High aspect ratio, metal-to-metal, linear capacitor for an integrated circuit

Claim 2

A capacitor in an IC having functional components on a substrate, the IC having a plurality of horizontally oriented metal interconnect layers and a plurality of horizontally extending layers of dielectric material, a first lower interconnect layer separated from the substrate by a first lowermost layer of dielectric material, the first layer of dielectric material having an upper planarized surface upon which the first interconnect layer is formed, a second interconnect layer adjacent to and separated from the first interconnect layer by a second layer of dielectric material, the second layer of dielectric material having an upper planarized surface upon which the second interconnect layer is formed, said capacitor comprising two separated metal plates oriented within the second layer of dielectric material with the majority of each plate extending substantially vertically between the first and second interconnect layers, one of the plates electrically connected to the first interconnect layer and the other of the plates electrically connected to the second interconnect layer.

Claim 3

A capacitor as defined in claim 1 wherein the plates are formed of at least some of the metal from which the interconnect layers are formed.

Claim 4

A capacitor as defined in claim 1 wherein the plates directly contact the interconnect layers to which the plates are connected.

Claim 5

A capacitor as defined in claim 1 in combination with a second capacitor in the IC in addition to the capacitor first aforesaid, wherein the IC further includes a third interconnect layer which is adjacent to and vertically separated from the second interconnect layer by a third layer of dielectric material, the third layer of dielectric material having an upper planarized surface upon which the third interconnect layer is formed, said second capacitor comprising two separated metal plates oriented within the third layer of dielectric material with the majority of both plates extending substantially vertically between the second and third interconnect layers, one of the plates of the second capacitor electrically connected to the second interconnect layer and the other of the plates of the second capacitor electrically connected to the third interconnect layer.

Claim 6

A capacitor as defined in claim 1 in combination with a second capacitor in the IC in addition to the capacitor first aforesaid, wherein the IC further includes a third interconnect layer which is vertically separated from the second interconnect layer by a third layer of dielectric material, the additional layer of dielectric material having an upper planarized surface upon which the third interconnect layer is formed, a fourth interconnect layer adjacent to and separated from the third interconnect layer by a fourth layer of dielectric material, the fourth layer of dielectric material having an upper planarized surface upon which the fourth interconnect layer is formed, said second capacitor comprising two separated metal plates oriented within the fourth layer of dielectric material with the majority of both plates extending substantially vertically between the third and fourth interconnect layers, one of the plates of the second capacitor electrically connected to the third interconnect layer and the other of the plates of the second capacitor electrically connected to the fourth interconnect layer.

Claim 7

A capacitor as defined in claim 1 wherein the two separated metal plates of said capacitor are formed as upper and lower U-shaped metal plates separated by a U-shaped dielectric layer, the upper capacitor plate directly contacting the second interconnect layer, the lower plate directly contacting the first interconnect layer, and the upper end of the lower plate being flush with the upper planarized surface of the second layer of dielectric material.

Claim 8

A capacitor as described in claim 6, further comprising a metal via positioned within the second layer of dielectric material, the via comprising a U-shaped metal plate, the U-shaped metal plate of the via and the U-shaped upper plate of the capacitor being electrically connected.

Claim 9

A capacitor as described in claim 7, wherein the U-shaped metal plate of the via and the U-shaped upper plate of the capacitor are filled with a metal plug material.

Claim 10

A capacitor as described in claim 8, wherein a lower portion of the U-shaped metal plate of the via is in direct electrical contact with a metal interconnect layer.

Claim 11

A capacitor as described in claim 9, wherein the U-shaped metal plate of the via and the U-shaped upper plate of the capacitor are formed of at least some of the same type of metal as the interconnect layer to which the U-shaped metal plate of the via and the U-shaped upper plate of the capacitor are connected.

Claim 12

A capacitor comprising two separated metal plates which extend substantially vertically and electrically connect between horizontally adjacent metal interconnect layers of an IC having a substrate, wherein one plate is directly connected to an interconnect layer above the capacitor and the other plate is directly connected to an interconnect layer below the capacitor, and wherein the lower interconnect layer is vertically separated from the substrate by a planarized layer of dielectric material.

Claim 13

A capacitor comprising two separated metal plates which extend substantially vertically and electrically connect between horizontally adjacent metal interconnect layers of an IC having a substrate, wherein one plate is directly connected to an interconnect layer above the capacitor and the other plate is directly connected to an interconnect layer below the capacitor, and wherein the lower interconnect layer is vertically separated from the substrate by a planarized layer of dielectric material.

Claim 14

A capacitor as defined in claim 11 wherein the plates are formed of at least some of the metal from which the metal interconnect layers are formed.

Claim 15

A capacitor as defined in claim 11 wherein: the interconnect layers are separated by a layer of dielectric material; and a substantial majority of a surface area of the plates is adjacent to the layer of dielectric material which separates the interconnect layers.

Claim 16

A capacitor as defined in claim 11 wherein a horizontal surface area occupied by the capacitor at either interconnect layer is substantially less than a vertical surface area occupied by the plates extending between the interconnect layers.

Claim 17

A capacitor as defined in claim 11 wherein the interconnect layers between which the capacitor are located are separated from a substrate of the IC by at least one layer of dielectric material in addition to the layer of planarized dielectric material first aforesaid which separates the substrate from the lower interconnect layer.

Claim 18

A capacitor as defined in claim 11 wherein: the interconnect layers are separated by a layer of dielectric material, the plates are oriented substantially vertically in a slot formed in the layer of dielectric material which separates the interconnect layers, and the slot extends between interconnect layers.

Claim 19

A capacitor as defined in claim 11 wherein the plates are cylindrically shaped about an axis which extends vertically between interconnect layers.

Claim 20

A capacitor in an IC having functional components on a substrate, the IC having a plurality of horizontally oriented metal interconnect layers and a plurality of horizontally extending layers of dielectric material, a first interconnect layer separated from the substrate by a first layer of dielectric material, the first layer of dielectric material having an upper planarized surface upon which the first interconnect layer is formed, a second interconnect layer adjacent to and separated from the first interconnect layer by a second layer of dielectric material, the second layer of dielectric material having an upper planarized surface upon which the second interconnect layer is formed, a third interconnect layer adjacent to and separated from the second interconnect layer by a third layer of dielectric material, the third layer of dielectric material having an upper planarized surface upon which the third interconnect layer is formed, said capacitor comprising two separated metal plates oriented within the third layer of dielectric material with the majority of each plate extending substantially vertically between the second and third interconnect layers, one of the plates electrically connected to the second interconnect layer and the other of the plates electrically connected to the third interconnect layer.

Claim 21

A capacitor in an IC having functional components on a substrate, the IC having a plurality of horizontally oriented metal interconnect layers and a plurality of horizontally extending layers of dielectric material, a first interconnect layer separated from the substrate by a first layer of dielectric material, the first layer of dielectric material having an upper planarized surface upon which the first interconnect layer is formed, a second interconnect layer adjacent to and separated from the first interconnect layer by a second layer of dielectric material, the second layer of dielectric material having an upper planarized surface upon which the second interconnect layer is formed, a third interconnect layer adjacent to and separated from the second interconnect layer by a third layer of dielectric material, the third layer of dielectric material having an upper planarized surface upon which the third interconnect layer is formed, said capacitor comprising two separated metal plates oriented within the third layer of dielectric material with the majority of each plate extending substantially vertically between the second and third interconnect layers, one of the plates electrically connected to the second interconnect layer and the other of the plates electrically connected to the third interconnect layer.