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US5861335A
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Semiconductor fabrication employing a post-implant anneal within a low temperature high pressure nitrogen ambient to improve channel and gate oxide reliability
Assignee: GlobalFoundries Inc
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Filing: 1997-03-21
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Granted: 1999-01-19
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Expires: 2017-03-21
Abstract
Abstract An integrated circuit is formed with minimal encroachment of lightly doped drain (LDD) implants partially due to barrier atoms incorporated along the migration avenues. Nitrogen is incorporated either during the LDD implant or during an anneal cycle following the LDD implant. Nitrogen helps minimize segregation and diffusion of LDD dopants placed adjacent critical channel and gate dielectric areas. Nitrogen is incorporated within a chamber while under pressure so as to minimize the temperature needed to repair implant damage and activate the LDD dopants. High pressure indoctrination of nitrogen is believed to provide the same amount of lattice repair and activation achieved if anneal temperatures were substantially higher.
Inventors
- 👤 Fred N. Hause
- 👤 Mark I. Gardner
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 04:15
CPC Classifications
H; H10; H10D; H10D30/00; H10D30/60; H10D30/601; H10D30/01; H10D30/021; H10D30/0223; H10D30/0227; H10D64/00; H10D64/01; H10D64/013; H10D64/01302; H10D64/01332; H10D64/01336; H10D64/01338; H10D64/60; H10D64/66; H10D64/68; H10D64/693; H10D84/00; H10D84/01; H10D84/0123; H10D84/0126; H10D84/013; H10D84/02; H10D84/03; H10D84/038
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
121 words
A method for forming an integrated circuit, comprising: providing a semiconductor substrate having an active area adjacent a field area defined by a field dielectric; patterning a gate conductor a dielectric spaced distance above the active area; implanting a dopant at a first concentration into a portion of the active area that is absent the overlying gate conductor to form a lightly doped drain region; annealing the substrate within a chamber containing nitrogen, said chamber is pressurized above 3.0 atmospheres; subsequent to said implanting a dopant at a first concentration and subsequent said annealing, implanting a dopant at a second concentration into the active area a spaced distance from a lateral edge of said gate conductor to form a drain region.
Claim 2
Independent Claim
121 words
A method for forming an integrated circuit, comprising: providing a semiconductor substrate having an active area adjacent a field area defined by a field dielectric; patterning a gate conductor a dielectric spaced distance above the active area; implanting a dopant at a first concentration into a portion of the active area that is absent the overlying gate conductor to form a lightly doped drain region; annealing the substrate within a chamber containing nitrogen, said chamber is pressurized above 3.0 atmospheres; subsequent to said implanting a dopant at a first concentration and subsequent said annealing, implanting a dopant at a second concentration into the active area a spaced distance from a lateral edge of said gate conductor to form a drain region.
Claim 3
Dependent Claim
21 words
The method as recited in claim 1, wherein said annealing occurs concurrent with said implanting a dopant at a first concentration.
Claim 4
Dependent Claim
21 words
The method as recited in claim 1, wherein said annealing occurs subsequent to said implanting a dopant at a first concentration.
Claim 5
Dependent Claim
17 words
The method as recited in claim 1, wherein said first concentration is less than said second concentration.
Claim 6
Dependent Claim
22 words
The method as recited in claim 1, wherein, during said annealing, the chamber is maintained at a temperature less than 800° C.
Claim 7
Dependent Claim
42 words
The method as recited in claim 1, wherein a lateral demarcation of said lightly doped drain region remains, as a result of migration of nitrogen atoms, less than 0.05 microns inside a region of the active area directly below the gate conductor.
Claim 8
Dependent Claim
38 words
The method as recited in claim 1, wherein a lateral demarcation of said lightly doped drain region moves less than 0.05 microns as a result of migration of nitrogen atoms into the region defined by said lateral demarcation.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2002-01-18 | 2002-07-20 | 2003-01-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-01-18 | 2006-07-20 | 2007-01-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-01-18 | 2010-07-20 | 2011-01-19 | $7700.00 | Window Closed / Lapsed |