US6159787A
Expired / Lapsed
US
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Structures and processes for reduced topography trench capacitors
Assignee: GlobalFoundries Inc
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Filing: 1998-05-28
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Granted: 2000-12-12
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Expires: 2018-05-28
Abstract
Abstract A trench capacitor for use with a substrate. The capacitor has an inner electrode formed above the substrate. The inner electrode has a plurality of metal layers, a dielectric partially surrounding the inner electrode, and an outer electrode partially surrounding the dielectric.
Inventors
- 👤 John M. Aitken
- 👤 Alvin W. Strong
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 04:54
CPC Classifications
H; H10; H10D; H10D1/00; H10D1/60; H10D1/68; H10D1/692; H10W; H10W20/00; H10W20/40; H10W20/495; H10D1/01; H10D1/041; H10D1/042; H10D1/711; H10D1/716; H10P; H10P50/00; H10P50/20; H10P50/28; H10P50/282; H10P50/283; H10W20/01; H10W20/031
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
88 words
A capacitor fabricated over a substrate comprising: at least one insulation layer disposed over the substrate; a trench formed in the at least one insulation layer; a first electrode formed along an interior surface of the trench, the first electrode not physically contacting the substrate; a dielectric disposed along at least an interior surface of the first electrode; and a second electrode disposed along at least a portion of the dielectric, wherein the first electrode is formed at a uniform thickness along the interior surface of the trench.
Claim 2
Dependent Claim
88 words
A capacitor fabricated over a substrate comprising: at least one insulation layer disposed over the substrate; a trench formed in the at least one insulation layer; a first electrode formed along an interior surface of the trench, the first electrode not physically contacting the substrate; a dielectric disposed along at least an interior surface of the first electrode; and a second electrode disposed along at least a portion of the dielectric, wherein the first electrode is formed at a uniform thickness along the interior surface of the trench.
Claim 3
Dependent Claim
66 words
A capacitor structure formed over a substrate, the capacitor comprising: a trench formed over the substrate; an inner electrode disposed in the trench, the inner electrode having: i) a plurality of metal layers, and ii) a plurality of metal contacts coupled to respective ones of the plurality of metal layers; a dielectric partially surrounding the inner electrode; and to an outer electrode partially surrounding the dielectric.
Claim 4
Dependent Claim
66 words
A capacitor structure formed over a substrate, the capacitor comprising: a trench formed over the substrate; an inner electrode disposed in the trench, the inner electrode having: i) a plurality of metal layers, and ii) a plurality of metal contacts coupled to respective ones of the plurality of metal layers; a dielectric partially surrounding the inner electrode; and to an outer electrode partially surrounding the dielectric.
Claim 5
Dependent Claim
67 words
A trench capacitor for use with a substrate comprising: an insulator disposed over a surface of the substrate; an orifice formed within the insulator having a bottom portion above the surface of the substrate; a first metal layer disposed along a surface of the orifice; a dielectric disposed along a surface of the first metal layer; and a second metal disposed along a surface of the dielectric.
Claim 6
Dependent Claim
67 words
A trench capacitor for use with a substrate comprising: an insulator disposed over a surface of the substrate; an orifice formed within the insulator having a bottom portion above the surface of the substrate; a first metal layer disposed along a surface of the orifice; a dielectric disposed along a surface of the first metal layer; and a second metal disposed along a surface of the dielectric.
Claim 7
Dependent Claim
48 words
A trench capacitor according to claim 3, further comprising: a second orifice formed from the bottom portion of the insulator to the surface of the substrate; and a third metal disposed within the second orifice and coupled to the surface of the substrate and the first metal layer.
Claim 8
Dependent Claim
82 words
A trench capacitor for use with a substrate comprising: an insulator disposed over a surface of the substrate; a first metal formed within the insulator; an orifice formed within the insulator and exposing at least a portion of the first metal, the orifice having a bottom portion above the surface of the substrate; a dielectric disposed along at least a surface of the first metal and a portion of the orifice; and a second metal disposed along a surface of the dielectric.
Claim 9
Dependent Claim
82 words
A trench capacitor for use with a substrate comprising: an insulator disposed over a surface of the substrate; a first metal formed within the insulator; an orifice formed within the insulator and exposing at least a portion of the first metal, the orifice having a bottom portion above the surface of the substrate; a dielectric disposed along at least a surface of the first metal and a portion of the orifice; and a second metal disposed along a surface of the dielectric.
Claim 10
Dependent Claim
19 words
A trench capacitor according to claim 5, wherein the first metal is coupled to the surface of the substrate.
Claim 11
Dependent Claim
104 words
A trench capacitor for use with a substrate comprising: an insulator disposed over a surface of the substrate; a first metal formed within the insulator; a second metal formed within the insulator; an orifice formed within the insulator and exposing at least a portion of the first metal and the second metal, the orifice having a bottom portion above the surface of the substrate; a dielectric disposed along i) at least a surface of the first metal, ii) a portion of the second metal, and iii) a portion of the orifice; and a third metal disposed at least along a surface of the dielectric.
Claim 12
Dependent Claim
104 words
A trench capacitor for use with a substrate comprising: an insulator disposed over a surface of the substrate; a first metal formed within the insulator; a second metal formed within the insulator; an orifice formed within the insulator and exposing at least a portion of the first metal and the second metal, the orifice having a bottom portion above the surface of the substrate; a dielectric disposed along i) at least a surface of the first metal, ii) a portion of the second metal, and iii) a portion of the orifice; and a third metal disposed at least along a surface of the dielectric.
Claim 13
Dependent Claim
28 words
A trench capacitor according to claim 7, wherein the at least one of the first metal and the second metal is coupled to the surface of the substrate.
Claim 14
Dependent Claim
110 words
A trench capacitor for use with a substrate comprising: an insulator disposed over a surface of the substrate; at least two stacked metal studs or metal layers formed within the insulator; an orifice formed within the insulator and between the at least two metal studs or layers, and exposing at least a portion of the at least two metal studs or layers, the orifice having a bottom portion above the surface of the substrate; a dielectric disposed along at least a surface of the at least two metal studs or layers and a portion of the orifice; and a further metal disposed at least along a surface of the dielectric.
Claim 15
Dependent Claim
110 words
A trench capacitor for use with a substrate comprising: an insulator disposed over a surface of the substrate; at least two stacked metal studs or metal layers formed within the insulator; an orifice formed within the insulator and between the at least two metal studs or layers, and exposing at least a portion of the at least two metal studs or layers, the orifice having a bottom portion above the surface of the substrate; a dielectric disposed along at least a surface of the at least two metal studs or layers and a portion of the orifice; and a further metal disposed at least along a surface of the dielectric.
Claim 16
Dependent Claim
29 words
A trench capacitor according to claim 9, wherein the at least one of the at least two metal studs or layers is coupled to the surface of the substrate.
Claim 17
Dependent Claim
21 words
A trench capacitor according to claim 9, wherein the at least two metal studs or layers are coupled to one another.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-12-12 | 2004-06-12 | 2004-12-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-12-12 | 2008-06-12 | 2008-12-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-12-12 | 2012-06-12 | 2012-12-12 | $7700.00 | Window Closed / Lapsed |