US6332835B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Polishing apparatus with transfer arm for moving polished object without drying it
Assignee: Canon Inc
•
Filing: 1998-11-18
•
Granted: 2001-12-25
•
Expires: 2018-11-18
Abstract
Abstract A polishing apparatus that can effectively and efficiently remove potassium and other alkaline metals comprises integrally a polishing unit for polishing an object by means of a polishing agent and a cleaning unit for cleaning the polished object. The polishing unit and the cleaning unit have means for isolating the internal atmosphere from the external atmosphere and the cleaning unit has a means for cleaning the polished object by bringing hot pure water or steam of pure water into contact with the polished object. With a cleaning method hot pure water is brought into contact with the polished object without drying it after having been polished by such a polishing apparatus.
Inventors
- 👤 Matsuomi Nishimura
- 👤 Mikichi Ban
- 👤 Kazuo Takahashi
- 👤 Osamu Ikeda
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 18:43
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0402; H10P72/0406; B; B08; B08B; B08B3/00; B08B3/04; B24; B24B; B24B37/00; B24B37/04; B24B57/00; B24B57/02; B08B2203/00; B08B2203/005; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49124; Y10T29/49155; Y10T29/49165
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
124 words
A polishing unit for polishing an object to produce a polished object by means of a polishing agent containing potassium, a cleaning unit for cleaning the polished object, and a transfer arm for moving the polished object from said polishing unit into said cleaning unit, and isolating means for isolating an internal atmosphere of said polishing unit, said cleaning unit and said transfer arm from an external atmosphere, wherein: said polishing unit has means for supplying the polishing agent containing potassium; said cleaning unit has means for bringing hot pure water or steam of pure water heated to or above 80° C. into contact with the polished object; and said transfer arm is operable to move the polished object without drying the polished object.
Claim 2
Dependent Claim
124 words
A polishing unit for polishing an object to produce a polished object by means of a polishing agent containing potassium, a cleaning unit for cleaning the polished object, and a transfer arm for moving the polished object from said polishing unit into said cleaning unit, and isolating means for isolating an internal atmosphere of said polishing unit, said cleaning unit and said transfer arm from an external atmosphere, wherein: said polishing unit has means for supplying the polishing agent containing potassium; said cleaning unit has means for bringing hot pure water or steam of pure water heated to or above 80° C. into contact with the polished object; and said transfer arm is operable to move the polished object without drying the polished object.
Claim 3
Dependent Claim
27 words
A polishing apparatus according to claim 1 , wherein the cleaning unit additionally has means for drying the polished object after cleaning it with hot pure water.
Claim 4
Dependent Claim
38 words
A polishing apparatus according to claim 2 , wherein the polishing unit and the cleaning unit are provided with an exhaust port and have means for maintaining the internal atmosphere under negative pressure relative to the external atmosphere.
Claim 5
Dependent Claim
30 words
A polishing apparatus according to claim 1 , wherein the cleaning means of the cleaning unit has a heating means adapted to heat pure water to or above 80° C.
Claim 6
Dependent Claim
37 words
A polishing apparatus according to claim 1 , wherein the cleaning unit has means for applying ultrasonic waves with a frequency between 0.8 MHz and 10 MHz to the hot pure water used by the cleaning means.
Claim 7
Dependent Claim
27 words
A polishing apparatus according to claim 1 , wherein said means for bringing the hot pure water is operable to bring hot pure water that contains ozone.
Claim 8
Dependent Claim
35 words
A polishing apparatus according to claim 1 , wherein the cleaning unit has a cleaning member adapted to be brought into contact with the polished object to physically remove any foreign objects adhering to it.
Claim 9
Dependent Claim
21 words
A polishing apparatus according to claim 1 , wherein the hot pure water is supplied from outside of said polishing apparatus.
Claim 10
Dependent Claim
34 words
A polishing apparatus according to claim 1 , wherein said means for bringing hot pure water is structured to cooperate with a piping system of a plant in which said polishing apparatus is installed.
References Cited (Backward Citations)
US5239410A
Cited
US5404046A
Cited
US5614439A
Cited
US5233224A
Cited
US5466961A
Cited
US5598037A
Cited
US5658183A
Cited
US5488507A
Cited
US5550393A
Cited
US5653623A
Cited
US5655954A
Cited
US5679059A
Cited
US5933204A
Cited
US6050884A
Cited
US5904611A
Cited
US6012966A
Cited
US5931723A
Cited
US5755614A
Cited
US5888124A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-12-24 | 2005-06-25 | 2005-12-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-12-24 | 2009-06-25 | 2009-12-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-12-24 | 2013-06-25 | 2013-12-25 | $7700.00 | Window Closed / Lapsed |