US6050884A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Polishing apparatus
Assignee: Ebara Corp
•
Filing: 1997-02-26
•
Granted: 2000-04-18
•
Expires: 2017-02-26
Abstract
Abstract A polishing apparatus is used for polishing a workpiece such as a semiconductor wafer to a flat mirror finish. The polishing apparatus includes a turntable having a polishing surface thereon, and a top ring for holding a workpiece to be polished and pressing the workpiece against the polishing surface on the turntable. A pusher is disposed in a position for transferring the workpiece to and from the top ring, and has a workpiece support which can be lifted to a position close to the top ring for transferring the workpiece to and from the top ring. When the workpiece support receives a polished workpiece and is lowered, a cleaning liquid is ejected substantially simultaneously from three cleaning nozzle units that are disposed in respective three positions to clean the upper and lower surfaces of the workpiece and the lower surface of the top ring.
Inventors
- 👤 Tetsuji Togawa
- 👤 Kuniaki Yamaguchi
- 👤 Shunichiro Kojima
- 👤 Toyomi Nishi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 19:03
CPC Classifications
B; B24; B24B; B24B37/00; B24B37/34; B24B37/345; H; H10; H10P; H10P52/00; B08; B08B; B08B3/00; B08B3/02; B24B41/00; B24B41/005; H10P72/00; H10P72/04; H10P72/0402; H10P72/0406; H10P72/0411; H10P72/0414
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
207 words
A polishing apparatus for polishing a surface of a workpiece, said apparatus comprising: a turntable having thereon a polishing surface; a top ring for holding a workpiece to be polished and for pressing the workpiece against said polishing surface on said turntable; a pusher for transferring the workpiece between said top ring and said pusher, said pusher having a workpiece support movable vertically between a transfer position close to said top ring, whereat transfer of the workpiece occurs, and a withdrawn position, whereat the workpiece transferred to said support is spaced from and confronts said top ring; a cleaning device for, after the workpiece has been polished and transferred from said top ring to said support and when said support is moved to said withdrawn position, ejecting a cleaning liquid toward and cleaning upper and lower surfaces of the workpiece and a lower surface of said top ring; and said cleaning device including at least one cleaning unit, disposed vertically between said lower surface of said top ring and the upper surface of the workpiece when the workpiece is supported on said support at said withdrawn position, for ejecting the cleaning liquid toward said lower surface of said top ring and the upper surface of the workpiece.
Claim 2
Dependent Claim
207 words
A polishing apparatus for polishing a surface of a workpiece, said apparatus comprising: a turntable having thereon a polishing surface; a top ring for holding a workpiece to be polished and for pressing the workpiece against said polishing surface on said turntable; a pusher for transferring the workpiece between said top ring and said pusher, said pusher having a workpiece support movable vertically between a transfer position close to said top ring, whereat transfer of the workpiece occurs, and a withdrawn position, whereat the workpiece transferred to said support is spaced from and confronts said top ring; a cleaning device for, after the workpiece has been polished and transferred from said top ring to said support and when said support is moved to said withdrawn position, ejecting a cleaning liquid toward and cleaning upper and lower surfaces of the workpiece and a lower surface of said top ring; and said cleaning device including at least one cleaning unit, disposed vertically between said lower surface of said top ring and the upper surface of the workpiece when the workpiece is supported on said support at said withdrawn position, for ejecting the cleaning liquid toward said lower surface of said top ring and the upper surface of the workpiece.
Claim 3
Dependent Claim
44 words
An apparatus as claimed in claim 1, wherein said cleaning device comprises three cleaning units disposed in three respective positions for ejecting the cleaning liquid toward and cleaning the upper and lower surfaces of the workpiece and said lower surface of said top ring.
Claim 4
Dependent Claim
35 words
An apparatus as claimed in claim 2, wherein said support has a recess enabling the cleaning liquid ejected from one of said cleaning units to pass therethrough to clean the lower surface of the workpiece.
Claim 5
Dependent Claim
18 words
An apparatus as claimed in claim 2, wherein each said cleaning unit comprises a horizontal array of nozzles.
Claim 6
Dependent Claim
141 words
A polishing apparatus for polishing a surface of a workpiece, said apparatus comprising: a turntable having thereon a polishing surface; a top ring for holding a workpiece to be polished and for pressing the workpiece against said polishing surface to polish the workpiece; a top ring moving mechanism for lifting said top ring from said turntable and for angularly moving said top ring to a workpiece transfer position, whereat the polished workpiece is transferred from said top ring directly to a robot hand; and a top ring cleaning device having a cleaning liquid nozzle operable for, after the polished workpiece is transferred from said top ring to the robot hand, moving to a position below said top ring when said top ring is in said transfer position and ejecting cleaning liquid toward and cleaning a lower surface of said top ring.
Claim 7
Dependent Claim
141 words
A polishing apparatus for polishing a surface of a workpiece, said apparatus comprising: a turntable having thereon a polishing surface; a top ring for holding a workpiece to be polished and for pressing the workpiece against said polishing surface to polish the workpiece; a top ring moving mechanism for lifting said top ring from said turntable and for angularly moving said top ring to a workpiece transfer position, whereat the polished workpiece is transferred from said top ring directly to a robot hand; and a top ring cleaning device having a cleaning liquid nozzle operable for, after the polished workpiece is transferred from said top ring to the robot hand, moving to a position below said top ring when said top ring is in said transfer position and ejecting cleaning liquid toward and cleaning a lower surface of said top ring.
Claim 8
Dependent Claim
46 words
An apparatus as claimed in claim 5, wherein said cleaning device is operable to, before the polished workpiece is transferred from said top ring to said robot hand, eject cleaning liquid from said cleaning liquid nozzle toward and clean the workpiece held by said top ring.
Claim 9
Dependent Claim
50 words
An apparatus as claimed in claim 5, wherein said cleaning device is operable to, after the robot hand has been moved below said top ring and before the polished workpiece is transferred to the robot hand, eject cleaning liquid from said cleaning liquid nozzle toward and clean the robot hand.
Claim 10
Dependent Claim
171 words
A polishing apparatus for polishing a surface of a workpiece, said apparatus comprising: a turntable having thereon a polishing surface; a top ring for holding a workpiece to be polished and for pressing the workpiece against said polishing surface to polish the workpiece; a top ring moving mechanism for lifting said top ring from said turntable and for angularly moving said top ring to a predetermined position; a top ring cleaning device having a cleaning liquid nozzle for ejecting cleaning liquid toward and cleaning a lower surface of said top ring when said top ring is in said predetermined position thereof; a dressing tool for dressing said polishing surface on said turntable; a dressing tool moving mechanism for lifting said dressing tool from said turntable and for angularly moving said dressing tool to a predetermined position; and a dressing tool cleaning device having a cleaning liquid nozzle for ejecting cleaning liquid toward and cleaning a lower surface of said dressing tool when said dressing tool is in said predetermined position thereof.
Claim 11
Dependent Claim
171 words
A polishing apparatus for polishing a surface of a workpiece, said apparatus comprising: a turntable having thereon a polishing surface; a top ring for holding a workpiece to be polished and for pressing the workpiece against said polishing surface to polish the workpiece; a top ring moving mechanism for lifting said top ring from said turntable and for angularly moving said top ring to a predetermined position; a top ring cleaning device having a cleaning liquid nozzle for ejecting cleaning liquid toward and cleaning a lower surface of said top ring when said top ring is in said predetermined position thereof; a dressing tool for dressing said polishing surface on said turntable; a dressing tool moving mechanism for lifting said dressing tool from said turntable and for angularly moving said dressing tool to a predetermined position; and a dressing tool cleaning device having a cleaning liquid nozzle for ejecting cleaning liquid toward and cleaning a lower surface of said dressing tool when said dressing tool is in said predetermined position thereof.
Claim 12
Dependent Claim
23 words
An apparatus as claimed in claim 8, wherein said predetermined position of said dressing tool is a retracted position outwardly of said turntable.
Claim 13
Dependent Claim
39 words
An apparatus as claimed in claim 8, further comprising a cover disposed over a predetermined range of said turntable for preventing liquid on said turntable from being scattered therefrom, said dressing tool cleaning device being provided on said cover.
Claim 14
Dependent Claim
132 words
A polishing apparatus for polishing a surface of a workpiece, said apparatus comprising: a turntable having thereon a polishing surface; a top ring for holding a workpiece to be polished and for pressing the workpiece against said polishing surface to polish the workpiece; a top ring moving mechanism for lifting said top ring from said turntable and for angularly moving said top ring to a predetermined position; a top ring cleaning device having a cleaning liquid nozzle for ejecting cleaning liquid toward and cleaning a lower surface of said top ring when said top ring is in said predetermined position thereof; a cover disposed over a predetermined range of said turntable for preventing liquid on said turntable from being scattered therefrom; and said top ring cleaning device being provided on said cover.
Claim 15
Dependent Claim
132 words
A polishing apparatus for polishing a surface of a workpiece, said apparatus comprising: a turntable having thereon a polishing surface; a top ring for holding a workpiece to be polished and for pressing the workpiece against said polishing surface to polish the workpiece; a top ring moving mechanism for lifting said top ring from said turntable and for angularly moving said top ring to a predetermined position; a top ring cleaning device having a cleaning liquid nozzle for ejecting cleaning liquid toward and cleaning a lower surface of said top ring when said top ring is in said predetermined position thereof; a cover disposed over a predetermined range of said turntable for preventing liquid on said turntable from being scattered therefrom; and said top ring cleaning device being provided on said cover.
Claim 16
Dependent Claim
42 words
An apparatus as claimed in claim 11, wherein said cleaning device is operable to, before removal of the polished workpiece from said top ring, eject cleaning liquid from said cleaning liquid nozzle toward and clean the workpiece held by said top ring.
Claim 17
Dependent Claim
54 words
An apparatus as claimed in claim 11, wherein said top ring is operable to transfer the polished workpiece to a robot hand, and said cleaning device is operable to, prior to transfer of the polished workpiece to the robot hand, eject cleaning liquid from said cleaning liquid nozzle toward and clean the robot hand.
References Cited (Backward Citations)
US4193226A
Cited
US4481738A
Cited
JPS61170569A
Cited
US4680893A
Cited
JPS62224563A
Cited
US4944119A
Cited
JPH04334025A
Cited
EP0648575A1
Cited
US5616063A
Cited
JPH07299734A
Cited
US5545076A
Cited
JPH08153693A
Cited
US5655954A
Cited
US5670011A
Cited
US5738574A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-04-18 | 2003-10-18 | 2004-04-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-04-18 | 2007-10-18 | 2008-04-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-04-18 | 2011-10-18 | 2012-04-18 | $7700.00 | Window Closed / Lapsed |