Abstract An apparatus for automatically organizing a variable number of lots into a batch which can be treated with high efficiency in a semiconductor wafer manufacturing line is installed for changing the number of lots organized into a batch between preceding and succeeding processes when such change is required. The apparatus includes a stocker array including a plurality of stockers disposed in a linear array and each capable of accommodating therein a plurality of lots, a first transfer robot disposed at one side of the stocker array for placing and taking out the lots in and from the stockers, a second transfer robot disposed at other side of the stocker array above for placing and taking out the lots in and from the stokers at a rear side thereof, a station for disposing thereon a plurality of lots handled by the first and second robots, a lot identifying device for reading identification information of the lots disposed on the station, a third transfer robot for transferring the lots disposed on the station with the first and second transfer robots, and a control unit for controlling automatically the stokers, the station and the first, second and third transfer robots in an coordinated manner to thereby allow the lots disposed on the station to be accommodated at predetermined positions in the stocker array in accordance with the lot identification information, to thereby organize the lots into a group in accordance with lot organization conditions such as conditions under which the lots are to be treated, distribution of load in the manufacturing line, and priorities allocated to the processes.
In a system for manufacturing articles through a series of sequential processes, wherein at least two successive ones of the processes differ from each other with respect to a number of lots of multiple ones of the articles which can be treated on a batch basis in the at least two processes, a method for automatically organizing the lots upon transferring the lots from a preceding one of the processes to a succeeding process, comprising the steps of: receiving the lots transferred from the preceding process; reading identification information from individual ones of the lots and transmitting the information to a control unit, the control unit storing lot organization information; storing the individual ones of the lots in a stocker; organizing the individual ones of the lots by grouping the individual ones of the lots in sets for successive processing according to the identification information read from the lots and the lot organization information stored in the control unit.
Claim 2
Dependent Claim
159 words
In a system for manufacturing articles through a series of sequential processes, wherein at least two successive ones of the processes differ from each other with respect to a number of lots of multiple ones of the articles which can be treated on a batch basis in the at least two processes, a method for automatically organizing the lots upon transferring the lots from a preceding one of the processes to a succeeding process, comprising the steps of: receiving the lots transferred from the preceding process; reading identification information from individual ones of the lots and transmitting the information to a control unit, the control unit storing lot organization information; storing the individual ones of the lots in a stocker; organizing the individual ones of the lots by grouping the individual ones of the lots in sets for successive processing according to the identification information read from the lots and the lot organization information stored in the control unit.
Claim 3
Dependent Claim
26 words
An automatic lot organization method according to claim 1, wherein said organizing step is performed while storing the individual ones of the lots in the stocker.
Claim 4
Dependent Claim
38 words
An automatic lot organization method according to claim 1, further comprising removing the individual ones of the lots from the stocker wherein said organizing step is performed while removing the individual ones of the lots from the stocker.