claim 13 wherein said step of selectively implanting ions into said second part of said overlying silicon layer to form said drain, channel region, and source of said PMOS transistor comprises a drain implant recipe comprising implanting boron ions at an energy of between about 40 KeV and 90 KeV and a dose of between about 3×10 15 ions/cm 2 and 4×10 15 ions/cm 2 .
Claim 21
Dependent Claim
70 words
The method according to claim 13 wherein said step of selectively implanting ions into said second part of said overlying silicon layer to form said drain, channel region, and source of said PMOS transistor comprises a source implant recipe comprising implanting boron ions at an energy of between about 2 KeV and 4 KeV and a dose of between about 2×10 15 ions/cm 2 and 4×10 15 ions/cm 2 .
Claim 22
Dependent Claim
24 words
The method according to claim 13 wherein said gate oxide layer is formed to a thickness of between about 15 Angstroms and 20 Angstroms.
Claim 23
Dependent Claim
23 words
The method according to claim 13 wherein said polysilicon layer is deposited to a thickness of between about 800 Angstroms and 1,200 Angstroms.
Claim 24
Dependent Claim
28 words
The method according to claim 13 further comprising forming shallow trench isolations in said overlying silicon layer to isolate planned said closely-spaced, vertical NMOS and PMOS transistor pair.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2005-10-07 | 2006-04-08 | 2006-10-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2009-10-07 | 2010-04-08 | 2010-10-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2013-10-07 | 2014-04-08 | 2014-10-08 | $7700.00 | Window Closed / Lapsed |