US5618383A
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Narrow lateral dimensioned microelectronic structures and method of forming the same
Assignee: Texas Instruments Inc
•
Filing: 1994-03-30
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Granted: 1997-04-08
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Expires: 2014-03-30
Abstract
Abstract In accordance with the present invention, there is provided a method by which narrow lateral dimensioned microelectronic structures can be formed using low temperature processes. An uncured resist layer (e.g. PMMA 42) is deposited on a supporting layer (e.g. silicon 40) and patterned. Then, by using an isotropic process such as a low temperature chemical vapor deposition, a conformal layer (e.g. silicon oxynitride 44) is deposited substantially evenly on the vertical walls and on the horizontal surfaces of the uncured resist layer. An anisotropic etch such as reactive ion etching is then used to substantially remove the conformal layer from the horizontal surfaces without substantially etching the conformal layer from the vertical walls of the resist. The resist can then be selectively removed, producing isolated vertical sidewall structures (e.g. silicon oxynitride 46) which could be used, for example, as a negative tone mask. Alternatively, instead of removing the resist, another resist layer (e.g. PMMA 48) could be spun on to planarize the structure, and then etched back to reveal the sidewall structures. The sidewall structures could then be selectively etched, producing a resist structure (e.g. PMMA 50) with openings the width of the sidewall structures.
Inventors
- 👤 John N. Randall
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 14:18
CPC Classifications
H; H10; H10P; H10P76/00; H10P76/20; H10P76/40; H10P76/408; H10P76/4085; Y; Y10; Y10S; Y10S438/00; Y10S438/942; Y10S438/947; Y10S438/948; Y10S438/951
Claims Analysis
Total Claims: 46
Claim 1
Independent Claim
159 words
A method of forming narrow lateral dimensioned microelectronic structures, said method comprising the steps of: a. providing a semiconductor substrate; b. depositing an uncured resist layer on said semiconductor substrate, wherein said uncured resist layer is soluble in an organic solvent; c. patterning said resist layer to form a profile having horizontal surfaces and vertical walls; d. depositing a conformal layer at a first temperature on said horizontal surfaces and on said vertical walls, said conformal layer forming vertical sidewalls having a first thickness on said vertical walls, wherein said conformal layer comprises silicon, and said first temperature is below a second temperature at which said uncured resist layer flows; e. anisotropically etching to remove said conformal layer from said horizontal surfaces without substantially etching said vertical sidewalls; and f. removing said uncured resist layer to form said narrow lateral dimensioned structures on said semiconductor substrate, said structures having lateral dimensions controlled by said thickness of said vertical sidewalls.
Claim 2
Independent Claim
159 words
A method of forming narrow lateral dimensioned microelectronic structures, said method comprising the steps of: a. providing a semiconductor substrate; b. depositing an uncured resist layer on said semiconductor substrate, wherein said uncured resist layer is soluble in an organic solvent; c. patterning said resist layer to form a profile having horizontal surfaces and vertical walls; d. depositing a conformal layer at a first temperature on said horizontal surfaces and on said vertical walls, said conformal layer forming vertical sidewalls having a first thickness on said vertical walls, wherein said conformal layer comprises silicon, and said first temperature is below a second temperature at which said uncured resist layer flows; e. anisotropically etching to remove said conformal layer from said horizontal surfaces without substantially etching said vertical sidewalls; and f. removing said uncured resist layer to form said narrow lateral dimensioned structures on said semiconductor substrate, said structures having lateral dimensions controlled by said thickness of said vertical sidewalls.
Claim 3
Dependent Claim
17 words
The method according to claim 1, wherein said step of removing said uncured resist layer comprises lift-off.
Claim 4
Dependent Claim
12 words
The method according to claim 1, wherein said semiconductor substrate comprises silicon.
Claim 5
Dependent Claim
14 words
The method according to claim 1, wherein said uncured resist layer comprises polymethyl methacrylate.
Claim 6
Dependent Claim
18 words
The method according to claim 1, wherein said step of patterning said resist layer comprises electron beam lithography.
Claim 7
Dependent Claim
23 words
The method according to claim 1, wherein said step of depositing said conformal layer comprises plasma-enhanced chemical vapor deposition of said conformal layer.
Claim 8
Dependent Claim
26 words
The method according to claim 1, wherein said conformal layer is selected from the group consisting of: silicon oxynitride, silicon nitride, silicon dioxide, and combinations thereof.
Claim 9
Dependent Claim
24 words
The method according to claim 1, wherein said step of anisotropic etching comprises reactive ion etching of said conformal layer on said horizontal surfaces.
Claim 10
Dependent Claim
28 words
The method according to claim 8, wherein said reactive ion etching comprises using CF 4 /O 2 etch gases to etch said conformal layer on said horizontal surfaces.
Claim 11
Dependent Claim
14 words
The method according to claim 1, wherein said first temperature is below 100° C.
Claim 12
Dependent Claim
17 words
The method according to claim 10, wherein said first temperature is between 85° C. and 95° C.
Claim 13
Dependent Claim
18 words
The method according to claim 1, wherein steps (b) through (f) are all performed below said second temperature.
Claim 14
Dependent Claim
13 words
The method according to claim 12, wherein said second temperature is 130° C.
Claim 15
Dependent Claim
13 words
The method according to claim 13, wherein said second temperature is 100° C.
Claim 16
Dependent Claim
20 words
The method according to claim 1, wherein said vertical sidewalls have a lateral thickness of less than about 20 nm.
Claim 17
Dependent Claim
20 words
The method according to claim 15, wherein said vertical sidewalls have a lateral thickness of less than about 10 nm.
Claim 18
Dependent Claim
20 words
The method according to claim 16, wherein said vertical sidewalls have a lateral thickness of less than about 5 nm.
Claim 19
Independent Claim
250 words
A method of forming narrow lateral dimensioned microelectronic structures, said method comprising the steps of: a. providing a semiconductor substrate; b. depositing a first uncured resist layer on said semiconductor substrate, wherein said uncured resist layer is soluble in an organic solvent; c. patterning said resist layer to expose a first portion of an underlying layer, thereby forming a profile having horizontal surfaces and vertical walls; d. depositing a conformal layer at a first temperature of less than 130° C. on said horizontal surfaces and on said vertical walls, said conformal layer forming vertical sidewalls on said vertical walls, wherein said conformal layer comprises silicon, and said conformal layer has substantial etch selectivity with respect to said resist layer; e. anisotropically etching to remove said conformal layer from said horizontal surfaces without substantially etching said vertical sidewalls; f. depositing a second uncured resist layer on said horizontal surfaces and said vertical sidewalls thereby planarizing said profile; g. etching said first and second resist layers to expose a top portion of said vertical sidewalls and form an uncured etched-back resist layer; h. removing said vertical sidewalls to form openings in said etched-back resist layer exposing second portions of said underlying layer, whereby the removal of the sidewalls is facilitated by the substantial etch selectivity of the sidewalls with respect to the uncured etched-back resist layer; i. depositing a metallic layer on said etched-back resist layer and said exposed second portions of said underlying layer; and j. removing said etched-back resist layer.
Claim 20
Independent Claim
250 words
A method of forming narrow lateral dimensioned microelectronic structures, said method comprising the steps of: a. providing a semiconductor substrate; b. depositing a first uncured resist layer on said semiconductor substrate, wherein said uncured resist layer is soluble in an organic solvent; c. patterning said resist layer to expose a first portion of an underlying layer, thereby forming a profile having horizontal surfaces and vertical walls; d. depositing a conformal layer at a first temperature of less than 130° C. on said horizontal surfaces and on said vertical walls, said conformal layer forming vertical sidewalls on said vertical walls, wherein said conformal layer comprises silicon, and said conformal layer has substantial etch selectivity with respect to said resist layer; e. anisotropically etching to remove said conformal layer from said horizontal surfaces without substantially etching said vertical sidewalls; f. depositing a second uncured resist layer on said horizontal surfaces and said vertical sidewalls thereby planarizing said profile; g. etching said first and second resist layers to expose a top portion of said vertical sidewalls and form an uncured etched-back resist layer; h. removing said vertical sidewalls to form openings in said etched-back resist layer exposing second portions of said underlying layer, whereby the removal of the sidewalls is facilitated by the substantial etch selectivity of the sidewalls with respect to the uncured etched-back resist layer; i. depositing a metallic layer on said etched-back resist layer and said exposed second portions of said underlying layer; and j. removing said etched-back resist layer.
Claim 21
Dependent Claim
22 words
The method according to claim 18, wherein said etched-back resist layer forms a negative tone image for said narrow lateral dimensioned structures.
Claim 22
Dependent Claim
17 words
The method according to claim 19, wherein said metallic layer is deposited using a vacuum evaporation process.
Claim 23
Dependent Claim
29 words
The method according to claim 19, wherein said step j further comprises dissolving said etched-back resist layer in acetone to lift-off said metallic layer on said etched-back resist layer.
Claim 24
Dependent Claim
27 words
The method according to claim 19, wherein said metallic layer is selected from the group consisting of: Al, Au, Ti, W, Pt, Ag, Cu, and combinations thereof.
Claim 25
Dependent Claim
22 words
The method according to claim 18, wherein said step of removing said vertical sidewalls comprises a wet chemical etch using buffered HF.
Claim 26
Dependent Claim
20 words
The method according to claim 18, wherein said step (j) comprises an oxygen plasma to lift-off said etched-back resist layer.
Claim 27
Dependent Claim
17 words
The method of claim 18, wherein said first and second resist layers are compatible with e-beam lithography.
Claim 28
Independent Claim
160 words
A method of forming narrow lateral dimensioned microelectronic structures, said method comprising the steps of: a. providing a semiconductor substrate; b. depositing an uncured resist layer on said semiconductor substrate, wherein said uncured resist layer is soluble in an organic solvent; c. patterning said resist layer to expose a portion of said supporting layer, thereby forming a profile having horizontal surfaces and vertical walls; d. depositing a conformal layer at a first temperature of less than 130° C. on said horizontal surfaces and on said vertical walls, said conformal layer forming vertical sidewalls on said vertical walls, and said conformal layer having substantial etch selectivity with respect to said resist layer; e. anisotropically etching to remove said conformal layer from said horizontal surfaces without substantially etching said vertical sidewalls; and f. removing the uncured resist layer, whereby the removal of the resist layer is facilitated by the resist layer remaining uncured after the low temperature deposition of the conformal layer.
Claim 29
Independent Claim
160 words
A method of forming narrow lateral dimensioned microelectronic structures, said method comprising the steps of: a. providing a semiconductor substrate; b. depositing an uncured resist layer on said semiconductor substrate, wherein said uncured resist layer is soluble in an organic solvent; c. patterning said resist layer to expose a portion of said supporting layer, thereby forming a profile having horizontal surfaces and vertical walls; d. depositing a conformal layer at a first temperature of less than 130° C. on said horizontal surfaces and on said vertical walls, said conformal layer forming vertical sidewalls on said vertical walls, and said conformal layer having substantial etch selectivity with respect to said resist layer; e. anisotropically etching to remove said conformal layer from said horizontal surfaces without substantially etching said vertical sidewalls; and f. removing the uncured resist layer, whereby the removal of the resist layer is facilitated by the resist layer remaining uncured after the low temperature deposition of the conformal layer.
Claim 30
Dependent Claim
27 words
The method according to claim 26, said method further comprising using said vertical sidewalls as a negative tone mask after said step of removing said resist layer.
Claim 31
Dependent Claim
14 words
The method of claim 26, wherein said resist layer is compatible with e-beam lithography.
Claim 32
Dependent Claim
86 words
A narrow lateral dimensioned microelectronic structure comprising: a. a semiconductor substrate; b. an uncured resist layer overlying said semiconductor substrate, wherein said uncured resist layer is soluble in an organic solvent; c. openings in said resist layer exposing portions of an underlying layer, said openings having substantially vertical walls; and d. vertical sidewalls adjacent to and contacting said vertical walls, said sidewalls consisting of a material having substantial etch selectivity with respect to said resist layer, and said sidewalls having a width less than 20 nm.
Claim 33
Dependent Claim
86 words
A narrow lateral dimensioned microelectronic structure comprising: a. a semiconductor substrate; b. an uncured resist layer overlying said semiconductor substrate, wherein said uncured resist layer is soluble in an organic solvent; c. openings in said resist layer exposing portions of an underlying layer, said openings having substantially vertical walls; and d. vertical sidewalls adjacent to and contacting said vertical walls, said sidewalls consisting of a material having substantial etch selectivity with respect to said resist layer, and said sidewalls having a width less than 20 nm.
Claim 34
Dependent Claim
12 words
The structure of claim 29, wherein said resist layer comprises polymethyl methacrylate.
Claim 35
Dependent Claim
25 words
The structure of claim 29, wherein said vertical sidewalls are selected from the group consisting of: silicon oxynitride, silicon nitride, silicon dioxide, and combinations thereof.
Claim 36
Dependent Claim
17 words
The structure of claim 31, wherein said openings are wider than said width of said vertical sidewalls.
Claim 37
Dependent Claim
19 words
The structure of claim 29, wherein said vertical sidewalls have a lateral thickness of less than about 10 nm.
Claim 38
Dependent Claim
19 words
The structure of claim 29, wherein said vertical sidewalls have a lateral thickness of less than about 5 nm.
Claim 39
Dependent Claim
12 words
The structure of claim 29, wherein said vertical sidewalls comprise a metal.
Claim 40
Dependent Claim
26 words
The structure of claim 35, wherein said vertical sidewalls are selected from the group consisting of: Al, Au, Ti, W, Pt, Ag, Cu, and combinations thereof.
Claim 41
Dependent Claim
15 words
The structure of claim 35, wherein said openings have said width of said vertical sidewalls.
Claim 42
Dependent Claim
14 words
The structure of claim 29, wherein said resist layer is compatible with e-beam lithography.
Claim 43
Dependent Claim
90 words
A microelectronic structure comprising: a. a semiconductor substrate; b. an uncured polymethyl methacrylate resist layer overlying said semiconductor substrate; c. openings in said resist layer exposing portions of an underlying layer, said openings having substantially vertical walls; and d. vertical sidewalls adjacent to and contacting said vertical walls, wherein said sidewalls have a width of less than 20 nm, wherein said openings are wider than said width of said sidewalls, and wherein said sidewalls are selected from the group consisting of: silicon oxynitride, silicon nitride, silicon dioxide, and combinations thereof.
Claim 44
Dependent Claim
90 words
A microelectronic structure comprising: a. a semiconductor substrate; b. an uncured polymethyl methacrylate resist layer overlying said semiconductor substrate; c. openings in said resist layer exposing portions of an underlying layer, said openings having substantially vertical walls; and d. vertical sidewalls adjacent to and contacting said vertical walls, wherein said sidewalls have a width of less than 20 nm, wherein said openings are wider than said width of said sidewalls, and wherein said sidewalls are selected from the group consisting of: silicon oxynitride, silicon nitride, silicon dioxide, and combinations thereof.
Claim 45
Dependent Claim
89 words
A microelectronic structure comprising: a. a semiconductor substrate; b. an uncured polymethyl methacrylate resist layer overlying said semiconductor substrate; c. openings in said resist layer exposing portions of an underlying layer, said openings having substantially vertical walls; and d. vertical sidewalls adjacent to and contacting said vertical walls, wherein said sidewalls have a width of less than 20 nm, wherein said openings have said width of said sidewalls, and wherein said sidewalls are selected from the group consisting of: Al, Au, Ti, W, Pt, Ag, Cu, and combinations thereof.
Claim 46
Dependent Claim
89 words
A microelectronic structure comprising: a. a semiconductor substrate; b. an uncured polymethyl methacrylate resist layer overlying said semiconductor substrate; c. openings in said resist layer exposing portions of an underlying layer, said openings having substantially vertical walls; and d. vertical sidewalls adjacent to and contacting said vertical walls, wherein said sidewalls have a width of less than 20 nm, wherein said openings have said width of said sidewalls, and wherein said sidewalls are selected from the group consisting of: Al, Au, Ti, W, Pt, Ag, Cu, and combinations thereof.
References Cited (Backward Citations)
US4209349A
Cited
US4256514A
Cited
US4358340A
Cited
US4502914A
Cited
JPS59163829A
Cited
US4650544A
Cited
US4784718A
Cited
US4803181A
Cited
US4707218A
Cited
US4931137A
Cited
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