Apparatus, method and medium for enhancing the throughput of a wafer processing facility using a multi-slot cool down chamber and a priority transfer scheme

Claim 2

A computer-implemented method for transferring wafers in a wafer processing facility comprising a plurality of process chambers, each process chamber for performing a different process on a wafer contained therein, the method comprising the steps of: (1) assigning a different priority level to each of a plurality of wafers in the wafer processing facility according to a processing stage to which each respective wafer has progressed through the process chambers; (2) determining that a process in one or more of the process chambers has been completed; (3) determining which wafer of the plurality of wafers in the one or more process chambers is assigned a highest priority level; and (4) initiating a wafer transfer between two of the process chambers for the wafer having the highest assigned priority level, wherein the wafer processing facility comprises a cooling chamber for cooling a wafer previously processed in one of the process chambers, wherein step (1) comprises the step of assigning a lower priority level to a wafer which has been transferred to the cooling chamber than to a wafer which has not yet been transferred to the cooling chamber.

Claim 3

The method of claim 1, wherein the cooling chamber comprises a plurality of slots for holding a plurality of wafers, the method further comprising the step of, prior to step (4), determining whether a latency associated with the transfer to be initiated in step (4) would exceed a remaining process time for a process occurring in any the plurality of process chambers, and, responsive to a determination that such a latency would exceed the remaining process time, delaying the transfer in step (4).

Claim 4

The method of claim 2, further comprising the step of determining whether all of the slots in the multi-slot cooling chamber are full and, responsive to such a determination, transferring one of the wafers from the multi-slot cooling chamber without regard to the latency determination associated with the transfer.

Claim 5

A computer-implemented method for transferring wafers in a wafer processing facility comprising a plurality of process chambers, each process chamber for performing a different process on a wafer contained therein, the method comprising the steps of: (1) assigning a different priority level to each of a plurality of wafers in the wafer processing facility according to a processing stage to which each respective wafer has progressed through the process chambers: (2) determining that a process in one or more of the process chambers has been completed; (3) determining which wafer of the plurality of wafers in the one or more process chambers is assigned a highest priority level; and (4) initiating a wafer transfer between two of the process chambers for the wafer having the highest assigned priority level, wherein step (1) comprises the step of assigning a first priority level to a wafer which has already been processed in one of the process chambers, and assigning a second priority level higher than the first priority level to a wafer which is a "dummy" wafer used to clean one of the process chambers.

Claim 6

A computer-implemented method for transferring wafers in a wafer processing facility comprising a plurality of process chambers, each process chamber for performing a different process on a wafer contained therein, the method comprising the steps of: (1) assigning a different priority level to each of a plurality of wafers in the wafer processing facility according to a processing stage to which each respective wafer has progressed through the process chambers: (2) determining that a process in one or more of the process chambers has been completed; (3) determining which wafer of the plurality of wafers in the one or more process chambers is assigned a highest priority level; and (4) initiating a wafer transfer between two of the process chambers for the wafer having the highest assigned priority level, wherein step (1) comprises the step of assigning a first priority level to a wafer which has already been processed in one of the process chambers, and assigning a second priority level higher than the first priority level to a wafer which is a "dummy" wafer used to clean one of the process chambers.

Claim 7

A computer-implemented method for transferring wafers in a wafer processing facility comprising a plurality of process chambers, each process chamber for performing a different process on a wafer contained therein, the method comprising the steps of: (1) assigning a different priority level to each of a plurality of wafers in the wafer processing facility according to a processing stage to which each respective wafer has progressed through the process chambers; (2) determining that a process in one or more of the process chambers has been completed; (3) determining which wafer of the plurality of wafers in the one or more process chambers is assigned a highest priority level; and (4) initiating a wafer transfer between two of the process chambers for the wafer having the highest assigned priority level, wherein step (1) comprises the step of assigning a first priority level to a wafer which has been cooled, a second priority level higher than the first priority level to a wafer which has not yet been processed in any of the process chambers, and a third priority level higher than both the first and second priority levels to a "revisit" wafer which has been processed in one of the processing chambers and requires further processing in another one of the processing chambers.

Claim 8

A computer-implemented method for transferring wafers in a wafer processing facility comprising a plurality of process chambers, each process chamber for performing a different process on a wafer contained therein, the method comprising the steps of: (1) assigning a different priority level to each of a plurality of wafers in the wafer processing facility according to a processing stage to which each respective wafer has progressed through the process chambers; (2) determining that a process in one or more of the process chambers has been completed; (3) determining which wafer of the plurality of wafers in the one or more process chambers is assigned a highest priority level; and (4) initiating a wafer transfer between two of the process chambers for the wafer having the highest assigned priority level, wherein step (1) comprises the step of assigning a first priority level to a wafer which has been cooled, a second priority level higher than the first priority level to a wafer which has not yet been processed in any of the process chambers, and a third priority level higher than both the first and second priority levels to a "revisit" wafer which has been processed in one of the processing chambers and requires further processing in another one of the processing chambers.

Claim 9

Apparatus for transferring wafers in a wafer processing facility comprising a plurality of process chambers, each process chamber for performing a different process on a wafer contained therein, the apparatus comprising: means for assigning a different priority level to each of a plurality of wafers in the wafer processing facility according to a processing stage to which each respective wafer has progressed through the processing chambers; means for determining that a process in one of the process chambers has been completed and for determining which wafer of the plurality of wafers in the one or more process chambers is assigned a highest priority level; and means for initiating a wafer transfer between two of the process chambers for the wafer having the highest assigned priority level, wherein the wafer processing facility comprises a cooling chamber for cooling a wafer previously processed in one of the process chambers, and wherein the means for assigning assigns a lower priority level to a wafer which has been transferred to the cooling chamber than to a wafer which has not yet been transferred to the cooling chamber.

Claim 10

Apparatus for transferring wafers in a wafer processing facility comprising a plurality of process chambers, each process chamber for performing a different process on a wafer contained therein, the apparatus comprising: means for assigning a different priority level to each of a plurality of wafers in the wafer processing facility according to a processing stage to which each respective wafer has progressed through the processing chambers; means for determining that a process in one of the process chambers has been completed and for determining which wafer of the plurality of wafers in the one or more process chambers is assigned a highest priority level; and means for initiating a wafer transfer between two of the process chambers for the wafer having the highest assigned priority level, wherein the wafer processing facility comprises a cooling chamber for cooling a wafer previously processed in one of the process chambers, and wherein the means for assigning assigns a lower priority level to a wafer which has been transferred to the cooling chamber than to a wafer which has not yet been transferred to the cooling chamber.

Claim 11

Apparatus for transferring wafers in a wafer processing facility comprising a plurality of process chambers, each process chamber for performing a different process on a wafer contained therein, the apparatus comprising: means for assigning a different priority level to each of a plurality of wafers in the wafer processing facility according to a processing stage to which each respective wafer has progressed through the processing chambers; means for determining that a process in one of the process chambers has been completed and for determining which wafer of the plurality of wafers in the one or more process chambers is assigned a highest priority level; and means for initiating a wafer transfer between two of the process chambers for the wafer having the highest assigned priority level, wherein the means for assigning assigns a first priority level to a wafer which has been cooled, a second priority level higher than the first priority level to a wafer which has not yet been processed in any of the process chambers, and a third priority level higher than both the first and second priority levels to a "revisit" wafer which has been processed in one of the processing chambers and requires further processing in another one of the processing chambers.

Claim 12

Apparatus for transferring wafers in a wafer processing facility comprising a plurality of process chambers, each process chamber for performing a different process on a wafer contained therein, the apparatus comprising: means for assigning a different priority level to each of a plurality of wafers in the wafer processing facility according to a processing stage to which each respective wafer has progressed through the processing chambers; means for determining that a process in one of the process chambers has been completed and for determining which wafer of the plurality of wafers in the one or more process chambers is assigned a highest priority level; and means for initiating a wafer transfer between two of the process chambers for the wafer having the highest assigned priority level, wherein the means for assigning assigns a first priority level to a wafer which has been cooled, a second priority level higher than the first priority level to a wafer which has not yet been processed in any of the process chambers, and a third priority level higher than both the first and second priority levels to a "revisit" wafer which has been processed in one of the processing chambers and requires further processing in another one of the processing chambers.

Claim 13

A wafer processing facility comprising: a plurality of process chambers, each process chamber for performing a different process on a wafer contained therein; a wafer dispensing mechanism which holds and dispenses wafers from a plurality of stored unprocessed wafers; a wafer transfer mechanism, operable to transfer wafers between any two of the process chambers and between the wafer dispensing mechanism and any one of the process chambers; a computer coupled to the wafer transfer mechanism and programmed to assign a different priority level to each of a plurality of wafers in the wafer processing facility according to a processing stage to which each respective wafer has progressed through the processing chambers, and programmed to command the wafer transfer mechanism to initiate a wafer transfer between two of the process chambers or between the wafer dispensing mechanism and any one of the process chambers for one of the plurality of wafers having the highest assigned priority level; and a cool down chamber for storing a wafer which is to be cooled; wherein the computer is programmed to assign a lower priority level to a wafer which has been transferred to the cool down chamber than to an unprocessed wafer.

Claim 14

A wafer processing facility comprising: a plurality of process chambers, each process chamber for performing a different process on a wafer contained therein; a wafer dispensing mechanism which holds and dispenses wafers from a plurality of stored unprocessed wafers; a wafer transfer mechanism, operable to transfer wafers between any two of the process chambers and between the wafer dispensing mechanism and any one of the process chambers; a computer coupled to the wafer transfer mechanism and programmed to assign a different priority level to each of a plurality of wafers in the wafer processing facility according to a processing stage to which each respective wafer has progressed through the processing chambers, and programmed to command the wafer transfer mechanism to initiate a wafer transfer between two of the process chambers or between the wafer dispensing mechanism and any one of the process chambers for one of the plurality of wafers having the highest assigned priority level; and a cool down chamber for storing a wafer which is to be cooled; wherein the computer is programmed to assign a lower priority level to a wafer which has been transferred to the cool down chamber than to an unprocessed wafer.

Claim 15

The wafer processing facility of claim 8, wherein the cool down chamber comprises a plurality of slots for holding a plurality of wafers, and wherein the computer is programmed to determine whether a latency associated with the wafer transfer to be initiated would exceed a remaining process time for a process occurring in any the plurality of process chambers, and, responsive to a determination that such a latency would exceed the remaining process time, delaying the wafer transfer.

Claim 16

The wafer processing facility of claim 8, further comprising a cooling gas generator, coupled to the cooling chamber, for increasing the cooling rate of wafers stored therein.

Claim 17

A wafer processing facility comprising: a plurality of process chambers, each process chamber for performing a different process on a wafer contained therein under computer control; a wafer dispensing mechanism which holds and dispenses a wafer from a plurality of stored unprocessed wafers; a multi-slot wafer cool down chamber having a plurality of slots for holding a plurality of wafers during a cool down period; a computer-controlled wafer transfer mechanism, operable to transfer wafers among the process chambers, the wafer dispensing mechanism, and the multi-slot cool down chamber, and means for determining whether a latency associated with the wafer transfer to be initiated would exceed a remaining process time for a process occurring in any of the plurality of process chambers, and responsive to a determination that such a latency would exceed the remaining process time, delaying the wafer transfer.

Claim 18

A wafer processing facility comprising: a plurality of process chambers, each process chamber for performing a different process on a wafer contained therein under computer control; a wafer dispensing mechanism which holds and dispenses a wafer from a plurality of stored unprocessed wafers; a multi-slot wafer cool down chamber having a plurality of slots for holding a plurality of wafers during a cool down period; a computer-controlled wafer transfer mechanism, operable to transfer wafers among the process chambers, the wafer dispensing mechanism, and the multi-slot cool down chamber, and means for determining whether a latency associated with the wafer transfer to be initiated would exceed a remaining process time for a process occurring in any of the plurality of process chambers, and responsive to a determination that such a latency would exceed the remaining process time, delaying the wafer transfer.

Claim 19

The wafer processing facility of claim 11, further comprising a cooling gas generator coupled to the multi-slot wafer cool down chamber, for increasing the cooling rate of wafers stored therein.

Claim 20

The wafer processing facility of claim 11, further comprising a computer-controlled elevator mechanism which moves a wafer slot into position to receive or dispense a wafer as part of a wafer transfer, wherein the elevator mechanism is actuated prior to or concurrently with the initiation of the wafer transfer.

Claim 21

A computer readable medium having a computer program encoded therein, the computer program comprising: means for assigning a different priority level to each of a plurality of wafers in a wafer processing facility according to a processing stage to which each respective wafer has progressed through a plurality of process chambers; means for determining which wafer of the plurality of wafers in the one or more process chambers is assigned a highest priority level; and means for initiating a wafer transfer between two of the process chambers for the wafer having the highest assigned priority level, wherein the wafer processing facility comprises a cooling chamber for cooling a wafer previously processed in one of the process chambers, and wherein the computer program assigns a lower priority level to a wafer which has been transferred to the cooling chamber than to a wafer which has not yet been transferred to the cooling chamber.

Claim 22

A computer readable medium having a computer program encoded therein, the computer program comprising: means for assigning a different priority level to each of a plurality of wafers in a wafer processing facility according to a processing stage to which each respective wafer has progressed through a plurality of process chambers; means for determining which wafer of the plurality of wafers in the one or more process chambers is assigned a highest priority level; and means for initiating a wafer transfer between two of the process chambers for the wafer having the highest assigned priority level, wherein the wafer processing facility comprises a cooling chamber for cooling a wafer previously processed in one of the process chambers, and wherein the computer program assigns a lower priority level to a wafer which has been transferred to the cooling chamber than to a wafer which has not yet been transferred to the cooling chamber.

Claim 23

The computer readable medium of claim 14, wherein the computer program determines whether a latency associated with the wafer transfer to be initiated would exceed a remaining process time for a process occurring in any the plurality of process chambers, and, responsive to a determination that such a latency would exceed the remaining process time, delaying the transfer.

Claim 24

A computer-implemented method for transferring wafers in a wafer processing facility comprising a plurality of process chambers wherein at least one chamber is a cooling chamber, each process chamber for performing a different process on a wafer contained therein, the method comprising the steps of: (1) assigning a different priority level to each of a plurality of wafers in the wafer processing facility according to a processing stage to which each respective wafer has progressed through the process chambers, wherein a lower priority level is assigned to a wafer which has been transferred to a cooling chamber than to a wafer which has not yet been transferred to the cooling chamber; (2 storing the priority levels assigned in said step (1) in a process controller: (3) determining which wafer of the plurality of wafers in the one or more process chambers is assigned a highest priority level; and (4) initiating a wafer transfer between two of the process chambers for the wafer having the highest assigned priority level, wherein the cooling chamber comprises a plurality of slots for holding a plurality of wafers, the method further comprising the step of, prior to step (4), determining whether a latency associated with the transfer to be initiated in step (4) would exceed a remaining process time for a process occurring in any the plurality of process chambers, and, responsive to a determination that such a latency would exceed the remaining process time, delaying the transfer in step (4).

Claim 25

A computer-implemented method for transferring wafers in a wafer processing facility comprising a plurality of process chambers wherein at least one chamber is a cooling chamber, each process chamber for performing a different process on a wafer contained therein, the method comprising the steps of: (1) assigning a different priority level to each of a plurality of wafers in the wafer processing facility according to a processing stage to which each respective wafer has progressed through the process chambers, wherein a lower priority level is assigned to a wafer which has been transferred to a cooling chamber than to a wafer which has not yet been transferred to the cooling chamber; (2 storing the priority levels assigned in said step (1) in a process controller: (3) determining which wafer of the plurality of wafers in the one or more process chambers is assigned a highest priority level; and (4) initiating a wafer transfer between two of the process chambers for the wafer having the highest assigned priority level, wherein the cooling chamber comprises a plurality of slots for holding a plurality of wafers, the method further comprising the step of, prior to step (4), determining whether a latency associated with the transfer to be initiated in step (4) would exceed a remaining process time for a process occurring in any the plurality of process chambers, and, responsive to a determination that such a latency would exceed the remaining process time, delaying the transfer in step (4).

Claim 26

The method of claim 16, further comprising the step of determining whether all of the slots in the multi-slot cooling chamber are full and, responsive to such a determination, transferring one of the wafers from the multi-slot cooling chamber without regard to the latency determination associated with the transfer.

Claim 27

A computer-implemented method for transferring wafers in a wafer processing facility comprising a plurality of process chambers wherein at least one chamber is a cooling chamber, each process chamber for performing a different process on a wafer contained therein, the method comprising the steps of: (1) assigning a different priority level to each of a plurality of wafers in the wafer processing facility according to a processing stage to which each respective wafer has progressed through the process chambers, wherein a lower priority level is assigned to a wafer which has been transferred to a cooling chamber than to a wafer which has not yet been transferred to the cooling chamber; (2) storing the priority levels assigned in said step (1) in a process controller; (3) determining which wafer of the plurality of wafers in the one or more process chambers is assigned a highest priority level; (4) initiating a wafer transfer between two of the process chambers for the wafer having the highest assigned priority level, wherein step (1) comprises the step of assigning a first priority level to a wafer which has been cooled, a second priority level higher than the first priority level to a wafer which has not yet been processed in any of the process chambers, and a third priority level higher than both the first and second priority levels to a "revisit" wafer which has been processed in one of the processing chambers and requires further processing in another one of the processing chambers.

Claim 28

A computer-implemented method for transferring wafers in a wafer processing facility comprising a plurality of process chambers wherein at least one chamber is a cooling chamber, each process chamber for performing a different process on a wafer contained therein, the method comprising the steps of: (1) assigning a different priority level to each of a plurality of wafers in the wafer processing facility according to a processing stage to which each respective wafer has progressed through the process chambers, wherein a lower priority level is assigned to a wafer which has been transferred to a cooling chamber than to a wafer which has not yet been transferred to the cooling chamber; (2) storing the priority levels assigned in said step (1) in a process controller; (3) determining which wafer of the plurality of wafers in the one or more process chambers is assigned a highest priority level; (4) initiating a wafer transfer between two of the process chambers for the wafer having the highest assigned priority level, wherein step (1) comprises the step of assigning a first priority level to a wafer which has been cooled, a second priority level higher than the first priority level to a wafer which has not yet been processed in any of the process chambers, and a third priority level higher than both the first and second priority levels to a "revisit" wafer which has been processed in one of the processing chambers and requires further processing in another one of the processing chambers.

Claim 29

Apparatus for transferring wafers in a wafer processing facility comprising a plurality of process chambers, each process chamber for performing a different process on a wafer contained therein, the apparatus comprising: a prioritization assignor, said prioritization assignor having a process controller, wherein said prioritization assignor assigns a different priority level to each of a plurality of wafers in the wafer processing facility according to a processing stage to which each respective wafer has progressed through the processing chambers; a completion detector, said completion detector utilizing said process controller, wherein said completion detector determines that a process in one of the process chambers has been completed and determines which wafer of the plurality of wafers in the one or more process chambers is assigned a highest priority level; and a wafer transporter, wherein said wafer transporter comprises a transport arm, and initiates a wafer transfer between two of the process chambers for the wafer having the highest assigned priority level.

Claim 30

Apparatus for transferring wafers in a wafer processing facility comprising a plurality of process chambers, each process chamber for performing a different process on a wafer contained therein, the apparatus comprising: a prioritization assignor, said prioritization assignor having a process controller, wherein said prioritization assignor assigns a different priority level to each of a plurality of wafers in the wafer processing facility according to a processing stage to which each respective wafer has progressed through the processing chambers; a completion detector, said completion detector utilizing said process controller, wherein said completion detector determines that a process in one of the process chambers has been completed and determines which wafer of the plurality of wafers in the one or more process chambers is assigned a highest priority level; and a wafer transporter, wherein said wafer transporter comprises a transport arm, and initiates a wafer transfer between two of the process chambers for the wafer having the highest assigned priority level.

Claim 31

The apparatus of claim 19, wherein the wafer processing facility comprises a cooling chamber for cooling a wafer previously processed in one of the process chambers, and wherein the prioritization assignor assigns a lower priority level to a wafer which has been transferred to the cooling chamber than to a wafer which has not yet been transferred to the cooling chamber.

Claim 32

The apparatus of claim 19, wherein the prioritization assignor assigns a first priority level to a wafer which has been cooled, a second priority level higher than the first priority level to a wafer which has not yet been processed in any of the process chambers, and a third priority level higher than both the first and second priority levels to a "revisit" wafer which has been processed in one of the processing chambers and requires further processing in another one of the processing chambers.