US5652021A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Combustion chemical vapor deposition of films and coatings
Assignee: Georgia Tech Research Corp
•
Filing: 1995-04-03
•
Granted: 1997-07-29
•
Expires: 2015-04-03
Abstract
Abstract A method for applying coatings to substrates using combustion chemical vapor deposition by mixing together a reagent and a carrier solution to form a reagent mixture, igniting the reagent mixture to create a flame, or flowing the reagent mixture through a plasma torch, in which the reagent is at least partially vaporized into a vapor phase, and contacting the vapor phase of the reagent to a substrate resulting in the deposition, at least in part from the vapor phase, of a coating of the reagent which can be controlled so as to have a preferred orientation on the substrate, and an apparatus to accomplish this method.
Inventors
- 👤 Andrew T. Hunt
- 👤 Joe K. Cochran
- 👤 William Brent Carter
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 16:20
CPC Classifications
C; C30; C30B; C30B25/00; C30B25/02; C30B25/10; C30B25/105; C23; C23C; C23C16/00; C23C16/44; C23C16/453; C23C16/22; C23C16/30; C23C16/40; C23C16/405; C23C16/408; C23C16/409; C23C16/448; C23C16/50; C23C16/513; C30B29/00; C30B29/10; C30B29/16; C30B29/22; C30B29/225; Y; Y02; Y02T; Y02T50/00; Y02T50/60
Claims Analysis
Total Claims: 37
Claim 1
Independent Claim
243 words
A method for applying a coating selected from the group consisting of a metal, metal oxide, nitride, carbide, fluoride, boride and carbonate to substrates using chemical vapor deposition comprising the steps of: (a) providing a substrate having at least one surface to be coated; (b) selecting a reagent and a carrier medium and mixing together said reagent and said carrier medium to form a reagent mixture, the reagent being selected such that at least a portion of the reagent forms the metal, metal oxide, nitride, carbide, fluoride, boride and carbonate coating; (c) providing a combustion means; (d) providing an oxidant to said combustion means to assist in combusting said reagent mixture; (e) introducing said reagent mixture into said combustion means and combusting said reagent mixture thereby producing a flame which produces radiant energy and hot gases and vaporizing at least a portion of said reagent into a vapor phase; (f) locating said substrate in a zone located relative to said flame such that the substrate is heated by said radiant energy and said hot gases of said flame sufficiently to allow adhesion of said vapor phase onto said substrate to form the metal, metal oxide, nitride, carbide, fluoride, boride and carbonate coating on said substrate; and (g) contacting said vapor phase of said reagent with said substrate in said zone resulting in the deposition from said vapor phase of the metal, metal oxide, nitride, carbide, fluoride, boride and carbonate coating onto said substrate.
Claim 2
Independent Claim
243 words
A method for applying a coating selected from the group consisting of a metal, metal oxide, nitride, carbide, fluoride, boride and carbonate to substrates using chemical vapor deposition comprising the steps of: (a) providing a substrate having at least one surface to be coated; (b) selecting a reagent and a carrier medium and mixing together said reagent and said carrier medium to form a reagent mixture, the reagent being selected such that at least a portion of the reagent forms the metal, metal oxide, nitride, carbide, fluoride, boride and carbonate coating; (c) providing a combustion means; (d) providing an oxidant to said combustion means to assist in combusting said reagent mixture; (e) introducing said reagent mixture into said combustion means and combusting said reagent mixture thereby producing a flame which produces radiant energy and hot gases and vaporizing at least a portion of said reagent into a vapor phase; (f) locating said substrate in a zone located relative to said flame such that the substrate is heated by said radiant energy and said hot gases of said flame sufficiently to allow adhesion of said vapor phase onto said substrate to form the metal, metal oxide, nitride, carbide, fluoride, boride and carbonate coating on said substrate; and (g) contacting said vapor phase of said reagent with said substrate in said zone resulting in the deposition from said vapor phase of the metal, metal oxide, nitride, carbide, fluoride, boride and carbonate coating onto said substrate.
Claim 3
Dependent Claim
14 words
The method as claimed in claim 1, wherein said coating is a crystalline film.
Claim 4
Dependent Claim
22 words
The method as claimed in claim 1, wherein said reagent mixture is a liquid solution and said coating is a non-crystalline film.
Claim 5
Dependent Claim
13 words
The method as claimed in claim 1, wherein said reagent mixture is flammable.
Claim 6
Dependent Claim
27 words
The method as claimed in claim 2, wherein a fuel capable of combustion is supplied to said combustion means to fuel said combusting of said reagent mixture.
Claim 7
Dependent Claim
27 words
The method as claimed in claim 3, wherein a fuel capable of combustion is supplied to said combustion means to fuel said combusting of said reagent mixture.
Claim 8
Dependent Claim
16 words
The method as claimed in claim 2, wherein said carrier medium is a liquid organic solvent.
Claim 9
Dependent Claim
16 words
The method as claimed in claim 3, wherein said carrier medium is a liquid organic solvent.
Claim 10
Dependent Claim
30 words
The method as claimed in claim 2, wherein said reagent is a gas, a vapor, or a liquid and said carrier medium is a gas, a vapor, or a liquid.
Claim 11
Dependent Claim
30 words
The method as claimed in claim 3, wherein said reagent is a gas, a vapor, or a liquid and said carrier medium is a gas, a vapor, or a liquid.
Claim 12
Dependent Claim
26 words
The method as claimed in claim 9, wherein said reagent mixture is a liquid solution and said vapor phase consists essentially of vapors of said reagent.
Claim 13
Dependent Claim
24 words
The method as claimed in claim 11, wherein said coating comprises a combination of vapor deposited and spray pyrolysis deposited film of said reagent.
Claim 14
Dependent Claim
21 words
The method as claimed in claim 12, wherein said coating is comprised essentially of spray pyrolysis deposited film of said reagent.
Claim 15
Dependent Claim
36 words
The method as claimed in claim 7, wherein said reagent mixture is a liquid solution which comprises solid particles of said reagent and said vapor comprises vapors of said reagent and solid particles of said reagent.
Claim 16
Dependent Claim
19 words
The method as claimed in claim 11 wherein said coating is an essentially heterogeneously nucleated film comprising said reagent.
Claim 17
Dependent Claim
22 words
The method as claimed in claim 14 wherein said coating is a film comprising solid particles of said reagent and said reagent.
Claim 18
Dependent Claim
21 words
The method as claimed in claim 16, wherein said coating comprises less than about 50% by volume of said solid particles.
Claim 19
Dependent Claim
18 words
The method as claimed in claim 7, wherein said coating is less than about 1000 microns in thickness.
Claim 20
Dependent Claim
18 words
The method as claimed in claim 18, wherein said coating is less than about 100 microns in thickness.
Claim 21
Dependent Claim
24 words
The method as claimed in claim 1, wherein said substrate is heated predominantly by the heat of combustion produced by combusting said reagent mixture.
Claim 22
Dependent Claim
18 words
The method as claimed in claim 1, wherein said substrate is heated predominantly by a secondary heat source.
Claim 23
Dependent Claim
26 words
The method as claimed in claim 7, wherein said coating is thermodynamically stable in an oxidizing environment having a temperature of approximately 300° C. or higher.
Claim 24
Dependent Claim
27 words
The method as claimed in claim 7, wherein said coating is not thermodynamically stable in an oxidizing environment having a temperature of approximately 300° C. or higher.
Claim 25
Dependent Claim
14 words
The method as claimed in claim 22, wherein said reagent is a metalorganic compound.
Claim 26
Dependent Claim
23 words
The method as claimed in claim 23, wherein additional reactants are supplied to said combustion means proximate to but just beyond said flame.
Claim 27
Dependent Claim
23 words
The method as claimed in claim 7, wherein said reagent mixture further comprises non-reactive particles which deposit on said substrate with said coating.
Claim 28
Dependent Claim
17 words
The method as claimed in claim 26, wherein said non-reactive particles are molten when striking said substrate.
Claim 29
Dependent Claim
50 words
The method as claimed in claim 1, wherein said flame has a temperature of between about 300° C., and 2800° C., said substrate has a surface temperature of between about 100° C. and 2200° C., and said deposition occurs at a pressure of between about 10 tort and 10,000 torr.
Claim 30
Dependent Claim
27 words
The method as claimed in claim 28, wherein said coating is deposited on said substrate at a deposition rate of between about 0.1 μm/hr and 1000 μm/hr.
Claim 31
Dependent Claim
22 words
The method as claimed in claim 29, wherein said substrate has a surface temperature of between about 400° C. and 1300° C.
Claim 32
Dependent Claim
18 words
The method as claimed in claim 3, wherein said coating is less than about 1 mm in thickness.
Claim 33
Dependent Claim
50 words
The method as claimed in claim 31, wherein said flame has a temperature of between about 300° C. and 2800° C., said substrate has a surface temperature of between about 100° C. and 1500° C., and said deposition occurs at a pressure of between about 10 torr and 10,000 torr.
Claim 34
Dependent Claim
27 words
The method as claimed in claim 32, wherein said coating is deposited on said substrate at a deposition rate of between about 0.1 μm/hr and 1000 μm/hr.
Claim 35
Dependent Claim
22 words
The method as claimed in claim 33, wherein said substrate has a surface temperature of between about 400° C. and 1300° C.
Claim 36
Independent Claim
205 words
A method for applying, a coating selected from the group consisting of a metal, metal oxide, nitride, carbide, fluoride, boride and carbonate to substrates using chemical vapor deposition comprising the steps of: (a) providing a substrate having at least one surface to be coated; (b) selecting a reagent and a carrier medium and mixing together said reagent and said carrier medium to form a reagent mixture, the reagent being selected such that at least a portion of the reagent forms the metal, metal oxide, nitride, carbide, fluoride, boride and carbonate coating; (c) combusting at least a portion of said reagent mixture thereby producing a flame which produces radiant energy and hot gases and vaporizing at least a portion of said reagent into a vapor phase; (d) locating said substrate in a zone such that the substrate is heated by said radiant energy and said hot gases of said flame sufficiently to allow adhesion of said vapor phase onto said substrate to form the coating on said substrate; and (e) contacting said vapor phase of said reagent with said substrate in said zone resulting in the deposition from said vapor phase of the metal, metal oxide, nitride, carbide, fluoride, boride and carbonate coating onto said substrate.
Claim 37
Independent Claim
205 words
A method for applying, a coating selected from the group consisting of a metal, metal oxide, nitride, carbide, fluoride, boride and carbonate to substrates using chemical vapor deposition comprising the steps of: (a) providing a substrate having at least one surface to be coated; (b) selecting a reagent and a carrier medium and mixing together said reagent and said carrier medium to form a reagent mixture, the reagent being selected such that at least a portion of the reagent forms the metal, metal oxide, nitride, carbide, fluoride, boride and carbonate coating; (c) combusting at least a portion of said reagent mixture thereby producing a flame which produces radiant energy and hot gases and vaporizing at least a portion of said reagent into a vapor phase; (d) locating said substrate in a zone such that the substrate is heated by said radiant energy and said hot gases of said flame sufficiently to allow adhesion of said vapor phase onto said substrate to form the coating on said substrate; and (e) contacting said vapor phase of said reagent with said substrate in said zone resulting in the deposition from said vapor phase of the metal, metal oxide, nitride, carbide, fluoride, boride and carbonate coating onto said substrate.
References Cited (Backward Citations)
US3849057A
Cited
US3883336A
Cited
JPS62288842A
Cited
US5275798A
Cited
US5017550A
Cited
US5002928A
Cited
US4822466A
Cited
US4931425A
Cited
US5026684A
Cited
US5034372A
Cited
US4957591A
Cited
US5178905A
Cited
US5021399A
Cited
US4994420A
Cited
US5108983A
Cited
US5215788A
Cited
US5174983A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-07-28 | 2001-01-27 | 2001-07-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-07-28 | 2005-01-27 | 2005-07-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-07-28 | 2009-01-27 | 2009-07-29 | $7700.00 | Window Closed / Lapsed |