US6012966A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Precision polishing apparatus with detecting means
Assignee: Canon Inc
•
Filing: 1997-05-05
•
Granted: 2000-01-11
•
Expires: 2017-05-05
Abstract
Abstract In order to reclaim defective articles, wafers carried in from a loading unit are transported to a wafer stocker unit, a polishing unit, a pre-rinsing unit, a rinsing unit, a spin dehydrating unit and a drying unit in the named order, and in a defect inspecting device, defective articles are sorted and the remainder are taken out as products out of an unloading unit. The defective articles are classified in a discriminating device in conformity with the kinds of the defects thereof, and are returned to the polishing unit, the rinsing unit or the drying unit through a return duct.
Inventors
- 👤 Mikichi Ban
- 👤 Matsuomi Nishimura
- 👤 Kazuo Takahashi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 12:53
CPC Classifications
H; H10; H10P; H10P50/00; H10P72/00; H10P72/04; H10P72/0451; H10P72/0468; H10P72/0472; B; B24; B24B; B24B37/00; B24B37/04; B24B49/00; H10P72/06; H10P72/0611; H10P72/30; H10P72/33; H10P72/3304
Claims Analysis
Total Claims: 67
Claim 1
Independent Claim
82 words
A precision polishing apparatus comprising a polishing unit having polishing means for polishing a workpiece, a removing unit for removing a stain on a polished surface of the workpiece transported from said polishing unit, detecting means for detecting a state of the polished surface of the workpiece operated upon by said removing unit, and selectively returning means for selectively returning the workpiece to said polishing unit or said removing unit in conformity with the result of the detection by said detecting means.
Claim 2
Dependent Claim
82 words
A precision polishing apparatus comprising a polishing unit having polishing means for polishing a workpiece, a removing unit for removing a stain on a polished surface of the workpiece transported from said polishing unit, detecting means for detecting a state of the polished surface of the workpiece operated upon by said removing unit, and selectively returning means for selectively returning the workpiece to said polishing unit or said removing unit in conformity with the result of the detection by said detecting means.
Claim 3
Dependent Claim
38 words
A precision polishing apparatus according to claim 1, wherein the selectively returning means returns the workpiece to one of said polishing unit and said removing unit in conformity with the result of the detection by said detecting means.
Claim 4
Dependent Claim
30 words
A precision polishing apparatus according to claim 1, wherein the pressure of the atmosphere in said polishing unit is lower than the pressure of the atmosphere in said removing unit.
Claim 5
Dependent Claim
44 words
A precision polishing apparatus according to claim 1, wherein said removing unit is provided with at least one of scrub removing means, removing means having a nozzle for injecting a rinsing liquid and removing means having a liquid tank containing the rinsing liquid therein.
Claim 6
Dependent Claim
28 words
A precision polishing apparatus according to claim 1, wherein said state comprises at least one of a flaw and a stain of the polished surface of said workpiece.
Claim 7
Dependent Claim
93 words
A precision polishing apparatus comprising a polishing unit having polishing means for polishing a workpiece, a removing unit for removing a stain on a polished surface of the workpiece transported from said polishing unit, a drying unit for drying the workpiece transported from said removing unit, detecting means for detecting a state of the polished surface of the workpiece dried by said drying unit, and selectively returning means for selectively returning the workpiece to said polishing unit or said removing unit in conformity with the result of the detection by said detecting means.
Claim 8
Dependent Claim
93 words
A precision polishing apparatus comprising a polishing unit having polishing means for polishing a workpiece, a removing unit for removing a stain on a polished surface of the workpiece transported from said polishing unit, a drying unit for drying the workpiece transported from said removing unit, detecting means for detecting a state of the polished surface of the workpiece dried by said drying unit, and selectively returning means for selectively returning the workpiece to said polishing unit or said removing unit in conformity with the result of the detection by said detecting means.
Claim 9
Dependent Claim
41 words
A precision polishing apparatus according to claim 6, wherein the selectively returning means returns the workpiece to one of said polishing unit, said removing unit and said drying unit in conformity with the result of the detection by said detecting means.
Claim 10
Dependent Claim
34 words
A precision polishing apparatus according to claim 6, wherein the pressure of the atmosphere in said polishing unit is lower than the pressure of the atmosphere in said removing unit or said drying unit.
Claim 11
Dependent Claim
44 words
A precision polishing apparatus according to claim 6, wherein said removing unit is provided with at least one of scrub removing means, removing means having a nozzle for injecting a rinsing liquid and removing means having a liquid tank containing the rinsing liquid therein.
Claim 12
Dependent Claim
28 words
A precision polishing apparatus according to claim 6, wherein said state comprises at least one of a flaw and a stain of the polished surface of said workpiece.
Claim 13
Dependent Claim
109 words
A precision polishing apparatus comprising a first unit to load and to stock a workpiece, a second unit provided with polishing means for polishing the workpiece transported from said first unit, a third unit for removing a stain on a polished surface of the workpiece transported from said second unit, a fourth unit for drying the workpiece transported from said third unit, detecting means for detecting a state of the polished surface of the workpiece transported from said fourth unit, and selectively returning means for selectively returning said workpiece to one of said first to fourth units in conformity with the result of the detection by said detecting means.
Claim 14
Dependent Claim
109 words
A precision polishing apparatus comprising a first unit to load and to stock a workpiece, a second unit provided with polishing means for polishing the workpiece transported from said first unit, a third unit for removing a stain on a polished surface of the workpiece transported from said second unit, a fourth unit for drying the workpiece transported from said third unit, detecting means for detecting a state of the polished surface of the workpiece transported from said fourth unit, and selectively returning means for selectively returning said workpiece to one of said first to fourth units in conformity with the result of the detection by said detecting means.
Claim 15
Dependent Claim
51 words
A precision polishing apparatus according to claim 11, which further comprises sealing means for individually sealing each of said first to fourth units, and atmosphere pressure control means for controlling the atmosphere pressure in each of said units to a value lower than the atmosphere pressure outside said precision polishing apparatus.
Claim 16
Dependent Claim
64 words
A precision polishing apparatus according to claim 12, which further comprises intermediate detecting means provided between said second unit and said third unit for detecting a state of the polished surface of the workpiece transported from said second unit, and intermediate returning means for returning said workpiece to said second unit in conformity with the result of the detection by said intermediate detecting means.
Claim 17
Dependent Claim
56 words
A precision polishing apparatus according to claim 12, which further comprises intermediate detecting means provided between said third unit and said fourth unit for detecting a state of the polished surface of the workpiece transported from said third unit, and intermediate returning means for selectively returning said workpiece to said second unit or said third unit.
Claim 18
Dependent Claim
64 words
A precision polishing apparatus according to claim 11, which further comprises intermediate detecting means provided between said second unit and said third unit for detecting a state of the polished surface of the workpiece transported from said second unit, and intermediate returning means for returning said workpiece to said second unit in conformity with the result of the detection by said intermediate detecting means.
Claim 19
Dependent Claim
56 words
A precision polishing apparatus according to claim 15, which further comprises intermediate detecting means provided between said third unit and said fourth unit for detecting a state of the polished surface of the workpiece transported from said third unit, and intermediate returning means for selectively returning said workpiece to said second unit or said third unit.
Claim 20
Dependent Claim
56 words
A precision polishing apparatus according to claim 11, which further comprises intermediate detecting means provided between said third unit and said fourth unit for detecting a state of the polished surface of the workpiece transported from said third unit, and intermediate returning means for selectively returning said workpiece to said second unit or said third unit.
Claim 21
Dependent Claim
28 words
A precision polishing apparatus according to claim 11, wherein said state comprises at least one of a flaw and a stain of the polished surface of said workpiece.
Claim 22
Dependent Claim
82 words
A precision polishing apparatus comprising a polishing unit having polishing means for polishing a workpiece, a removing unit for removing a stain on a polished surface of the workpiece transported from said polishing unit, detecting means for detecting a defect of the polished surface of the workpiece operated upon by said removing unit, and selectively returning means for selectively returning the workpiece to said polishing unit or said removing unit in conformity with the result of the detection by said detecting means.
Claim 23
Dependent Claim
82 words
A precision polishing apparatus comprising a polishing unit having polishing means for polishing a workpiece, a removing unit for removing a stain on a polished surface of the workpiece transported from said polishing unit, detecting means for detecting a defect of the polished surface of the workpiece operated upon by said removing unit, and selectively returning means for selectively returning the workpiece to said polishing unit or said removing unit in conformity with the result of the detection by said detecting means.
Claim 24
Dependent Claim
38 words
A precision polishing apparatus according to claim 19, wherein the selectively returning means returns the workpiece to one of said polishing unit and said removing unit in conformity with the result of the detection by said detecting means.
Claim 25
Dependent Claim
30 words
A precision polishing apparatus according to claim 19, wherein the pressure of the atmosphere in said polishing unit is lower than the pressure of the atmosphere in said removing unit.
Claim 26
Dependent Claim
44 words
A precision polishing apparatus according to claim 19, wherein said removing unit is provided with at least one of scrub removing means, removing means having a nozzle for injecting a rinsing liquid and removing means having a liquid tank containing the rinsing liquid therein.
Claim 27
Dependent Claim
28 words
A precision polishing apparatus according to claim 19, wherein said defect comprises at least one of a flaw and a stain of the polished surface of said workpiece.
Claim 28
Dependent Claim
93 words
A precision polishing apparatus comprising a polishing unit having polishing means for polishing a workpiece, a removing unit for removing a stain on a polished surface of the workpiece transported from said polishing unit, a drying unit for drying the workpiece transported from said removing unit, detecting means for detecting a defect of the polished surface of the workpiece dried by said drying unit, and selectively returning means for selectively returning the workpiece to said polishing unit or said removing unit in conformity with the result of the detection by said detecting means.
Claim 29
Dependent Claim
93 words
A precision polishing apparatus comprising a polishing unit having polishing means for polishing a workpiece, a removing unit for removing a stain on a polished surface of the workpiece transported from said polishing unit, a drying unit for drying the workpiece transported from said removing unit, detecting means for detecting a defect of the polished surface of the workpiece dried by said drying unit, and selectively returning means for selectively returning the workpiece to said polishing unit or said removing unit in conformity with the result of the detection by said detecting means.
Claim 30
Dependent Claim
41 words
A precision polishing apparatus according to claim 24, wherein the selectively returning means returns the workpiece to one of said polishing unit, said removing unit and said drying unit in conformity with the result of the detection by said detecting means.
Claim 31
Dependent Claim
34 words
A precision polishing apparatus according to claim 24, wherein the pressure of the atmosphere in said polishing unit is lower than the pressure of the atmosphere in said removing unit or said drying unit.
Claim 32
Dependent Claim
44 words
A precision polishing apparatus according to claim 24, wherein said removing unit is provided with at least one of scrub removing means, removing means having a nozzle for injecting a rinsing liquid and removing means having a liquid tank containing the rinsing liquid therein.
Claim 33
Dependent Claim
28 words
A precision polishing apparatus according to claim 24, wherein said defect comprises at least one of a flaw and a stain of the polished surface of said workpiece.
Claim 34
Dependent Claim
109 words
A precision polishing apparatus comprising a first unit to load and to stock a workpiece, a second unit provided with polishing means for polishing the workpiece transported from said first unit, a third unit for removing a stain on a polished surface of the workpiece transported from said second unit, a fourth unit for drying the workpiece transported from said third unit, detecting means for detecting a defect of the polished surface of the workpiece transported from said fourth unit, and selectively returning means for selectively returning said workpiece to one of said first to fourth units in conformity with the result of the detection by said detecting means.
Claim 35
Dependent Claim
109 words
A precision polishing apparatus comprising a first unit to load and to stock a workpiece, a second unit provided with polishing means for polishing the workpiece transported from said first unit, a third unit for removing a stain on a polished surface of the workpiece transported from said second unit, a fourth unit for drying the workpiece transported from said third unit, detecting means for detecting a defect of the polished surface of the workpiece transported from said fourth unit, and selectively returning means for selectively returning said workpiece to one of said first to fourth units in conformity with the result of the detection by said detecting means.
Claim 36
Dependent Claim
51 words
A precision polishing apparatus according to claim 29, which further comprises sealing means for individually sealing each of said first to fourth units, and atmosphere pressure control means for controlling the atmosphere pressure in each of said units to a value lower than the atmosphere pressure outside said precision polishing apparatus.
Claim 37
Dependent Claim
64 words
A precision polishing apparatus according to claim 30, which further comprises intermediate detecting means provided between said second unit and said third unit for detecting a defect of the polished surface of the workpiece transported from said second unit, and intermediate returning means for returning said workpiece to said second unit in conformity with the result of the detection by said intermediate detecting means.
Claim 38
Dependent Claim
56 words
A precision polishing apparatus according to claim 30, which further comprises intermediate detecting means provided between said third unit and said fourth unit for detecting a defect of the polished surface of the workpiece transported from said third unit, and intermediate returning means for selectively returning said workpiece to said second unit or said third unit.
Claim 39
Dependent Claim
64 words
A precision polishing apparatus according to claim 29, which further comprises intermediate detecting means provided between said second unit and said third unit for detecting a defect of the polished surface of the workpiece transported from said second unit, and intermediate returning means for returning said workpiece to said second unit in conformity with the result of the detection by said intermediate detecting means.
Claim 40
Dependent Claim
56 words
A precision polishing apparatus according to claim 33, which further comprises intermediate detecting means provided between said third unit and said fourth unit for detecting a defect of the polished surface of the workpiece transported from said third unit, and intermediate returning means for selectively returning said workpiece to said second unit or said third unit.
Claim 41
Dependent Claim
56 words
A precision polishing apparatus according to claim 29, which further comprises intermediate detecting means provided between said third unit and said fourth unit for detecting a defect of the polished surface of the workpiece transported from said third unit, and intermediate returning means for selectively returning said workpiece to said second unit or said third unit.
Claim 42
Dependent Claim
28 words
A precision polishing apparatus according to claim 29, wherein said defect comprises at least one of a flaw and a stain of the polished surface of said workpiece.
Claim 43
Dependent Claim
77 words
A precision polishing apparatus comprising a polishing unit having polishing means for polishing a workpiece, a removing unit for removing a stain on a polished surface of the workpiece transported from the polishing unit, detecting means for detecting a state of the polished surface of the workpiece operated upon by the removing unit, and a returning means for returning the workpiece to the removing unit in conformity with the result of the detection by the detecting means.
Claim 44
Dependent Claim
77 words
A precision polishing apparatus comprising a polishing unit having polishing means for polishing a workpiece, a removing unit for removing a stain on a polished surface of the workpiece transported from the polishing unit, detecting means for detecting a state of the polished surface of the workpiece operated upon by the removing unit, and a returning means for returning the workpiece to the removing unit in conformity with the result of the detection by the detecting means.
Claim 45
Dependent Claim
36 words
A precision polishing apparatus according to claim 37, wherein the returning means selectively returns the workpiece to the polishing unit or the removing unit in conformity with the result of the detection by the detecting means.
Claim 46
Dependent Claim
37 words
A precision polishing apparatus according to claim 37, wherein the polishing unit returns the workpiece to one of the polishing unit and the removing unit in conformity with the result of the detection by the detecting means.
Claim 47
Dependent Claim
30 words
A precision polishing apparatus according to claim 37, wherein the pressure of the atmosphere in the polishing unit is lower than the pressure of the atmosphere in the removing unit.
Claim 48
Dependent Claim
44 words
A precision polishing apparatus according to claim 37, wherein the removing unit is provided with at least one of scrub removing means, removing means having a nozzle for injecting a rinsing liquid and removing means having a liquid tank containing the rinsing liquid therein.
Claim 49
Dependent Claim
23 words
A precision polishing apparatus according to claim 37, which further comprises a drying unit for drying the workpiece transported from the removing unit.
Claim 50
Dependent Claim
40 words
A precision polishing apparatus according to claim 42, wherein the returning means returns the workpiece to one of the polishing unit, the removing unit and the drying unit in conformity with the result of the detection by the detecting means.
Claim 51
Dependent Claim
34 words
A precision polishing apparatus according to claim 42, wherein the pressure of the atmosphere in the polishing unit is lower than the pressure of the atmosphere in the removing unit or the drying unit.
Claim 52
Dependent Claim
28 words
A precision polishing apparatus according to claim 42, wherein the state comprises at least one of a flaw and a stain of the polished surface of the workpiece.
Claim 53
Dependent Claim
22 words
A precision polishing apparatus according to claim 37, which further comprises a loading and stocking unit for loading and stocking the workpiece.
Claim 54
Dependent Claim
23 words
A precision polishing apparatus according to claim 46, which further comprises a drying unit for drying the workpiece transported from the removing unit.
Claim 55
Dependent Claim
63 words
A precision polishing apparatus according to claim 47, wherein the returning means returns the workpiece to one of the loading and stocking unit as a first unit or the polishing unit as a second unit or the removing unit as a third unit or the drying unit as a fourth unit in conformity with the result of the detection by the detecting means.
Claim 56
Dependent Claim
51 words
A precision polishing apparatus according to claim 48, which further comprises sealing means for individually sealing each of the first to fourth units, and atmosphere pressure control means for controlling the atmosphere pressure in each of the units to a value lower than the atmosphere pressure outside the precision polishing apparatus.
Claim 57
Dependent Claim
64 words
A precision polishing apparatus according to claim 49, which further comprises intermediate detecting means provided between the second unit and the third unit for detecting a state of the polished surface of the workpiece transported from the second unit, and intermediate returning means for returning the workpiece to the second unit in conformity with the result of the detection by the intermediate detecting means.
Claim 58
Dependent Claim
56 words
A precision polishing apparatus according to claim 49, which further comprises intermediate detecting means provided between the third unit and the fourth unit for detecting a state of the polished surface of the workpiece transported from the third unit, and intermediate returning means for selectively returning the workpiece to the second unit or the third unit.
Claim 59
Dependent Claim
64 words
A precision polishing apparatus according to claim 48, which further comprises intermediate detecting means provided between the second unit and the third unit for detecting a state of the polished surface of the workpiece transported from the second unit, and intermediate returning means for returning the workpiece to the second unit in conformity with the result of the detection by the intermediate detecting means.
Claim 60
Dependent Claim
56 words
A precision polishing apparatus according to claim 52, which further comprises intermediate detecting means provided between the third unit and the fourth unit for detecting a state of the polished surface of the workpiece transported from the third unit, and intermediate returning means for selectively returning the workpiece to the second unit or the third unit.
Claim 61
Dependent Claim
56 words
A precision polishing apparatus according to claim 48, which further comprises intermediate detecting means provided between the third unit and the fourth unit for detecting a state of the polished surface of the workpiece transported from the third unit, and intermediate returning means for selectively returning the workpiece to the second unit or the third unit.
Claim 62
Dependent Claim
28 words
A precision polishing apparatus according to claim 37, wherein the state comprises at least one of a flaw and a stain of the polished surface of the workpiece.
Claim 63
Dependent Claim
22 words
A precision polishing apparatus according to claim 37, wherein the state of the polished surface means a defect of the polished surface.
Claim 64
Independent Claim
98 words
A method of manufacturing a semiconductor device including the step of forming a wiring and an inter-layer insulating film on a substrate on which a semiconductor element is formed, the method comprising the steps of: polishing a surface of a film to be polished after the film which provides the wiring or the inter-layer insulating film is formed; removing a stain on a polished surface of the film; detecting a state of the polished surface of the film; and returning the substrate to the removing step in conformity with the result of the detection in the detecting step.
Claim 65
Independent Claim
98 words
A method of manufacturing a semiconductor device including the step of forming a wiring and an inter-layer insulating film on a substrate on which a semiconductor element is formed, the method comprising the steps of: polishing a surface of a film to be polished after the film which provides the wiring or the inter-layer insulating film is formed; removing a stain on a polished surface of the film; detecting a state of the polished surface of the film; and returning the substrate to the removing step in conformity with the result of the detection in the detecting step.
Claim 66
Dependent Claim
43 words
The method of manufacturing a semiconductor device according to claim 57, wherein in the returning step, the substrate can be selectively returned to either the removing step or the polishing step in conformity with the result of the detection in the detecting step.
Claim 67
Dependent Claim
16 words
A semiconductor device produced by the method of manufacturing a semiconductor device according to claim 57.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-01-10 | 2003-07-12 | 2004-01-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-01-10 | 2007-07-12 | 2008-01-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-01-10 | 2011-07-12 | 2012-01-11 | $7700.00 | Window Closed / Lapsed |