US5977582A
Expired / Lapsed
US
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Capacitor comprising improved TaOx -based dielectric
Assignee: Bell Semiconductor LLC
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Filing: 1997-05-23
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Granted: 1999-11-02
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Expires: 2017-05-23
Abstract
Abstract A dielectric layer consisting essentially of Ta, Al, oxygen and nitrogen can have advantageous properties that make such a layer useful for thin film capacitors, typically capacitors for Si integrated circuits. For instance, a significantly greater fraction of capacitors according to the invention than of prior art tantalum oxide capacitors can store a charge of 3 mu coulomb/cm2. In a currently preferred embodiment, the dielectric layer has composition Ta1-yAlyOxNz, with y DIFFERENCE 0.1, x DIFFERENCE 2.4, and z DIFFERENCE 0.02. The dielectric layer can be formed by sputter deposition or any other appropriate deposition technique, e.g., chemical vapor deposition.
Inventors
- 👤 Robert McLemore Fleming
- 👤 Lynn Frances Schneemeyer
- 👤 Robert Bruce van Dover
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 22:38
CPC Classifications
H; H10; H10D; H10D1/00; H10D1/60; H10D1/68; H01; H01G; H01G4/00; H01G4/002; H01G4/018; H01G4/06; H01G4/08; H10P; H10P14/00; H10P14/60; H10P14/69; H10P14/692; H10P14/6938; H10P14/6939; H10P14/69391; H10P14/69393; H10P14/69397
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
34 words
Article comprising a capacitor comprising two electrically conductive members, and a first dielectric layer therebetween; CHARACTERIZED IN THAT the first dielectric layer consists essentially of tantalum (Ta), aluminum (Al), oxygen (O) and nitrogen (N).
Claim 2
Dependent Claim
34 words
Article comprising a capacitor comprising two electrically conductive members, and a first dielectric layer therebetween; CHARACTERIZED IN THAT the first dielectric layer consists essentially of tantalum (Ta), aluminum (Al), oxygen (O) and nitrogen (N).
Claim 3
Dependent Claim
26 words
Article according to claim 1, wherein the first dielectric layer has composition Ta 1-y Al y O x N z , where 0.05≦y≦0.5, 2.0≦x≦2.5, and 0≦z≦0.1.
Claim 4
Dependent Claim
19 words
Article according to claim 2, wherein y is about 0.1, x is about 2.4 and z is about 0.02.
Claim 5
Dependent Claim
13 words
Article according to claim 1, wherein the article is a Si integrated circuit.
Claim 6
Dependent Claim
33 words
Article according to claim 1, wherein the capacitor is a member of a multi-capacitor sample, at least 75% of the members of the sample being capable of storing 3 μcoulomb/cm 2 or more.
Claim 7
Dependent Claim
27 words
Article according to claim 1, wherein the capacitor further comprises at least one layer of a second dielectric material of composition different from the first dielectric layer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-11-01 | 2003-05-03 | 2003-11-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-11-01 | 2007-05-03 | 2007-11-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-11-01 | 2011-05-03 | 2011-11-02 | $7700.00 | Window Closed / Lapsed |