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US5877558A Expired / Lapsed US ⏱️ 0.0 years remaining

Gallium nitride-based III-V group compound semiconductor

Assignee: Nichia Corp
•
Filing: 1997-12-19
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Granted: 1999-03-02
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Expires: 2017-12-19
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Abstract

Abstract A gallium nitride-based III-V Group compound semiconductor device has a gallium nitride-based III-V Group compound semiconductor layer provided over a substrate, and an ohmic electrode provided in contact with the semiconductor layer. The ohmic electrode is formed of a metallic material, and has been annealed.

Inventors

  • 👤 Shuji Nakamura
  • 👤 Takao Yamada
  • 👤 Masayuki Senoh
  • 👤 Motokazu Yamada
  • 👤 Kanji Bando

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-04 12:04
CPC Classifications
H; H10; H10H; H10H20/00; H10H20/80; H10H20/83; H10H20/832; H10D; H10D64/00; H10D64/01; H10D64/011; H10D64/0116; H10F; H10F71/00; H10F71/138; H10H20/81; H10H20/822; H10H20/824; H10H20/825; H10H20/8252; H10H20/833; H10D62/00; H10D62/80; H10D62/85; H10D62/8503; H10H20/01; H10H20/032; H10H20/831; H10H20/84; H10W; H10W72/00; H10W72/071; H10W72/075; H10W72/07551; H10W72/07554; H10W72/50; H10W72/531; H10W72/536; H10W72/541; H10W72/547; H10W72/551; H10W72/552; H10W72/5522; H10W72/59; H10W72/851; H10W72/874; H10W72/884; H10W72/90; H10W72/921; H10W72/923; H10W72/926; H10W72/951; H10W72/952; H10W90/00; H10W90/701; H10W90/751; H10W90/756; Y; Y02; Y02E; Y02E10/00; Y02E10/50

Claims Analysis

Total Claims: 7
Claim 1
Independent Claim 194 words
A gallium nitride-based III-V Group compound semiconductor comprising: a substrate having a substantially square surface shape, said substrate having first and second major surfaces; a semiconductor stacked layer structure arranged over said first major surface of the substrate, and comprising n-type gallium nitride-based III-V Group compound semiconductor layer and a p-type gallium nitride-based III-V Group compound semiconductor provided over said n-type semiconductor layer, said p-type semiconductor layer having a cut-off portion partially exposing a surface of said n-type semiconductor layer; a first electrode structure provided on the exposed surface of said n-type semiconductor layer; a second electrode structure provided in electrical contact with said p-type semiconductor layer, and arranged on the same side of the substrate as said first electrode structure, said second electrode structure comprising an electrode layer having a light-transmitting property and provided on a substantially entire surface of said p-type semiconductor layer, and a bonding pad provided on said electrode layer; and a continuous insulating protective film covering a portion of the upper surface of said bonding pad, a substantially entire upper surface of said electrode layer as well as a portion of the exposed surface of said n-type semiconductor layer.
Claim 2
Dependent Claim 194 words
A gallium nitride-based III-V Group compound semiconductor comprising: a substrate having a substantially square surface shape, said substrate having first and second major surfaces; a semiconductor stacked layer structure arranged over said first major surface of the substrate, and comprising n-type gallium nitride-based III-V Group compound semiconductor layer and a p-type gallium nitride-based III-V Group compound semiconductor provided over said n-type semiconductor layer, said p-type semiconductor layer having a cut-off portion partially exposing a surface of said n-type semiconductor layer; a first electrode structure provided on the exposed surface of said n-type semiconductor layer; a second electrode structure provided in electrical contact with said p-type semiconductor layer, and arranged on the same side of the substrate as said first electrode structure, said second electrode structure comprising an electrode layer having a light-transmitting property and provided on a substantially entire surface of said p-type semiconductor layer, and a bonding pad provided on said electrode layer; and a continuous insulating protective film covering a portion of the upper surface of said bonding pad, a substantially entire upper surface of said electrode layer as well as a portion of the exposed surface of said n-type semiconductor layer.
Claim 3
Dependent Claim 23 words
The device according to claim 1, wherein said protective film covers also a portion of the upper surface of said first electrode structure.
Claim 4
Dependent Claim 256 words
A gallium nitride-based III-V Group compound semiconductor light-emitting device comprising: a substrate having a substantially square surface shape, said substrate having first and second major surfaces; a semiconductor stacked layer structure arranged over said first major surface of the substrate, and comprising n-type gallium nitride-based III-V Group compound semiconductor layer and a p-type gallium nitride-based III-V Group compound semiconductor provided over said n-type semiconductor layer, said p-type semiconductor layer having a cut-off portion partially exposing a surface of said n-type semiconductor layer; a first electrode structure provide don the exposed surface of said n-type semiconductor layer; a second electrode structure provided in electrical contact with said p-type semiconductor layer, and arranged on the same side of the substrate as said first electrode structure, said second electrode structure comprising a light-transmitting electrode layer and provided on a substantially entire surface of said p-type semiconductor layer, and a bonding pad provided on said light-transmitting electrode layer, wherein said bonding pad is arranged at first portion corresponding to a first corner portion of said substrate, and said first electrode structure is arranged at a second portion corresponding to a second corner portion of said substrate, and wherein said first and second corner portion of said substrate are diagonally arranged with respect to the substantially square surface of said substrate; and a continuous insulating protective film covering a substantially entire surface of said light-transmitting electrode layer exposed between said first electrode structure and said bonding pad, as well as a portion of the exposed surface of said n-type semiconductor layer.
Claim 5
Dependent Claim 256 words
A gallium nitride-based III-V Group compound semiconductor light-emitting device comprising: a substrate having a substantially square surface shape, said substrate having first and second major surfaces; a semiconductor stacked layer structure arranged over said first major surface of the substrate, and comprising n-type gallium nitride-based III-V Group compound semiconductor layer and a p-type gallium nitride-based III-V Group compound semiconductor provided over said n-type semiconductor layer, said p-type semiconductor layer having a cut-off portion partially exposing a surface of said n-type semiconductor layer; a first electrode structure provide don the exposed surface of said n-type semiconductor layer; a second electrode structure provided in electrical contact with said p-type semiconductor layer, and arranged on the same side of the substrate as said first electrode structure, said second electrode structure comprising a light-transmitting electrode layer and provided on a substantially entire surface of said p-type semiconductor layer, and a bonding pad provided on said light-transmitting electrode layer, wherein said bonding pad is arranged at first portion corresponding to a first corner portion of said substrate, and said first electrode structure is arranged at a second portion corresponding to a second corner portion of said substrate, and wherein said first and second corner portion of said substrate are diagonally arranged with respect to the substantially square surface of said substrate; and a continuous insulating protective film covering a substantially entire surface of said light-transmitting electrode layer exposed between said first electrode structure and said bonding pad, as well as a portion of the exposed surface of said n-type semiconductor layer.
Claim 6
Dependent Claim 22 words
The device according to claim 3, wherein said protective film covers also a portion of the upper surface of said bonding pad.
Claim 7
Dependent Claim 23 words
The device according to claim 3, wherein said protective film covers also a portion of the upper surface of said first electrode structure.

References Cited (Backward Citations)

US4153905A Cited
US4495514A Cited
EP0483688A2 Cited
US5281830A Cited
US5247533A Cited
US5285078A Cited
JPH05291621A Cited
JPH06237012A Cited
JPH06275868A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2002-03-01 2002-08-31 2003-03-02 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2006-03-01 2006-08-31 2007-03-02 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2010-03-01 2010-08-31 2011-03-02 $7700.00 Window Closed / Lapsed

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