Method and apparatus for continuously producing a multiplicity of types

Abstract

Abstract A semiconductor production method for moving products between respective processing devices as if there were some flow shops to thereby reduce labor hours between respective processes, improve reliability through stable supply and promptly deal with production of a multiplicity of types which comprises a work area comprising the processing devices, transfer systems for connecting work areas with each other and devices for connecting the work areas with the transfer systems, whereby the entire processing is prevented from totally getting down only due to the failure of a part of the processing devices through control by a computer to thereby fullfil a production schedule (tact) in a predetermined fashion, eventually resulting in reduction of time required for completion of the process. In addition, a series of processes for respective products can be solved through software, and since there is needed no rearrangement of devices and change to the transfer paths, it is possible to promptly deal with production of a multiplicity of types.

Inventors

• 👤 Yoichiro Tamoto
• 👤 Sadao Shimoyashiro
• 👤 Hiroyasu Sasaki
• 👤 Takemasa Iwasaki
• 👤 Masao Sakata
• 👤 Tomoyuki Masui
• 👤 Hiroyoshi Matsumura

Bibliographic Details