Patent US6403482B1 successfully refreshed from Google Patents.
US6403482B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Self-aligned junction isolation
Assignee: International Business Machines Corp
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Filing: 2000-06-28
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Granted: 2002-06-11
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Expires: 2020-06-28
Abstract
Abstract Transistors having self-aligned dielectric layers under the source/drain contacts are formed by constructing transistors up to the LDD implant; etching STI oxide selective to Si and nitride to form a self-aligned contact recess; depositing an insulating layer in the bottom of the contact recess; recessing the insulating layer to leave room for a conductive contact layer; depositing the contact layer to make contact on a vertical surface to the Si underneath the gate sidewalls; recessing the contact layer; forming interlayer dielectric and interconnect to complete the circuit.
Inventors
- 👤 Nivo Rovedo
- 👤 Chung Hon Lam
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 08:36
CPC Classifications
H; H10; H10D; H10D62/00; H10D62/01; H10D62/021; H10D62/10; H10D62/113; H10D62/115; H10D62/116; H10D64/00; H10D64/20; H10D64/23; H10D64/251; H10D64/256
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
197 words
A method of forming an integrated circuit comprising the steps of: preparing a silicon substrate, including forming a set of STI members defining a set of transistor areas; forming a gate stack comprising a gate dielectric, a gate electrode and a gate cap layer, forming gate sidewall spacers on said gate stack; patterning a layer of resist to expose contact areas on opposite sides of said gate stack; etching into said silicon substrate selective to said STI members and said sidewall spacers in an area bounded by said sidewall spacers and said STI members to form a set of self-aligned contact recess apertures; depositing isolation dielectric in said contact recess apertures; planarizing said isolation dielectric to the level of said gate stack; etching said isolation dielectric, selective to said substrate material and to said sidewall spacers, to form an isolation member in the bottom of said contact recess apertures; filling said contact recess apertures with conductive material; planarizing said conductive material to the level of said gate stack; etching said conductive material selective to said isolation dielectric and said sidewall spacers to leave a set of contact members in said contact recess apertures; and completing said circuit.
Claim 2
Independent Claim
197 words
A method of forming an integrated circuit comprising the steps of: preparing a silicon substrate, including forming a set of STI members defining a set of transistor areas; forming a gate stack comprising a gate dielectric, a gate electrode and a gate cap layer, forming gate sidewall spacers on said gate stack; patterning a layer of resist to expose contact areas on opposite sides of said gate stack; etching into said silicon substrate selective to said STI members and said sidewall spacers in an area bounded by said sidewall spacers and said STI members to form a set of self-aligned contact recess apertures; depositing isolation dielectric in said contact recess apertures; planarizing said isolation dielectric to the level of said gate stack; etching said isolation dielectric, selective to said substrate material and to said sidewall spacers, to form an isolation member in the bottom of said contact recess apertures; filling said contact recess apertures with conductive material; planarizing said conductive material to the level of said gate stack; etching said conductive material selective to said isolation dielectric and said sidewall spacers to leave a set of contact members in said contact recess apertures; and completing said circuit.
Claim 3
Dependent Claim
69 words
A method of forming an integrated circuit according to claim 1 , in which sources and drains are formed in said transistors before the formation of said sidewalls; said step of forming said contact recess apertures exposes junction contact areas on the wall of said contact recess apertures abutting transistor sources and drains under said sidewalls, whereby said conductive material is in electrical contact with said sources and drains.
Claim 4
Dependent Claim
54 words
A method of forming an integrated circuit according to claim 2 , further including a step of patterning photoresist before a step of forming sources and drains to define a set of local interconnect members by etching additional contact recess apertures into at least one STI member disposed between at least two contact members.
Claim 5
Dependent Claim
62 words
A method of forming an integrated circuit according to claim 2 , in which said substrate contains a well of opposite polarity; further including a step of patterning photoresist before a step of forming sources and drains to define a set of well contact members; and protecting said set of local interconnect members during said step of etching said contact recess apertures.
Claim 6
Dependent Claim
42 words
A method of forming an integrated circuit according to claim 2 , in which said STI members and said isolation dielectric are oxide, said gate cap layer is nitride and said conductive material is selected from the group of silicon and Silicon-germanium.
Claim 7
Independent Claim
188 words
A method of forming an integrated circuit comprising the steps of: preparing a silicon substrate, including forming a set of STI members defining a set of transistor areas; forming a gate stack comprising a gate dielectric, a gate electrode and a dielectric gate cap layer; forming gate sidewall spacers on said gate stack; patterning a layer of resist to expose junction areas on opposite sides of said gate stack; etching into said silicon substrate selective to said STI members and said sidewall spacers in an area bounded by said sidewall spacers and said STI to form a set of contact recess apertures; depositing isolation dielectric in said contact recess apertures and planarizing said isolation dielectric using said gate stack as a polish stop; etching said isolation dielectric, selective to said substrate material and to said sidewall spacers, to form an isolation member in the bottom of said contact aperture; filling said contact apertures with conductive material; polishing said conductive material down to said gate cap layer; etching said conductive material selective to said isolation dielectric and said sidewall spacers; removing said gate cap layer; and completing said circuit.
Claim 8
Independent Claim
188 words
A method of forming an integrated circuit comprising the steps of: preparing a silicon substrate, including forming a set of STI members defining a set of transistor areas; forming a gate stack comprising a gate dielectric, a gate electrode and a dielectric gate cap layer; forming gate sidewall spacers on said gate stack; patterning a layer of resist to expose junction areas on opposite sides of said gate stack; etching into said silicon substrate selective to said STI members and said sidewall spacers in an area bounded by said sidewall spacers and said STI to form a set of contact recess apertures; depositing isolation dielectric in said contact recess apertures and planarizing said isolation dielectric using said gate stack as a polish stop; etching said isolation dielectric, selective to said substrate material and to said sidewall spacers, to form an isolation member in the bottom of said contact aperture; filling said contact apertures with conductive material; polishing said conductive material down to said gate cap layer; etching said conductive material selective to said isolation dielectric and said sidewall spacers; removing said gate cap layer; and completing said circuit.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2005-06-10 | 2005-12-10 | 2006-06-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2009-06-10 | 2009-12-10 | 2010-06-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2013-06-10 | 2013-12-10 | 2014-06-11 | $7700.00 | Window Closed / Lapsed |