US6030508A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Sputter etching chamber having a gas baffle with improved uniformity
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Filing: 1998-05-20
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Granted: 2000-02-29
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Expires: 2018-05-20
Abstract
Abstract The uniformity of material removal, as well as contamination due to deposited particulate matter, has been reduced in single wafer sputter-etchers by providing an improved gas baffle. Said gas baffle presents a smooth surface to the incoming sputtering gas so that it disperses uniformly throughout the sputtering chamber, thereby avoiding local fluctuations in pressure which, in turn, can lead to local differences in material removal rate as well as to particulate contamination of the surface that is being etched. The design of the baffle is described along with a method for attaching it to the inside of the sputtering shield.
Inventors
- 👤 Chin-Shien Yang
- 👤 Chuan-Huai Chen
- 👤 Cheng-Kun Lin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:33
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H01J37/3244; H01J37/34; Y; Y10; Y10T; Y10T29/00; Y10T29/49
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
165 words
A method for attaching a gas baffle that comprises a disk having smooth unbroken, upper and lower surfaces, to the inside of a sputtering shield comprising: providing a first disk-shaped plate that has smooth unbroken surfaces; drilling first holes through said first plate and countersinking said first holes on one side; drilling a second hole, centrally located, through said first plate and then threading said second hole; providing flat-head screws, passing said screws through said first holes and then screwing said screws into said sputtering shield to a depth sufficient to firmly attach said gas baffle to the inside of said sputtering shield while at the same time positioning the gas baffle to be a fixed distance from the sputtering shield; providing a second disk-shaped plate that has upper and lower smooth unbroken surfaces; attaching a threaded rod, formed on said second disk-shaped plate, normal to the center of the upper surface of said second plate; and screwing said threaded rod into said second hole.
Claim 2
Independent Claim
165 words
A method for attaching a gas baffle that comprises a disk having smooth unbroken, upper and lower surfaces, to the inside of a sputtering shield comprising: providing a first disk-shaped plate that has smooth unbroken surfaces; drilling first holes through said first plate and countersinking said first holes on one side; drilling a second hole, centrally located, through said first plate and then threading said second hole; providing flat-head screws, passing said screws through said first holes and then screwing said screws into said sputtering shield to a depth sufficient to firmly attach said gas baffle to the inside of said sputtering shield while at the same time positioning the gas baffle to be a fixed distance from the sputtering shield; providing a second disk-shaped plate that has upper and lower smooth unbroken surfaces; attaching a threaded rod, formed on said second disk-shaped plate, normal to the center of the upper surface of said second plate; and screwing said threaded rod into said second hole.
Claim 3
Dependent Claim
17 words
The method of claim 1 wherein said fixed distance is between about 4 and about 7 mm.
Claim 4
Dependent Claim
22 words
The method of claim 1 wherein an inlet for the admission of gas is located above the center of said first plate.
Claim 5
Dependent Claim
12 words
The method of claim 1 wherein said second plate comprises aluminum metal.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-02-28 | 2003-08-30 | 2004-02-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-02-28 | 2007-08-30 | 2008-02-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-02-28 | 2011-08-30 | 2012-02-29 | $7700.00 | Window Closed / Lapsed |