US6007968A
Expired / Lapsed
US
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Method for forming features using frequency doubling hybrid resist and device formed thereby
Assignee: Google LLC
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Filing: 1997-10-29
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Granted: 1999-12-28
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Expires: 2017-10-29
Abstract
Abstract The preferred embodiment of the present invention overcomes the limitations of the prior art by providing a method to form unlinked features using hybrid resist. The method uses a trim process in order to trim the linking features from the "loops" formed by the hybrid resist. This allows the method to form a plurality of unlinked features rather than the loops. In order to trim the ends, a relatively larger trim area is formed adjacent the narrow feature line, either by a second exposure step or by utilizing a grey scale reticle. The broader or wider open area allows features to be formed in the narrow feature lines and being trimmed from the relatively large areas, thereby resulting in district features rather than loops.
Inventors
- 👤 Toshiharu Furukawa
- 👤 Mark C. Hakey
- 👤 Steven J. Holmes
- 👤 David V. Horak
- 👤 Paul A. Rabidoux
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 16:18
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70425; G03F7/70466; G03F7/004; G03F7/038; H; H10; H10P; H10P76/00; H10P76/20; H10P76/204; H10P76/2041; G03F7/20; G03F7/2022
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
89 words
A method for forming a feature on a semiconductor substrate, the method comprising the steps of: a) forming a linked feature using hybrid resist on said semiconductor substrate, said linked feature including at least one feature portion and at least one linking portion, the at least one linking portion connecting the at least one feature portion to form the linked feature; b) trimming said at least one linking portion from said linked feature by removing said at least one linking portion while leaving the at least one feature portion.
Claim 2
Independent Claim
89 words
A method for forming a feature on a semiconductor substrate, the method comprising the steps of: a) forming a linked feature using hybrid resist on said semiconductor substrate, said linked feature including at least one feature portion and at least one linking portion, the at least one linking portion connecting the at least one feature portion to form the linked feature; b) trimming said at least one linking portion from said linked feature by removing said at least one linking portion while leaving the at least one feature portion.
Claim 3
Dependent Claim
51 words
The method of claim 1 wherein the step of forming a linked feature comprises exposing hybrid resist through a mask having mask shapes having edges such that areas of the hybrid resist under the edges of said mask shapes are exposed to intermediate amounts of exposure and become soluble in developer.
Claim 4
Dependent Claim
58 words
The method of claim 1 wherein the step of forming a linked feature comprises forming spaces in said hybrid resist, said spaces including narrow feature spaces and relatively wide trim spaces, and wherein said feature portion is formed in said narrow spaces and said linking portion of said linked feature is formed in said relatively wide trim spaces.
Claim 5
Dependent Claim
22 words
The method of claim 3 wherein said relatively wide trim spaces are formed by x-ray diffraction effects at edges of elongated shapes.
Claim 6
Dependent Claim
32 words
The method of claim 1 wherein the step of trimming said at least one linking portion comprises isotropically etching said linked feature such that the at least one linking portion is removed.
Claim 7
Dependent Claim
30 words
The method of claim 1 wherein the step of forming a linked feature comprises etching into a sub-layer through said hybrid resist and forming said linked feature in said sub-layer.
Claim 8
Dependent Claim
116 words
The method of claim 1 wherein the step of forming a linked feature comprises the steps of: i) depositing hybrid resist on said semiconductor substrate; ii) exposing said hybrid resist through at least one mask containing a plurality of feature shapes and a plurality of trim shapes; iii) developing said hybrid resist, said development forming at least one feature space in said hybrid resist where said hybrid resist was exposed to intermediate amounts of exposure and forming at least one trim space in said hybrid resist; and iv) forming the at least one feature portion in said at least one feature space and the at least one linking portion in the at least one trim space.
Claim 9
Dependent Claim
57 words
The method of claim 7 wherein the step of forming the at least one feature portion in said at least one feature space and the at least one linking portion in the at least one trim space comprises conformally depositing a feature material in the at least one feature space and the at least one trim space.
Claim 10
Dependent Claim
36 words
The method of claim 7 wherein the step of trimming said at least one linking portion from said linked feature comprises isotropically etching said at least one linking portion from the at least one trim space.
Claim 11
Dependent Claim
68 words
The method of claim 7 wherein the step of forming the at least one feature portion in said at least one feature space and the at least one linking portion in the at least one trim space comprises etching through said at least one feature space and said at least one trim space into a sub-layer and forming said feature portion and said linking portion in said sub-layer.
Claim 12
Dependent Claim
50 words
The method of claim 7 wherein the step of exposing said hybrid resist through at least one mask containing a plurality of feature shapes and a plurality of trim shapes comprises exposing through a mask having a plurality of blocking feature shapes each having an adjacent grey scale trim shape.
Claim 13
Dependent Claim
12 words
The method of claim 1 wherein said feature comprises a bit line.
Claim 14
Independent Claim
175 words
A method for forming a feature on a semiconductor substrate, the method comprising the steps of: a) depositing hybrid resist on said semiconductor substrate; b) exposing said hybrid resist through at least one mask containing a plurality of feature shapes having edges, each of the plurality of feature shapes having at least one trim shape adjacent said feature shape, wherein regions of hybrid resist under the edges of said feature shapes and under said trim shapes are exposed to intermediate amounts of exposure; c) developing said hybrid resist such that portions of said hybrid resist that were exposed to intermediate amounts of exposure are removed, forming a plurality of feature spaces and a plurality of trim spaces in said hybrid resist. d) conformally depositing a feature material, such that said feature material substantially fills said feature spaces and partially fills said trim spaces; and e) isotopically etching said feature material such that said feature material in said trim spaces is removed while leaving at least a portion of said feature material in said feature spaces.
Claim 15
Independent Claim
175 words
A method for forming a feature on a semiconductor substrate, the method comprising the steps of: a) depositing hybrid resist on said semiconductor substrate; b) exposing said hybrid resist through at least one mask containing a plurality of feature shapes having edges, each of the plurality of feature shapes having at least one trim shape adjacent said feature shape, wherein regions of hybrid resist under the edges of said feature shapes and under said trim shapes are exposed to intermediate amounts of exposure; c) developing said hybrid resist such that portions of said hybrid resist that were exposed to intermediate amounts of exposure are removed, forming a plurality of feature spaces and a plurality of trim spaces in said hybrid resist. d) conformally depositing a feature material, such that said feature material substantially fills said feature spaces and partially fills said trim spaces; and e) isotopically etching said feature material such that said feature material in said trim spaces is removed while leaving at least a portion of said feature material in said feature spaces.
Claim 16
Dependent Claim
32 words
The method of claim 13 wherein the step of exposing comprises exposing through a first mask containing feature shapes and said trim shapes, and wherein said trim shapes comprise grey scale shapes.
Claim 17
Dependent Claim
30 words
The method of claim 13 wherein the trim spaces have an area relatively large such that the step of conformally depositing feature material leaves a depression in said trim spaces.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-12-27 | 2003-06-28 | 2003-12-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-12-27 | 2007-06-28 | 2007-12-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-12-27 | 2011-06-28 | 2011-12-28 | $7700.00 | Window Closed / Lapsed |