US4471405A
Expired / Lapsed
US
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Thin film capacitor with a dual bottom electrode structure
Assignee: International Business Machines Corp
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Filing: 1983-10-03
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Granted: 1984-09-11
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Expires: 2003-10-03
Abstract
Abstract A thin film capacitor having a dual bottom electrode is provided. The bottom electrode includes a first layer of metal and a second layer of platinum, the metal of the first layer having the characteristic of forming a stable intermetallic phase with platinum during heat treatment. The first layer metal may be selected from the group consisting of Hf, Zr and Ta. The thin film capacitor may be employed as a decoupling capacitor in VLSI devices.
Inventors
- 👤 James K. Howard
- 👤 Kris V. Srikrishnan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 07:33
CPC Classifications
H; H01; H01G; H01G4/00; H01G4/002; H01G4/005; H01G4/008; H01G4/018; H01G4/06; H01G4/08
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
59 words
A thin film capacitor comprising: a dual bottom electrode including a first layer of metal, and a second layer of platinum, said metal of the first layer being of the nature of forming a stable intermetallic phase with platinum during heat treatment, a dielectric layer formed on said bottom electrode, and a counter electrode formed on said dielectric layer.
Claim 2
Dependent Claim
59 words
A thin film capacitor comprising: a dual bottom electrode including a first layer of metal, and a second layer of platinum, said metal of the first layer being of the nature of forming a stable intermetallic phase with platinum during heat treatment, a dielectric layer formed on said bottom electrode, and a counter electrode formed on said dielectric layer.
Claim 3
Dependent Claim
16 words
The thin film capacitor of claim 1 wherein said intermetallic phase has lower resistivity than platinum.
Claim 4
Dependent Claim
25 words
The thin film capacitor of claim 2 wherein said metal of the first layer is selected from the group consisting of hafnium, zirconium and tantalum.
Claim 5
Dependent Claim
12 words
The thin film capacitor of claim 3 formed on a supporting substrate.
Claim 6
Dependent Claim
16 words
The thin capacitor of claim 4 wherein said substrate comprises a dielectric adjacent said bottom electrode.
Claim 7
Dependent Claim
19 words
The thin film capacitor of claim 5 wherein said dielectric comprises a silicon dioxide coating on a semiconductor device.
Claim 8
Dependent Claim
73 words
A thin film capacitor comprising: a dual bottom electrode including a first layer of metal and a second layer of platinum, said first layer metal having the characteristic of forming a stable intermetallic phase with platinum during heat treatment, said intermetallic phase having a lower resistivity than platinum; a dual dielectric layer of silicon nitride and tantalum pentoxide formed on said bottom electrode; and a counter electrode formed on said dual dielectric layer.
Claim 9
Dependent Claim
73 words
A thin film capacitor comprising: a dual bottom electrode including a first layer of metal and a second layer of platinum, said first layer metal having the characteristic of forming a stable intermetallic phase with platinum during heat treatment, said intermetallic phase having a lower resistivity than platinum; a dual dielectric layer of silicon nitride and tantalum pentoxide formed on said bottom electrode; and a counter electrode formed on said dual dielectric layer.
Claim 10
Dependent Claim
15 words
The thin film capacitor of claim 7 being formed on a semiconductor integrated circuit substrate.
Claim 11
Dependent Claim
15 words
The thin film capacitor of claim 8 being a decoupling capacitor for the integrated circuit.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-09-11 | 1988-03-12 | 1988-09-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-09-11 | 1992-03-12 | 1992-09-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-09-11 | 1996-03-12 | 1996-09-11 | $7700.00 | Window Closed / Lapsed |