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US6339544B1 Expired / Lapsed US ⏱️ 0.0 years remaining

Method to enhance performance of thermal resistor device

Assignee: Ovonyx Memory Technology LLC
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Filing: 2000-09-29
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Granted: 2002-01-15
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Expires: 2020-09-29
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Abstract

Abstract An apparatus including a contact on a substrate, a dielectric material overlying the contact, a phase change element overlying the dielectric material on a substrate, and a heater element disposed in the dielectric material and coupled to the contact and the phase change element, wherein a portion of the dielectric material comprises a thermal conductivity less than silicon dioxide. A method including introducing over a contact formed on a substrate, a dielectric material, a portion of which comprises a thermal conductivity less than silicon dioxide, introducing a heater element through the dielectric material to the contact, and introducing a phase change material over the dielectric material and the heater element.

Inventors

  • 👤 Chien Chiang
  • 👤 Guy C. Wicker

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-09 10:55
CPC Classifications
G; G11; G11C; G11C13/00; G11C13/0002; G11C13/0004; H; H10; H10B; H10B63/00; H10B63/20; H10N; H10N70/00; H10N70/011; H10N70/20; H10N70/231; H10N70/801; H10N70/821; H10N70/826; H10N70/841; H10N70/8413; H10N70/881; H10N70/882; H10N70/8828

Claims Analysis

Total Claims: 25
Claim 1
Independent Claim 59 words
An apparatus comprising: a contact on a substrate; a dielectric material overlying the contact; a phase change element overlying the dielectric material on a substrate; and a heater element disposed in the dielectric material and coupled to the contact and the phase change element, wherein a portion of the dielectric material comprises a thermal conductivity less than silicon dioxide.
Claim 2
Independent Claim 59 words
An apparatus comprising: a contact on a substrate; a dielectric material overlying the contact; a phase change element overlying the dielectric material on a substrate; and a heater element disposed in the dielectric material and coupled to the contact and the phase change element, wherein a portion of the dielectric material comprises a thermal conductivity less than silicon dioxide.
Claim 3
Dependent Claim 18 words
The apparatus of claim 1 , wherein the portion of the dielectric material is adjacent the heater element.
Claim 4
Dependent Claim 45 words
The apparatus of claim 2 , wherein the heater element has a first portion and a second portion and the second portion is disposed adjacent the phase change element, wherein the portion of the dielectric material is adjacent the second portion of the heater element.
Claim 5
Dependent Claim 98 words
The apparatus of claim 2 , wherein the heater element comprises a body surrounded in all directions by the dielectric material, the body defining, by a cross-section through the body, volumes of dielectric material: a first volume adjacent a left side of the body; a second volume adjacent a right side of the body; a third volume adjacent a front side of the body; and a fourth volume adjacent a back side of the body, wherein the portion of the dielectric material comprises one of the first volume, the second volume, the third volume, and the fourth volume.
Claim 6
Dependent Claim 45 words
The apparatus of claim 4 , wherein the heater element has a first portion and a second portion and the second portion is disposed adjacent the phase change element, wherein the portion of the dielectric material is adjacent the second portion of the heater element.
Claim 7
Dependent Claim 31 words
The apparatus of claim 5 , wherein the portion of the dielectric material comprises more than one of the first volume, the second volume, the third volume, and the fourth volume.
Claim 8
Dependent Claim 35 words
The apparatus of claim 1 , wherein the dimensions of the phase change element define an area over the dielectric material, and the portion of the dielectric material is within a volume comprising the area.
Claim 9
Dependent Claim 16 words
The apparatus of claim 7 , wherein the portion of dielectric material comprises the entire area.
Claim 10
Dependent Claim 19 words
The apparatus of claim 1 , wherein the thermal conductivity is three to 10 times less than silicon dioxide.
Claim 11
Dependent Claim 12 words
The apparatus of claim 1 , wherein the dielectric material comprises Xerogel.
Claim 12
Independent Claim 59 words
An apparatus comprising: a contact on a substrate; a dielectric material overlying the contact; a chalcogenide memory element overlying the dielectric material on a substrate; and a heater element disposed in the dielectric material and coupled to the contact and the chalcogenide memory element, wherein a portion of the dielectric material comprises a thermal conductivity less than silicon dioxide.
Claim 13
Independent Claim 59 words
An apparatus comprising: a contact on a substrate; a dielectric material overlying the contact; a chalcogenide memory element overlying the dielectric material on a substrate; and a heater element disposed in the dielectric material and coupled to the contact and the chalcogenide memory element, wherein a portion of the dielectric material comprises a thermal conductivity less than silicon dioxide.
Claim 14
Dependent Claim 18 words
The apparatus of claim 11 , wherein the portion of the dielectric material is adjacent the heater element.
Claim 15
Dependent Claim 98 words
The apparatus of claim 11 , wherein the heater element comprises a body surrounded in all directions by the dielectric material, the body defining, by a cross-section through the body, volumes of dielectric material: a first volume adjacent a left side of the body; a second volume adjacent a right side of the body; a third volume adjacent a front side of the body; and a fourth volume adjacent a back side of the body, wherein the portion of the dielectric material comprises one of the first volume, the second volume, the third volume, and the fourth volume.
Claim 16
Dependent Claim 45 words
The apparatus of claim 13 , wherein the heater element has a first portion and a second portion and the second portion is disposed adjacent the phase change element, wherein the portion of the dielectric material is adjacent the second portion of the heater element.
Claim 17
Dependent Claim 31 words
The apparatus of claim 14 , wherein the portion of the dielectric material comprises more than one of the first volume, the second volume, the third volume, and the fourth volume.
Claim 18
Dependent Claim 27 words
The apparatus of claim 11 , wherein the portion of the dielectric material has a thermal conductivity that is three to 10 times less than silicon dioxide.
Claim 19
Dependent Claim 15 words
The apparatus of claim 11 , wherein the portion of the dielectric material comprises Xerogel.
Claim 20
Independent Claim 51 words
A method comprising: introducing over a contact formed on a substrate, a dielectric material, a portion of which comprises a thermal conductivity less than silicon dioxide; introducing a heater element through the dielectric material to the contact; and introducing a phase change material over the dielectric material and the heater element.
Claim 21
Independent Claim 51 words
A method comprising: introducing over a contact formed on a substrate, a dielectric material, a portion of which comprises a thermal conductivity less than silicon dioxide; introducing a heater element through the dielectric material to the contact; and introducing a phase change material over the dielectric material and the heater element.
Claim 22
Dependent Claim 28 words
The method of claim 18 , wherein introducing the dielectric material comprises introducing the portion which comprises the thermal conductivity less than silicon dioxide adjacent the heater element.
Claim 23
Dependent Claim 109 words
The method of claim 18 , wherein the heater element comprises a body and introducing the dielectric comprises surrounding the body of the heater element in all directions by the dielectric material, the body defining, by a cross-section through the body, volumes of dielectric material: a first volume adjacent a left side of the body; a second volume adjacent a right side of the body; a third volume adjacent a front side of the body; and a fourth volume adjacent a back side of the body, and the portion of the dielectric material comprises one of the first volume, the second volume, the third volume, and the fourth volume.
Claim 24
Dependent Claim 54 words
The method of claim 20 , wherein the heater element has a first portion and a second portion and the second portion is disposed adjacent the phase change element and introducing the dielectric material comprises introducing the portion with the thermal conductivity less than silicon dioxide adjacent the second portion of the heater element.
Claim 25
Dependent Claim 41 words
The method of claim 21 , wherein introducing the dielectric material comprises introducing the portion of the thermal conductivity less than silicon dioxide within more than one of the first volume, the second volume, the third volume, and the fourth volume.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2005-01-14 2005-07-16 2006-01-15 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2009-01-14 2009-07-16 2010-01-15 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2013-01-14 2013-07-16 2014-01-15 $7700.00 Window Closed / Lapsed

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