US5796573A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Overhanging separator for self-defining stacked capacitor
Assignee: International Business Machines Corp
•
Filing: 1997-05-29
•
Granted: 1998-08-18
•
Expires: 2017-05-29
Abstract
Abstract An overhanging separator structure with a post projecting from a surface which may be a substrate, an underlying layer on the surface, and a separator layer on the underlying layer, with the separator layer overhanging the underlying layer. A discontinuous film is then formed in a single process step having a first portion on the separator layer and a second portion on the post, the discontinuity caused by the overhanging separator layer. The structure is made into a stacked capacitor with the second (post) portion of the discontinuous film being the bottom electrode, by forming a continuous dielectric layer on the bottom electrode and a continuous top electrode layer on the dielectric layer.
Inventors
- 👤 David E. Kotecki
- 👤 William H. Ma
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:21
CPC Classifications
H; H10; H10B; H10B12/00; H10B12/01; H10B12/02; H10B12/03
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
105 words
An overhanging separator structure useful for creating a self-formed discontinuous film, comprising: a post projecting from a surface; an underlying layer on the surface, the underlying layer having a first opening formed therein such that the post is within the first opening and at least a first distance from the underlying layer; and a separator layer on the underlying layer, the separator layer having a second opening formed therein such that the post is within the second opening and at least a second distance from the separator layer, the second distance greater than zero, and the underlying layer recessed with respect to the separator layer.
Claim 2
Dependent Claim
105 words
An overhanging separator structure useful for creating a self-formed discontinuous film, comprising: a post projecting from a surface; an underlying layer on the surface, the underlying layer having a first opening formed therein such that the post is within the first opening and at least a first distance from the underlying layer; and a separator layer on the underlying layer, the separator layer having a second opening formed therein such that the post is within the second opening and at least a second distance from the separator layer, the second distance greater than zero, and the underlying layer recessed with respect to the separator layer.
Claim 3
Dependent Claim
40 words
The structure of claim 1, further comprising a non-patterned discontinuous film having a first portion on the separator layer and a second portion on the post, the non-patterned discontinuous film having a discontinuity substantially in register with the second opening.
Claim 4
Dependent Claim
41 words
The structure of claim 2 wherein the structure is a capacitor, and the discontinuous film is a bottom electrode of the capacitor, further comprising: a dielectric layer on the bottom electrode; and a continuous top electrode layer on the dielectric layer.
Claim 5
Dependent Claim
10 words
The structure of claim 3 wherein the post is conductive.
Claim 6
Dependent Claim
11 words
The structure of claim 4 wherein the post is doped polysilicon.
Claim 7
Dependent Claim
23 words
The structure of claim 1 wherein the underlying layer is a material selected from the group consisting of oxide, nitride, polysilicon, and polyimide.
Claim 8
Dependent Claim
12 words
The structure of claim 1 wherein the underlying layer is an oxide.
Claim 9
Dependent Claim
21 words
The structure of claim 1 wherein the separator layer is a material selected from the group consisting of insulators and semiconductors.
Claim 10
Dependent Claim
12 words
The structure of claim 1 wherein the separator layer is an insulator.
Claim 11
Dependent Claim
12 words
The structure of claim 9 wherein the separator layer is an oxide.
Claim 12
Dependent Claim
12 words
The structure of claim 9 wherein the separator layer is a nitride.
Claim 13
Dependent Claim
30 words
The structure of claim 9 wherein the separator layer is a material selected from the group consisting of undoped SiO 2 , doped SiO 2 , SiN, and diamond-like carbon.
Claim 14
Dependent Claim
24 words
The structure of claim 3 wherein the bottom electrode is a material selected from the group consisting of noble metals and noble metal oxides.
Claim 15
Dependent Claim
11 words
The structure of claim 13 wherein the bottom electrode is platinum.
Claim 16
Dependent Claim
14 words
The structure of claim 3 wherein the dielectric layer is a high-dielectric constant material.
Claim 17
Dependent Claim
13 words
The structure of claim 15 wherein the dielectric layer is (Ba,Sr)TiO 3 .
Claim 18
Dependent Claim
22 words
The structure of claim 2 wherein the first distance is at least equal to 2.5 times a thickness of the discontinuous film.
Claim 19
Dependent Claim
22 words
The structure of claim 17 wherein the first distance is at least equal to 5 times the thickness of the discontinuous film.
Claim 20
Dependent Claim
24 words
The structure of claim 2 wherein the underlying layer has a thickness at least equal to 1.5 times the thickness of the discontinuous film.
Claim 21
Dependent Claim
24 words
The structure of claim 19 wherein the underlying layer has a thickness at least equal to 3 times the thickness of the discontinuous film.
Claim 22
Dependent Claim
22 words
The structure of claim 2 wherein the second distance is at least equal to 1.5 times the thickness of the discontinuous film.
Claim 23
Dependent Claim
22 words
The structure of claim 21 wherein the second distance is at least equal to 3 times the thickness of the discontinuous film.
References Cited (Backward Citations)
US5143861A
Cited
US5419810A
Cited
US5346844A
Cited
US5335138A
Cited
US5381302A
Cited
US5478772A
Cited
US5506166A
Cited
US5392169A
Cited
US5534458A
Cited
US5436477A
Cited
US5416042A
Cited
US5489548A
Cited
US5504041A
Cited
US5554564A
Cited
US5550076A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-08-17 | 2002-02-16 | 2002-08-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-08-17 | 2006-02-16 | 2006-08-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-08-17 | 2010-02-16 | 2010-08-18 | $7700.00 | Window Closed / Lapsed |