Method of reducing carbon incorporation into films produced by chemical vapor deposition involving organic precursor compounds

Claim 2

A chemical vapor deposition method comprising the following steps: forming a first layer on a semiconductor wafer in a reactor from an organic precursor, the first layer comprising predominately an inorganic material, the first layer also comprising incorporated carbon; and after forming the first layer, injecting a component gas into the reactor and generating a plasma from the component gas within the reactor, the component gas consisting essentially of a gas selected from the group consisting of N 2 , Ar and mixtures thereof, the component gas providing an activated state component which is effective to remove the carbon from the first layer.

Claim 3

The chemical vapor deposition method of claim 1 wherein the activated state component effectively diffuses into the first layer and interacts with a first layer component to remove the carbon from the first layer and produce gaseous products.

Claim 4

The chemical vapor deposition method of claim 1 wherein the activated state component comprises a component which is chemically reactive with a first layer component, the activated state component effectively diffusing into the first layer and chemically reacting with the first layer component to remove the carbon from the first layer and produce gaseous products.

Claim 5

The chemical vapor deposition method of claim 1 wherein the activated state component comprises a component which is chemically reactive with a first layer component, the first layer component comprising unbonded and incomplete electron shell atoms, the activated state component effectively diffusing into the first layer and chemically reacting with the unbonded and incomplete electron shell atoms to remove the carbon from the first layer and produce gaseous products.

Claim 6

The chemical vapor deposition method of claim 1 wherein the component gas comprises N 2 .

Claim 7

The chemical vapor deposition method of claim 1 wherein the component gas comprises Ar.

Claim 8

The chemical vapor deposition method of claim 1 wherein the component gas consists essentially of N 2 .

Claim 9

The chemical vapor deposition method of claim 1 further comprising biasing the substrate to a negative voltage during the plasma treatment.

Claim 10

A chemical vapor deposition method comprising the following steps: forming a first layer on a semiconductor wafer in a reactor from an organic precursor, the first layer comprising predominately an inorganic material, the first layer also comprising incorporated carbon in the form of a carbide; and after forming the first layer, injecting a component gas into the reactor and generating a plasma from the component gas within the reactor, the component gas providing an activated component which is effective to remove the carbon of the carbide from the first layer.

Claim 11

A chemical vapor deposition method comprising the following steps: forming a first layer on a semiconductor wafer in a reactor from an organic precursor, the first layer comprising predominately an inorganic material, the first layer also comprising incorporated carbon in the form of a carbide; and after forming the first layer, injecting a component gas into the reactor and generating a plasma from the component gas within the reactor, the component gas providing an activated component which is effective to remove the carbon of the carbide from the first layer.

Claim 12

The chemical vapor deposition method of claim 9 wherein the activated component effectively diffuses into the first layer and chemically reacts with a first layer component to remove the carbon from the first layer.

Claim 13

The chemical vapor deposition method of claim 9 wherein the component gas comprises N 2 .

Claim 14

The chemical vapor deposition method of claim 9 wherein the component gas comprises N 2 and H 2 .

Claim 15

The chemical vapor deposition method of claim 9 wherein the component gas consists essentially of N 2 .

Claim 16

The chemical vapor deposition method of claim 9 wherein the component gas comprises NH 3 .

Claim 17

The chemical vapor deposition method of claim 9 further comprising biasing the substrate to a negative voltage during the plasma treatment.

Claim 18

A chemical vapor deposition method comprising the following steps: injecting an organic precursor within a reactor having a wafer positioned therein, and maintaining the reactor at a temperature and a pressure which in combination are effective to form a first layer on the wafer, the first layer comprising predominately an inorganic material, the first layer also comprising incorporated carbon; after forming the first layer, ceasing to inject the organic precursor into the reactor and first injecting a component gas into the reactor and generating a first plasma within the reactor, the component gas consisting essentially of a gas selected from the group consisting of N 2 , Ar and mixtures thereof, the component gas providing an activated component which is effective to remove the carbon from the first layer; after the first plasma treatment, injecting the organic precursor to within the reactor having the wafer positioned therein, and maintaining the reactor at a temperature and a pressure which in combination are effective to form a second layer on the wafer, the second layer comprising carbon; and after forming the second layer, ceasing to inject the organic precursor into the reactor and second injecting the component gas into the reactor and generating a second plasma within the reactor, the component gas providing the activated component which is effective to remove the carbon from the second layer.

Claim 19

A chemical vapor deposition method comprising the following steps: injecting an organic precursor within a reactor having a wafer positioned therein, and maintaining the reactor at a temperature and a pressure which in combination are effective to form a first layer on the wafer, the first layer comprising predominately an inorganic material, the first layer also comprising incorporated carbon; after forming the first layer, ceasing to inject the organic precursor into the reactor and first injecting a component gas into the reactor and generating a first plasma within the reactor, the component gas consisting essentially of a gas selected from the group consisting of N 2 , Ar and mixtures thereof, the component gas providing an activated component which is effective to remove the carbon from the first layer; after the first plasma treatment, injecting the organic precursor to within the reactor having the wafer positioned therein, and maintaining the reactor at a temperature and a pressure which in combination are effective to form a second layer on the wafer, the second layer comprising carbon; and after forming the second layer, ceasing to inject the organic precursor into the reactor and second injecting the component gas into the reactor and generating a second plasma within the reactor, the component gas providing the activated component which is effective to remove the carbon from the second layer.

Claim 20

The chemical vapor deposition method of claim 16 wherein the activated component effectively diffuses into the first layer and interacts with a first layer component to remove the carbon from the first layer and produce gaseous products, and wherein the activated component effectively diffuses into the second layer and interacts with a second layer component to remove the carbon from the second layer and produce gaseous products.

Claim 21

The chemical vapor deposition method of claim 16 wherein the component gas comprises N 2 .

Claim 22

The chemical vapor deposition method of claim 16 wherein the component gas comprises Ar.

Claim 23

The chemical vapor deposition method of claim 16 wherein the component gas consists essentially of N 2 .

Claim 24

The chemical vapor deposition method of claim 16 further comprising biasing the substrate to a negative voltage during the first and second plasma treatments.

Claim 25

The chemical vapor deposition method of claim 16 wherein each of the first and second layers are deposited to respective thicknesses of less than 50 Angstroms.

Claim 26

The chemical vapor deposition method of claim 16 wherein the organic precursor injection steps and the plasma treatment steps are conducted for respective time periods, the sum of the plasma treatment step's time periods being at least two times as great as the sum of the organic precursor injection step's time periods.

Claim 27

A chemical vapor deposition method comprising the following steps: forming a first layer on a semiconductor wafer from an organic precursor compound, the first layer comprising predominately an inorganic material, the first layer also comprising incorporated carbon in the form of a carbide; after forming the first layer, ceasing to inject the organic precursor into the reactor and first injecting a component gas into the reactor and generating a first plasma from the component gas within the reactor, the component gas providing an activated component which is effective to remove the carbon of the carbide from the first layer, the component gas providing a bonding component which replaces and substitutes for the carbon displaced from the carbide in the first layer; after the first plasma treatment, injecting the organic precursor to within the reactor having the wafer positioned therein, and maintaining the reactor at a temperature and a pressure which in combination are effective to form a second layer on the wafer, the second layer comprising carbon in the form of a carbide; and after forming the second layer, ceasing to inject the organic precursor into the reactor and second injecting the component gas into the reactor and generating a second plasma from the component gas within the reactor, the component gas providing an activated component which is effective to remove the carbon of the carbide from the second layer.

Claim 28

A chemical vapor deposition method comprising the following steps: forming a first layer on a semiconductor wafer from an organic precursor compound, the first layer comprising predominately an inorganic material, the first layer also comprising incorporated carbon in the form of a carbide; after forming the first layer, ceasing to inject the organic precursor into the reactor and first injecting a component gas into the reactor and generating a first plasma from the component gas within the reactor, the component gas providing an activated component which is effective to remove the carbon of the carbide from the first layer, the component gas providing a bonding component which replaces and substitutes for the carbon displaced from the carbide in the first layer; after the first plasma treatment, injecting the organic precursor to within the reactor having the wafer positioned therein, and maintaining the reactor at a temperature and a pressure which in combination are effective to form a second layer on the wafer, the second layer comprising carbon in the form of a carbide; and after forming the second layer, ceasing to inject the organic precursor into the reactor and second injecting the component gas into the reactor and generating a second plasma from the component gas within the reactor, the component gas providing an activated component which is effective to remove the carbon of the carbide from the second layer.

Claim 29

The chemical vapor deposition method of claim 24 wherein the activated component effectively diffuses into the first layer and chemically reacts with a first layer component to the carbon from the first layer and produce gaseous products, and wherein the activated component effectively diffuses into the second layer and chemically reacts with a second layer component to remove the carbon from the second layer and produce gaseous products.

Claim 30

The chemical vapor deposition method of claim 24 wherein the component gas comprises N 2 .

Claim 31

The chemical vapor deposition method of claim 24 wherein the component gas comprises N 2 and H 2 .

Claim 32

The chemical vapor deposition method of claim 24 wherein the component gas consists essentially of N 2 .

Claim 33

The chemical vapor deposition method of claim 24 wherein the component gas comprises NH 3 .

Claim 34

The chemical vapor deposition method of claim 24 further comprising biasing the substrate to a negative voltage during the first and second plasma treatments.

Claim 35

The chemical vapor deposition method of claim 24 wherein each of the first and second layers are deposited to respective thicknesses of less than 50 Angstroms.

Claim 36

A deposition method comprising the following steps: forming a layer on a semiconductive substrate, the layer comprising predominately an inorganic material, the layer also comprising incorporated carbon; generating a plasma adjacent the layer from a component gas, the component gas consisting essentially of N 2 ; and utilizing the plasma to remove the carbon from the layer.

Claim 37

A deposition method comprising the following steps: forming a layer on a semiconductive substrate, the layer comprising predominately an inorganic material, the layer also comprising incorporated carbon; generating a plasma adjacent the layer from a component gas, the component gas consisting essentially of N 2 ; and utilizing the plasma to remove the carbon from the layer.

Claim 38

A deposition method comprising the following steps: depositing a layer on a semiconductor wafer, the layer comprising predominately an inorganic material, the layer also comprising incorporated carbon; and generating a plasma adjacent the layer from a component gas, the component gas consisting essentially of a gas selected from the group consisting of N 2 and Ar.

Claim 39

A deposition method comprising the following steps: depositing a layer on a semiconductor wafer, the layer comprising predominately an inorganic material, the layer also comprising incorporated carbon; and generating a plasma adjacent the layer from a component gas, the component gas consisting essentially of a gas selected from the group consisting of N 2 and Ar.

Claim 40

A deposition method comprising the following steps: depositing a first layer on a semiconductor wafer, the first layer comprising predominately an inorganic material, the first layer also comprising incorporated carbon; generating a first plasma adjacent the first layer from a component gas, the component gas consisting essentially of a gas selected from the group consisting of N 2 and Ar; removing the carbon from the first layer with the first plasma; after removing the carbon from the first layer, depositing a second layer on the wafer, the second layer comprising incorporated carbon; generating a second plasma adjacent the second layer; and removing the carbon from the second layer with the second plasma.

Claim 41

A deposition method comprising the following steps: depositing a first layer on a semiconductor wafer, the first layer comprising predominately an inorganic material, the first layer also comprising incorporated carbon; generating a first plasma adjacent the first layer from a component gas, the component gas consisting essentially of a gas selected from the group consisting of N 2 and Ar; removing the carbon from the first layer with the first plasma; after removing the carbon from the first layer, depositing a second layer on the wafer, the second layer comprising incorporated carbon; generating a second plasma adjacent the second layer; and removing the carbon from the second layer with the second plasma.

Claim 42

A deposition method comprising the following steps: forming a layer on a semiconductor wafer, the layer comprising predominately an inorganic material, the layer also comprising incorporated carbon in the form of a carbide; and utilizing a plasma to remove the carbide from the layer.

Claim 43

A deposition method comprising the following steps: forming a layer on a semiconductor wafer, the layer comprising predominately an inorganic material, the layer also comprising incorporated carbon in the form of a carbide; and utilizing a plasma to remove the carbide from the layer.

Claim 44

A deposition method comprising the following steps: depositing a first layer of material on a semiconductor wafer, the first layer comprising predominately an inorganic material, the first layer also comprising incorporated carbon in the form of a carbide; utilizing a first plasma to remove the carbide from the first layer; depositing a second layer of material on the semiconductor wafer, the second layer comprising incorporated carbon; utilizing a second plasma to remove the carbon from the second layer.

Claim 45

A deposition method comprising the following steps: depositing a first layer of material on a semiconductor wafer, the first layer comprising predominately an inorganic material, the first layer also comprising incorporated carbon in the form of a carbide; utilizing a first plasma to remove the carbide from the first layer; depositing a second layer of material on the semiconductor wafer, the second layer comprising incorporated carbon; utilizing a second plasma to remove the carbon from the second layer.

Claim 46

The method of claim 36 wherein the carbon incorporated in the second layer is in the form of a carbide.

Claim 47

The method of claim 36 wherein the carbon incorporated in the second layer is in the form of a carbide, and wherein the carbide incorporated in the second layer comprises a same chemical composition as the carbide incorporated in the first layer.

Claim 48

The method of claim 36 wherein the second plasma comprises a same chemical composition as the first plasma.

Claim 49

A deposition method comprising the following steps: injecting an organic precursor within a reactor having a wafer positioned therein to form a first layer on the wafer, the first layer comprising predominately an inorganic material, the first layer also comprising incorporated carbon; generating a first plasma within the reactor to treat the wafer with a first plasma treatment which removes the incorporated carbon from the first layer; after the first plasma treatment, injecting the organic precursor to within the reactor having the wafer positioned therein to form a second layer on the wafer; generating a second plasma within the reactor to treat the wafer with a second plasma treatment; and wherein the organic precursor injection steps and the plasma treatment steps are conducted for respective time periods, the sum of the plasma treatment step's time periods being at least two times as great as the sum of the organic precursor injection step's time periods.

Claim 50

A deposition method comprising the following steps: injecting an organic precursor within a reactor having a wafer positioned therein to form a first layer on the wafer, the first layer comprising predominately an inorganic material, the first layer also comprising incorporated carbon; generating a first plasma within the reactor to treat the wafer with a first plasma treatment which removes the incorporated carbon from the first layer; after the first plasma treatment, injecting the organic precursor to within the reactor having the wafer positioned therein to form a second layer on the wafer; generating a second plasma within the reactor to treat the wafer with a second plasma treatment; and wherein the organic precursor injection steps and the plasma treatment steps are conducted for respective time periods, the sum of the plasma treatment step's time periods being at least two times as great as the sum of the organic precursor injection step's time periods.

Claim 51

A deposition method comprising the following steps: injecting an organic precursor within a reactor having a wafer positioned therein to form a first layer on the wafer, the first layer comprising predominately an inorganic material, the first layer also comprising incorporated carbon; generating a first plasma within the reactor to treat the wafer with a first plasma treatment which removes the incorporated carbon from the first layer, the first plasma being generated from a component gas comprising at least one of the elements N or Ar; after the first plasma treatment, injecting the organic precursor to within the reactor having the wafer positioned therein to form a second layer on the wafer; generating a second plasma within the reactor to treat the wafer with a second plasma treatment; and wherein the organic precursor injection steps and the plasma treatment steps are conducted for respective time periods, the sum of the plasma treatment step's time periods being at least two times as great as the sum of the organic precursor injection step's time periods.

Claim 52

A deposition method comprising the following steps: injecting an organic precursor within a reactor having a wafer positioned therein to form a first layer on the wafer, the first layer comprising predominately an inorganic material, the first layer also comprising incorporated carbon; generating a first plasma within the reactor to treat the wafer with a first plasma treatment which removes the incorporated carbon from the first layer, the first plasma being generated from a component gas comprising at least one of the elements N or Ar; after the first plasma treatment, injecting the organic precursor to within the reactor having the wafer positioned therein to form a second layer on the wafer; generating a second plasma within the reactor to treat the wafer with a second plasma treatment; and wherein the organic precursor injection steps and the plasma treatment steps are conducted for respective time periods, the sum of the plasma treatment step's time periods being at least two times as great as the sum of the organic precursor injection step's time periods.

Claim 53

A deposition method comprising the following steps: depositing a first layer on a semiconductor wafer, the first layer comprising predominately an inorganic material, the first layer also comprising incorporated hydrocarbon; after depositing the first layer, generating a first plasma adjacent the first layer from a component gas, the component gas comprising at least one of the elements N, H or Ar; and removing the hydrocarbon from the first layer with the first plasma.

Claim 54

A deposition method comprising the following steps: depositing a first layer on a semiconductor wafer, the first layer comprising predominately an inorganic material, the first layer also comprising incorporated hydrocarbon; after depositing the first layer, generating a first plasma adjacent the first layer from a component gas, the component gas comprising at least one of the elements N, H or Ar; and removing the hydrocarbon from the first layer with the first plasma.

Claim 55

A deposition method comprising the following steps: depositing a first layer on a semiconductor wafer, the first layer comprising predominately an inorganic material, the first layer also comprising incorporated hydrocarbon; after depositing the first layer, generating a first plasma adjacent the first layer from a component gas, the component gas comprising at least one of the elements N, H or Ar; removing the hydrocarbon from the first layer with the first plasma; after removing the hydrocarbon from the first layer, depositing a second layer on the wafer, the second layer comprising incorporated carbon; generating a second plasma adjacent the second layer; and removing the carbon from the second layer with the second plasma.

Claim 56

A deposition method comprising the following steps: depositing a first layer on a semiconductor wafer, the first layer comprising predominately an inorganic material, the first layer also comprising incorporated hydrocarbon; after depositing the first layer, generating a first plasma adjacent the first layer from a component gas, the component gas comprising at least one of the elements N, H or Ar; removing the hydrocarbon from the first layer with the first plasma; after removing the hydrocarbon from the first layer, depositing a second layer on the wafer, the second layer comprising incorporated carbon; generating a second plasma adjacent the second layer; and removing the carbon from the second layer with the second plasma.

Claim 57

A chemical vapor deposition method comprising the following steps: forming a first layer on a semiconductor wafer in a reactor, the first layer comprising predominately an inorganic material, the first layer also comprising incorporated carbon; and after forming the first layer, injecting a component gas into the reactor and generating a plasma from the component gas within the reactor, the component gas comprising at least one of the elements N or Ar, the component gas providing an activated state component which is effective to remove the carbon from the first layer.

Claim 58

A chemical vapor deposition method comprising the following steps: forming a first layer on a semiconductor wafer in a reactor, the first layer comprising predominately an inorganic material, the first layer also comprising incorporated carbon; and after forming the first layer, injecting a component gas into the reactor and generating a plasma from the component gas within the reactor, the component gas comprising at least one of the elements N or Ar, the component gas providing an activated state component which is effective to remove the carbon from the first layer.