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US5895225A Expired / Lapsed US ⏱️ 0.0 years remaining

Semiconductor light-emitting device and production method thereof

Assignee: Panasonic Holdings Corp
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Filing: 1997-11-26
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Granted: 1999-04-20
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Expires: 2017-11-26
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Abstract

Abstract A semiconductor light-emitting device with a double hetero structure, including: an active layer made of Ga 1-x In x N (0≦x≦0.3) doped with a p-type impurity and an n-type impurity; and first and second cladding layers provided so as to sandwich the active layer.

Inventors

  • 👤 Isao Kidoguchi
  • 👤 Hideto Adachi
  • 👤 Akihiko Ishibashi
  • 👤 Kiyoshi Ohnaka
  • 👤 Yuzaburo Ban
  • 👤 Minoru Kubo

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-05 17:54
CPC Classifications
H; H10; H10H; H10H20/00; H10H20/80; H10H20/85; H10H20/858; H10H20/8582; H01; H01S; H01S5/00; H01S5/02; H01S5/022; H01S5/023; H01S5/20; H01S5/22; H01S5/223; H01S5/2231; H01S5/30; H01S5/305; H01S5/32; H01S5/323; H01S5/32308; H01S5/32341; H01S5/327; H10H20/01; H10H20/011; H10H20/013; H10H20/0133; H10H20/01335; H10H20/81; H10H20/8215; H10H20/822; H10H20/824; H10H20/825; H10H20/8252; H10W; H10W72/00; H10W72/071; H10W72/072; H10W72/20; H01S5/0206; H01S5/0213; H01S5/0233; H01S5/0234; H01S5/0235; H01S5/02355; H01S5/0237; H01S5/04; H01S5/042; H01S5/0421; H01S5/0422; H01S5/10; H01S5/16; H01S5/162; H01S5/2054; H01S5/2059; H01S5/2063; H01S5/3054; H01S5/3063; H01S5/3086; H10H20/036; H10H20/0365; H10W72/073; H10W74/00; H10W74/10; H10W74/15

Claims Analysis

Total Claims: 8
Claim 1
Independent Claim 91 words
A method for producing a semiconductor light-emitting device, comprising the steps of: forming a semiconductor structure made of Al x Ga y In z N (where 0≦x≦1, 0≦y≦1, 0≦z≦1), including an active layer and first and second cladding layers sandwiching the active layer on a substrate; forming a mask layer having a predetermined pattern on the semiconductor structure; implanting an ionized substance into the semiconductor structure, using the mask layer as a mask; and removing a region of the semiconductor structure in which the ionized substance is implanted by wet etching.
Claim 2
Independent Claim 91 words
A method for producing a semiconductor light-emitting device, comprising the steps of: forming a semiconductor structure made of Al x Ga y In z N (where 0≦x≦1, 0≦y≦1, 0≦z≦1), including an active layer and first and second cladding layers sandwiching the active layer on a substrate; forming a mask layer having a predetermined pattern on the semiconductor structure; implanting an ionized substance into the semiconductor structure, using the mask layer as a mask; and removing a region of the semiconductor structure in which the ionized substance is implanted by wet etching.
Claim 3
Independent Claim 141 words
A method for producing a semiconductor light-emitting device, comprising the steps of: forming a semiconductor structure including an active layer and first and second cladding layers sandwiching the active layer on a substrate; removing portions of the active layer, and the first and second cladding layers to form a projected portion and a concave portion in the semiconductor structure; forming first and second electrodes on the concave portion and the projected portion of the semiconductor structure; and providing the semiconductor layered structure on a heat sink having a step difference larger than a step difference between the projected portion and the concave portion of the semiconductor structure in such a manner that the projected portion of the heat sink comes into contact with the first electrode and a concave portion of the heat sink comes into contact with the second electrode.
Claim 4
Independent Claim 141 words
A method for producing a semiconductor light-emitting device, comprising the steps of: forming a semiconductor structure including an active layer and first and second cladding layers sandwiching the active layer on a substrate; removing portions of the active layer, and the first and second cladding layers to form a projected portion and a concave portion in the semiconductor structure; forming first and second electrodes on the concave portion and the projected portion of the semiconductor structure; and providing the semiconductor layered structure on a heat sink having a step difference larger than a step difference between the projected portion and the concave portion of the semiconductor structure in such a manner that the projected portion of the heat sink comes into contact with the first electrode and a concave portion of the heat sink comes into contact with the second electrode.
Claim 5
Dependent Claim 61 words
A method for producing a semiconductor light-emitting device according to claim 2, wherein the heat sink has first and second bumps on the projected portion and the concave portion, and the first bump presses the heat sink and the semiconductor layered structure after coming into contact with the first electrode, thereby bringing the second bump into contact with the second electrode.
Claim 6
Dependent Claim 57 words
A method for producing a semiconductor light-emitting device according to claim 2, wherein, in the step of providing the semiconductor layered structure, resin is coated onto surfaces of the projected portion and the concave portion of the heat sink, and the semiconductor layered structure and the heat sink are fixed to each other by curing the resin.
Claim 7
Dependent Claim 36 words
A method for producing a semiconductor light-emitting device according to claim 4, wherein the resin is a UV-curable resin, and UV-light is emitted by applying a voltage to the semiconductor structure, whereby the resin is cured.
Claim 8
Dependent Claim 32 words
A method for producing a semiconductor light-emitting device according to claim 5, wherein the active layer is made of Al x Ga y In z N (where 0≦x≦1, 0≦y≦1, 0≦z≦1) or ZnMgSSe.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2002-04-19 2002-10-19 2003-04-20 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2006-04-19 2006-10-19 2007-04-20 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2010-04-19 2010-10-19 2011-04-20 $7700.00 Window Closed / Lapsed

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