Patent US6317175B1 successfully refreshed from Google Patents.
← Back to Patent Explorer
US6317175B1 Expired / Lapsed US ⏱️ 0.0 years remaining

Single crystal silicon arrayed devices with optical shield between transistor and substrate

Assignee: Kopin Corp
•
Filing: 1995-06-06
•
Granted: 2001-11-13
•
Expires: 2015-06-06
📄 Original PDF 🌐 Google Patents 🔄 Sync Now

Abstract

Abstract A display panel is formed using a single crystal thin-film transistors that are transferred to substrates for display fabrication. Pixel arrays form light valves or switches that can be fabricated with control electronics in the thin-film material prior to transfer. The resulting circuit panel is then incorporated into a projection display system with a light emitting or liquid crystal material to provide the desired light valve.

Inventors

  • 👤 Jack P. Salerno
  • 👤 Paul M. Zavracky
  • 👤 Mark B. Spitzer
  • 👤 Brenda Dingle

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-09 05:29
CPC Classifications
H; H10; H10D; H10D86/00; H10D86/01; H10D86/021; H10D86/0214; A; A61; A61B; A61B3/00; A61B3/10; A61B3/113; G; G02; G02B; G02B27/00; G02B27/0093; G02B27/01; G02B27/017; G02B27/0172; G09; G09G; G09G3/00; G09G3/20; G09G3/22; G09G3/30; G09G3/34; G09G3/36; H04; H04N; H04N5/00; H04N5/74; H04N5/7416; H04N5/7441; H04N9/00; H04N9/12; H04N9/31; H04N9/3102; H04N9/3105; H04N9/3108; H04N9/312; H04N9/3141; H04N9/3173; H05; H05B; H05B33/00; H05B33/12; H10D30/00; H10D30/60; H10D30/67; H10D30/6758; H10D84/00; H10D84/01; H10D84/02; H10D84/03; H10D84/038; H10D86/0221; H10D86/0223; H10D86/40; H10D86/60; H10D88/00; H10D88/01; H10H; H10H20/00; H10H20/01; H10H20/011; H10H20/013; H10H29/00; H10H29/10; H10H29/14; H10H29/142; H10W; H10W90/00; G02B27/0101; G02B2027/0132; G02B2027/0138; G02B27/0179; G02B2027/0187; G02B2027/0192; G02B2027/0198; G02B5/00; G02B5/30; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/136; G02F1/13613; G03; G03B; G03B21/00; G03B21/10; G03B21/14; G03B21/28; G03B33/00; G03B33/10; G03B33/12; G03B37/00; G03B37/04; G09G2300/00; G09G2300/02; G09G2300/023; G09G2300/08; G09G2300/0809; G09G2300/0842; G09G2320/00; G09G2320/02; G09G2320/0233; G09G2320/04; G09G2320/041; G09G2320/043; G09G2340/00; G09G2340/04; G09G2340/0464; G09G2370/00; G09G2370/04; G09G2370/042; G09G3/3607; G09G3/3611; G09G3/3614; G09G3/3648; H01; H01S; H01S5/00; H01S5/40; H01S5/42; H01S5/423; H04N5/66; H04N5/70; H04N5/7475; H04N5/7491; H10D30/6729; H10D30/673; H10D30/6733; H10D30/6734; H10P; H10P72/00; H10P72/70; H10P72/74; H10P72/743; H10P72/7432

Claims Analysis

Total Claims: 52
Claim 1
Independent Claim 142 words
A projection display device comprising: an optically transmissive substrate positioned to receive light from a light source; a light valve matrix secured to the substrate and comprising an array of transistors formed from a thin film of single crystal material, an array of electrodes, each electrode being electrically connected to a transistor, a gate positioned between a channel region of each transistor and the optically submissive substrate, a light transmitting material through which light from the light source is selectively transmitted, and an array of optical shields positioned between the gate of each transistor and the optically transmissive substrate to inhibit transmission of light from the light source to the transistors; a driver circuit electrically connected to the light valve matrix for actuating the light valves; and an optical system for projecting light transmitted through actuated light valves onto a viewing surface.
Claim 2
Dependent Claim 142 words
A projection display device comprising: an optically transmissive substrate positioned to receive light from a light source; a light valve matrix secured to the substrate and comprising an array of transistors formed from a thin film of single crystal material, an array of electrodes, each electrode being electrically connected to a transistor, a gate positioned between a channel region of each transistor and the optically submissive substrate, a light transmitting material through which light from the light source is selectively transmitted, and an array of optical shields positioned between the gate of each transistor and the optically transmissive substrate to inhibit transmission of light from the light source to the transistors; a driver circuit electrically connected to the light valve matrix for actuating the light valves; and an optical system for projecting light transmitted through actuated light valves onto a viewing surface.
Claim 3
Dependent Claim 20 words
The projection display device of claim 1 wherein the light valve matrix is secured to the substrate with an adhesive.
Claim 4
Dependent Claim 27 words
The projection display device of claim 1 wherein each light valve comprises at least one transistor, an electrode and a respective volume of the light transmitting material.
Claim 5
Dependent Claim 27 words
The projection display device of claim 1 wherein the transistor array and the electrode array are formed in a thin film of substantially single crystal silicon material.
Claim 6
Dependent Claim 29 words
The projection display device of claim 1 further comprising a sealed cavity in which the light transmitting material is retained adjacent to the thin film of single crystal material.
Claim 7
Dependent Claim 66 words
The projection display device of claim 1 wherein the driver circuit is formed in or on the thin film of single crystal material, the driver circuit being electrically connected to each of the transistors such that the driver circuit is capable of selectively actuating a plurality of transistors, the electrodes being connected to the actuated transistors for producing an electric field in the light transmitting material.
Claim 8
Dependent Claim 60 words
The projection display device of claim 1 wherein the transistor array and the electrode array are arranged as a light valve array comprising a plurality of columns and rows, the driver circuit comprising a first circuit electrically connected to each column of the light valve array, and a second circuit electrically connected to each row of the light valve array.
Claim 9
Dependent Claim 22 words
The projection display device of claim 1 wherein the light valve matrix is attached to the optically transmissive substrate with an adhesive.
Claim 10
Dependent Claim 26 words
The projection display device of claim 1 further comprising additional light valve matrices, each light valve matrix adapted to selectively transmit light of a primary color.
Claim 11
Dependent Claim 31 words
The projection display device of claim 9 wherein the optical system further comprises a dichroic prism for combining the primary color light transmitted by each matrix into a multi-color light image.
Claim 12
Dependent Claim 28 words
The projection display device of claim 1 wherein the viewing surface is a reflective surface such that light is directed from the reflective surface to a viewing screen.
Claim 13
Dependent Claim 19 words
The projection display device of claim 1 wherein the display is adapted to be used in a projection monitor.
Claim 14
Dependent Claim 21 words
The projection display device of claim 1 wherein the display is adapted to be used in a high resolution monitor system.
Claim 15
Dependent Claim 15 words
The projection display device of claim 1 wherein the light transmitting material is liquid crystal.
Claim 16
Dependent Claim 24 words
The projection display device of claim 1 wherein the optical shields are positioned between the gate of each transistor and the optically transmissive substrate.
Claim 17
Dependent Claim 21 words
The projection display device of claim 1 wherein the optical shields are disposed between the transistors and the light transmitting material.
Claim 18
Dependent Claim 41 words
The projection display device of claim 1 wherein the optical shields include a first optical shield array positioned between the transistors and the optically transmissive substrate and a second optical shield array positioned between the transistors and the light transmitting material.
Claim 19
Dependent Claim 194 words
A projection display device comprising: a light source; an optically transmissive substrate positioned to receive light from the light source; a light valve matrix secured to the substrate with an adhesive and being comprised of an array of transistors formed from a thin film of single crystal silicon material, a gate positioned between a channel region of each transistor and the optically transmissive substrate, an array of electrodes, each electrode being electrically connected to a transistor, a light transmitting material positioned adjacent to the single crystal material such that an electric field applied to the light transmitting material alters a light transmitting property thereof to allow light from the light source to be transmitted through the light transmitting material, and an array of optical shields positioned between the gate of each transistor and the substrate to inhibit transmission of light from the light source to the transistors; a driver circuit formed in the thin film of single crystal silicon material, the driver circuit being electrically connected to the light valve matrix to selectively actuate the light valves; and an optical system for projecting light transmitted through actuated light valves onto an enlarged viewing surface.
Claim 20
Dependent Claim 194 words
A projection display device comprising: a light source; an optically transmissive substrate positioned to receive light from the light source; a light valve matrix secured to the substrate with an adhesive and being comprised of an array of transistors formed from a thin film of single crystal silicon material, a gate positioned between a channel region of each transistor and the optically transmissive substrate, an array of electrodes, each electrode being electrically connected to a transistor, a light transmitting material positioned adjacent to the single crystal material such that an electric field applied to the light transmitting material alters a light transmitting property thereof to allow light from the light source to be transmitted through the light transmitting material, and an array of optical shields positioned between the gate of each transistor and the substrate to inhibit transmission of light from the light source to the transistors; a driver circuit formed in the thin film of single crystal silicon material, the driver circuit being electrically connected to the light valve matrix to selectively actuate the light valves; and an optical system for projecting light transmitted through actuated light valves onto an enlarged viewing surface.
Claim 21
Dependent Claim 18 words
The projection display device of claim 16 wherein the single crystal silicon material comprises essentially single crystal silicon.
Claim 22
Dependent Claim 27 words
The projection display device of claim 18 wherein each light valve comprises at least one transistor, an electrode and a respective volume of the light transmitting material.
Claim 23
Dependent Claim 26 words
The projection display device of claim 18 further comprising additional light valve matrices, each light valve matrix adapted to selectively transmit light of a primary color.
Claim 24
Dependent Claim 31 words
The projection display device of claim 21 wherein the optical system further comprises a dichroic prism for combining the primary color light transmitted by each matrix into a multi-color light image.
Claim 25
Dependent Claim 29 words
The projection display device of claim 18 wherein the enlarged viewing surface is a reflective surface such that light is directed from the reflective surface to a viewing screen.
Claim 26
Dependent Claim 19 words
The projection display device of claim 18 wherein the display is adapted to be used in a projection monitor.
Claim 27
Dependent Claim 21 words
The projection display device of claim 18 wherein the display is adapted to be used in a high resolution monitor system.
Claim 28
Dependent Claim 15 words
The projection display device of claim 18 wherein the light transmitting material is liquid crystal.
Claim 29
Dependent Claim 24 words
The projection display device of claim 18 wherein the optical shields are positioned between the gate of each transistor and the optically tansmissive substrate.
Claim 30
Dependent Claim 21 words
The projection display device of claim 18 wherein the optical shields are disposed between the transistors and the light transmitting material.
Claim 31
Dependent Claim 41 words
The projection display device of claim 18 wherein the optical shields include a first optical shield array positioned between the transistors and the optically transmissive substrate and a second optical shield array positioned between the transistors and the light transmitting material.
Claim 32
Dependent Claim 147 words
A projection display device comprising: a back-light source; an optically transmissive substrate positioned to receive light from the back-light source; a light valve matrix secured to the substrate and comprising an array of transistors formed from a thin film of single crystal material, each transistor having a channel and a gate positioned between the channel and the optically transmissive substrate, an array of electrodes each electrode being electrically connected to a transistor, a light transmitting material through which light from the back-light source is selectively transmitted, and a first optical shield positioned between each transistor and the light transmitting material; a second optical shield positioned between the gate of each transistor and the optically transmissive substrate; a driver circuit electrically connected to the light valve matrix for actuating the light valves; and an optical system for projecting light transmitted through actuated light valves onto a viewing surface.
Claim 33
Dependent Claim 147 words
A projection display device comprising: a back-light source; an optically transmissive substrate positioned to receive light from the back-light source; a light valve matrix secured to the substrate and comprising an array of transistors formed from a thin film of single crystal material, each transistor having a channel and a gate positioned between the channel and the optically transmissive substrate, an array of electrodes each electrode being electrically connected to a transistor, a light transmitting material through which light from the back-light source is selectively transmitted, and a first optical shield positioned between each transistor and the light transmitting material; a second optical shield positioned between the gate of each transistor and the optically transmissive substrate; a driver circuit electrically connected to the light valve matrix for actuating the light valves; and an optical system for projecting light transmitted through actuated light valves onto a viewing surface.
Claim 34
Dependent Claim 21 words
The projection display device of claim 30 wherein the transistor array is secured to the optically transmissive substrate with an epoxy.
Claim 35
Dependent Claim 14 words
The projection display device of claim 30 wherein each light shield comprises a metal.
Claim 36
Dependent Claim 23 words
The projection display device of claim 30 further comprising a substantially planar boundary between the array of transistors and the light transmitting material.
Claim 37
Dependent Claim 176 words
A liquid crystal-display device comprising: a light source; a liquid crystal display device having an active matrix circuit over a substrate, the active matrix circuit comprising a plurality of pixels including an array of transistors formed from a single crystal material, each transistor having a gate positioned between the single crystal material and the substrate, and an array of pixel electrodes, each electrode being electrically connected to a transistor, the array of pixel electrodes having an active area with a diagonal array dimension no greater than 42 millimeters, the pixel electrodes are formed in lines and there are at least 800 lines per inch such that each pixel has a pixel size of 31.8 microns or less, and an array of optical shields positioned between the array of transistors and the substrate and registered to the transistors to inhibit transmission of light from the light source to the transistors; a driver circuit electrically connected to the active matrix circuit that actuates the active matrix; and an optical system to magnify an image on the display device.
Claim 38
Dependent Claim 176 words
A liquid crystal-display device comprising: a light source; a liquid crystal display device having an active matrix circuit over a substrate, the active matrix circuit comprising a plurality of pixels including an array of transistors formed from a single crystal material, each transistor having a gate positioned between the single crystal material and the substrate, and an array of pixel electrodes, each electrode being electrically connected to a transistor, the array of pixel electrodes having an active area with a diagonal array dimension no greater than 42 millimeters, the pixel electrodes are formed in lines and there are at least 800 lines per inch such that each pixel has a pixel size of 31.8 microns or less, and an array of optical shields positioned between the array of transistors and the substrate and registered to the transistors to inhibit transmission of light from the light source to the transistors; a driver circuit electrically connected to the active matrix circuit that actuates the active matrix; and an optical system to magnify an image on the display device.
Claim 39
Dependent Claim 16 words
The display of claim 34 wherein the diagonal array dimension is no greater than 21 millimeters.
Claim 40
Dependent Claim 14 words
The display of claim 34 where there is at least 1200 lines per inch.
Claim 41
Dependent Claim 17 words
The display of claim 34 wherein the array of pixel electrodes has at least 750,000 pixel electrodes.
Claim 42
Dependent Claim 214 words
A display device comprising: a backlight source; a light valve device having a light valve matrix secured to a substrate, the substrate being optically transmissive and positioned to receive light from the backlight source; the light valve matrix comprising a plurality of pixels including an array of transistors formed from a thin film of single crystal material, each transistor having a gate positioned between the single crystal material and the substrate, and an array of pixel electrodes, each electrode being electrically connected to a transistor, the array of pixel electrodes having an active area with a diagonal array dimension of less than 42 millimeters, the array of pixel electrodes being optically coupled to a light transmitting material through which light from the backlight source is selectively transmitted, the pixels being formed in lines such that there are at least 800 lines per inch and each pixel has a size of 31.8 microns or less and an array of optical shields positioned between the array of transistors and the substrate and registered to the transistors to inhibit transmission of light from the backlight source to the transistors; a driver circuit electrically connected to the light valve matrix for actuating the light valves; and an optical system to magnify the image on the light valve device.
Claim 43
Dependent Claim 214 words
A display device comprising: a backlight source; a light valve device having a light valve matrix secured to a substrate, the substrate being optically transmissive and positioned to receive light from the backlight source; the light valve matrix comprising a plurality of pixels including an array of transistors formed from a thin film of single crystal material, each transistor having a gate positioned between the single crystal material and the substrate, and an array of pixel electrodes, each electrode being electrically connected to a transistor, the array of pixel electrodes having an active area with a diagonal array dimension of less than 42 millimeters, the array of pixel electrodes being optically coupled to a light transmitting material through which light from the backlight source is selectively transmitted, the pixels being formed in lines such that there are at least 800 lines per inch and each pixel has a size of 31.8 microns or less and an array of optical shields positioned between the array of transistors and the substrate and registered to the transistors to inhibit transmission of light from the backlight source to the transistors; a driver circuit electrically connected to the light valve matrix for actuating the light valves; and an optical system to magnify the image on the light valve device.
Claim 44
Dependent Claim 64 words
The display of claim 38 wherein the light valve device further comprises a counterelectrode and liquid crystal and the array of transistors are in a first plane, and the counterelectrode extending in a second plane that is parallel to the first plane, and the liquid crystal layer interposed in a cavity between the two planes, the cavity having no spacers in the active area.
Claim 45
Dependent Claim 22 words
The display of claim 38 wherein the pixel electrodes are formed in lines and there are at least 800 lines per inch.
Claim 46
Dependent Claim 14 words
The display of claim 40 where there is at least 1000 lines per inch.
Claim 47
Dependent Claim 14 words
The display of claim 41 where there is at least 1200 lines per inch.
Claim 48
Dependent Claim 13 words
The display of claim 42 wherein there is approximately 2000 lines per inch.
Claim 49
Dependent Claim 17 words
The display of claim 38 wherein the array of pixel electrodes has at least 750,000 pixel electrodes.
Claim 50
Dependent Claim 16 words
The display of claim 38 wherein the diagonal array dimension is no greater than 21 millimeters.
Claim 51
Dependent Claim 16 words
The display of claim 45 wherein the diagonal array dimension is no greater than 16.26 millimeters.
Claim 52
Dependent Claim 27 words
The device of claim 38 wherein the array of optical shields is disposed between an optically transmissive substrate and a source and drain region of each transistor.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2004-11-12 2005-05-14 2005-11-13 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2008-11-12 2009-05-14 2009-11-13 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2012-11-12 2013-05-14 2013-11-13 $7700.00 Window Closed / Lapsed

Assigned Categories & Tags

No categories assigned to this patent yet.

Assign Category Tag