US5888906A
Expired / Lapsed
US
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Plasmaless dry contact cleaning method using interhalogen compounds
Assignee: Micron Technology Inc
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Filing: 1996-09-16
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Granted: 1999-03-30
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Expires: 2016-09-16
Abstract
Abstract A method of removing an oxide layer from an article. The article is located in a reaction chamber. An interhalogen compound reactive with the oxide layer is introduced into the reaction chamber. The interhalogen compound forms volatile by-product gases upon reaction with the oxide layer. For compounds that form volatile chlorides, bromides or iodides, a reducing gas, such as for example hydrogen, ammonia, amines, phosphine, silanes, and higher silanes, may optionally be added simultaneously with the interhalogen to form a volatile by-product. Unreacted interhalogen compound and volatile by-product gases are removed from the reaction chamber. In one embodiment, the temperature in the reaction chamber may be elevated prior to or after introducing the interhalogen compound. In another embodiment, a metal layer is deposited in-situ on a portion of the article within the reaction chamber.
Inventors
- 👤 Gurtej S. Sandhu
- 👤 Donald L. Westmoreland
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:42
CPC Classifications
H; H10; H10P; H10P70/00; H10P70/20; H10P70/23; H10P70/234; H10P14/00; H10P14/40; H10P14/42; H10P14/43; H10P50/00; H10P50/20; H10P50/28; H10P50/282; H10P50/283; H10W; H10W20/00; H10W20/01; H10W20/071; H10W20/081; Y; Y10; Y10S; Y10S438/00; Y10S438/906
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
110 words
A method of removing a layer of silicon oxide from at least a portion of a surface feature provided on an article comprising silicon, the method comprising the steps of: locating the article having the surface feature in a reaction chamber; introducing an interhalogen compound reactive with the silicon oxide layer into the reaction chamber so as to remove the silicon oxide layer from the portion of the surface feature, the interhalogen compound forming volatile by-product gases upon reaction with the silicon oxide layer; increasing a temperature in the reaction chamber during introduction of the interhalogen compound; and removing unreacted interhalogen compound and volatile by-product gases from the reaction chamber.
Claim 2
Independent Claim
110 words
A method of removing a layer of silicon oxide from at least a portion of a surface feature provided on an article comprising silicon, the method comprising the steps of: locating the article having the surface feature in a reaction chamber; introducing an interhalogen compound reactive with the silicon oxide layer into the reaction chamber so as to remove the silicon oxide layer from the portion of the surface feature, the interhalogen compound forming volatile by-product gases upon reaction with the silicon oxide layer; increasing a temperature in the reaction chamber during introduction of the interhalogen compound; and removing unreacted interhalogen compound and volatile by-product gases from the reaction chamber.
Claim 3
Dependent Claim
20 words
The method of claim 1 wherein the temperature is 3within a range of about -20° C. to about 700° C.
Claim 4
Dependent Claim
27 words
The method of claim 1 further including the step of increasing a temperature of the interhalogen compound prior to introducing the interhalogen compound into the reaction chamber.
Claim 5
Dependent Claim
24 words
The method of claim 1 wherein a pressure in the reaction chamber is within a range of about 0.0133 Pa to about 101,325 Pa.
Claim 6
Dependent Claim
27 words
The method of claim 1 further including the step of coating at least a portion of the article with a photoresistive layer impervious to the interhalogen compound.
Claim 7
Dependent Claim
25 words
The method of claim 1 further including the step of depositing in-situ a metal layer on a portion of the article within the reaction chamber.
Claim 8
Dependent Claim
16 words
The method of claim 1 wherein the reaction chamber comprises a chemical vapor deposition reaction chamber.
Claim 9
Dependent Claim
12 words
The method of claim 1 wherein the article comprises a silicon wafer.
Claim 10
Dependent Claim
37 words
The method of claim 1 wherein the interhalogen compound is selected from a group consisting of ClF 3 , BrF 3 , ClF 5 , IF 5 , IF 7 , ClF, BrCl, IBr, ICl and BrF.
Claim 11
Dependent Claim
13 words
The method of claim 1 wherein the interhalogen compound comprises an interhalogen gas.
Claim 12
Dependent Claim
14 words
The method of claim 10 wherein the interhalogen gas comprises a complex interhalogen gas.
Claim 13
Dependent Claim
14 words
The method of claim 1 wherein the interhalogen compound comprises a non-fluorine-containing interhalogen compound.
Claim 14
Dependent Claim
18 words
The method of claim 1 wherein the interhalogen compound comprises a high vapor pressure liquid at room temperature.
Claim 15
Dependent Claim
24 words
The method of claim 1 wherein the interhalogen compound comprises a solid at room temperature that sublimes upon heating to generate an interhalogen vapor.
Claim 16
Dependent Claim
24 words
The method of claim 1 wherein the surface feature comprises a depression with one or more lateral dimensions of less than about 2 micrometers.
Claim 17
Dependent Claim
24 words
The method of claim 1 wherein the surface feature comprises a depression with one or more lateral dimensions of less than about 0.5 micrometer.
Claim 18
Dependent Claim
18 words
The method of claim 1 wherein the surface feature has an aspect ratio comprising at least about 1:1.
Claim 19
Dependent Claim
18 words
The method of claim 1 wherein the surface feature has an aspect ratio comprising at least about 5:1.
Claim 20
Independent Claim
101 words
A method of in-situ removal of a silicon oxide layer from a silicon wafer in a chemical vapor deposition chamber prior to metal deposition, comprising the steps of: locating the silicon wafer in the deposition chamber; introducing an interhalogen compound reactive with the silicon oxide layer into the deposition chamber so as to remove the silicon oxide layer from the silicon wafer; increasing a temperature in the chamber during introduction of the interhalogen compound; evacuating unreacted interhalogen compound and volatile by-product gases from the deposition chamber; and depositing a metal layer on a portion of the article within the deposition chamber.
Claim 21
Independent Claim
101 words
A method of in-situ removal of a silicon oxide layer from a silicon wafer in a chemical vapor deposition chamber prior to metal deposition, comprising the steps of: locating the silicon wafer in the deposition chamber; introducing an interhalogen compound reactive with the silicon oxide layer into the deposition chamber so as to remove the silicon oxide layer from the silicon wafer; increasing a temperature in the chamber during introduction of the interhalogen compound; evacuating unreacted interhalogen compound and volatile by-product gases from the deposition chamber; and depositing a metal layer on a portion of the article within the deposition chamber.
Claim 22
Independent Claim
128 words
A method of removing an oxide layer from a portion of a surface feature provided on an article having a non-silicon surface, comprising the steps of: locating the article having the non-silicon surface and high aspect ratio surface feature in a reaction chamber, the surface feature having a high aspect ratio of depth relative to width of between about 1:1 and about 40:1; introducing an interhalogen compound reactive with the oxide layer into the reaction chamber so as to remove the oxide layer from the portion of the surface feature, the interhalogen compound forming volatile by-product gases upon reaction with the oxide layer; increasing a temperature in the chamber during introduction of the interhalogen compound; and evacuating unreacted interhalogen compound and volatile by-product gases from the reaction chamber.
Claim 23
Independent Claim
128 words
A method of removing an oxide layer from a portion of a surface feature provided on an article having a non-silicon surface, comprising the steps of: locating the article having the non-silicon surface and high aspect ratio surface feature in a reaction chamber, the surface feature having a high aspect ratio of depth relative to width of between about 1:1 and about 40:1; introducing an interhalogen compound reactive with the oxide layer into the reaction chamber so as to remove the oxide layer from the portion of the surface feature, the interhalogen compound forming volatile by-product gases upon reaction with the oxide layer; increasing a temperature in the chamber during introduction of the interhalogen compound; and evacuating unreacted interhalogen compound and volatile by-product gases from the reaction chamber.
Claim 24
Dependent Claim
14 words
The method of claim 20 wherein the interhalogen compound comprises a non-fluorine-containing interhalogen compound.
Claim 25
Dependent Claim
30 words
The method of claim 19 wherein the silicon wafer includes a surface feature having a high aspect ratio of depth relative to width of between about 1:1 and about 40:1.
Claim 26
Dependent Claim
30 words
The method of claim 19 wherein the silicon wafer includes a surface feature having a high aspect ratio of depth relative to width of between about 2:1 and about 20:1.
Claim 27
Dependent Claim
24 words
The method of claim 20 wherein the surface feature comprises a depression with one or more lateral dimensions of less than about 2 micrometers.
Claim 28
Dependent Claim
20 words
The method of claim 19 wherein the temperature is within a range of about -20° C. to about 700° C.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-03-29 | 2002-09-28 | 2003-03-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-03-29 | 2006-09-28 | 2007-03-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-03-29 | 2010-09-28 | 2011-03-30 | $7700.00 | Window Closed / Lapsed |