Patent US6033596A successfully refreshed from Google Patents.
US6033596A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Multi-oxidizer slurry for chemical mechanical polishing
Assignee: CMC Materials LLC
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Filing: 1997-02-18
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Granted: 2000-03-07
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Expires: 2017-02-18
Abstract
Abstract A chemical mechanical polishing slurry comprising a first oxidizer of urea hydrogen peroxide, a second oxidizer, an organic acid, and an abrasive, and a method for using the chemical mechanical polishing slurry to remove titanium, titanium nitride, and an aluminum alloy containing layer from a substrate.
Inventors
- 👤 Vlasta Brusic Kaufman
- 👤 Shumin Wang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 12:47
CPC Classifications
C; C09; C09G; C09G1/00; C09G1/02
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
47 words
A chemical mechanical polishing slurry comprising: from about 1.0 to about 9.0 weight percent alumina; from about 1.5 to about 30.0 weight percent urea hydrogen peroxide; from about 0.2 to about 10.0 weight percent ammonium persulfate; and from about 0.5 to about 5.0 weight percent succinic acid.
Claim 2
Dependent Claim
47 words
A chemical mechanical polishing slurry comprising: from about 1.0 to about 9.0 weight percent alumina; from about 1.5 to about 30.0 weight percent urea hydrogen peroxide; from about 0.2 to about 10.0 weight percent ammonium persulfate; and from about 0.5 to about 5.0 weight percent succinic acid.
Claim 3
Dependent Claim
50 words
The chemical mechanical polishing slurry of claim 1 including from about 3.0 to about 6.0 weight percent, alumina from about 5.0 to about 12.0 weight percent urea hydrogen peroxide, from about 3.0 to about 5.0 weight percent ammonium persulfate, and from about 0.5 to about 5.0 weight percent succinic acid.
Claim 4
Dependent Claim
18 words
The chemical mechanical polishing slurry of claim 1 having a selectivity of from about 1:2 to about 2:1.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-03-07 | 2003-09-06 | 2004-03-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-03-07 | 2007-09-06 | 2008-03-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-03-07 | 2011-09-06 | 2012-03-07 | $7700.00 | Window Closed / Lapsed |