US6207522B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Formation of thin film capacitors
Assignee: Microcoating Technologies Inc
•
Filing: 1998-11-23
•
Granted: 2001-03-27
•
Expires: 2018-11-23
Abstract
Abstract Thin layer capacitors are formed from a first flexible metal layer, a dielectric layer between about 0.03 and about 2 microns deposited thereon, and a second flexible metal layer deposited on the dielectric layer. The first flexible metal layer may either be a metal foil, such as a copper, aluminum, or nickel foil, or a metal layer deposited on a polymeric support sheet. Depositions of the layers is by or is facilitate by combustion chemical vapor deposition or controlled atmosphere chemical vapor deposition.
Inventors
- 👤 Andrew T. Hunt
- 👤 Tzyy Jiuan Hwang
- 👤 Helmut G. Hornis
- 👤 Wen-Yi Lin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 12:10
CPC Classifications
H; H05; H05K; H05K1/00; H05K1/16; H05K1/162; H01; H01G; H01G4/00; H01G4/002; H01G4/018; H01G4/06; H01G4/08; H01G4/085; H01G7/00; H01G7/06; H05K2201/00; H05K2201/01; H05K2201/0137; H05K2201/0175; H05K2201/0179; H05K2201/03; H05K2201/0302; H05K2201/0317; H05K2201/0332; H05K2201/0335; H05K2201/0355; H05K2201/09; H05K2201/09209; H05K2201/0929; H05K2201/09309; H05K3/00; H05K3/38; H05K3/388; H05K3/46; H05K3/4644; H05K3/467
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
43 words
A method of forming at least one capacitor comprising providing a first metal foil layer, depositing on said metal foil layer a dielectric material layer between about 0.03 and about 2 microns thick, and depositing on said dielectric material a second metal layer.
Claim 2
Independent Claim
43 words
A method of forming at least one capacitor comprising providing a first metal foil layer, depositing on said metal foil layer a dielectric material layer between about 0.03 and about 2 microns thick, and depositing on said dielectric material a second metal layer.
Claim 3
Dependent Claim
18 words
The method according to claim 1 wherein said dielectric material layer is deposited by combustion chemical vapor deposition.
Claim 4
Dependent Claim
25 words
The method according to claim 1 wherein said second metal layer is deposited by combustion chemical vapor deposition or controlled atmosphere combustion chemical vapor deposition.
Claim 5
Dependent Claim
44 words
The method according to claim 1 wherein said second metal layer is formed by depositing an electrically conductive seed layer by combustion chemical vapor deposition or controlled atmosphere combustion chemical vapor deposition and additional metal for said second metal layer is deposited by electroplating.
Claim 6
Dependent Claim
74 words
The method according to claim 1 wherein prior to depositing said dielectric layer on said metal foil layer, a barrier layer between about 0.01 and about 0.08 microns thick is deposited on said foil to protect said metal foil layer from excessive temperature during deposition of said dielectric material layer and/or to prevent oxidation of said metal foil layer and/or to prevent chemical interaction between said metal foil layer and said dielectric material layer.
Claim 7
Dependent Claim
44 words
The method according to claim 26 wherein prior to depositing said second metal layer, a layer of material is deposited between about 0.001 and about 0.05 microns thick, which layer of material promotes adhesion between said dielectric material layer and said second metal layer.
Claim 8
Dependent Claim
22 words
The method according to claim 1 wherein second metal layer is patterned so as to provide a plurality of discrete capacitor plates.
Claim 9
Dependent Claim
32 words
The method according to claim 7 wherein said patterned second material layer is laminated to dielectric material and said metal foil layer is patterned to form a plurality of discrete capacitor plates.
Claim 10
Dependent Claim
16 words
The method according to claim 8 wherein patterned metal foil layer is laminated to dielectric material.
Claim 11
Independent Claim
70 words
A method of providing at least one thin layer capacitor comprising providing a polymeric support sheet, depositing on said support sheet a first metal layer between about 0.05 and about 3 microns thick, depositing on said first metal layer a dielectric material layer between about 0.03 and about 2 microns thick, and deposition on said dielectric material layer a second metal layer between about 0.05 and about 3 microns thick.
Claim 12
Independent Claim
70 words
A method of providing at least one thin layer capacitor comprising providing a polymeric support sheet, depositing on said support sheet a first metal layer between about 0.05 and about 3 microns thick, depositing on said first metal layer a dielectric material layer between about 0.03 and about 2 microns thick, and deposition on said dielectric material layer a second metal layer between about 0.05 and about 3 microns thick.
Claim 13
Dependent Claim
21 words
The method according to claim 10 wherein said second metal layer is subsequently patterned so as to form discrete capacitor plates.
References Cited (Backward Citations)
US3481781A
Cited
US4277525A
Cited
US4501602A
Cited
US4645524A
Cited
US5079069A
Cited
US5155655A
Cited
US5161086A
Cited
US5356672A
Cited
US5043002A
Cited
US5152819A
Cited
US5154744A
Cited
US5261153A
Cited
US5454847A
Cited
US5466892A
Cited
US5410107A
Cited
US5652021A
Cited
US5347258A
Cited
WO1996033298A1
Cited
US5670262A
Cited
WO1997038429A1
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-03-26 | 2004-09-25 | 2005-03-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-03-26 | 2008-09-25 | 2009-03-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-03-26 | 2012-09-25 | 2013-03-27 | $7700.00 | Window Closed / Lapsed |