Patent US6200865B1 successfully refreshed from Google Patents.
US6200865B1
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Use of sacrificial dielectric structure to form semiconductor device with a self-aligned threshold adjust and overlying low-resistance gate
Assignee: GlobalFoundries Inc
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Filing: 1998-12-04
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Granted: 2001-03-13
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Expires: 2018-12-04
Abstract
Abstract A semiconductor device is provided and formed using self-aligned low-resistance gates within a metal-oxide semiconductor (MOS) process. A sacrificial dielectric gate structure is formed on a semiconductor substrate instead of a conventional gate dielectric/gate conductor stack. After forming junction regions within a semiconductor substrate, the gate structure is removed to form a trench within a dielectric formed above the substrate. A low-resistance gate material can then be arranged within the trench, i.e., in the region removed of the gate conductor. The gate material can take various forms, including a single layer or multiple metal and/or dielectric layers interposed throughout the as-filled trench. The gate formation occurs after high temperature cycles often associated with activating the previously implanted junctions or growing gate dielectrics. Thus, low-temperature metals such as copper or copper alloys can be used.
Inventors
- 👤 Mark I. Gardner
- 👤 H. Jim Fulford, Jr.
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:00
CPC Classifications
H; H10; H10D; H10D30/00; H10D30/01; H10D30/021; H10D30/0217; H10D30/0411; H10D30/60; H10D30/68; H10D30/6891; H10D64/00; H10D64/01; H10D64/017; H10D64/031; H10D64/035; H10D30/0223; H10D30/0227
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
212 words
A method for forming a semiconductor device, comprising: forming a dielectric sacrificial gate structure upon a semiconductor substrate; introducing first impurity distributions into the semiconductor substrate using the sacrificial gate structure as a mask, wherein the impurity distributions are of opposite type than the semiconductor substrate; forming dielectric spacers adjacent opposed sidewall surfaces of the sacrificial gate structure, wherein the dielectric spacers comprise a different chemical composition than the sacrificial gate structure; introducing second impurity distributions into the semiconductor substrate using the sacrificial gate structure and dielectric spacers as a mask, wherein the second impurity distributions are of the same type as the first impurity distributions, and wherein the second impurity distributions are more heavily doped and extend further into the substrate than the first impurity distributions; forming silicide regions upon the semiconductor substrate and exclusive of the dielectric spacers forming protective dielectrics above the semiconductor substrate to an elevation level commensurate with an upper surface of the sacrificial gate structure, wherein the protective dielectrics comprise a different chemical composition than the sacrificial gate structure; removing the sacrificial gate structure to form a trench; introducing dopants into a portion of the semiconductor substrate exposed by formation of the trench; and filling at least a portion of the trench with a conductive material.
Claim 2
Independent Claim
212 words
A method for forming a semiconductor device, comprising: forming a dielectric sacrificial gate structure upon a semiconductor substrate; introducing first impurity distributions into the semiconductor substrate using the sacrificial gate structure as a mask, wherein the impurity distributions are of opposite type than the semiconductor substrate; forming dielectric spacers adjacent opposed sidewall surfaces of the sacrificial gate structure, wherein the dielectric spacers comprise a different chemical composition than the sacrificial gate structure; introducing second impurity distributions into the semiconductor substrate using the sacrificial gate structure and dielectric spacers as a mask, wherein the second impurity distributions are of the same type as the first impurity distributions, and wherein the second impurity distributions are more heavily doped and extend further into the substrate than the first impurity distributions; forming silicide regions upon the semiconductor substrate and exclusive of the dielectric spacers forming protective dielectrics above the semiconductor substrate to an elevation level commensurate with an upper surface of the sacrificial gate structure, wherein the protective dielectrics comprise a different chemical composition than the sacrificial gate structure; removing the sacrificial gate structure to form a trench; introducing dopants into a portion of the semiconductor substrate exposed by formation of the trench; and filling at least a portion of the trench with a conductive material.
Claim 3
Dependent Claim
73 words
The method as recited in claim 1 , wherein said forming protective dielectrics comprises: depositing a conformal dielectric layer over said sacrificial gate structure and said semiconductor substrate, wherein a thickness of said dielectric layer is greater than a thickness of said sacrificial gate structure; and removing an upper portion of said dielectric layer, wherein a lower surface of said upper portion is co-planar with the upper surface of the sacrificial gate structure.
Claim 4
Dependent Claim
35 words
The method as recited in claim 2 , wherein said forming the sacrificial dielectric gate structure comprises patterning a deposited oxide layer, and wherein said depositing the conformal dielectric layer comprises depositing nitride or oxynitride.
Claim 5
Dependent Claim
35 words
The method as recited in claim 2 , wherein said forming the sacrificial dielectric gate structure comprises patterning a deposited nitride or oxynitride layer, and wherein said depositing the conformal dielectric layer comprises depositing oxide.
Claim 6
Dependent Claim
35 words
The method as recited in claim 1 , wherein said filling comprises: depositing a conductive layer within said trench and over said protective dielectrics; and removing portions of the conductive layer external to said trench.
Claim 7
Dependent Claim
21 words
The method as recited in claim 5 , wherein said depositing a conductive layer comprises depositing copper or a copper alloy.
Claim 8
Dependent Claim
17 words
The method as recited in claim 5 , wherein said depositing a conductive layer comprises depositing aluminum.
Claim 9
Dependent Claim
48 words
The method as recited in claim 5 , wherein said filling further comprises forming a gate dielectric on a floor of the trench, prior to said depositing a conductive layer, and wherein said removing portions further comprises removing any portions of the gate dielectric external to the trench.
Claim 10
Dependent Claim
35 words
The method as recited in claim 8 , wherein said introducing comprises implanting a threshold adjust impurity distribution into a portion of the semiconductor substrate underlying the trench, prior to said depositing a conductive layer.
Claim 11
Dependent Claim
73 words
The method as recited in claim 8 , wherein said filling further comprises: forming a second gate dielectric within the trench and above the conductive layer, prior to said removing portions; and forming a second conductive layer within the trench and above the second gate dielectric, prior to said removing portions, wherein said removing portions further comprises removing portions of the second gate dielectric and the second conductive layer external to the trench.
Claim 12
Dependent Claim
73 words
The method as recited in claim 1 , wherein said forming the dielectric sacrificial gate structure comprises: chemical vapor depositing a dielectric layer over the semiconductor substrate; depositing a photoresist layer over the dielectric layer; exposing the photoresist layer through a mask and developing the photoresist layer to form a patterned photoresist structure; anisotropically etching exposed portions of the dielectric layer to form the sacrificial gate structure; and removing the patterned photoresist structure.
Claim 13
Dependent Claim
18 words
The method as recited in claim 11 , wherein said chemical vapor depositing comprises using a silane source.
Claim 14
Dependent Claim
24 words
The method as recited in claim 2 , wherein said depositing the conformal dielectric comprises chemical vapor depositing using a tetraethyl orthosilicate (TEOS) source.
Claim 15
Dependent Claim
41 words
The method as recited in claim 8 , wherein said forming the gate dielectric comprises heating the trench to a temperature higher than about 700° C. in an ambient comprising a chemical selected from the group consisting of oxygen and nitrogen.
Claim 16
Dependent Claim
35 words
The method as recited in claim 10 , wherein said forming the second gate dielectric comprises chemical vapor depositing of a layer comprising a material selected from the group consisting of oxide, nitride, and oxynitride.
Claim 17
Dependent Claim
18 words
The method as recited in claim 1 , wherein said removing the sacrificial gate structure comprises wet etching.
Claim 18
Independent Claim
149 words
A method for forming a semiconductor device, comprising: forming a dielectric sacrificial gate structure upon a semiconductor substrate; forming protective dielectrics above the semiconductor substrate to an elevation level commensurate with an upper surface of the sacrificial gate structure, wherein the protective dielectrics comprise a different chemical composition than the sacrificial gate structure; removing the sacrificial gate structure to form a trench; introducing dopants into a portion of the semiconductor substrate exposed by formation of the trench; forming a gate dielectric on a floor of the trench; depositing a conductive layer within said trench and over said gate dielectric; forming a second gate dielectric within the trench and above the conductive layer; depositing a second conductive layer within the trench and above the second gate dielectric; and removing portions of said gate dielectric, said conductive layer, said second gate dielectric and said second conductive layer external to the trench.
Claim 19
Independent Claim
149 words
A method for forming a semiconductor device, comprising: forming a dielectric sacrificial gate structure upon a semiconductor substrate; forming protective dielectrics above the semiconductor substrate to an elevation level commensurate with an upper surface of the sacrificial gate structure, wherein the protective dielectrics comprise a different chemical composition than the sacrificial gate structure; removing the sacrificial gate structure to form a trench; introducing dopants into a portion of the semiconductor substrate exposed by formation of the trench; forming a gate dielectric on a floor of the trench; depositing a conductive layer within said trench and over said gate dielectric; forming a second gate dielectric within the trench and above the conductive layer; depositing a second conductive layer within the trench and above the second gate dielectric; and removing portions of said gate dielectric, said conductive layer, said second gate dielectric and said second conductive layer external to the trench.
Claim 20
Dependent Claim
43 words
The method as recited in claim 17 , wherein said forming the sacrificial gate structure comprises forming dielectric spacers adjacent opposed sidewall surfaces of the sacrificial gate structure, and wherein the dielectric spacers comprise a different chemical composition than the sacrificial gate structure.
Claim 21
Dependent Claim
125 words
The method as recited in claim 18 , further comprising: introducing first impurity distributions into the semiconductor substrate using the sacrificial gate structure as a mask, wherein the impurity distributions are of opposite type than the semiconductor substrate, prior to said forming dielectric spacers; introducing second impurity distributions into the semiconductor substrate using the sacrificial gate structure and dielectric spacers as a mask, prior to said forming protective dielectrics, wherein the second impurity distributions are of the same type as the first impurity distributions, and wherein the second impurity distributions are more heavily doped and extend further into the substrate than the first impurity distributions; and forming silicide regions upon the semiconductor substrate and exclusive of the dielectric spacers, prior to said forming protective dielectrics.
Claim 22
Dependent Claim
35 words
The method as recited in claim 17 , wherein said introducing comprises implanting a threshold adjust impurity distribution into a portion of the semiconductor substrate underlying the trench, prior to said forming a gate dielectric.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-03-12 | 2004-09-11 | 2005-03-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-03-12 | 2008-09-11 | 2009-03-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-03-12 | 2012-09-11 | 2013-03-13 | $7700.00 | Window Closed / Lapsed |