US5643394A — Gas injection slit nozzle for a plasma process re…

Claim 1

Independent Claim 187 words

A plasma reactor comprising: a reactor vacuum chamber having a chamber housing; a pedestal holding a workpiece to be processed gas injection apparatus, comprising: a gas supply containing a processing species in a gas, an opening in said chamber housing, a gas feed line from said supply to said opening in said chamber housing, gas distribution apparatus near said opening in said chamber housing, comprising: a disk member surrounded by an annular member with a gap therebetween, said gap comprising an elongate thin slit nozzle facing the interior of said chamber, said disk member and annular member dispersing gas flow from said opening in said chamber housing to said slit nozzle, and a plurality of spacers, each disposed between the disk member and the annular, said spacers having a thickness which spans the gap between the disk and annular members and causes said gap to be of a substantially equal width over its entire circumference, said spacers further having a cross-sectional size in the direction of gas flow which is sufficiently small so as to not significantly interfere with the flow of gas from the slit nozzle.

Claim 2

Dependent Claim 187 words

A plasma reactor comprising: a reactor vacuum chamber having a chamber housing; a pedestal holding a workpiece to be processed gas injection apparatus, comprising: a gas supply containing a processing species in a gas, an opening in said chamber housing, a gas feed line from said supply to said opening in said chamber housing, gas distribution apparatus near said opening in said chamber housing, comprising: a disk member surrounded by an annular member with a gap therebetween, said gap comprising an elongate thin slit nozzle facing the interior of said chamber, said disk member and annular member dispersing gas flow from said opening in said chamber housing to said slit nozzle, and a plurality of spacers, each disposed between the disk member and the annular, said spacers having a thickness which spans the gap between the disk and annular members and causes said gap to be of a substantially equal width over its entire circumference, said spacers further having a cross-sectional size in the direction of gas flow which is sufficiently small so as to not significantly interfere with the flow of gas from the slit nozzle.

Claim 3

Dependent Claim 19 words

The reactor of claim 1 wherein said gas distribution apparatus is contained within said opening in said chamber housing.

Claim 4

Dependent Claim 22 words

The reactor of claim 1 wherein said gas distribution apparatus is suspended inside said chamber adjacent said opening in said chamber housing.

Claim 5

Dependent Claim 27 words

The reactor of claim 1 further comprising an intermediate annular member surrounding said annular member and separated therefrom by a gap therebetween comprising a second slit nozzle.

Claim 6

Dependent Claim 28 words

The reactor of claim 4 further comprising an outer annular member surrounding said intermediate annular member and separated therefrom by a gap therebetween comprising an outer slit nozzle.

Claim 7

Dependent Claim 20 words

The reactor of claim 1 wherein said disk member and said annular member are cylindrical and concentric with one another.

Claim 8

Dependent Claim 20 words

The reactor of claim 1 wherein said disk member and said annular member are each mutually congruent truncated conical sections.

Claim 9

Dependent Claim 36 words

The reactor of claim 7 wherein said conical sections correspond to a cone whose apex faces toward the center of said workpiece, whereby each slit nozzle directs gas flowing therethrough toward said center of said workpiece.

Claim 10

Dependent Claim 21 words

The reactor of claim 5 wherein said disk member and each of said annular members are mutually congruent truncated conical sections.

Claim 11

Dependent Claim 36 words

The reactor of claim 9 wherein said conical sections correspond to a cone whose apex faces toward the center of said workpiece, whereby each slit nozzle directs gas flowing therethrough toward said center of said workpiece.

Claim 12

Dependent Claim 26 words

The reactor of claim 1 wherein each of said members of said gas distribution apparatus comprises a material substantially impervious to attack from said processing species.

Claim 13

Dependent Claim 20 words

The reactor of claim 11 wherein said processing species comprises at least one of (a) chlorine and (b) boron tri-chloride.

Claim 14

Dependent Claim 30 words

The reactor of claim 11 wherein said material substantially impervious to attack from said processing species comprises one of: (a) ceramic, (b) quartz, (c) sapphire, (d) polyimide, (e) anodized aluminum.

Claim 15

Dependent Claim 20 words

The reactor of claim 1 further comprising a focus ring adjacent said pedestal surrounding a peripheral edge of said workpiece.

Claim 16

Dependent Claim 38 words

The reactor of claim 11 wherein said gas feed line comprises stainless steel and wherein each of said members of said gas distribution apparatus comprises one of: (a) ceramic, (b) quartz, (c) sapphire, (d) polyimide, (e) anodized aluminum.

Claim 17

Dependent Claim 23 words

The reactor of claim 1 wherein said disk and annular members have their surfaces polished prior to assembly of said gas distribution apparatus.

Claim 18

Dependent Claim 14 words

The reactor of claim 1 wherein said slit nozzle follows a closed circular path.

Claim 19

Dependent Claim 36 words

The reactor of claim 1 wherein said chamber housing comprises a lid overlying said workpiece and having a ceiling surface thereof facing said workpiece, and wherein said opening through said chamber housing is in said lid.

Claim 20

Dependent Claim 26 words

The reactor of claim I wherein said slit nozzle has a diameter in the range of approximately 0.5 inches (1.2 cm) to 6.0 inches (15 cm).

Claim 21

Dependent Claim 25 words

The reactor of claim 19 wherein said slit nozzle has a diameter in the range of 1.0 inches (2.5 cm) to 2.0 inches (5.0 cm).

Claim 22

Dependent Claim 48 words

The reactor of claim 4 wherein said second slit nozzle has a diameter in the range of 3.0 inches (7.5 cm) to 6.0 inches (15 cm) and said slit nozzle has a diameter in the range of approximately of 0.5 inches (1.2 cm) to 2.0 inches (5.0 cm).

Claim 23

Dependent Claim 29 words

The reactor of claim 21 wherein said second slit nozzle and said slit nozzle have diameters of about 4.0 inches (10 cm) and about 1.5 inches (3.7 cm), respectively.

Claim 24

Dependent Claim 55 words

The reactor of claim 5 wherein said slit nozzle, said second slit nozzle and said outer slit nozzle have diameters of about one of: (a) 0.3 inch (0.8 cm), 1.0 inch (2.5 cm) and 1.25 inches (3.0 cm), respectively, and (b) 4 inches (10 cm), 2.5 inches (6.3 cm) and 1 inch (2.5 cm), respectively.

Claim 25

Dependent Claim 29 words

The reactor of claim 1, wherein the each one of the plurality of spacers is disposed at approximately equal intervals from one another around the circumference of the gap.

Claim 26

Dependent Claim 14 words

The reactor of claim 24 wherein said plurality of spacers number at least three.

Claim 27

Dependent Claim 90 words

The reactor of claim 4 wherein the annular member and the intermediate annular member disperse gas flowing from said opening in said chamber housing to the second slit nozzle, and wherein said gas distribution apparatus further comprises: a plurality of spacers, each disposed between the annular member and the intermediate annular at approximately equal intervals from one another, said spacers having a thickness which spans the gap between the annular member and the intermediate annular and causes said gap to be of a substantially equal width over its entire circumference.

Claim 28

Dependent Claim 95 words

The reactor of claim 5 wherein the intermediate annular member and the outer annular member disperse gas flowing from said opening in said chamber housing to the outer slit nozzle, and wherein said gas distribution apparatus further comprises: a plurality of spacers, each disposed between the intermediate annular member and the outer annular member at approximately equal intervals from one another, said spacers having a thickness which spans the gap between the intermediate annular member and the outer annular member and causes said gap to be of a substantially equal width over its entire circumference.

Claim 29

Dependent Claim 64 words

The reactor of claim 1 wherein said chamber housing comprises a lid overlying said workpiece and having a ceiling surface thereof facing said workpiece, and wherein said opening through said chamber housing is in said lid, and wherein said disk member and said annular member are both contained within said opening and have respective bottom surfaces co-planar with said ceiling surface of said lid.

Claim 30

Dependent Claim 67 words

The reactor of claim 4 wherein said chamber housing comprises a lid overlying said workpiece and having a ceiling surface thereof facing said workpiece, and wherein said opening through said chamber housing is in said lid, and wherein said disk member, said annular member and said intermediate annular member are contained within said opening and have respective bottom surfaces co-planar with said ceiling surface of said lid.

Claim 31

Dependent Claim 71 words

The reactor of claim 5 wherein said chamber housing comprises a lid overlying said workpiece and having a ceiling surface thereof facing said workpiece, and wherein said opening through said chamber housing is in said lid, and wherein said disk member, said annular member, said intermediate annular member and said outer annular member are contained within said opening and have respective bottom surfaces co-planar with said ceiling surface of said lid.

Claim 32

Dependent Claim 129 words

A gas distribution apparatus for injecting gases into a plasma reactor vacuum chamber comprising: a disk member surrounded by an annular member with a gap therebetween, said gap comprising an elongate thin slit nozzle facing the interior of said chamber, said disk member and annular member dispersing gas to said slit nozzle, and a plurality of spacers, each disposed between the disk member and the annular member, said spacers having a thickness which spans the gap between the disk and annular member and causes said gap to be of a substantially equal width over its entire circumference, said spacers further having a cross-sectional size in the direction of gas flow which is sufficiently small so as to not significantly interfere with the flow of gas from the slit nozzle.

Claim 33

Dependent Claim 129 words

A gas distribution apparatus for injecting gases into a plasma reactor vacuum chamber comprising: a disk member surrounded by an annular member with a gap therebetween, said gap comprising an elongate thin slit nozzle facing the interior of said chamber, said disk member and annular member dispersing gas to said slit nozzle, and a plurality of spacers, each disposed between the disk member and the annular member, said spacers having a thickness which spans the gap between the disk and annular member and causes said gap to be of a substantially equal width over its entire circumference, said spacers further having a cross-sectional size in the direction of gas flow which is sufficiently small so as to not significantly interfere with the flow of gas from the slit nozzle.

Claim 34

Dependent Claim 29 words

The gas injection apparatus of claim 31 further comprising an intermediate annular member surrounding said annular member and separated therefrom by a gap therebetween comprising an second slit nozzle.

Claim 35

Dependent Claim 30 words

The gas injection apparatus of claim 32 further comprising an outer annular member surrounding said intermediate annular member and separated therefrom by a gap therebetween comprising an outer slit nozzle.

Claim 36

Dependent Claim 22 words

The gas injection apparatus of claim 31 wherein said disk member and said annular member are cylindrical and concentric with one another.

Claim 37

Dependent Claim 22 words

The gas distribution apparatus of claim 31 wherein said disk member and said annular member are each mutually congruent truncated conical sections.

Claim 38

Dependent Claim 38 words

The gas injection apparatus of claim 35 wherein said conical sections correspond to a cone whose apex faces toward the center of said workpiece, whereby each slit nozzle directs gas flowing therethrough toward said center of said workpiece.

Claim 39

Dependent Claim 23 words

The gas injection apparatus of claim 33 wherein said disk member and each of said annular members are mutually congruent truncated conical sections.

Claim 40

Dependent Claim 38 words

The gas injection apparatus of claim 37 wherein said conical sections correspond to a cone whose apex faces toward the center of said workpiece, whereby each slit nozzle directs gas flowing therethrough toward said center of said workpiece.

Claim 41

Dependent Claim 28 words

The gas injection apparatus of claim 31 wherein each of said members of said gas distribution apparatus comprises a material substantially impervious to attack from said etchant species.

Claim 42

Dependent Claim 22 words

The gas injection apparatus of claim 39 wherein said etchant species comprises at least one of (a) chlorine and (b) boron trichloride.

Claim 43

Dependent Claim 32 words

The gas injection apparatus of claim 39 wherein said material substantially impervious to attack from said etchant species comprises one of: (a) ceramic, (b) quartz, (c) sapphire, (d) polyimide, (e) anodized aluminum.

Claim 44

Dependent Claim 40 words

The gas injection apparatus of claim 39 wherein said gas feed line comprises stainless steel and wherein each of said members of said gas distribution apparatus comprises one of: (a) ceramic, (b) quartz, (c) sapphire, (d) polyimide, (e) anodized aluminum.

Claim 45

Dependent Claim 25 words

The gas injection apparatus of claim 31 wherein said disk and annular members have their surfaces polished prior to assembly of said gas distribution apparatus.

Claim 46

Dependent Claim 16 words

The gas injection apparatus of claim 31 wherein said slit nozzle follows a closed circular path.

Claim 47

Dependent Claim 28 words

The gas injection apparatus of claim 31 wherein said slit nozzle has a diameter in the range of approximately 0.5 inches (1.2 cm) to 6.0 inches (15 cm).

Claim 48

Dependent Claim 27 words

The gas injection apparatus of claim 45 wherein said slit nozzle has a diameter in the range of 1.0 inches (2.5 cm) to 2.0 inches (5.0 cm).

Claim 49

Dependent Claim 49 words

The gas injection apparatus of claim 32 wherein said second slit nozzle has a diameter in the range of 3.0 inches (7.5 cm) to 6.0 inches (15 cm) and said slit nozzle has a diameter in the range of approximately 0.5 inches (1.2 cm) to 2.0 inches (5.0 cm).

Claim 50

Dependent Claim 31 words

The gas injection apparatus of claim 47 wherein said second slit nozzle and said slit nozzle have diameters of about 4.0 inches (10 cm) and about 1.5 inches (3.7 cm), respectively.

Claim 51

Dependent Claim 57 words

The gas injection apparatus of claim 33 wherein said slit nozzle, said second slit nozzle and said outer slit nozzle have diameters of about one of: (a) 0.3 inch (0.8 cm), 1.0 inch (2.5 cm) and 1.25 inches (3.0 cm), respectively, and (b) 4 inches (10 cm), 2.5 inches (6.3 cm) and 1 inch (2.5 cm), respectively.

Claim 52

Dependent Claim 230 words

A reactor chamber for use with a source of process gas, comprising: an interior capable of being evacuated, and provided with a channel to permit communication between a source of process gas and the interior of said chamber; a pedestal adapted to mount a workpiece to be processed; a gas injection device including, at least one solid central element adjacent and across the outlet of said channel, said central element being surrounded by one or more annular rings, said central element and each annular ring being closely spaced from one another to define one or more slit passageways centered about a central axis coinciding with that of said channel, said one or more slit passageways may be oriented to direct the process gas into said chamber interior one of (a) substantially perpendicularly of said pedestal, (b) angled inwardly and (c) angled outwardly of said central axis, and a plurality of spacers disposed within said one or more slit passageways between the solid central element and the one or more annular rings, said spacers having a thickness which spans the one or more slit passageways and causes them to be of a substantially equal width over their entire circumference, said spacers further having a cross-sectional size in the direction of gas flow which is sufficiently small so as to not significantly interfere with the flow of gas from the slit nozzle.

Claim 53

Dependent Claim 230 words

A reactor chamber for use with a source of process gas, comprising: an interior capable of being evacuated, and provided with a channel to permit communication between a source of process gas and the interior of said chamber; a pedestal adapted to mount a workpiece to be processed; a gas injection device including, at least one solid central element adjacent and across the outlet of said channel, said central element being surrounded by one or more annular rings, said central element and each annular ring being closely spaced from one another to define one or more slit passageways centered about a central axis coinciding with that of said channel, said one or more slit passageways may be oriented to direct the process gas into said chamber interior one of (a) substantially perpendicularly of said pedestal, (b) angled inwardly and (c) angled outwardly of said central axis, and a plurality of spacers disposed within said one or more slit passageways between the solid central element and the one or more annular rings, said spacers having a thickness which spans the one or more slit passageways and causes them to be of a substantially equal width over their entire circumference, said spacers further having a cross-sectional size in the direction of gas flow which is sufficiently small so as to not significantly interfere with the flow of gas from the slit nozzle.

Claim 54

Dependent Claim 48 words

The chamber of claim 50, further including a focus ring mounted upon said pedestal and adapted to surround a workpiece to be processed and to extend above the position of said workpiece in a manner related to injection device diameter, whereby to improve process uniformity across said workpiece.

Claim 55

Dependent Claim 25 words

The chamber of claim 50 wherein said gas injection device comprises an insulating material, and said adjacent wall of said chamber comprises a conductive material.

Claim 56

Dependent Claim 19 words

The chamber of claim 50 wherein said gas injection device is recessed within the upper wall of said chamber.

Claim 57

Dependent Claim 28 words

The chamber of claim 50 wherein said central element is a disk whose diameter is at least an order of magnitude larger than the diameter of said channel.

Claim 58

Dependent Claim 31 words

The chamber of claim 50 wherein said central element is a cylindrical element whose diameter is greater than but within the same order of magnitude as the diameter of said channel.

Claim 59

Dependent Claim 26 words

The chamber of claim 53 wherein said gas injection device comprises an insulating material which is generally nonreactive in the plasma environment of the chamber interior.

Claim 60

Dependent Claim 20 words

The chamber of claim 50 wherein at least one of said one or more slit passageways is a continuous slit.

Claim 61

Dependent Claim 189 words

A plasma reactor for use with a source of process gas, comprising: a reactor chamber having an interior capable of being evacuated, and provided with a channel to permit communication between a source of process gas and the interior of said chamber; a pedestal adapted to mount a workpiece to be processed; and a gas injection device including, at least one solid central element adjacent and across the outlet of said channel, said element being surrounded by at least one annular member having a central axis of symmetry with a gap therebetween to define at least one slit passageway directing the gas toward said pedestal, said central and annular elements otherwise blocking gas flow from said channel into said chamber, and a plurality of spacers disposed within said at least one slit passageway, said spacers having a thickness which spans each slit passageway and causes it to be of a substantially equal width over its entire circumference, said spacers further having a cross-sectional size in the direction of gas flow which is sufficiently small so as to not significantly interfere with the flow of gas from the slit nozzle.

Claim 62

Dependent Claim 189 words

A plasma reactor for use with a source of process gas, comprising: a reactor chamber having an interior capable of being evacuated, and provided with a channel to permit communication between a source of process gas and the interior of said chamber; a pedestal adapted to mount a workpiece to be processed; and a gas injection device including, at least one solid central element adjacent and across the outlet of said channel, said element being surrounded by at least one annular member having a central axis of symmetry with a gap therebetween to define at least one slit passageway directing the gas toward said pedestal, said central and annular elements otherwise blocking gas flow from said channel into said chamber, and a plurality of spacers disposed within said at least one slit passageway, said spacers having a thickness which spans each slit passageway and causes it to be of a substantially equal width over its entire circumference, said spacers further having a cross-sectional size in the direction of gas flow which is sufficiently small so as to not significantly interfere with the flow of gas from the slit nozzle.

Claim 63

Dependent Claim 28 words

The reactor of claim 58 wherein each slit passageway is oriented to direct the process gas into said chamber interior in a direction substantially perpendicular of said pedestal.

Claim 64

Dependent Claim 29 words

The reactor of claim 58 wherein each slit passageway is oriented to direct the process gas into said chamber interior in a direction angled inwardly of said central axis.

Claim 65

Dependent Claim 29 words

The reactor of claim 58 wherein each slit passageway is oriented to direct the process gas into said chamber interior in a direction angled outwardly of said central axis.

Claim 66

Dependent Claim 103 words

A plasma reactor comprising: a reactor vacuum chamber having a chamber housing; a pedestal holding a workpiece to be processed; gas injection apparatus, comprising: a gas supply containing a processing species in a gas, an opening in said chamber housing, a gas feed line from said supply to said opening in said chamber housing, gas distribution apparatus near said opening in said chamber housing, said gas distribution apparatus having at least one elongate thin slit nozzle facing the interior of said chamber wherein said slit nozzle follows a segmented circular path so as to reduce gas flow over selected portions of said workpiece.

Claim 67

Dependent Claim 103 words

A plasma reactor comprising: a reactor vacuum chamber having a chamber housing; a pedestal holding a workpiece to be processed; gas injection apparatus, comprising: a gas supply containing a processing species in a gas, an opening in said chamber housing, a gas feed line from said supply to said opening in said chamber housing, gas distribution apparatus near said opening in said chamber housing, said gas distribution apparatus having at least one elongate thin slit nozzle facing the interior of said chamber wherein said slit nozzle follows a segmented circular path so as to reduce gas flow over selected portions of said workpiece.

Claim 68

Dependent Claim 91 words

A plasma reactor comprising: a reactor vacuum chamber having a chamber housing; a pedestal holding a workpiece to be processed; gas injection apparatus, comprising: a gas supply containing a processing species in a gas, an opening in said chamber housing, a gas feed line from said supply to said opening in said chamber housing, gas distribution apparatus near said opening in said chamber housing, said gas distribution apparatus having at least one elongate thin slit nozzle facing the interior of said chamber wherein said slit nozzle follows a meandering arcuate path.

Claim 69

Dependent Claim 91 words

A plasma reactor comprising: a reactor vacuum chamber having a chamber housing; a pedestal holding a workpiece to be processed; gas injection apparatus, comprising: a gas supply containing a processing species in a gas, an opening in said chamber housing, a gas feed line from said supply to said opening in said chamber housing, gas distribution apparatus near said opening in said chamber housing, said gas distribution apparatus having at least one elongate thin slit nozzle facing the interior of said chamber wherein said slit nozzle follows a meandering arcuate path.

Claim 70

Dependent Claim 12 words

The reactor of claim 63 wherein said meandering arcuate path is segmented.

Claim 71

Dependent Claim 113 words

A plasma reactor comprising: a reactor vacuum chamber having a chamber housing; a pedestal holding a workpiece to be processed; gas injection apparatus, comprising: a gas supply containing a processing species in a gas, an opening in said chamber housing, a gas feed line from said supply to said opening in said chamber housing, gas distribution apparatus near said opening in said chamber housing, said gas distribution apparatus having a blocking plate in said chamber facing said opening through said chamber housing and separated from said chamber housing by a gap along a peripheral edge of said blocking plate, said gap comprising an elongate thin slit nozzle facing the interior of said chamber.

Claim 72

Dependent Claim 113 words

A plasma reactor comprising: a reactor vacuum chamber having a chamber housing; a pedestal holding a workpiece to be processed; gas injection apparatus, comprising: a gas supply containing a processing species in a gas, an opening in said chamber housing, a gas feed line from said supply to said opening in said chamber housing, gas distribution apparatus near said opening in said chamber housing, said gas distribution apparatus having a blocking plate in said chamber facing said opening through said chamber housing and separated from said chamber housing by a gap along a peripheral edge of said blocking plate, said gap comprising an elongate thin slit nozzle facing the interior of said chamber.

Claim 73

Dependent Claim 15 words

The reactor of claim 65 further comprising an annular gas reflector surrounding said blocking plate.

Claim 74

Dependent Claim 22 words

The reactor of claim 66 wherein said gas reflector comprises a reflector surface facing and acutely oriented relative to said blocking plate.

Claim 75

Dependent Claim 22 words

The reactor of claim 66 wherein said gas reflector comprises a reflector surface facing and obliquely oriented relative to said blocking plate.

Claim 76

Dependent Claim 48 words

A gas distribution apparatus for injecting gases into a plasma reactor vacuum chamber comprising: at least one elongate thin slit nozzle facing the interior of said chamber wherein said slit nozzle follows a segmented circular path so as to reduce gas flow over selected portions of said workpiece.

Claim 77

Dependent Claim 48 words

A gas distribution apparatus for injecting gases into a plasma reactor vacuum chamber comprising: at least one elongate thin slit nozzle facing the interior of said chamber wherein said slit nozzle follows a segmented circular path so as to reduce gas flow over selected portions of said workpiece.

Claim 78

Dependent Claim 36 words

A gas distribution apparatus for injecting gases into a plasma reactor vacuum chamber comprising: at least one elongate thin slit nozzle facing the interior of said chamber wherein said slit nozzle follows a meandering arcuate path.

Claim 79

Dependent Claim 36 words

A gas distribution apparatus for injecting gases into a plasma reactor vacuum chamber comprising: at least one elongate thin slit nozzle facing the interior of said chamber wherein said slit nozzle follows a meandering arcuate path.

Claim 80

Dependent Claim 12 words

The reactor of claim 70 wherein said meandering arcuate path is segmented.

Claim 81

Dependent Claim 172 words

A reactor chamber for use with a source of process gas, comprising: an interior capable of being evacuated, and provided with a channel to permit communication between a source of process gas and the interior of said chamber; a pedestal adapted to mount a workpiece to be processed; an applicator for coupling RF energy into the chamber; a gas injection device including, at least one solid central element adjacent and across the outlet of said channel, said central element being surrounded by one or more annular rings, said central element and each annular ring being closely spaced from one another to define one or more slit passageways centered about a central axis coinciding with that of said channel, said one or more slit passageways may be oriented to direct the process gas into said chamber interior one of (a) perpendicularly of said pedestal, (b) angled inwardly and (c) angled outwardly of said central axis, and wherein at least one of said one or more slit passageways comprises an array of discrete slits.

Claim 82

Dependent Claim 172 words

A reactor chamber for use with a source of process gas, comprising: an interior capable of being evacuated, and provided with a channel to permit communication between a source of process gas and the interior of said chamber; a pedestal adapted to mount a workpiece to be processed; an applicator for coupling RF energy into the chamber; a gas injection device including, at least one solid central element adjacent and across the outlet of said channel, said central element being surrounded by one or more annular rings, said central element and each annular ring being closely spaced from one another to define one or more slit passageways centered about a central axis coinciding with that of said channel, said one or more slit passageways may be oriented to direct the process gas into said chamber interior one of (a) perpendicularly of said pedestal, (b) angled inwardly and (c) angled outwardly of said central axis, and wherein at least one of said one or more slit passageways comprises an array of discrete slits.

Claim 83

Dependent Claim 19 words

The chamber of claim 71 wherein each array of discrete slits is symmetrically disposed relative to the central axis.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	2000-06-30	2000-12-30	2001-07-01	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2004-06-30	2004-12-30	2005-07-01	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2008-06-30	2008-12-30	2009-07-01	$7700.00	Window Closed / Lapsed

Gas injection slit nozzle for a plasma process reactor

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