Method and apparatus for cleaning polishing surface of polisher

Claim 2

A polishing surface cleaning method comprising the steps of: polishing a workpiece to be polished by presssing said workpiece to a polishing surface and generating relative motion between them, dressing said polishing surface by a dresser after the step of polishing, spraying a fluid mixture of a cleaning liquid and a gas through a mixture spray nozzle to said polishing surface from the time that said dresser starts dressing; ending spray of said fluid mixture through said mixing spray nozzle when a given time is lapsed after ending of dressing.

Claim 3

A polishing surface cleaning method comprising the steps of: polishing a workpiece to be polished by holding the workpiece by a top ring to press it against a polishing surface and generating relative motion between said workpiece and said polishing surface, dressing said polishing surface by a dresser after the step of polishing, and spraying a fluid mixture of a cleaning liquid and a gas through a mixing spray nozzle to said polishing surface from the time that said top ring rises after polishing.

Claim 4

A polishing surface cleaning method comprising the steps of: polishing a workpiece to be polished by holding the workpiece by a top ring to press it against a polishing surface and generating relative motion between said workpiece and said polishing surface, dressing said polishing surface by a dresser after the step of polishing, and spraying a fluid mixture of a cleaning liquid and a gas through a mixing spray nozzle to said polishing surface from the time that said top ring rises after polishing.

Claim 5

A polishing surface cleaning method comprising the steps of: polishing a workpiece to be polished by pressing said workpiece to a polishing surface and generating relative motion between them, dressing said polishing surface by a dresser after the step of polishing, and spraying a fluid mixture of a cleaning liquid and a gas through a mixing spray nozzle to said polishing surface before the step of dressing starts, ending spray of said fluid mixture through said mixing spray nozzle when a given time lapsed after ending of dressing.

Claim 6

A polishing surface cleaning method comprising the steps of: polishing a workpiece to be polished by pressing said workpiece to a polishing surface and generating relative motion between them, dressing said polishing surface by a dresser after the step of polishing, and spraying a fluid mixture of a cleaning liquid and a gas through a mixing spray nozzle to said polishing surface before the step of dressing starts, ending spray of said fluid mixture through said mixing spray nozzle when a given time lapsed after ending of dressing.

Claim 7

A polishing surface cleaning method for use in a polisher in which a workpiece is pressed against a polishing surface of a polishing table to polish said workpiece by relative motion between said polishing surface and said workpiece, said method comprising the steps of: preparing a fluid mixture of a cleaning liquid and a gas; spraying said fluid mixture on said polishing surface to clean it; and dressing the polishing surface during said spraying.

Claim 8

A polishing surface cleaning method for use in a polisher in which a workpiece is pressed against a polishing surface of a polishing table to polish said workpiece by relative motion between said polishing surface and said workpiece, said method comprising the steps of: preparing a fluid mixture of a cleaning liquid and a gas; spraying said fluid mixture on said polishing surface to clean it; and dressing the polishing surface during said spraying.

Claim 9

The method of claim 4 , wherein said dressing ends before said spraying.

Claim 10

The method of claim 5 , wherein said dressing starts after said spraying.

Claim 11

The method of claim 4 , wherein said dressing starts after said spraying.

Claim 12

A polishing surface cleaning apparatus for use in a polisher in which a workpiece to be polished is pressed against a polishing surface of a polishing table to polish the workpiece by relative motion between the polishing surface and the workpiece, said apparatus comprising: a mixing spray nozzle structure to mix together a cleaning liquid and a gas to form a fluid mixture and to spray the fluid mixture; a gas supply fluidly connected with said mixing spray nozzle; a liquid supply fluidly connected with said mixing spray nozzle; and pressure regulators and valves for controlling supply of gas and liquid from said gas supply and said liquid supply to said mixing spray nozzle; wherein said mixing spray nozzle comprises a nozzle body having a mixing space, a liquid supply opening, a gas supply opening and a fluid mixture discharge opening.

Claim 13

A polishing surface cleaning apparatus for use in a polisher in which a workpiece to be polished is pressed against a polishing surface of a polishing table to polish the workpiece by relative motion between the polishing surface and the workpiece, said apparatus comprising: a mixing spray nozzle structure to mix together a cleaning liquid and a gas to form a fluid mixture and to spray the fluid mixture; a gas supply fluidly connected with said mixing spray nozzle; a liquid supply fluidly connected with said mixing spray nozzle; and pressure regulators and valves for controlling supply of gas and liquid from said gas supply and said liquid supply to said mixing spray nozzle; wherein said mixing spray nozzle comprises a nozzle body having a mixing space, a liquid supply opening, a gas supply opening and a fluid mixture discharge opening.

Claim 14

A polishing surface cleaning apparatus for use in a polisher in which a workpiece to be polished is pressed against a polishing surface of a polishing table to polish the workpiece by relative motion between the polishing surface and the workpiece, said apparatus comprising: a mixing spray nozzle structure to mix together a cleaning liquid and a gas to form a fluid mixture and to spray the fluid mixture; a gas supply fluidly connected with said mixing spray nozzle; a liquid supply fluidly connected with said mixing spray nozzle; and pressure regulators and valves for controlling supply of gas and liquid from said gas supply and said liquid supply to said mixing spray nozzle; wherein said mixing spray nozzle comprises a conical nozzle body having a liquid supply pipe therein, a gas supply opening at a rear end of said nozzle body, a gas discharge opening at a forward end of said nozzle body, a liquid supply opening at a rear end of said liquid supply pipe and a liquid discharge opening at a forward end of said liquid supply pipe.

Claim 15

A polishing surface cleaning apparatus for use in a polisher in which a workpiece to be polished is pressed against a polishing surface of a polishing table to polish the workpiece by relative motion between the polishing surface and the workpiece, said apparatus comprising: a mixing spray nozzle structure to mix together a cleaning liquid and a gas to form a fluid mixture and to spray the fluid mixture; a gas supply fluidly connected with said mixing spray nozzle; a liquid supply fluidly connected with said mixing spray nozzle; and pressure regulators and valves for controlling supply of gas and liquid from said gas supply and said liquid supply to said mixing spray nozzle; wherein said mixing spray nozzle comprises a conical nozzle body having a liquid supply pipe therein, a gas supply opening at a rear end of said nozzle body, a gas discharge opening at a forward end of said nozzle body, a liquid supply opening at a rear end of said liquid supply pipe and a liquid discharge opening at a forward end of said liquid supply pipe.