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US3106489A Expired / Lapsed US ⏱️ 0.0 years remaining

Semiconductor device fabrication

Assignee: AT&T Inc
•
Filing: 1960-12-09
•
Granted: 1963-10-08
•
Expires: 1980-12-09
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Abstract

No abstract record available.

Inventors

  • 👤 Martin P Lepselter

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-25 09:07
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/06; C23C14/14; C23C14/16; H; H10; H10W; H10W74/00; H10W74/40; H10W74/43; H10P; H10P95/00; H10W20/00; H10W20/40; H10W72/00; H10W72/01; H10W72/013; Y; Y10; Y10S; Y10S428/00; Y10S428/922; Y10S428/9335; Y10S428/934; Y10S428/938; Y10T; Y10T428/00; Y10T428/12; Y10T428/12444; Y10T428/12493; Y10T428/12535; Y10T428/12583; Y10T428/1259

Claims Analysis

Total Claims: 2
Claim 1
Independent Claim 96 words
A METHOD FOR FABRICATING A SUBSTANTIALLY NON-PENETRATING CONTACT TO A SLICE OF SEMICONDUCTOR MATERIAL WHICH INCLUDES AN OXIDE COATING, COMPRISING DEPOSITING A LAYER OF AN ACTIVE METAL SELECTED FROM THE GROUP CONSISTING OF TITANIUM, ZIRCONIUM, NIOBIUM, TANTALUM, THORIUM AND VANADIUM ON SAID METAL A LAYER OF CONTACT METAL BETWEEN ABOUT 1,500 AND 10,000 ANGSTROM UNITS THICK SELECTED FROM THE GROUP CONSISTING OF SILVER AND PLATINUM, GOLD, RHODIUM, COPPER, NICKEL AND PALLADIUM AND HEATING AT A TEMPERATURE AND FOR A TIME TO CONVERT SUBSTANTIALLY ALL OF THE UNDERLYING OXIDE COATING TO AN OXIDE OF THE ACTIVE METAL.
Claim 2
Independent Claim 96 words
A METHOD FOR FABRICATING A SUBSTANTIALLY NON-PENETRATING CONTACT TO A SLICE OF SEMICONDUCTOR MATERIAL WHICH INCLUDES AN OXIDE COATING, COMPRISING DEPOSITING A LAYER OF AN ACTIVE METAL SELECTED FROM THE GROUP CONSISTING OF TITANIUM, ZIRCONIUM, NIOBIUM, TANTALUM, THORIUM AND VANADIUM ON SAID METAL A LAYER OF CONTACT METAL BETWEEN ABOUT 1,500 AND 10,000 ANGSTROM UNITS THICK SELECTED FROM THE GROUP CONSISTING OF SILVER AND PLATINUM, GOLD, RHODIUM, COPPER, NICKEL AND PALLADIUM AND HEATING AT A TEMPERATURE AND FOR A TIME TO CONVERT SUBSTANTIALLY ALL OF THE UNDERLYING OXIDE COATING TO AN OXIDE OF THE ACTIVE METAL.

References Cited (Backward Citations)

US2799600A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1966-10-07 1967-04-08 1967-10-08 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1970-10-07 1971-04-08 1971-10-08 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1974-10-07 1975-04-08 1975-10-08 $7700.00 Window Closed / Lapsed

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