Patent US6057209A successfully refreshed from Google Patents.
US6057209A
Expired / Lapsed
US
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Semiconductor device having a nitrogen bearing isolation region
Assignee: Mosaid Technologies Inc
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Filing: 1997-07-10
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Granted: 2000-05-02
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Expires: 2017-07-10
Abstract
Abstract A semiconductor device and manufacturing process in which a nitrogen bearing isolation region is formed. In one embodiment of the invention, a semiconductor device is formed by forming, in a substrate, one or more trenches each of which define an isolation region. In each trench, an insulating region is formed. In each trench over the insulating region, a nitrogen bearing region is formed. The nitrogen bearing region may, for example, be a nitride. A semiconductor device consistent with one embodiment of the invention includes a substrate having a plurality of active regions and one or more nitrogen bearing isolation regions separating the active regions. Each isolation region generally includes an insulating region adjacent the substrate and a nitrogen bearing region disposed over the insulating region and separated from the substrate by the oxide region. The nitrogen bearing region may, for example, be a nitride. The nitrogen bearing region in the isolation region generally enhances device performance and can, for example, reduce boron penetration of the isolation region.
Inventors
- 👤 Mark I. Gardner
- 👤 Mark C. Gilmer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 12:43
CPC Classifications
H; H10; H10W; H10W10/00; H10W10/10; H10W10/17; H10P; H10P14/00; H10P14/60; H10P14/69; H10P14/694; H10P14/6943; H10P14/69433; H10W10/01; H10W10/011; H10W10/014; H10W10/0143
Claims Analysis
Total Claims: 34
Claim 1
Independent Claim
98 words
A process of forming a semiconductor device, comprising: forming at least one isolation trench in a substrate; forming an insulating layer in the trench and on portions of the substrate surface adjacent the trench; and forming, in a single step, a nitrogen bearing layer on the insulating layer in the trench and on the insulating layer over the portions of the substrate surface adjacent the trench leaving an unfilled portion of the trench filling the unfilled portion of the trench with a second insulating layer to form an oxide region in the trench over the nitrogen bearing layer.
Claim 2
Dependent Claim
98 words
A process of forming a semiconductor device, comprising: forming at least one isolation trench in a substrate; forming an insulating layer in the trench and on portions of the substrate surface adjacent the trench; and forming, in a single step, a nitrogen bearing layer on the insulating layer in the trench and on the insulating layer over the portions of the substrate surface adjacent the trench leaving an unfilled portion of the trench filling the unfilled portion of the trench with a second insulating layer to form an oxide region in the trench over the nitrogen bearing layer.
Claim 3
Dependent Claim
47 words
The process of claim 1, further including selectively removing portions of the second insulating layer to expose portions of the nitrogen bearing layer over the portions of the substrate surface adjacent the trench and to form an insulating region in the trench over the nitrogen bearing layer.
Claim 4
Dependent Claim
31 words
The process of claim 2, further including removing portions of the nitrogen bearing layer over portions of the substrate surface adjacent the trench, after removing portions of the second insulating layer.
Claim 5
Dependent Claim
27 words
The process of claim 3, further including implanting dopants into the substrate to form channel stops beneath the trench after removing portions of the nitrogen bearing layer.
Claim 6
Dependent Claim
28 words
The process of claim 3, further including implanting dopants into the substrate to form a channel stop beneath the trench before removing portions of the nitrogen bearing layer.
Claim 7
Dependent Claim
19 words
The process of claim 3, further including forming a channel stop beneath the trench before forming the insulating layer.
Claim 8
Dependent Claim
29 words
The process of claim 6, further including performing one or more dopant implants after removing the nitrogen bearing layer to form one or more doped regions in the substrate.
Claim 9
Dependent Claim
33 words
The process of claim 2, wherein selectively removing portions of the second insulating layer include leaving the insulating region with an upper surface about level with an upper surface of the insulating layer.
Claim 10
Dependent Claim
32 words
The process of claim 1, further including implanting dopants into the substrate to form channel stops beneath the trench after forming the nitrogen bearing layer and before forming the second insulating layer.
Claim 11
Dependent Claim
32 words
The process of claim 9, further including implanting dopants into the substrate to form well regions in the substrate after forming the nitrogen bearing layer and before forming the second insulating layer.
Claim 12
Dependent Claim
20 words
The process of claim 10, wherein a single implant is used to form the channel stops and the well regions.
Claim 13
Dependent Claim
30 words
The process of claim 9, wherein forming the nitrogen bearing layer includes forming the nitrogen bearing layer to a thickness in the trench ranging from about 1000 to 1500 Å.
Claim 14
Dependent Claim
26 words
The process of claim 1, further including forming spacers on sidewalls of the nitrogen bearing layer within the trench prior to forming the second insulating layer.
Claim 15
Dependent Claim
27 words
The process of claim 1, wherein forming the second insulating layer includes forming the second insulating layer to a thickness ranging from about 5000 to 10000 Å.
Claim 16
Dependent Claim
16 words
The process of claim 1, further including removing the insulating film before forming the insulating layer.
Claim 17
Dependent Claim
15 words
The process of claim 1, wherein forming the insulating layer includes forming an oxide layer.
Claim 18
Dependent Claim
16 words
The process of claim 1, wherein forming the nitrogen bearing layer includes forming a nitride layer.
Claim 19
Dependent Claim
27 words
The process of claim 1, wherein forming the nitrogen bearing layer includes forming the nitrogen bearing layer to a thickness ranging from about 50 to 2000 Å.
Claim 20
Dependent Claim
15 words
The process of claim 1, wherein the insulating layer is formed in a single step.
Claim 21
Dependent Claim
170 words
A process of forming a semiconductor device, comprising: forming a first insulating layer over a substrate; forming a patterned mask over the first insulating layer; forming at least one trench in a substrate using the patterned mask, the trench defining an isolation region for isolating active regions; removing the patterned mask; forming a second insulating layer in the trench and over substrate regions adjacent the trench after removing the patterned mask; depositing a nitride layer over the second insulating layer, the nitride layer being deposited in the trench and over substrate regions adjacent the trench depositing a third insulating layer over the nitrogen bearing layer, the third insulating layer being deposited in an unfilled portion of the trench and over the substrate regions adjacent the trench selectively removing portions of the third insulating layer to expose portions of the nitride layer over the substrate regions adjacent the trench and to form an oxide region in the trench over the nitride layer; and selectively removing exposed portions of the nitride layer.
Claim 22
Dependent Claim
170 words
A process of forming a semiconductor device, comprising: forming a first insulating layer over a substrate; forming a patterned mask over the first insulating layer; forming at least one trench in a substrate using the patterned mask, the trench defining an isolation region for isolating active regions; removing the patterned mask; forming a second insulating layer in the trench and over substrate regions adjacent the trench after removing the patterned mask; depositing a nitride layer over the second insulating layer, the nitride layer being deposited in the trench and over substrate regions adjacent the trench depositing a third insulating layer over the nitrogen bearing layer, the third insulating layer being deposited in an unfilled portion of the trench and over the substrate regions adjacent the trench selectively removing portions of the third insulating layer to expose portions of the nitride layer over the substrate regions adjacent the trench and to form an oxide region in the trench over the nitride layer; and selectively removing exposed portions of the nitride layer.
Claim 23
Dependent Claim
29 words
The process of claim 20, further including implanting dopants into the substrate to form a channel stop beneath the trench after selectively removing exposed portions of the nitride layer.
Claim 24
Dependent Claim
29 words
The process of claim 20, further including implanting dopants into the substrate to form a channel stop beneath the trench before selectively removing exposed portions of the nitride layer.
Claim 25
Dependent Claim
22 words
The process of claim 22, wherein the dopants are implanted after depositing the nitride layer and before depositing the third insulating layer.
Claim 26
Dependent Claim
31 words
The process of claim 23, further including implanting dopants into the substrate to form well regions in the substrate after depositing the nitride layer and before forming the third insulating layer.
Claim 27
Dependent Claim
28 words
The process of claim 23, wherein forming the nitride layer includes forming the nitride layer to a thickness in the trench ranging from about 1000 to 1500 Å.
Claim 28
Dependent Claim
15 words
The process of claim 22, wherein the dopants are implanted before depositing the nitride layer.
Claim 29
Dependent Claim
20 words
The process of claim 26, wherein the dopants are implanted before removing the patterned mask and after forming the trench.
Claim 30
Dependent Claim
27 words
The process of claim 20, wherein the second insulating layer is formed in the trench and over the substrate regions adjacent the trench in a single step.
Claim 31
Dependent Claim
26 words
The process of claim 20, wherein the nitride layer is deposited in the trench and over the substrate regions adjacent the trench in a single step.
Claim 32
Dependent Claim
18 words
The process of claim 20, further including removing the first insulating layer before forming the second insulating layer.
Claim 33
Dependent Claim
168 words
A process of forming a semiconductor device, comprising: forming an insulating layer over a substrate; forming a patterned mask over the first insulating layer; forming at least one trench in a substrate using the patterned mask, the trench defining an isolation region for isolating active regions; removing the patterned mask and the insulating layer; forming an oxide layer in the trench and over substrate regions adjacent the trench after removing the patterned mask and the insulating layer; depositing a nitride layer over the oxide layer, the nitride layer being deposited in the trench and over substrate regions adjacent the trench leaving an unfilled portion of the trench; and depositing a insulating layer over the nitride layer, the insulating layer being deposited in the unfilled portion of the trench and over the substrate regions adjacent the trench to form an oxide region in the trench over the nitride layer; wherein the oxide layer, the deposited nitride layer, and the insulating layer form, at least in part, the isolation region.
Claim 34
Dependent Claim
168 words
A process of forming a semiconductor device, comprising: forming an insulating layer over a substrate; forming a patterned mask over the first insulating layer; forming at least one trench in a substrate using the patterned mask, the trench defining an isolation region for isolating active regions; removing the patterned mask and the insulating layer; forming an oxide layer in the trench and over substrate regions adjacent the trench after removing the patterned mask and the insulating layer; depositing a nitride layer over the oxide layer, the nitride layer being deposited in the trench and over substrate regions adjacent the trench leaving an unfilled portion of the trench; and depositing a insulating layer over the nitride layer, the insulating layer being deposited in the unfilled portion of the trench and over the substrate regions adjacent the trench to form an oxide region in the trench over the nitride layer; wherein the oxide layer, the deposited nitride layer, and the insulating layer form, at least in part, the isolation region.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-05-02 | 2003-11-01 | 2004-05-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-05-02 | 2007-11-01 | 2008-05-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-05-02 | 2011-11-01 | 2012-05-02 | $7700.00 | Window Closed / Lapsed |