Patent US6096590A successfully refreshed from Google Patents.
US6096590A
Expired / Lapsed
US
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Scalable MOS field effect transistor
Assignee: International Business Machines Corp
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Filing: 1998-06-30
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Granted: 2000-08-01
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Expires: 2018-06-30
Abstract
Abstract A field effect transistor and method for making is described incorporating self aligned source and drain contacts with Schottky metal-to-semiconductor junction and a T-shaped gate or incorporating highly doped semiconductor material for the source and drain contacts different from the channel material to provide etch selectivity and a T-shaped gate or incorporating a metal for the source and drain contacts and the oxide of the metal for the gate dielectric which is self aligned. The invention overcomes the problem of self-aligned high resistance source/drain contacts and a high resistance gate electrode for submicron FET devices which increase as devices are scaled to smaller dimensions.
Inventors
- 👤 Kevin Kok Chan
- 👤 Jack Oon Chu
- 👤 Khalid EzzEldin Ismail
- 👤 Stephen Anthony Rishton
- 👤 Katherine Lynn Saenger
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 20:06
CPC Classifications
H; H10; H10D; H10D84/00; H10D84/80; H10D84/86; H10D64/00; H10D64/01; H10D64/013; H10D64/01302; H10D64/01304; H10D64/01324
Claims Analysis
Total Claims: 43
Claim 1
Independent Claim
185 words
A method of forming a field effect transistor comprising the steps of: selecting a substrate of single crystal semiconductor material, forming a first sacrificial layer on said substrate, forming a metal layer on said first sacrificial layer, said metal layer including material suitable for forming a Schottky metal-to-semiconductor barrier and having a selected work function, forming an insulating layer over said metal layer, forming a gate opening in said insulating layer and said metal layer, heating said substrate, first sacrificial layer and said metal layer above a selected temperature for a time period to react said metal layer and said sacrificial layer to form a Schottky metal-to-semiconductor barrier on said substrate, removing said sacrificial layer in said gate opening to expose said substrate, forming a gate dielectric on said substrate in said gate opening and over the sidewalls of said opening, forming a conductive layer on said gate dielectric in said gate opening, and patterning said conductive layer to define a gate electrode, said Schottky metal barrier on opposite sides of said gate electrode corresponding to the source and drain of said field effect transistor.
Claim 2
Independent Claim
185 words
A method of forming a field effect transistor comprising the steps of: selecting a substrate of single crystal semiconductor material, forming a first sacrificial layer on said substrate, forming a metal layer on said first sacrificial layer, said metal layer including material suitable for forming a Schottky metal-to-semiconductor barrier and having a selected work function, forming an insulating layer over said metal layer, forming a gate opening in said insulating layer and said metal layer, heating said substrate, first sacrificial layer and said metal layer above a selected temperature for a time period to react said metal layer and said sacrificial layer to form a Schottky metal-to-semiconductor barrier on said substrate, removing said sacrificial layer in said gate opening to expose said substrate, forming a gate dielectric on said substrate in said gate opening and over the sidewalls of said opening, forming a conductive layer on said gate dielectric in said gate opening, and patterning said conductive layer to define a gate electrode, said Schottky metal barrier on opposite sides of said gate electrode corresponding to the source and drain of said field effect transistor.
Claim 3
Dependent Claim
40 words
The method of claim 1 wherein said step of selecting said single crystal semiconductor material includes the step of selecting from the group consisting of GaAs, InGaAs, InP, In 1-x Ga x As y P 1-y , Si and SiGe.
Claim 4
Dependent Claim
39 words
The method of claim 1 wherein said step of forming a first sacrificial layer includes the step of selecting from the group consisting of GaAs, InGaAs, InP, In 1-x Ga x As y P 1-y , Si and SiGe.
Claim 5
Dependent Claim
32 words
The method of claim 1 wherein said step of forming a metal layer includes the step of selecting from the group consisting of Co, Ni, Pd, Pt, Rh, Ta, Ti and W.
Claim 6
Dependent Claim
35 words
The method of claim 1 wherein said step of forming a metal layer includes the step of forming a titanium layer and wherein said step of heating includes heating to a temperature above 700° C.
Claim 7
Dependent Claim
35 words
The method of claim 1 wherein said step of forming a metal layer includes the step of forming a platinum layer and wherein said step of heating includes heating to a temperature above 250° C.
Claim 8
Dependent Claim
50 words
The method of claim 1 wherein said step of forming a first sacrificial layer includes the step of forming a silicon germanium layer and wherein said step of heating includes heating to a temperature to form metal silicide and metal germanide to provide a Schottky barrier to the semiconductor substrate.
Claim 9
Dependent Claim
47 words
The method of claim 1 further including the step of forming source and drain contacts to said Schottky metal barrier on opposite sides of said gate electrode and wherein said step of forming a conductive layer includes forming said conductive layer on said sidewalls of said opening.
Claim 10
Independent Claim
139 words
A method of forming a field effect transistor comprising the steps of: selecting a substrate of single crystal semiconductor material, forming a first layer on said substrate of heavily doped semiconductor material compositionally different from said substrate to provide a different etching rate with respect to said substrate, forming a second layer of insulating material, forming an opening through said first and second layers exposing said substrate for forming a gate dielectric, forming a gate dielectric on said substrate in said opening and over the sidewalls of said opening, forming a conductive layer on said gate dielectric in said gate opening and on said sidewalls of said opening, and patterning said conductive layer to define a gate electrode, said first layer on opposite sides of said gate electrode corresponding to the source and drain of said field effect transistor.
Claim 11
Independent Claim
139 words
A method of forming a field effect transistor comprising the steps of: selecting a substrate of single crystal semiconductor material, forming a first layer on said substrate of heavily doped semiconductor material compositionally different from said substrate to provide a different etching rate with respect to said substrate, forming a second layer of insulating material, forming an opening through said first and second layers exposing said substrate for forming a gate dielectric, forming a gate dielectric on said substrate in said opening and over the sidewalls of said opening, forming a conductive layer on said gate dielectric in said gate opening and on said sidewalls of said opening, and patterning said conductive layer to define a gate electrode, said first layer on opposite sides of said gate electrode corresponding to the source and drain of said field effect transistor.
Claim 12
Dependent Claim
40 words
The method of claim 9 wherein said step of selecting said single crystal semiconductor material includes the step of selecting from the group consisting of GaAs, InGaAs, InP, In 1-x Ga x As y P 1-y , Si and SiGe.
Claim 13
Dependent Claim
22 words
The method of claim 9 wherein said step of forming a first layer includes the step of forming a single crystal layer.
Claim 14
Dependent Claim
32 words
The method of claim 9 wherein said step of selecting a substrate includes selecting SiGe and wherein said step of forming a first layer includes the step of forming a polycrystalline layer.
Claim 15
Dependent Claim
38 words
The method of claim 9 wherein said step of forming a first layer includes the step of selecting from the group consisting of GaAs, InGaAs, InP, In 1-x Ga x As y P 1-y , Si and SiGe.
Claim 16
Dependent Claim
28 words
The method of claim 9 wherein said step of forming a second layer includes the step of selecting from the group consisting of silicon dioxide and silicon nitride.
Claim 17
Dependent Claim
43 words
The method of claim 9 wherein said step of forming a conductive layer includes the step of forming over said second layer and wherein said step of patterning includes defining a gate electrode that extends on said sidewalls and over said second layer.
Claim 18
Dependent Claim
38 words
The method of claim 15 wherein said step of patterning includes defining a gate electrode that extends on said sidewalls and over said second layer over a portion of said source and drain to form a T-shaped gate.
Claim 19
Dependent Claim
26 words
The method of claim 9 further including the step of forming source and drain contacts to said first layer on opposite sides of said gate electrode.
Claim 20
Independent Claim
152 words
A method of forming a field effect transistor comprising the steps of: selecting a substrate of single crystal'semiconductor material, forming a metal layer on said substrate, said metal layer including material suitable for forming a Schottky metal-to-semiconductor barrier and having a selected work function, forming an insulating layer over said metal layer, forming a gate opening in said insulating layer to expose said metal layer, heating said metal layer in said gate opening above a selected temperature for a time period in a gaseous ambient to react said metal layer and constituents in said gaseous ambient to form a gate dielectric in said gate opening on said substrate, forming a conductive layer on said gate dielectric in said gate opening, and patterning said conductive layer to define a gate electrode, said Schottky metal-to-semiconductor barrier on opposite sides of said gate electrode corresponding to the source and drain of said field effect transistor.
Claim 21
Independent Claim
152 words
A method of forming a field effect transistor comprising the steps of: selecting a substrate of single crystal'semiconductor material, forming a metal layer on said substrate, said metal layer including material suitable for forming a Schottky metal-to-semiconductor barrier and having a selected work function, forming an insulating layer over said metal layer, forming a gate opening in said insulating layer to expose said metal layer, heating said metal layer in said gate opening above a selected temperature for a time period in a gaseous ambient to react said metal layer and constituents in said gaseous ambient to form a gate dielectric in said gate opening on said substrate, forming a conductive layer on said gate dielectric in said gate opening, and patterning said conductive layer to define a gate electrode, said Schottky metal-to-semiconductor barrier on opposite sides of said gate electrode corresponding to the source and drain of said field effect transistor.
Claim 22
Dependent Claim
29 words
The method of claim 18 wherein said step of selecting said single crystal semiconductor material includes the step of selecting from the group consisting of silicon and silicon germanium.
Claim 23
Dependent Claim
32 words
The method of claim 18 wherein said step of forming a metal layer includes the step of selecting from the group consisting of Co, Ni, Pd, Pt, Rh, Ta, Ti and W.
Claim 24
Dependent Claim
35 words
The method of claim 18 wherein said step of forming a metal layer includes the step of forming a titanium layer and wherein said step of heating includes heating in a gaseous ambient including oxygen.
Claim 25
Dependent Claim
31 words
The method of claim 18 wherein said step of heating includes heating in a gaseous ambient selected to react with said metal of said metal layer to form a dielectric material.
Claim 26
Dependent Claim
28 words
The method of claim 1 wherein said step of heating includes heating to a temperature to form a Schottky metal semiconductor compound with the material of said substrate.
Claim 27
Independent Claim
105 words
A method for making an FET comprising: selecting a semiconductor substrate having a layer of dielectric thereon, etching a gate window in said layer of dielectric exposing said substrate, selectively growing germanium on said substrate in said gate window wherein no germanium has grown on said layer of dielectric, using the germanium as a mask, implanting shallow regions of dopant ions to form the source and drain, removing said germaniun, forming a gate oxide in said gate window, forming a layer of conductive material on said gate oxide and on said layer of dielectric, and patterning said layer of conductive material to form a gate.
Claim 28
Independent Claim
105 words
A method for making an FET comprising: selecting a semiconductor substrate having a layer of dielectric thereon, etching a gate window in said layer of dielectric exposing said substrate, selectively growing germanium on said substrate in said gate window wherein no germanium has grown on said layer of dielectric, using the germanium as a mask, implanting shallow regions of dopant ions to form the source and drain, removing said germaniun, forming a gate oxide in said gate window, forming a layer of conductive material on said gate oxide and on said layer of dielectric, and patterning said layer of conductive material to form a gate.
Claim 29
Dependent Claim
41 words
The method of claim 13 further including the step of forming an epitaxial layer of second semiconductor material on said substrate in said opening to provide a raised channel above said substrate prior to said step of forming a gate dielectric.
Claim 30
Independent Claim
124 words
A method of forming a field effect transistor comprising the steps of: selecting a substrate of single crystal semiconductor material, forming a metal layer on said substrate, said metal layer including material suitable for forming a Schottky metal-to-semiconductor barrier and having a selected work function, forming an insulating layer over said metal layer, forming a gate opening in said insulating layer to expose said metal layer, forming a gate dielectric in said gate opening by oxidation of said metal layer, forming a conductive layer on said gate dielectric in said gate opening, and patterning said conductive layer to define a gate electrode, said Schottky metal-to-semiconductor barrier on opposite sides of said gate electrode corresponding to the source and drain of said field effect transistor.
Claim 31
Independent Claim
124 words
A method of forming a field effect transistor comprising the steps of: selecting a substrate of single crystal semiconductor material, forming a metal layer on said substrate, said metal layer including material suitable for forming a Schottky metal-to-semiconductor barrier and having a selected work function, forming an insulating layer over said metal layer, forming a gate opening in said insulating layer to expose said metal layer, forming a gate dielectric in said gate opening by oxidation of said metal layer, forming a conductive layer on said gate dielectric in said gate opening, and patterning said conductive layer to define a gate electrode, said Schottky metal-to-semiconductor barrier on opposite sides of said gate electrode corresponding to the source and drain of said field effect transistor.
Claim 32
Dependent Claim
26 words
The method of claim 26 wherein said step of forming a gate dielectric by oxidation includes the step of electrochemical anodic oxidation of said metal layer.
Claim 33
Dependent Claim
22 words
The method of claim 26 wherein said step of forming a gate dielectric by oxidation includes the step of gaseous plasma anodization.
Claim 34
Dependent Claim
34 words
The method of claim 26 wherein said step of forming a gate dielectric by oxidation includes the step of heating said metal layer in a reactive ambient to a temperature above a selected temperature.
Claim 35
Dependent Claim
29 words
The method of claim 26 further including the step of forming an additional layer of conductive material over said metal layer after said step of forming a metal layer.
Claim 36
Dependent Claim
24 words
The method of claim 30 further including the step of forming an insulating material on exposed sidewalls of said additional layer of conductive material.
Claim 37
Dependent Claim
29 words
The method of claim 31 wherein said step of forming an insulating material includes the step of electrochemical anodic oxidation of exposed sidewall regions of said additional conductive material.
Claim 38
Dependent Claim
29 words
The method of claim 31 wherein said step of forming an insulating material includes the step of gaseous plasma anodization of exposed sidewall regions of said additional conductive material.
Claim 39
Dependent Claim
32 words
The method of claim 31 wherein said step of forming an insulating material includes the step of heating said conductive material in a reactive ambient to a temperature above a selected temperature.
Claim 40
Dependent Claim
44 words
The method of claim 31 wherein said step of depositing an insulating material includes the step of depositing a thin conformal layer of said insulating material in said gate opening and anisotropically etching said insulating material to form sidewall spacers of said insulating material.
Claim 41
Independent Claim
131 words
A method of forming a field effect transistor comprising the steps of: selecting a substrate of single crystal semiconductor material, forming at least one conductive layer on said substrate, said at least one conductive layer including a metal suitable for forming a Schottky metal-to-semiconductor barrier and having a selected work function, forming an insulating layer over said at least one conductive layer, forming a gate opening in said at least one conductive layer and said insulating layer, forming a gate dielectric in said gate opening, forming a second conductive layer on said gate dielectric in said gate opening, and patterning said second conductive layer to define a gate electrode, said Schottky metal-to-semiconductor barrier on opposite sides of said gate electrode corresponding to the source and drain of said field effect transistor.
Claim 42
Independent Claim
131 words
A method of forming a field effect transistor comprising the steps of: selecting a substrate of single crystal semiconductor material, forming at least one conductive layer on said substrate, said at least one conductive layer including a metal suitable for forming a Schottky metal-to-semiconductor barrier and having a selected work function, forming an insulating layer over said at least one conductive layer, forming a gate opening in said at least one conductive layer and said insulating layer, forming a gate dielectric in said gate opening, forming a second conductive layer on said gate dielectric in said gate opening, and patterning said second conductive layer to define a gate electrode, said Schottky metal-to-semiconductor barrier on opposite sides of said gate electrode corresponding to the source and drain of said field effect transistor.
Claim 43
Dependent Claim
26 words
The method of claim 36 further including the step of forming an insulating material on exposed sidewalls of said at least one layer of conductive material.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2003-08-01 | 2004-01-31 | 2004-08-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-08-01 | 2008-01-31 | 2008-08-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-08-01 | 2012-01-31 | 2012-08-01 | $7700.00 | Window Closed / Lapsed |