Patent US5800686A successfully refreshed from Google Patents.
US5800686A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Chemical vapor deposition chamber with substrate edge protection
Assignee: Applied Materials Inc
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Filing: 1994-02-23
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Granted: 1998-09-01
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Expires: 2014-02-23
Abstract
Abstract An improved deposition chamber deposits useful layers on substrates. The improved chamber includes a substrate edge protection system which, in combination with a purge gas, protects selected portions of the edge and underside of the substrate from the deposition gas while preventing the creation of a masked area on the substrate edge. The substrate edge protection system includes a ring, which is received over a substrate received on the substrate support member and which is alignable with the substrate to provide a minimum gap between the edge of the substrate and the ring.
Inventors
- 👤 Karl Littau
- 👤 Lawrence Chung-Lai Lei
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 06:59
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45519; C23C16/4412; C23C16/45521; C23C16/458; C23C16/4582; C23C16/4583; C23C16/4585; C23C16/46; H; H10; H10P; H10P72/00; H10P72/04; H10P72/0431; H10P72/0432; H10P72/50; H10P72/70; H10P72/76; H10P72/7604; H10P72/7606; H10P72/7608; H10P72/7611; H10P72/7614; H10P72/7624; H10P72/7626; Y; Y10; Y10S; Y10S438/00; Y10S438/935
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
156 words
An apparatus for protecting an edge of a substrate from a processing gas within a processing chamber, comprising: a substrate support member having a substrate receiving surface to receive the substrate thereon; a purge fluid passage positioned adjacent the substrate receiving surface to deliver a purge fluid to the edge of the substrate when received on the substrate receiving surface; a purge fluid guide ring movably receivable on said substrate support member, wherein said purge fluid guide ring forms a purge fluid gap in fluid communication with the purge fluid passage and wherein said purge fluid guide ring includes a projecting shield portion extending inward over the peripheral edge of the substrate when received on the substrate receiving surface to provide a fixed gap between the substrate and said shield portion; and at least one substrate alignment member positioned to align the substrate so that the edge of the substrate is adjacent the purge fluid passage.
Claim 2
Independent Claim
156 words
An apparatus for protecting an edge of a substrate from a processing gas within a processing chamber, comprising: a substrate support member having a substrate receiving surface to receive the substrate thereon; a purge fluid passage positioned adjacent the substrate receiving surface to deliver a purge fluid to the edge of the substrate when received on the substrate receiving surface; a purge fluid guide ring movably receivable on said substrate support member, wherein said purge fluid guide ring forms a purge fluid gap in fluid communication with the purge fluid passage and wherein said purge fluid guide ring includes a projecting shield portion extending inward over the peripheral edge of the substrate when received on the substrate receiving surface to provide a fixed gap between the substrate and said shield portion; and at least one substrate alignment member positioned to align the substrate so that the edge of the substrate is adjacent the purge fluid passage.
Claim 3
Dependent Claim
33 words
The apparatus of claim 1, wherein the purge fluid passage is an annular channel extending from an edge of the substrate receiving surface through the support member at an angle of about 135°.
Claim 4
Dependent Claim
40 words
The apparatus of claim 1, further including a minimum gap between the edge of the substrate when received on the substrate receiving surface and said purge fluid guide ring when the guide ring is received on said substrate support member.
Claim 5
Dependent Claim
20 words
The apparatus of claim 3, wherein a mixture of purge fluid and enhancement gas is flowed through the minimum gap.
Claim 6
Independent Claim
156 words
A method of protecting an edge of at substrate from a processing gas within a processing chamber, comprising: providing a substrate support member having a substrate receiving surface thereon; providing a purge fluid passage positioned adjacent the substrate receiving surface to deliver a purge fluid to the edge of the substrate when received on the substrate receiving surface; locating a substrate on the substrate support member; aligning the substrate on the substrate support member so that the edge of the substrate is adjacent the purge fluid passage; aligning a guide ring on the substrate support member to form a purge fluid gap in fluid communication with the purge fluid passage, wherein the substrate support member includes a guide bumper thereon engageable with the guide ring to align the guide ring on the substrate support member; and delivering a purge fluid through the purge fluid passage to the edge of the substrate on the substrate receiving surface.
Claim 7
Independent Claim
156 words
A method of protecting an edge of at substrate from a processing gas within a processing chamber, comprising: providing a substrate support member having a substrate receiving surface thereon; providing a purge fluid passage positioned adjacent the substrate receiving surface to deliver a purge fluid to the edge of the substrate when received on the substrate receiving surface; locating a substrate on the substrate support member; aligning the substrate on the substrate support member so that the edge of the substrate is adjacent the purge fluid passage; aligning a guide ring on the substrate support member to form a purge fluid gap in fluid communication with the purge fluid passage, wherein the substrate support member includes a guide bumper thereon engageable with the guide ring to align the guide ring on the substrate support member; and delivering a purge fluid through the purge fluid passage to the edge of the substrate on the substrate receiving surface.
Claim 8
Dependent Claim
13 words
The method of claim 5, wherein the guide bumper includes a spherical head.
Claim 9
Independent Claim
126 words
An apparatus for protecting the edge of a substrate from a processing environment maintained within a processing chamber, comprising: a substrate support member disposed in said chamber to receive a substrate thereon; a substrate alignment member positioned to align the substrate with the substrate support member; a guide ring selectively receivable on said substrate support member; at least one guide bumper disposed on said substrate support member and engageable with said guide ring to align said guide ring on said substrate support member; and wherein said substrate support member includes a substrate receiving portion, an annular ledge disposed circumferentially about said substrate support member and a circumferential recess interconnecting said annular ledge and said substrate receiving portion, and said guide bumper is disposed in said recess.
Claim 10
Independent Claim
126 words
An apparatus for protecting the edge of a substrate from a processing environment maintained within a processing chamber, comprising: a substrate support member disposed in said chamber to receive a substrate thereon; a substrate alignment member positioned to align the substrate with the substrate support member; a guide ring selectively receivable on said substrate support member; at least one guide bumper disposed on said substrate support member and engageable with said guide ring to align said guide ring on said substrate support member; and wherein said substrate support member includes a substrate receiving portion, an annular ledge disposed circumferentially about said substrate support member and a circumferential recess interconnecting said annular ledge and said substrate receiving portion, and said guide bumper is disposed in said recess.
Claim 11
Dependent Claim
18 words
The apparatus of claim 7, wherein said guide bumper includes a spherical head engageable with said guide ring.
Claim 12
Dependent Claim
19 words
The apparatus of claim 8, wherein said spherical head and said guide ring are constructed of the same materials.
Claim 13
Independent Claim
147 words
An apparatus for protecting an edge of a substrate from a processing gas within a processing chamber, comprising: a substrate support member having a substrate receiving surface to receive the substrate thereon; a purge fluid passage positioned adjacent the substrate receiving surface to deliver a purge fluid to the edge of the substrate when received on the substrate receiving surface; a purge fluid guide ring movably receivable on said substrate support member, wherein said purge fluid guide ring forms a purge fluid gap in fluid communication with the purge fluid passage; and at least one substrate alignment member positioned to align the substrate so that the edge of the substrate is adjacent the purge fluid passage, wherein said alignment member includes at least one alignment web on said purge fluid guide ring positioned to selectively engage the edge of the substrate received on said substrate support member.
Claim 14
Independent Claim
147 words
An apparatus for protecting an edge of a substrate from a processing gas within a processing chamber, comprising: a substrate support member having a substrate receiving surface to receive the substrate thereon; a purge fluid passage positioned adjacent the substrate receiving surface to deliver a purge fluid to the edge of the substrate when received on the substrate receiving surface; a purge fluid guide ring movably receivable on said substrate support member, wherein said purge fluid guide ring forms a purge fluid gap in fluid communication with the purge fluid passage; and at least one substrate alignment member positioned to align the substrate so that the edge of the substrate is adjacent the purge fluid passage, wherein said alignment member includes at least one alignment web on said purge fluid guide ring positioned to selectively engage the edge of the substrate received on said substrate support member.
Claim 15
Independent Claim
143 words
An apparatus for protecting an edge of a substrate from a processing gas within a processing chamber, comprising: a substrate support member having a substrate receiving surface to receive the substrate thereon; a purge fluid passage positioned adjacent the substrate receiving surface to deliver a purge fluid to the edge of the substrate when received on the substrate receiving surface; a purge fluid guide ring movably receivable on said substrate support member, wherein said purge fluid guide ring forms a purge fluid gap in fluid communication with the purge fluid passage; at least one substrate alignment member positioned to align the substrate so that the edge of the substrate is adjacent the purge fluid passage; and at least one guide bumper disposed on said substrate support member and engageable with said guide ring to align said guide ring on said substrate support member.
Claim 16
Independent Claim
143 words
An apparatus for protecting an edge of a substrate from a processing gas within a processing chamber, comprising: a substrate support member having a substrate receiving surface to receive the substrate thereon; a purge fluid passage positioned adjacent the substrate receiving surface to deliver a purge fluid to the edge of the substrate when received on the substrate receiving surface; a purge fluid guide ring movably receivable on said substrate support member, wherein said purge fluid guide ring forms a purge fluid gap in fluid communication with the purge fluid passage; at least one substrate alignment member positioned to align the substrate so that the edge of the substrate is adjacent the purge fluid passage; and at least one guide bumper disposed on said substrate support member and engageable with said guide ring to align said guide ring on said substrate support member.
Claim 17
Independent Claim
113 words
An apparatus for protecting an edge of a substrate from a processing gas within a processing chamber, comprising: a substrate support member having a substrate receiving surface to receive the substrate thereon; a purge fluid passage positioned adjacent the substrate receiving surface to deliver a purge fluid to the edge of the substrate when received on the substrate receiving surface, wherein the purge fluid passage is an annular channel extending from an edge of the substrate receiving surface through the support member at an angle of about 135°; and at least one substrate alignment member positioned to align the substrate so that the edge of the substrate is adjacent the purge fluid passage.
Claim 18
Independent Claim
113 words
An apparatus for protecting an edge of a substrate from a processing gas within a processing chamber, comprising: a substrate support member having a substrate receiving surface to receive the substrate thereon; a purge fluid passage positioned adjacent the substrate receiving surface to deliver a purge fluid to the edge of the substrate when received on the substrate receiving surface, wherein the purge fluid passage is an annular channel extending from an edge of the substrate receiving surface through the support member at an angle of about 135°; and at least one substrate alignment member positioned to align the substrate so that the edge of the substrate is adjacent the purge fluid passage.
Claim 19
Independent Claim
142 words
A method of protecting an edge of a substrate from a processing gas within a processing chamber, comprising: providing a substrate support member having a substrate receiving surface thereon; providing a purge fluid passage positioned adjacent the substrate receiving surface to deliver a purge fluid to the edge of the substrate when received on the substrate receiving surface; locating a substrate on the substrate support member; aligning the substrate on the substrate support member so that the edge of the substrate is adjacent the purge fluid passage; and aligning a guide ring on the substrate support member to form a purge fluid gap in fluid communication with the purge fluid passage, wherein the guide ring includes a substrate alignment member thereon; and delivering a purge fluid through the purge fluid passage to the edge of the substrate on the substrate receiving surface.
Claim 20
Independent Claim
142 words
A method of protecting an edge of a substrate from a processing gas within a processing chamber, comprising: providing a substrate support member having a substrate receiving surface thereon; providing a purge fluid passage positioned adjacent the substrate receiving surface to deliver a purge fluid to the edge of the substrate when received on the substrate receiving surface; locating a substrate on the substrate support member; aligning the substrate on the substrate support member so that the edge of the substrate is adjacent the purge fluid passage; and aligning a guide ring on the substrate support member to form a purge fluid gap in fluid communication with the purge fluid passage, wherein the guide ring includes a substrate alignment member thereon; and delivering a purge fluid through the purge fluid passage to the edge of the substrate on the substrate receiving surface.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-08-31 | 2002-03-02 | 2002-09-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-08-31 | 2006-03-02 | 2006-09-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-08-31 | 2010-03-02 | 2010-09-01 | $7700.00 | Window Closed / Lapsed |