US5755614A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Rinse water recycling in CMP apparatus
Assignee: Integrated Process Equipment Corp
•
Filing: 1997-03-17
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Granted: 1998-05-26
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Expires: 2017-03-17
Abstract
Abstract Recycled slurry is continuously blended with the slurry in use to provide a consistent polishing rate while consuming or discarding a small fraction of the slurry flowing continuously across the polishing pad. The slurry is recovered in a catch ring and fed to a recycle loop to blend the recovered slurry with fresh slurry, rejuvenating chemicals, or water; test the blend; filter the blend; and return the blend to the polishing pad. The volume returned to the pad slightly exceeds the volume recovered, causing the catch ring to overflow. Rinse water is recycled in the same fashion to keep the polishing pad wet between polishing cycles.\!
Inventors
- 👤 John A. Adams
- 👤 Gerald A. Krulik
- 👤 C. Randall Harwood
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 01:50
CPC Classifications
B; B24; B24B; B24B57/00; B24B57/02; H; H10; H10P; H10P95/00; B24B37/00; B24B37/04; B24B55/00; B24B55/02; B24B55/03; Y; Y10; Y10S; Y10S134/00; Y10S134/902
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
73 words
A method for recycling rinse water in a CMP apparatus, the rinse water comprising substantially less than 1% abrasive solids by weight, in which the rinse water is applied to a polishing pad, said method comprising the steps of: at least partially surrounding the pad with a catch ring to collect the rinse water that flows off the pad; withdrawing rinse water from the ring; and returning the rinse water to the pad.
Claim 2
Independent Claim
73 words
A method for recycling rinse water in a CMP apparatus, the rinse water comprising substantially less than 1% abrasive solids by weight, in which the rinse water is applied to a polishing pad, said method comprising the steps of: at least partially surrounding the pad with a catch ring to collect the rinse water that flows off the pad; withdrawing rinse water from the ring; and returning the rinse water to the pad.
Claim 3
Dependent Claim
24 words
The method as set forth in claim 1 wherein said withdrawing step withdraws less than all the rinse water that flows off the pad.
Claim 4
Dependent Claim
35 words
The method as set forth in claim 1 and further including the step of: conditioning the pad while the rinse water flows over the pad; and filtering the rinse water prior to said returning step.
References Cited (Backward Citations)
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US5545076A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-05-25 | 2001-11-24 | 2002-05-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-05-25 | 2005-11-24 | 2006-05-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-05-25 | 2009-11-24 | 2010-05-26 | $7700.00 | Window Closed / Lapsed |