US6137133A
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Programmable non-volatile memory cell and method of forming a non-volatile memory cell
Assignee: Micron Technology Inc
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Filing: 1998-05-11
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Granted: 2000-10-24
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Expires: 2018-05-11
Abstract
Abstract A method of forming a non-volatile memory array includes, a) providing first and second floating gate word lines atop a semiconductor substrate, the first and second word lines being adjacent one another and defining transistor active area therebetween, the first and second word lines having inwardly opposing and facing active area sidewall edges, the first and second word lines each comprising respective nitride capping layers having a thickness of at least about 1000 Angstroms; b) providing a nitride spacer layer over the nitride capping layer; c) anisotropically etching the nitride spacer layer to produce insulating sidewall spacers over the first and second word line active area sidewall edges, the anisotropic etching leaving at least a portion of the nitride capping layer covering each of the first and second word lines, the portion of each nitride capping layer joining with one of the sidewall spacers to cover the first and second word line active area sidewall edges and thereby defining a widened mask misalignment area than were such capping layer portions not present; d) providing an oxide layer over the sidewall spacers and capping layer; e) patterning and etching the oxide layer selectively relative to the nitride capping layer and sidewall spacers to define a contact opening to the active area, the contact opening overlapping with at least one nitride capping layer portion on one of the word lines; and f) providing an electrically conductive plug within the contact opening. A non-volatile memory array is disclosed.
Inventors
- 👤 Ralph Kauffman
- 👤 Roger Lee
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 17:10
CPC Classifications
H; H10; H10B; H10B41/00; H10B41/30; H10B69/00
Claims Analysis
Total Claims: 32
Claim 1
Independent Claim
137 words
A non-volatile memory array comprising: a word line having a floating gate over a substrate, the word line being positioned adjacent a drain region and a source region, the word line having sidewall edges which face away from one another; a discrete block comprising insulating material, the block being positioned over the floating gate and having sidewall edges which face away from one another, the block's sidewall edges defining the entire width of the block, one of the block's sidewall edges being aligned with a word line sidewall edge, the other of the block's sidewall edges being positioned intermediate the word line sidewall edges; a sidewall spacer over each word line sidewall edge, only one of the sidewall spacers being disposed over insulating material comprising the block; and a conductive plug extending upwardly from the drain region.
Claim 2
Dependent Claim
137 words
A non-volatile memory array comprising: a word line having a floating gate over a substrate, the word line being positioned adjacent a drain region and a source region, the word line having sidewall edges which face away from one another; a discrete block comprising insulating material, the block being positioned over the floating gate and having sidewall edges which face away from one another, the block's sidewall edges defining the entire width of the block, one of the block's sidewall edges being aligned with a word line sidewall edge, the other of the block's sidewall edges being positioned intermediate the word line sidewall edges; a sidewall spacer over each word line sidewall edge, only one of the sidewall spacers being disposed over insulating material comprising the block; and a conductive plug extending upwardly from the drain region.
Claim 3
Dependent Claim
24 words
The memory array of claim 1, wherein said one block sidewall edge is aligned with the word line sidewall edge nearest the drain region.
Claim 4
Dependent Claim
48 words
The memory array of claim 1 further comprising an insulative material layer immediately underneath the block and comprising a material which is different from material comprising the block, said insulative material layer having a layer thickness, said block having a thickness which is greater than said layer thickness.
Claim 5
Dependent Claim
13 words
The memory array of claim 3, wherein said block is a nitride block.
Claim 6
Dependent Claim
66 words
The memory array of claim 1, further comprising an insulative material layer immediately underneath the block and comprising a material which is different from material comprising the block, said insulative material layer having a layer thickness, said block having a thickness which is greater than said layer thickness; and said one block sidewall edge is aligned with the word line sidewall edge nearest the drain region.
Claim 7
Dependent Claim
109 words
A non-volatile memory array word line comprising: a conductive line over a substrate, the line having an insulator layer disposed over a conductive portion of the line and having a layer thickness, the line comprising a floating gate and having sidewalls which define a uniform lateral width therebetween along both the conductive line and the insulator layer; and a protective insulative cap disposed atop the insulator layer and comprising an insulator material which is different from insulator material comprising the insulator layer, the insulative cap having a lateral width which covers less than said uniform lateral width and an insulative cap thickness which is greater than the layer thickness.
Claim 8
Dependent Claim
109 words
A non-volatile memory array word line comprising: a conductive line over a substrate, the line having an insulator layer disposed over a conductive portion of the line and having a layer thickness, the line comprising a floating gate and having sidewalls which define a uniform lateral width therebetween along both the conductive line and the insulator layer; and a protective insulative cap disposed atop the insulator layer and comprising an insulator material which is different from insulator material comprising the insulator layer, the insulative cap having a lateral width which covers less than said uniform lateral width and an insulative cap thickness which is greater than the layer thickness.
Claim 9
Dependent Claim
15 words
The memory array of claim 6, wherein the cap thickness is at least 1000 Angstroms.
Claim 10
Dependent Claim
18 words
The memory array of claim 6, wherein the cap thickness is from about 1500 Angstroms to 3000 Angstroms.
Claim 11
Dependent Claim
35 words
The memory array of claim 6, wherein the cap has a sidewall which defines a terminus of its lateral width and another sidewall which is in substantial alignment with a sidewall of the conductive line.
Claim 12
Dependent Claim
15 words
The memory array of claim 9, wherein the cap thickness is at least 1000 Angstroms.
Claim 13
Dependent Claim
18 words
The memory array of claim 9, wherein the cap thickness is from about 1500 Angstroms to 3000 Angstroms.
Claim 14
Dependent Claim
176 words
A non-volatile memory array comprising: a word line assembly having a pair of sidewalls, the assembly being disposed over a substrate and having a floating gate, the assembly comprising a plurality of layers, one of the layers of the word line assembly comprising a conductive word line layer comprising a portion which is received elevationally over the floating gate; a first sidewall spacer disposed over the substrate adjacent the word line assembly and extending away from the substrate toward a first sidewall spacer terminus which is joined at an uppermost extent with a first layer of the plurality of layers comprising the word line assembly, the first sidewall spacer being received laterally over the word line layer; and a second sidewall spacer disposed over the substrate adjacent the word line assembly and extending away from the substrate toward a second sidewall spacer terminus which is joined at an uppermost extent with a second layer of the plurality of layers comprising the word line assembly, the second sidewall spacer being received laterally over the word line layer.
Claim 15
Dependent Claim
176 words
A non-volatile memory array comprising: a word line assembly having a pair of sidewalls, the assembly being disposed over a substrate and having a floating gate, the assembly comprising a plurality of layers, one of the layers of the word line assembly comprising a conductive word line layer comprising a portion which is received elevationally over the floating gate; a first sidewall spacer disposed over the substrate adjacent the word line assembly and extending away from the substrate toward a first sidewall spacer terminus which is joined at an uppermost extent with a first layer of the plurality of layers comprising the word line assembly, the first sidewall spacer being received laterally over the word line layer; and a second sidewall spacer disposed over the substrate adjacent the word line assembly and extending away from the substrate toward a second sidewall spacer terminus which is joined at an uppermost extent with a second layer of the plurality of layers comprising the word line assembly, the second sidewall spacer being received laterally over the word line layer.
Claim 16
Dependent Claim
135 words
A non-volatile memory array comprising: a word line assembly having a pair of sidewalls, the assembly being disposed over a substrate and having a floating gate, the assembly comprising a plurality of layers; a first sidewall spacer disposed over the substrate adjacent the word line assembly and extending away from the substrate toward a first sidewall spacer terminus which is joined at an uppermost extent with a first layer of the plurality of layers comprising the word line assembly; a second sidewall spacer disposed over the substrate adjacent the word line assembly and extending away from the substrate toward a second sidewall spacer terminus which is joined at an uppermost extent with a second layer of the plurality of layers comprising the word line assembly; and wherein the first and second layers comprise insulative materials.
Claim 17
Dependent Claim
135 words
A non-volatile memory array comprising: a word line assembly having a pair of sidewalls, the assembly being disposed over a substrate and having a floating gate, the assembly comprising a plurality of layers; a first sidewall spacer disposed over the substrate adjacent the word line assembly and extending away from the substrate toward a first sidewall spacer terminus which is joined at an uppermost extent with a first layer of the plurality of layers comprising the word line assembly; a second sidewall spacer disposed over the substrate adjacent the word line assembly and extending away from the substrate toward a second sidewall spacer terminus which is joined at an uppermost extent with a second layer of the plurality of layers comprising the word line assembly; and wherein the first and second layers comprise insulative materials.
Claim 18
Dependent Claim
136 words
A non-volatile memory array comprising: a word line assembly having a pair of sidewalls, the assembly being disposed over a substrate and having a floating gate, the assembly comprising a plurality of layers; a first sidewall spacer disposed over the substrate adjacent the word line assembly and extending away from the substrate toward a first sidewall spacer terminus which is joined at an uppermost extent with a first layer of the plurality of layers comprising the word line assembly; a second sidewall spacer disposed over the substrate adjacent the word line assembly and extending away from the substrate toward a second sidewall spacer terminus which is joined at an uppermost extent with a second layer of the plurality of layers comprising the word line assembly; and wherein the first and second layers comprise different insulative materials.
Claim 19
Dependent Claim
136 words
A non-volatile memory array comprising: a word line assembly having a pair of sidewalls, the assembly being disposed over a substrate and having a floating gate, the assembly comprising a plurality of layers; a first sidewall spacer disposed over the substrate adjacent the word line assembly and extending away from the substrate toward a first sidewall spacer terminus which is joined at an uppermost extent with a first layer of the plurality of layers comprising the word line assembly; a second sidewall spacer disposed over the substrate adjacent the word line assembly and extending away from the substrate toward a second sidewall spacer terminus which is joined at an uppermost extent with a second layer of the plurality of layers comprising the word line assembly; and wherein the first and second layers comprise different insulative materials.
Claim 20
Dependent Claim
168 words
A non-volatile memory array comprising: a word line assembly having a pair of sidewalls, the assembly being disposed over a substrate and having a floating gate, the assembly comprising a plurality of layers; a first sidewall spacer disposed over the substrate adjacent the word line assembly and extending away from the substrate toward a first sidewall spacer terminus which is joined at an uppermost extent with a first layer of the plurality of layers comprising the word line assembly; a second sidewall spacer disposed over the substrate adjacent the word line assembly and extending away from the substrate toward a second sidewall spacer terminus which is joined at an uppermost extent with a second layer of the plurality of layers comprising the word line assembly; and wherein the first layer comprises an insulative material which defines portions of both sidewalls of the word line assembly, and the second layer comprises an insulative material which defines a portion of only one of the sidewalls of the word line assembly.
Claim 21
Dependent Claim
168 words
A non-volatile memory array comprising: a word line assembly having a pair of sidewalls, the assembly being disposed over a substrate and having a floating gate, the assembly comprising a plurality of layers; a first sidewall spacer disposed over the substrate adjacent the word line assembly and extending away from the substrate toward a first sidewall spacer terminus which is joined at an uppermost extent with a first layer of the plurality of layers comprising the word line assembly; a second sidewall spacer disposed over the substrate adjacent the word line assembly and extending away from the substrate toward a second sidewall spacer terminus which is joined at an uppermost extent with a second layer of the plurality of layers comprising the word line assembly; and wherein the first layer comprises an insulative material which defines portions of both sidewalls of the word line assembly, and the second layer comprises an insulative material which defines a portion of only one of the sidewalls of the word line assembly.
Claim 22
Dependent Claim
16 words
The memory array of claim 15, wherein the first and second layers comprise different insulative materials.
Claim 23
Dependent Claim
23 words
The memory array of claim 15, wherein the second layer is thicker than the first layer and disposed elevationally over the first layer.
Claim 24
Dependent Claim
172 words
A non-volatile memory array comprising: a word line having a conductive floating gate atop a semiconductor substrate, the word line being disposed adjacent a substrate transistor drain region and a substrate transistor source region, the word line having sidewall edges one of which being a drain sidewall edge defined in part by conductive portions of the conductive floating gate, the other of which being a source sidewall edge defined in part by different conductive portions of the conductive floating gate, the word line further comprising a discrete nitride block having an inner drain sidewall edge which aligns with the word line drain sidewall edge, the nitride block having an outer source sidewall edge positioned intermediate the word line drain sidewall edge and the word line source sidewall edge; a sidewall spacer over the word line drain sidewall edge, the inner drain sidewall edge of the nitride block joining with the sidewall spacer to cover the word line drain sidewall edge; and a conductive plug extending upwardly from the substrate drain is region.
Claim 25
Dependent Claim
172 words
A non-volatile memory array comprising: a word line having a conductive floating gate atop a semiconductor substrate, the word line being disposed adjacent a substrate transistor drain region and a substrate transistor source region, the word line having sidewall edges one of which being a drain sidewall edge defined in part by conductive portions of the conductive floating gate, the other of which being a source sidewall edge defined in part by different conductive portions of the conductive floating gate, the word line further comprising a discrete nitride block having an inner drain sidewall edge which aligns with the word line drain sidewall edge, the nitride block having an outer source sidewall edge positioned intermediate the word line drain sidewall edge and the word line source sidewall edge; a sidewall spacer over the word line drain sidewall edge, the inner drain sidewall edge of the nitride block joining with the sidewall spacer to cover the word line drain sidewall edge; and a conductive plug extending upwardly from the substrate drain is region.
Claim 26
Dependent Claim
34 words
The memory array of claim 12 wherein one of the layers of the word line assembly comprises a conductive word line layer which comprises a portion which is received elevationally over the floating gate.
Claim 27
Dependent Claim
34 words
The memory array of claim 13 wherein one of the layers of the word line assembly comprises a conductive word line layer which comprises a portion which is received elevationally over the floating gate.
Claim 28
Dependent Claim
34 words
The memory array of claim 14 wherein one of the layers of the word line assembly comprises a conductive word line layer which comprises a portion which is received elevationally over the floating gate.
Claim 29
Dependent Claim
34 words
The memory array of claim 15 wherein one of the layers of the word line assembly comprises a conductive word line layer which comprises a portion which is received elevationally over the floating gate.
Claim 30
Dependent Claim
58 words
The memory array of claim 13 wherein one of the layers of the word line assembly comprises a conductive word line layer which comprises a portion which is received elevationally over the floating gate, the first sidewall spacer being received laterally over the word line layer, the second sidewall spacer being received laterally over the word line layer.
Claim 31
Dependent Claim
58 words
The memory array of claim 14 wherein one of the layers of the word line assembly comprises a conductive word line layer which comprises a portion which is received elevationally over the floating gate, the first sidewall spacer being received laterally over the word line layer, the second sidewall spacer being received laterally over the word line layer.
Claim 32
Dependent Claim
58 words
The memory array of claim 15 wherein one of the layers of the word line assembly comprises a conductive word line layer which comprises a portion which is received elevationally over the floating gate, the first sidewall spacer being received laterally over the word line layer, the second sidewall spacer being received laterally over the word line layer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-10-24 | 2004-04-24 | 2004-10-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-10-24 | 2008-04-24 | 2008-10-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-10-24 | 2012-04-24 | 2012-10-24 | $7700.00 | Window Closed / Lapsed |