Vertical power MOSFET structure having reduced cell area

Claim 1

A method for manufacturing a vertical power field effect transistor comprising the steps of: forming a first insulating film covering on a principal surface of a semiconductor substrate of a first conductivity type; forming a conducting layer on said first insulating film; forming a first interlayer insulating film covering said conducting layer; patterning a stacked structure formed of said first insulating film, said conducting layer and said first interlayer film so as to form a patterned stacked structure and to expose a portion of said substrate uncovered by said patterned stacked structure, said first insulating film of said patterned stacked structure forming a gate insulator film, said conducting layer of said patterned stacked structure forming a gate electrode; introducing an impurity of a second conductivity type opposite to said first conductivity type into said exposed portion of said substrate by using the patterned stacked structure as a mask, so that a base region extending under said gate electrode is formed; introducing an impurity of said first conductivity type by using the patterned stacked structure as a mask, so that a source region smaller than said base region is formed in said base region and extends under said gate electrode; forming a second interlayer insulating film on said principal surface of said substrate; anisotropically etching said second interlayer insulating film so as to form a side insulating film which covers only each side surface of the gate electrode and the gate insulator film; anisotropically etching said substrate by using the side insulating films as a mask, so as to form, in a self-alignment manner, a groove which extends downward from said principal surface of said silicon substrate to pass through said source region and to reach said base region; filling said groove with a metal film; forming a metal film evaporated on the entire resulting surface; and patterning said metal film to form a source electrode which is electrically connected to said metal filled in said groove.

Claim 2

A method for manufacturing a vertical power field effect transistor comprising the steps of: forming a first insulating film covering on a principal surface of a semiconductor substrate of a first conductivity type; forming a conducting layer on said first insulating film; forming a first interlayer insulating film covering said conducting layer; patterning a stacked structure formed of said first insulating film, said conducting layer and said first interlayer film so as to form a patterned stacked structure and to expose a portion of said substrate uncovered by said patterned stacked structure, said first insulating film of said patterned stacked structure forming a gate insulator film, said conducting layer of said patterned stacked structure forming a gate electrode; introducing an impurity of a second conductivity type opposite to said first conductivity type into said exposed portion of said substrate by using the patterned stacked structure as a mask, so that a base region extending under said gate electrode is formed; introducing an impurity of said first conductivity type by using the patterned stacked structure as a mask, so that a source region smaller than said base region is formed in said base region and extends under said gate electrode; forming a second interlayer insulating film on said principal surface of said substrate; anisotropically etching said second interlayer insulating film so as to form a side insulating film which covers only each side surface of the gate electrode and the gate insulator film; anisotropically etching said substrate by using the side insulating films as a mask, so as to form, in a self-alignment manner, a groove which extends downward from said principal surface of said silicon substrate to pass through said source region and to reach said base region; filling said groove with a metal film; forming a metal film evaporated on the entire resulting surface; and patterning said metal film to form a source electrode which is electrically connected to said metal filled in said groove.

Claim 3

A method for manufacturing a vertical power field effect transistor comprising the steps of: forming a drain layer of a first conductivity type at an upper surface of a semiconductor substrate of said first conductivity type; forming at an upper surface of said drain layer a base layer of a second conductivity type opposite to said first conductivity type; forming a source layer of said first conductivity type at an upper surface of said base layer; forming in said substrate a plurality of vertical trenches separated from each other and passing through said source layer and said base layer to reach said drain layer; forming a gate oxide film covering said principal surface of said substrate and an inner surface of said trenches; forming a gate electrode layer covering said gate oxide film at said principal surface of said substrate and within said trenches; forming a first interlayer insulating film on said gate electrode layer at said principal surface of said substrate and within said trenches; patterning a stacked structure composed of said gate oxide film, said gate electrode layer and said first interlayer insulating film so as to form a pattern stacked structure and to expose a portion of said substrate, said gate electrode layer of said patterned stacked structure forming a gate electrode; forming a second interlayer insulating film on said principal surface of said substrate; anisotropically etching said second interlayer insulating film so as to form a side insulating film which covers only each side surface of the gate electrode, the gate insulator film and the remaining first interlayer insulating film; anisotropically etching said substrate by using the side insulating films as a mask, so as to form, in a self-alignment manner, a groove which extends downward from said principal surface of said substrate to pass through said source region and to reach said base region; filling said groove with a metal film; forming a metal film evaporated on the entire resulting surface; and patterning said metal film to form a source electrode which is electrically connected to said metal filled in said groove.

Claim 4

A method for manufacturing a vertical power field effect transistor comprising the steps of: forming a drain layer of a first conductivity type at an upper surface of a semiconductor substrate of said first conductivity type; forming at an upper surface of said drain layer a base layer of a second conductivity type opposite to said first conductivity type; forming a source layer of said first conductivity type at an upper surface of said base layer; forming in said substrate a plurality of vertical trenches separated from each other and passing through said source layer and said base layer to reach said drain layer; forming a gate oxide film covering said principal surface of said substrate and an inner surface of said trenches; forming a gate electrode layer covering said gate oxide film at said principal surface of said substrate and within said trenches; forming a first interlayer insulating film on said gate electrode layer at said principal surface of said substrate and within said trenches; patterning a stacked structure composed of said gate oxide film, said gate electrode layer and said first interlayer insulating film so as to form a pattern stacked structure and to expose a portion of said substrate, said gate electrode layer of said patterned stacked structure forming a gate electrode; forming a second interlayer insulating film on said principal surface of said substrate; anisotropically etching said second interlayer insulating film so as to form a side insulating film which covers only each side surface of the gate electrode, the gate insulator film and the remaining first interlayer insulating film; anisotropically etching said substrate by using the side insulating films as a mask, so as to form, in a self-alignment manner, a groove which extends downward from said principal surface of said substrate to pass through said source region and to reach said base region; filling said groove with a metal film; forming a metal film evaporated on the entire resulting surface; and patterning said metal film to form a source electrode which is electrically connected to said metal filled in said groove.