US5844810A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Scaled adaptive lithography
Assignee: General Electric Co
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Filing: 1995-05-30
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Granted: 1998-12-01
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Expires: 2015-05-30
Abstract
Abstract An adaptive method of providing electrical interconnections for a plurality of feed-through lines each having a respective end extending to at least one substrate surface includes generating an artwork representation for the electrical interconnections using specified feed-through line end positions on the at least one substrate surface. The at least one substrate surface may include a surface of a stack of substrates with at least two substrates having feed-through line ends facing a common direction. Actual positions of the at least two of the feed-through line ends are determined, and a scale factor is estimated using the determined actual positions. Actual positions of others of the feed-through line ends are estimated using the scale factor, and the artwork representation is modified to properly include electrical interconnections to ones of the feed-through line ends which are not in their specified positions. The artwork representation can be converted into a turn point polygon (TPP) format for effective data handling and modification of the artwork representation, and the TPP format can then be can be converted to a rectangular representation. A laser can be controlled in accordance with the rectangular representation of the modified artwork.
Inventors
- 👤 Leonard Richard Douglas
- 👤 Richard Joseph Saia
- 👤 Kevin Matthew Durocher
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 23:33
CPC Classifications
H; H10; H10W; H10W90/00; H10W70/00; H10W70/60; H10W70/611; H10W70/614
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
151 words
An adaptive method of providing electrical interconnections for a plurality of feed-through lines, each of the feed-through lines having a respective end extending to at least one substrate surface, the method comprising: generating an artwork representation for the electrical interconnections using specified feed-through line end positions on the at least one substrate surface; determining actual positions of at least two of the feed-through line ends; estimating a scale factor using the actual positions of the at least two of the feed-through line ends; performing calculations to estimate actual positions of others of the feed-through line ends using the scale factor and the determined actual positions of the at least two of the feed-through line ends; modifying the artwork representation to properly include electrical interconnections to ones of the feed-through line ends which are not in their specified positions; and forming the electrical interconnections for the feed-through lines using the modified artwork.
Claim 2
Dependent Claim
151 words
An adaptive method of providing electrical interconnections for a plurality of feed-through lines, each of the feed-through lines having a respective end extending to at least one substrate surface, the method comprising: generating an artwork representation for the electrical interconnections using specified feed-through line end positions on the at least one substrate surface; determining actual positions of at least two of the feed-through line ends; estimating a scale factor using the actual positions of the at least two of the feed-through line ends; performing calculations to estimate actual positions of others of the feed-through line ends using the scale factor and the determined actual positions of the at least two of the feed-through line ends; modifying the artwork representation to properly include electrical interconnections to ones of the feed-through line ends which are not in their specified positions; and forming the electrical interconnections for the feed-through lines using the modified artwork.
Claim 3
Dependent Claim
33 words
The method of claim 1 wherein the at least one substrate surface comprises a surface of a stack of substrates with at least two substrates having feed-through line ends facing a common direction.
Claim 4
Dependent Claim
80 words
The method of claim 2 wherein the specified positions of the feed-through line ends are stored in a first database and the step of generating the artwork representation comprises the steps of: providing a circuit layout of a pattern of electrical conductors including the specified feed-through line end positions; and storing a representation of the circuit layout in a second database describing an electrical interconnection structure for providing the electrical interconnections for the feed-through line ends in their specified positions.
Claim 5
Dependent Claim
32 words
The method of claim 3 wherein the step of storing the representation of the circuit is performed by storing a turn point polygon representation of the circuit layout in the second database.
Claim 6
Dependent Claim
65 words
The method of claim 4, wherein the step of modifying the artwork representation comprises: comparing the positions of the at least two of the feed-through line ends with respective specified positions; and after performing calculations to estimate the actual positions of the others of the feed-through line ends, calculating a translation and rotation for each of the feed-through line ends based on the comparing step.
Claim 7
Dependent Claim
53 words
The method of claim 5 wherein the step of modifying the artwork representation further includes generating a third database describing the actual locations of each of the feed-through line ends with respect to the at least one substrate surface and wherein said step of comparing compares entries in the first and third databases.
Claim 8
Dependent Claim
58 words
The method of claim 6 wherein the step of modifying the artwork representation further comprises producing a fourth database by altering the second database according to the scale factor estimation and the translation and rotation calculations for each of the feed-through line ends to produce a fourth database storing a turn point polygon representation of the modified artwork.
Claim 9
Dependent Claim
46 words
The method of claim 7 wherein the step of forming the electrical interconnections comprises converting the turn point polygon representation of the modified artwork in the fourth database to a rectangular representation; and controlling a laser in accordance with the rectangular representation of the modified artwork.
Claim 10
Dependent Claim
41 words
The method of claim 1 wherein the specified feed-through line end positions are situated in a row and the at least two of the feed-through line ends for which actual positions are determined are situated at opposite ends of the row.
Claim 11
Dependent Claim
163 words
An adaptive system for providing electrical interconnections for a plurality of feed-through lines, each of the feed-through lines having a respective end extending to at least one substrate surface, the system comprising: means for generating an artwork representation for the electrical interconnections using specified feed-through line end positions on the at least one substrate surface; means for determining actual positions of at least two of the feed-through line ends; means for estimating a scale factor using the actual positions of the at least two of the feed-through line ends; means for performing calculations to estimate actual positions of others of the feed-through line ends using the scale factor and the determined actual positions of the at least two of the feed-through line ends; means for modifying the artwork representation to properly include electrical interconnections to ones of the feed-through line ends which are not in their specified positions; and means for forming the electrical interconnections for the feed-through lines using the modified artwork.
Claim 12
Dependent Claim
163 words
An adaptive system for providing electrical interconnections for a plurality of feed-through lines, each of the feed-through lines having a respective end extending to at least one substrate surface, the system comprising: means for generating an artwork representation for the electrical interconnections using specified feed-through line end positions on the at least one substrate surface; means for determining actual positions of at least two of the feed-through line ends; means for estimating a scale factor using the actual positions of the at least two of the feed-through line ends; means for performing calculations to estimate actual positions of others of the feed-through line ends using the scale factor and the determined actual positions of the at least two of the feed-through line ends; means for modifying the artwork representation to properly include electrical interconnections to ones of the feed-through line ends which are not in their specified positions; and means for forming the electrical interconnections for the feed-through lines using the modified artwork.
Claim 13
Dependent Claim
33 words
The system of claim 10 wherein the at least one substrate surface comprises a surface of a stack of substrates with at least two substrates having feed-through line ends facing a common direction.
Claim 14
Dependent Claim
125 words
The system of claim 11 wherein the means for generating the artwork representation for the electrical interconnections using specified feed-through line end positions on the at least one substrate surface include means for storing the specified positions of the feed-through line ends in a first database, and wherein the means for generating an artwork representation for the electrical interconnections using specified feed-through line end positions on the at least one substrate surface include: means for providing a circuit layout of a pattern of electrical conductors including the specified feed-through line end positions; and means for storing a representation of the circuit layout in a second database describing an electrical interconnection structure for providing the electrical interconnections for the feed-through line ends in their specified positions.
Claim 15
Dependent Claim
37 words
The system of claim 12 wherein the means for storing the representation of the circuit layout in the second database comprise means for storing a turn point polygon representation of the circuit layout in the second database.
Claim 16
Dependent Claim
56 words
The system of claim 10 wherein the specified feed-through line end positions are situated in a row and the means for determining actual positions of the at least two of the feed-through line ends include means for determining actual positions of two of the feed-through line ends which are situated at opposite ends of the row.
References Cited (Backward Citations)
US4783695A
Cited
US4933042A
Cited
US4835704A
Cited
GB2202673A
Cited
US4972311A
Cited
US5019946A
Cited
US4894115A
Cited
US5019997A
Cited
US5161093A
Cited
US5257178A
Cited
US5285571A
Cited
US5324687A
Cited
US5355306A
Cited
US5506793A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-11-30 | 2002-06-01 | 2002-12-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-11-30 | 2006-06-01 | 2006-12-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-11-30 | 2010-06-01 | 2010-12-01 | $7700.00 | Window Closed / Lapsed |