US6330708B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for preparing command files for photomask production
Assignee: International Business Machines Corp
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Filing: 1998-09-17
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Granted: 2001-12-11
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Expires: 2018-09-17
Abstract
Abstract Method for producing CATS include files for photomask production. A table of algorithms identifies each level of the design to be used in a given photomask layer. A key word table is created to identify special functions that must be performed on the data to define changes to be made to polygons in the pattern data of the mask. Compensations for dimensions of the polygons are applied to one or more data levels of the design data based on the specific process and vendor tools to be used to make the photomask. Optimal mathematical steps are derived from the algorithms and include any respective dimensional compensations which are needed to create the polygons of the mask. Each of the mathematical steps are broken into one or more substeps which are executed to create the pattern data. The executable substeps enhance parallel computation for creating the pattern data.
Inventors
- 👤 Thomas R. Parker
- 👤 Stephen B. Houchen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 23:22
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/302; H01J37/3023; H01J37/3026; H01J2237/00; H01J2237/30; H01J2237/317; H01J2237/3175; H01J2237/31761; H01J2237/31762
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
116 words
A method for creating CATS Include files comprising: creating a table of algorithms which identify a segment of a mask, each layer of a mask set and an algorithm which defines the segment and layer combination appearing on said mask; creating a keyword table which defines for each piece of an algorithm, and a given layer and segment combination, a special function which defines polygons to create said segments on the mask; creating compensations for dimensions of said polygons for each of said pieces of said algorithm; defining mathematical steps from said algorithms and a respective compensation for each segment to be created by said mask; and creating a file of commands from said mathematical steps.
Claim 2
Independent Claim
116 words
A method for creating CATS Include files comprising: creating a table of algorithms which identify a segment of a mask, each layer of a mask set and an algorithm which defines the segment and layer combination appearing on said mask; creating a keyword table which defines for each piece of an algorithm, and a given layer and segment combination, a special function which defines polygons to create said segments on the mask; creating compensations for dimensions of said polygons for each of said pieces of said algorithm; defining mathematical steps from said algorithms and a respective compensation for each segment to be created by said mask; and creating a file of commands from said mathematical steps.
Claim 3
Dependent Claim
35 words
The method according to claim 1 further comprising: creating a plurality of computationally efficient substeps from said steps, and creating a table of dependencies identifying which of said substeps depend on a previous substep computation.
Claim 4
Dependent Claim
49 words
The method according to claim 2 wherein said mathematical substeps which define a relationship having a common layer or layer type, and have substantially the same positive compensation value, are gathered and replaced by an abbreviated layer number and said compensation value which is executed as a single step.
Claim 5
Dependent Claim
34 words
The method according to claim 3 further comprising the substep of flattening abbreviated layer numbers by replacing said layer numbers with a flattened design value contained in a library of said abbreviated layer numbers.
Claim 6
Dependent Claim
35 words
The method according to claim 2 further comprising adding to each substep which comprises said file of commands a mask compensation factor which compensates for dimensional changes produced by a process which uses said mask.
Claim 7
Dependent Claim
34 words
The method according to claim 5 further comprising adding to each substep a magnification factor which matches a magnification by a wafer stepper tool and a technology scale which is used with said mask.
Claim 8
Dependent Claim
28 words
The method for creating command files according to claim 2 wherein said substeps are grouped in an order which provides compensations to all polygons of the same shape.
Claim 9
Dependent Claim
41 words
The method for creating command files according to claim 7 wherein said substeps are grouped in an order which provides compensations to the same dimension of all the same polygons, and then provides compensations to the remaining dimensions of said polygons.
Claim 10
Dependent Claim
56 words
The method for creating CATS MEBES command files according to claim 2 wherein said substeps comprise: combining all horizontally oriented polygons with all vertically oriented polygons of the same size; compensating a first dimension of said combined polygons, and then a second dimension of said combined polygons; and subtracting said combined polygons from said compensated polygons.
Claim 11
Dependent Claim
140 words
The method accord to claim 9 further comprising: combining all horizontally oriented polygons with all vertically oriented polygons, of a first shape; compensating a first dimension of said combined polygons of a first shape, and then a second dimension of said combined polygons of said first shape; combining all horizontally oriented polygons of a second shape with all vertically oriented polygons of said second shape; compensating said combined horizontally oriented polygons of a second shape and vertically oriented polygons of a second shape in first and second dimensions; combining said compensated polygons of said first shape with said compensated polygons of said second shape; and subtracting the combination of said polygons of said first shape with said polygons of a second shape from the combination of said compensated combination of said polygons of said first shape and said second shape.
Claim 12
Dependent Claim
25 words
The method according to claim 2 wherein said table of dependencies includes an indication of the relative computational efficiency for processing each of said substeps.
Claim 13
Dependent Claim
23 words
The method according to claim 11 further comprising ordering said substeps for execution in accordance with the relative computational efficiency of said substeps.
References Cited (Backward Citations)
US4698509A
Cited
US4970387A
Cited
US4979223A
Cited
US5018210A
Cited
US5784292A
Cited
US5448494A
Cited
US5159201A
Cited
US5251140A
Cited
US5340700A
Cited
US5294800A
Cited
US5571639A
Cited
US5593839A
Cited
US5450332A
Cited
US5631110A
Cited
US5537580A
Cited
US5608638A
Cited
US5666288A
Cited
US5844810A
Cited
US5900941A
Cited
US6056785A
Cited
US6225025B1
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-12-10 | 2005-06-11 | 2005-12-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-12-10 | 2009-06-11 | 2009-12-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-12-10 | 2013-06-11 | 2013-12-11 | $7700.00 | Window Closed / Lapsed |